RU2005117970A - Резервуар для приема расплавленного кремния или для плавления кремния и способ его изготовления - Google Patents

Резервуар для приема расплавленного кремния или для плавления кремния и способ его изготовления Download PDF

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Publication number
RU2005117970A
RU2005117970A RU2005117970/15A RU2005117970A RU2005117970A RU 2005117970 A RU2005117970 A RU 2005117970A RU 2005117970/15 A RU2005117970/15 A RU 2005117970/15A RU 2005117970 A RU2005117970 A RU 2005117970A RU 2005117970 A RU2005117970 A RU 2005117970A
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Russia
Prior art keywords
silicon
sub
nitride
silicon oxide
tank
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RU2005117970/15A
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English (en)
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RU2303663C2 (ru
Inventor
Койчи ШИМИЗУ (JP)
Койчи ШИМИЗУ
Фредерик КАЙО (FR)
Фредерик КАЙО
Казуми ТАНИ (JP)
Казуми ТАНИ
Ешифуми КОБАЯШИ (JP)
Ешифуми КОБАЯШИ
Original Assignee
Везувиус Франс С.А. (Fr)
Везувиус Франс С.А.
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Application filed by Везувиус Франс С.А. (Fr), Везувиус Франс С.А. filed Critical Везувиус Франс С.А. (Fr)
Publication of RU2005117970A publication Critical patent/RU2005117970A/ru
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Publication of RU2303663C2 publication Critical patent/RU2303663C2/ru

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062—Borides, Nitrides or Silicides
    • C04B41/5066—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
    • Y10T428/1314—Contains fabric, fiber particle, or filament made of glass, ceramic, or sintered, fused, fired, or calcined metal oxide, or metal carbide or other inorganic compound [e.g., fiber glass, mineral fiber, sand, etc.]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Ceramic Products (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Claims (7)

1. Резервуар для приема расплавленного кремния или для плавления кремния, который имеет напыленное покрытие из кремниевого композитного термета, содержащего металлический кремний, нитрид кремния и оксид кремния, по меньшей мере на части внутренней стенки резервуара для хранения кремния, отличающийся тем, что налыленное покрытие из кремниевого композитного термета имеет следующее отношение концентраций металлического кремния (X) к нитриду кремния (Y) и к оксиду кремния (Z): X:Y:Z=20-50:77-30:3-20.
2. Резервуар по п.1, отличающийся тем, что напыленное покрытие из кремниевого композитного термета образуют за счет напыления материала в виде кремниевого композитного термета, полученного за счет добавки металлического кремния, в качестве связующего материала, в смесь Si2N4 и SiO2.
3. Резервуар по п.1 или 2, отличающийся тем, что он изготовлен из материала, который содержит оксид кремния, нитрид бора и/или графит.
4. Резервуар по п.3, в котором оксид кремния (SiO2) представляет собой уплотненный или спеченный плавленый кварц.
5. Резервуар по п.1, отличающийся тем, что покрытие имеет толщину 20-500 мкм, преимущественно 50-300 мкм.
6. Способ изготовления резервуара для приема расплавленного кремния или для плавления кремния, который предусматривает напыление материала в виде кремниевого композитного термета, который содержит металлический кремний, нитрид кремния и оксид кремния, на внутреннюю стенку указанного резервуара, в результате чего образуется напыленное покрытие из кремниевого композитного термета, причем напыленное покрытие из кремниевого термета имеет следующее отношение концентраций металлического кремния (X) к нитриду кремния (Y) и к оксиду кремния (Z): X:Y:Z=20-50:77-30:3-20.
7. Способ по п.6, в котором указанный резервуар изготавливают из материала, содержащего оксид кремния, нитрид бора и/или графит, преимущественно уплотненный или спеченный плавленый кварц.
RU2005117970/15A 2002-12-06 2002-12-06 Резервуар для приема расплавленного кремния или для плавления кремния и способ его изготовления RU2303663C2 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2002/013850 WO2004053207A1 (en) 2002-12-06 2002-12-06 Vessel for holding silicon and method of producing the same

Publications (2)

Publication Number Publication Date
RU2005117970A true RU2005117970A (ru) 2005-11-20
RU2303663C2 RU2303663C2 (ru) 2007-07-27

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RU2005117970/15A RU2303663C2 (ru) 2002-12-06 2002-12-06 Резервуар для приема расплавленного кремния или для плавления кремния и способ его изготовления

Country Status (13)

Country Link
US (1) US20060057317A1 (ru)
EP (1) EP1570117B1 (ru)
CN (1) CN1309879C (ru)
AT (1) ATE335094T1 (ru)
AU (1) AU2002358101A1 (ru)
BR (1) BR0215961A (ru)
CA (1) CA2507389A1 (ru)
DE (1) DE60213687T2 (ru)
ES (1) ES2269794T3 (ru)
MX (1) MXPA05006031A (ru)
RU (1) RU2303663C2 (ru)
UA (1) UA81278C2 (ru)
WO (1) WO2004053207A1 (ru)

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DE102005029039B4 (de) * 2004-07-08 2012-07-12 Deutsche Solar Gmbh Herstellungsverfahren für Kokille mit Antihaftbeschichtung
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Also Published As

Publication number Publication date
UA81278C2 (en) 2007-12-25
EP1570117A1 (en) 2005-09-07
BR0215961A (pt) 2005-09-13
CN1742120A (zh) 2006-03-01
CA2507389A1 (en) 2004-06-24
MXPA05006031A (es) 2005-08-18
DE60213687D1 (de) 2006-09-14
AU2002358101A1 (en) 2004-06-30
RU2303663C2 (ru) 2007-07-27
EP1570117B1 (en) 2006-08-02
WO2004053207A1 (en) 2004-06-24
DE60213687T2 (de) 2007-10-18
US20060057317A1 (en) 2006-03-16
CN1309879C (zh) 2007-04-11
ATE335094T1 (de) 2006-08-15
ES2269794T3 (es) 2007-04-01

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Effective date: 20081207