PH12017500285B1 - Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating - Google Patents
Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coatingInfo
- Publication number
- PH12017500285B1 PH12017500285B1 PH12017500285A PH12017500285A PH12017500285B1 PH 12017500285 B1 PH12017500285 B1 PH 12017500285B1 PH 12017500285 A PH12017500285 A PH 12017500285A PH 12017500285 A PH12017500285 A PH 12017500285A PH 12017500285 B1 PH12017500285 B1 PH 12017500285B1
- Authority
- PH
- Philippines
- Prior art keywords
- protective coating
- forming sheet
- semiconductor chip
- manufacturing semiconductor
- chip provided
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
Abstract
A protective coating-forming sheet having a first support sheet and a protective coating formation film laminated to a first surface side of the first support sheet, wherein the protective coating formation film is formed from a curable material, and the protective coating formation film has the following characteristics: namely, when the protective coating formation film is cured to form a protective coating, the protective coating has a breaking strain at 50øC of not more than 20 pcnt , and a loss tangent peak temperature T1 within a range from 25øC to 60øC.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014169266 | 2014-08-22 | ||
JP2014169267 | 2014-08-22 | ||
PCT/JP2015/073503 WO2016027883A1 (en) | 2014-08-22 | 2015-08-21 | Protective-coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
Publications (2)
Publication Number | Publication Date |
---|---|
PH12017500285A1 PH12017500285A1 (en) | 2017-06-28 |
PH12017500285B1 true PH12017500285B1 (en) | 2017-06-28 |
Family
ID=55350823
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PH12017500285A PH12017500285B1 (en) | 2014-08-22 | 2017-02-16 | Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
PH12017500284A PH12017500284B1 (en) | 2014-08-22 | 2017-02-16 | Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PH12017500284A PH12017500284B1 (en) | 2014-08-22 | 2017-02-16 | Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating |
Country Status (8)
Country | Link |
---|---|
JP (2) | JP6589209B2 (en) |
KR (2) | KR102368140B1 (en) |
CN (2) | CN106660333B (en) |
MY (2) | MY186759A (en) |
PH (2) | PH12017500285B1 (en) |
SG (2) | SG11201701270QA (en) |
TW (4) | TWI668290B (en) |
WO (2) | WO2016027883A1 (en) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017073627A1 (en) * | 2015-10-29 | 2017-05-04 | リンテック株式会社 | Film for protective film formation and composite sheet for protective film formation |
JP6573841B2 (en) * | 2016-03-04 | 2019-09-11 | リンテック株式会社 | Semiconductor processing sheet |
JP6805230B2 (en) * | 2016-03-04 | 2020-12-23 | リンテック株式会社 | Composite sheet for forming a protective film |
WO2017149925A1 (en) * | 2016-03-04 | 2017-09-08 | リンテック株式会社 | Semiconductor processing sheet |
JP7008620B2 (en) * | 2016-03-04 | 2022-01-25 | リンテック株式会社 | Sheet for semiconductor processing |
JP6833804B2 (en) * | 2016-03-04 | 2021-02-24 | リンテック株式会社 | Composite sheet for forming a protective film |
JP6617056B2 (en) * | 2016-03-04 | 2019-12-04 | リンテック株式会社 | Semiconductor processing sheet, winding body thereof, and method for manufacturing the winding body |
TWI778960B (en) * | 2016-04-28 | 2022-10-01 | 日商琳得科股份有限公司 | Film for forming protective film, composite sheet for forming protective film, and method of manufacturing semiconductor chip having protective film |
TWI796297B (en) * | 2016-04-28 | 2023-03-21 | 日商琳得科股份有限公司 | Composite sheet for forming protective film |
TWI721158B (en) * | 2016-04-28 | 2021-03-11 | 日商琳得科股份有限公司 | Protective film forming film and composite sheet for forming protective film |
CN109071845A (en) * | 2016-04-28 | 2018-12-21 | 琳得科株式会社 | Protective film formation film and protective film formation composite sheet |
TWI731964B (en) * | 2016-04-28 | 2021-07-01 | 日商琳得科股份有限公司 | Complex sheet for forming protective film |
JP6278164B1 (en) * | 2016-05-12 | 2018-02-14 | 住友ベークライト株式会社 | Adhesive tape for semiconductor substrate processing |
JP6776081B2 (en) * | 2016-09-28 | 2020-10-28 | リンテック株式会社 | Manufacturing method of semiconductor chip with protective film and manufacturing method of semiconductor device |
TWI765038B (en) * | 2017-05-17 | 2022-05-21 | 日商琳得科股份有限公司 | Semiconductor device and method for manufacturing same |
JP7107946B2 (en) * | 2017-08-28 | 2022-07-27 | リンテック株式会社 | infrared sensor module |
WO2019146607A1 (en) * | 2018-01-24 | 2019-08-01 | リンテック株式会社 | Long laminated sheet, and winding body thereof |
KR102487552B1 (en) | 2018-02-05 | 2023-01-11 | 삼성전자주식회사 | Composition for protective film against sawing process and method of manufacturing semiconductor package using the composition |
CN111670231B (en) * | 2018-03-23 | 2022-06-03 | 琳得科株式会社 | Film-like adhesive and sheet for semiconductor processing |
WO2019187014A1 (en) * | 2018-03-30 | 2019-10-03 | リンテック株式会社 | Support sheet and composite sheet for protective film formation |
CN111466014B (en) * | 2018-03-30 | 2024-01-02 | 琳得科株式会社 | Composite sheet for forming protective film and method for producing same |
WO2020218519A1 (en) * | 2019-04-26 | 2020-10-29 | リンテック株式会社 | Method for producing three-layer body, method for producing four-layer body, method for producing semiconductor device equipped with rear surface protective film, and three-layer body |
JP7453879B2 (en) | 2020-08-12 | 2024-03-21 | リンテック株式会社 | Protective film forming sheet roll and protective film forming sheet roll manufacturing method |
JP7084972B2 (en) * | 2020-10-06 | 2022-06-15 | リンテック株式会社 | Composite sheet for forming a protective film |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100355031C (en) | 2002-03-12 | 2007-12-12 | 浜松光子学株式会社 | Method for deviding substrate |
US20030190466A1 (en) * | 2002-04-03 | 2003-10-09 | Katsuji Nakaba | Adhesive sheet for producing semiconductor devices |
JP3857953B2 (en) * | 2002-05-16 | 2006-12-13 | 株式会社巴川製紙所 | Adhesive sheet for semiconductor device manufacturing |
JP4364508B2 (en) * | 2002-12-27 | 2009-11-18 | リンテック株式会社 | Protective film forming sheet for chip back surface and manufacturing method of chip with protective film |
KR101215728B1 (en) * | 2003-06-06 | 2012-12-26 | 히다치 가세고교 가부시끼가이샤 | Semiconductor device producing method |
KR100850772B1 (en) * | 2003-07-08 | 2008-08-06 | 린텍 코포레이션 | Hardenable Pressure Sensitive Adhesive Sheet for Dicing/Die-Bonding and Method for Manufacturing Semiconductor Device |
JP4846406B2 (en) * | 2006-03-28 | 2011-12-28 | リンテック株式会社 | Chip protection film forming sheet |
EP2360013A4 (en) * | 2008-11-27 | 2013-01-16 | Mitsui Du Pont Polychemical | Protective film for electronic component, manufacturing method therefor, and use thereof |
JP5335483B2 (en) * | 2009-02-27 | 2013-11-06 | リンテック株式会社 | Method for producing polarizing plate with adhesive layer |
JP5603757B2 (en) * | 2009-12-04 | 2014-10-08 | リンテック株式会社 | Laser dicing adhesive sheet and method for manufacturing semiconductor device |
JP2011151362A (en) | 2009-12-24 | 2011-08-04 | Nitto Denko Corp | Dicing tape-integrated film for semiconductor back surface |
JP2012033637A (en) | 2010-07-29 | 2012-02-16 | Nitto Denko Corp | Dicing tape integrated semiconductor rear face film, and method of manufacturing semiconductor device |
JP5580701B2 (en) * | 2010-09-13 | 2014-08-27 | 日東電工株式会社 | Dicing die bond film |
KR101649020B1 (en) * | 2011-07-01 | 2016-08-17 | 후루카와 덴키 고교 가부시키가이샤 | Adhesive film, and dicing/die bonding film and method for processing semiconductor using said dicing/die bonding film |
JP5865045B2 (en) * | 2011-12-07 | 2016-02-17 | リンテック株式会社 | Dicing sheet with protective film forming layer and chip manufacturing method |
JP6001273B2 (en) * | 2012-02-13 | 2016-10-05 | 信越化学工業株式会社 | Protective film for semiconductor wafer and method for manufacturing semiconductor chip |
JP5684948B2 (en) * | 2012-05-14 | 2015-03-18 | リンテック株式会社 | Sheet with adhesive resin layer and method for manufacturing semiconductor device |
KR102140470B1 (en) * | 2012-11-30 | 2020-08-03 | 린텍 가부시키가이샤 | Sheet for forming resin film for chips and method for manufacturing semiconductor device |
SG11201606470RA (en) * | 2014-03-24 | 2016-10-28 | Lintec Corp | Protective film forming film, protective film forming sheet and work product manufacturing method |
WO2015146936A1 (en) * | 2014-03-24 | 2015-10-01 | リンテック株式会社 | Protection membrane forming film, protection membrane forming utilization sheet, production method and inspection method for workpiece or processed product, workpiece determined as adequate product, and processed product determined as adequate product |
-
2015
- 2015-08-21 KR KR1020177004497A patent/KR102368140B1/en active IP Right Grant
- 2015-08-21 TW TW104127314A patent/TWI668290B/en active
- 2015-08-21 JP JP2016544263A patent/JP6589209B2/en active Active
- 2015-08-21 WO PCT/JP2015/073503 patent/WO2016027883A1/en active Application Filing
- 2015-08-21 TW TW108122914A patent/TWI706023B/en active
- 2015-08-21 KR KR1020177004494A patent/KR102376017B1/en active IP Right Grant
- 2015-08-21 JP JP2016544268A patent/JPWO2016027888A1/en active Pending
- 2015-08-21 WO PCT/JP2015/073545 patent/WO2016027888A1/en active Application Filing
- 2015-08-21 SG SG11201701270QA patent/SG11201701270QA/en unknown
- 2015-08-21 MY MYPI2017700515A patent/MY186759A/en unknown
- 2015-08-21 MY MYPI2017700479A patent/MY182846A/en unknown
- 2015-08-21 TW TW104127316A patent/TWI672354B/en active
- 2015-08-21 TW TW108128902A patent/TWI712670B/en active
- 2015-08-21 CN CN201580044562.9A patent/CN106660333B/en active Active
- 2015-08-21 SG SG11201701272UA patent/SG11201701272UA/en unknown
- 2015-08-21 CN CN201580044561.4A patent/CN106660332B/en active Active
-
2017
- 2017-02-16 PH PH12017500285A patent/PH12017500285B1/en unknown
- 2017-02-16 PH PH12017500284A patent/PH12017500284B1/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR102368140B1 (en) | 2022-02-25 |
KR20170044652A (en) | 2017-04-25 |
CN106660332B (en) | 2020-08-07 |
WO2016027888A1 (en) | 2016-02-25 |
KR102376017B1 (en) | 2022-03-17 |
TWI706023B (en) | 2020-10-01 |
TWI712670B (en) | 2020-12-11 |
PH12017500284A1 (en) | 2017-07-03 |
TW201614024A (en) | 2016-04-16 |
MY182846A (en) | 2021-02-05 |
CN106660332A (en) | 2017-05-10 |
PH12017500285A1 (en) | 2017-06-28 |
TW201938728A (en) | 2019-10-01 |
TWI672354B (en) | 2019-09-21 |
PH12017500284B1 (en) | 2017-07-03 |
SG11201701270QA (en) | 2017-03-30 |
TW201940622A (en) | 2019-10-16 |
JPWO2016027883A1 (en) | 2017-06-01 |
TW201614023A (en) | 2016-04-16 |
TWI668290B (en) | 2019-08-11 |
JPWO2016027888A1 (en) | 2017-06-01 |
MY186759A (en) | 2021-08-18 |
CN106660333A (en) | 2017-05-10 |
WO2016027883A1 (en) | 2016-02-25 |
CN106660333B (en) | 2018-11-06 |
KR20170044108A (en) | 2017-04-24 |
SG11201701272UA (en) | 2017-04-27 |
JP6589209B2 (en) | 2019-10-16 |
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