PL2176450T3 - Aparat i sposób elektrolitycznej obróbki produktu w kształcie płytki - Google Patents

Aparat i sposób elektrolitycznej obróbki produktu w kształcie płytki

Info

Publication number
PL2176450T3
PL2176450T3 PL08759143T PL08759143T PL2176450T3 PL 2176450 T3 PL2176450 T3 PL 2176450T3 PL 08759143 T PL08759143 T PL 08759143T PL 08759143 T PL08759143 T PL 08759143T PL 2176450 T3 PL2176450 T3 PL 2176450T3
Authority
PL
Poland
Prior art keywords
product
treatment
plate
shaped product
electrolytic treatment
Prior art date
Application number
PL08759143T
Other languages
English (en)
Polish (pl)
Inventor
Reinhard Schneider
Henry Kunze
Ferdinand Wiener
Original Assignee
Atotech Deutschland Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland Gmbh filed Critical Atotech Deutschland Gmbh
Publication of PL2176450T3 publication Critical patent/PL2176450T3/pl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/08Electroplating with moving electrolyte e.g. jet electroplating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/10Agitating of electrolytes; Moving of racks
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/04Electroplating with moving electrodes
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/241Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0736Methods for applying liquids, e.g. spraying
    • H05K2203/0746Local treatment using a fluid jet, e.g. for removing or cleaning material; Providing mechanical pressure using a fluid jet
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15Position of the PCB during processing
    • H05K2203/1509Horizontally held PCB

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Coating Apparatus (AREA)
  • Electrodes Of Semiconductors (AREA)
PL08759143T 2007-06-06 2008-06-03 Aparat i sposób elektrolitycznej obróbki produktu w kształcie płytki PL2176450T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007026633A DE102007026633B4 (de) 2007-06-06 2007-06-06 Vorrichtung und Verfahren zum elektrolytischen Behandeln von plattenförmiger Ware
EP08759143A EP2176450B9 (en) 2007-06-06 2008-06-03 Apparatus and method for the electrolytic treatment of a plate-shaped product
PCT/EP2008/004616 WO2008148578A1 (en) 2007-06-06 2008-06-03 Apparatus and method for the electrolytic treatment of a plate-shaped product

Publications (1)

Publication Number Publication Date
PL2176450T3 true PL2176450T3 (pl) 2011-12-30

Family

ID=39712035

Family Applications (1)

Application Number Title Priority Date Filing Date
PL08759143T PL2176450T3 (pl) 2007-06-06 2008-06-03 Aparat i sposób elektrolitycznej obróbki produktu w kształcie płytki

Country Status (11)

Country Link
US (1) US8545687B2 (enExample)
EP (1) EP2176450B9 (enExample)
JP (2) JP2010530029A (enExample)
KR (2) KR101641475B1 (enExample)
CN (1) CN101730760B (enExample)
AT (1) ATE519872T1 (enExample)
BR (1) BRPI0812259A2 (enExample)
DE (1) DE102007026633B4 (enExample)
PL (1) PL2176450T3 (enExample)
TW (1) TWI433965B (enExample)
WO (1) WO2008148578A1 (enExample)

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PT3287550T (pt) 2016-08-23 2019-05-30 Atotech Deutschland Gmbh Dispositivo para deposição galvânica vertical de metal num substrato
JP6995544B2 (ja) * 2017-09-20 2022-01-14 上村工業株式会社 表面処理装置および表面処理方法
CN113943966A (zh) * 2020-07-16 2022-01-18 南通深南电路有限公司 一种电路板的电镀装置和电镀方法
CN112899743B (zh) * 2021-01-19 2021-09-21 鑫巨(深圳)半导体科技有限公司 一种电镀装置及电镀方法
CN114808057B (zh) * 2021-01-29 2024-06-21 泰科电子(上海)有限公司 电镀装置和电镀系统
CN117964183B (zh) * 2024-04-02 2024-06-07 生态环境部华南环境科学研究所(生态环境部生态环境应急研究所) 一种苯胺类事故废水应急处置方法及一体化装置

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Also Published As

Publication number Publication date
TWI433965B (zh) 2014-04-11
EP2176450A1 (en) 2010-04-21
DE102007026633B4 (de) 2009-04-02
WO2008148578A1 (en) 2008-12-11
KR20100019481A (ko) 2010-02-18
US8545687B2 (en) 2013-10-01
CN101730760B (zh) 2011-09-28
JP2010530029A (ja) 2010-09-02
CN101730760A (zh) 2010-06-09
EP2176450B1 (en) 2011-08-10
KR101641475B1 (ko) 2016-07-20
JP5597751B2 (ja) 2014-10-01
TW200918689A (en) 2009-05-01
US20100176004A1 (en) 2010-07-15
JP2013224492A (ja) 2013-10-31
BRPI0812259A2 (pt) 2014-12-23
ATE519872T1 (de) 2011-08-15
EP2176450B9 (en) 2012-02-01
DE102007026633A1 (de) 2008-12-11
KR20150071031A (ko) 2015-06-25

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