CN111466014B - Composite sheet for forming protective film and method for producing same - Google Patents
Composite sheet for forming protective film and method for producing same Download PDFInfo
- Publication number
- CN111466014B CN111466014B CN201880079841.2A CN201880079841A CN111466014B CN 111466014 B CN111466014 B CN 111466014B CN 201880079841 A CN201880079841 A CN 201880079841A CN 111466014 B CN111466014 B CN 111466014B
- Authority
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- China
- Prior art keywords
- protective film
- forming
- film
- adhesive layer
- meth
- Prior art date
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- 230000001681 protective effect Effects 0.000 title claims abstract description 639
- 239000002131 composite material Substances 0.000 title claims abstract description 196
- 238000004519 manufacturing process Methods 0.000 title claims description 64
- 239000012790 adhesive layer Substances 0.000 claims abstract description 288
- 239000000463 material Substances 0.000 claims abstract description 117
- 238000012360 testing method Methods 0.000 claims abstract description 68
- 239000011229 interlayer Substances 0.000 claims abstract description 40
- 238000003860 storage Methods 0.000 claims description 31
- 239000005001 laminate film Substances 0.000 claims description 18
- 238000005520 cutting process Methods 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 10
- 238000004378 air conditioning Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 description 299
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 228
- 230000001070 adhesive effect Effects 0.000 description 167
- 239000000853 adhesive Substances 0.000 description 163
- 229920001187 thermosetting polymer Polymers 0.000 description 119
- 150000001875 compounds Chemical class 0.000 description 110
- 239000010410 layer Substances 0.000 description 103
- 239000002585 base Substances 0.000 description 92
- 239000000178 monomer Substances 0.000 description 83
- 239000003431 cross linking reagent Substances 0.000 description 82
- 239000002904 solvent Substances 0.000 description 79
- 239000000758 substrate Substances 0.000 description 79
- -1 polyethylene Polymers 0.000 description 77
- 229920000642 polymer Polymers 0.000 description 70
- 239000004065 semiconductor Substances 0.000 description 63
- 125000000524 functional group Chemical group 0.000 description 62
- 238000000034 method Methods 0.000 description 62
- 229920000058 polyacrylate Polymers 0.000 description 56
- 229920005989 resin Polymers 0.000 description 55
- 239000011347 resin Substances 0.000 description 55
- 239000004840 adhesive resin Substances 0.000 description 50
- 229920006223 adhesive resin Polymers 0.000 description 50
- 239000000049 pigment Substances 0.000 description 47
- 239000000654 additive Substances 0.000 description 40
- 229920000178 Acrylic resin Polymers 0.000 description 39
- 239000004925 Acrylic resin Substances 0.000 description 39
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 37
- 239000003822 epoxy resin Substances 0.000 description 36
- 229920000647 polyepoxide Polymers 0.000 description 36
- 238000002156 mixing Methods 0.000 description 34
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 33
- 239000003999 initiator Substances 0.000 description 33
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 32
- 239000003086 colorant Substances 0.000 description 32
- 125000000217 alkyl group Chemical group 0.000 description 31
- 239000000945 filler Substances 0.000 description 31
- 238000003475 lamination Methods 0.000 description 31
- 239000003795 chemical substances by application Substances 0.000 description 26
- 125000003277 amino group Chemical group 0.000 description 23
- 239000007822 coupling agent Substances 0.000 description 23
- 238000007639 printing Methods 0.000 description 23
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- 238000004804 winding Methods 0.000 description 21
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- 239000004593 Epoxy Substances 0.000 description 17
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- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 17
- 239000005056 polyisocyanate Substances 0.000 description 17
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- 150000002430 hydrocarbons Chemical group 0.000 description 16
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 15
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 15
- 238000002834 transmittance Methods 0.000 description 14
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 13
- 229920000728 polyester Polymers 0.000 description 13
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 12
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- 229910052751 metal Inorganic materials 0.000 description 11
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- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 10
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 10
- 125000004432 carbon atom Chemical group C* 0.000 description 10
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- 238000010438 heat treatment Methods 0.000 description 10
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 10
- 238000010030 laminating Methods 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 8
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 8
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 8
- 230000001771 impaired effect Effects 0.000 description 8
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 8
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 7
- 229920001577 copolymer Polymers 0.000 description 7
- 239000011162 core material Substances 0.000 description 7
- 239000011256 inorganic filler Substances 0.000 description 7
- 229910003475 inorganic filler Inorganic materials 0.000 description 7
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 7
- 230000000379 polymerizing effect Effects 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 6
- 150000001298 alcohols Chemical class 0.000 description 6
- 239000000470 constituent Substances 0.000 description 6
- 150000001991 dicarboxylic acids Chemical class 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 6
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 6
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 5
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 5
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 5
- 239000004793 Polystyrene Substances 0.000 description 5
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 239000013522 chelant Substances 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 5
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 5
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- 238000004321 preservation Methods 0.000 description 5
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- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 5
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 5
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 4
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 4
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 4
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 4
- QOXOZONBQWIKDA-UHFFFAOYSA-N 3-hydroxypropyl Chemical group [CH2]CCO QOXOZONBQWIKDA-UHFFFAOYSA-N 0.000 description 4
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical compound CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 4
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
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- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 125000005907 alkyl ester group Chemical group 0.000 description 4
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 description 4
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- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
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- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
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- 125000001196 nonadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 239000004843 novolac epoxy resin Substances 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
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- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 229920005604 random copolymer Polymers 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- USFPINLPPFWTJW-UHFFFAOYSA-N tetraphenylphosphonium Chemical compound C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 USFPINLPPFWTJW-UHFFFAOYSA-N 0.000 description 1
- JOUDBUYBGJYFFP-FOCLMDBBSA-N thioindigo Chemical compound S\1C2=CC=CC=C2C(=O)C/1=C1/C(=O)C2=CC=CC=C2S1 JOUDBUYBGJYFFP-FOCLMDBBSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 235000010215 titanium dioxide Nutrition 0.000 description 1
- RUELTTOHQODFPA-UHFFFAOYSA-N toluene 2,6-diisocyanate Chemical compound CC1=C(N=C=O)C=CC=C1N=C=O RUELTTOHQODFPA-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- IUCJMVBFZDHPDX-UHFFFAOYSA-N tretamine Chemical compound C1CN1C1=NC(N2CC2)=NC(N2CC2)=N1 IUCJMVBFZDHPDX-UHFFFAOYSA-N 0.000 description 1
- 229950001353 tretamine Drugs 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- VTHOKNTVYKTUPI-UHFFFAOYSA-N triethoxy-[3-(3-triethoxysilylpropyltetrasulfanyl)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCSSSSCCC[Si](OCC)(OCC)OCC VTHOKNTVYKTUPI-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/27—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Adhesive Tapes (AREA)
- Laminated Bodies (AREA)
- Dicing (AREA)
Abstract
The present invention relates to a composite sheet for forming a protective film, comprising a support sheet having a base material and an adhesive layer provided on the base material, wherein the adhesive layer of the support sheet is provided with a film for forming a protective film, the surface of the base material on the adhesive layer side is a concave-convex surface, a test piece is cut from 5 positions of the composite sheet for forming a protective film, and when the interlayer distance between the film for forming a protective film and the non-bonded region of the support sheet of each of the 5 test pieces is measured, the interlayer distance is 0.5 [ mu ] m or less.
Description
Technical Field
The present invention relates to a composite sheet for forming a protective film and a method for producing the same.
Background
In recent years, a semiconductor device using a mounting method called a flip-chip (face down) method has been manufactured. In the flip-chip method, a semiconductor chip having electrodes such as bumps on a circuit surface, the electrodes being bonded to a substrate, is used. Therefore, the back surface of the semiconductor chip opposite to the circuit surface may be exposed.
A resin film containing an organic material as a protective film is formed on the back surface of the exposed semiconductor chip, and the resin film may be incorporated into a semiconductor device as a semiconductor chip with a protective film. The protective film is used to prevent cracks from occurring on the semiconductor chip after the dicing process or the packaging.
Such a protective film can be formed, for example, by curing a protective film forming film having curability. In addition, a non-curable protective film-forming film having adjusted physical properties may be used as the protective film. The protective film forming film is attached to the back surface of the semiconductor wafer. The protective film forming film may be attached to the back surface of the semiconductor wafer in a state of a composite sheet for forming a protective film integrated with a support sheet used for processing the semiconductor wafer, for example, or may be attached to the back surface of the semiconductor wafer in a state of not being integrated with the support sheet.
After the protective film forming composite sheet is attached to the back surface of the semiconductor chip through the protective film forming film therein, each of the protective film forming composite sheets is appropriately attached at an appropriate timing: the protective film is formed by curing the protective film forming film, cutting the protective film forming film or the protective film, dividing (dicing) the semiconductor wafer into semiconductor chips, picking up the semiconductor chips (semiconductor chips with the protective film forming film or semiconductor chips with the protective film) having the cut protective film or the protective film on the back surface thereof from the support sheet, and the like. When the semiconductor chip with the protective film forming film is picked up, the protective film forming film is cured to form a semiconductor chip with a protective film, and the semiconductor chip with a protective film is finally used to manufacture a semiconductor device. In this way, the support sheet in the protective film forming composite sheet can be used as a dicing sheet. In addition, when the protective film forming film is non-curable, the protective film forming film is regarded as a protective film directly in each of the above steps.
On the other hand, after the protective film forming film is attached to the back surface of the semiconductor wafer in a state of not being integrated with the support sheet, the support sheet is attached to the exposed surface of the protective film forming film on the opposite side of the attaching surface of the semiconductor wafer. Then, a semiconductor chip with a protective film or a semiconductor chip with a film for forming a protective film is obtained in the same manner as in the case of using the composite sheet for forming a protective film, and a semiconductor device is manufactured. In this case, the protective film forming film is attached to the back surface of the semiconductor wafer in a state of not being integrated with the support sheet, but is integrated with the support sheet after the attachment to form the protective film forming composite sheet.
As such a composite sheet for forming a protective film, for example, a dicing tape-integrated semiconductor back surface protective film (composite sheet for forming a protective film) is disclosed, which includes a dicing tape (support sheet) having a base material having a concave-convex processed surface and an adhesive layer laminated on the concave-convex processed surface side of the base material, and an adhesive layer having a haze of 45% or less, and a semiconductor back surface protective film (film for forming a protective film) laminated on the adhesive layer of the dicing tape (see patent document 1).
However, in the composite sheet for forming a protective film (dicing tape-integrated film for protecting a semiconductor back surface) disclosed in patent document 1, the adhesive layer is laminated on the uneven surface side of the substrate, and therefore, the influence of the unevenness described above may be reflected on the adhesive layer and the film for forming a protective film (film for protecting a semiconductor back surface) laminated on the adhesive layer. For example, since the surface of the adhesive layer on the protective film forming film side is a concave-convex surface, there is a case where an area (non-bonded area) where the adhesive layer and the protective film forming film are not bonded to each other is generated between them, and the lamination property of the adhesive layer and the protective film forming film is lowered. In addition, the surface of the protective film or the protective film forming film on the adhesive layer side may be printed by laser irradiation, and the visibility of the printing through the base material and the adhesive layer may be reduced at the portion where the thickness of the adhesive layer is uneven and the adhesive layer is thick.
Prior art literature
Patent literature
Patent document 1: japanese patent No. 5432853
Disclosure of Invention
Technical problem to be solved by the invention
The purpose of the present invention is to provide a composite sheet for forming a protective film, which comprises a support sheet comprising an adhesive layer on the uneven surface side of a substrate, and a protective film-forming film provided on the adhesive layer, wherein the composite sheet for forming a protective film can achieve good lamination of the adhesive layer and the protective film-forming film, and good printing visibility of the protective film or the protective film-forming film via the support sheet.
Technical means for solving the technical problems
The invention includes the following aspects.
(1) A composite sheet for forming a protective film, comprising a support sheet having a base material and an adhesive layer on the base material, wherein the adhesive layer in the support sheet has a film for forming a protective film, wherein the surface of the base material on the adhesive layer side is a concave-convex surface, and wherein when a test piece is cut from 5 positions of the composite sheet for forming a protective film, and the interlayer distance between the film for forming a protective film and the non-bonded region of the support sheet of the 5 test pieces is measured, the interlayer distance is 0.5 [ mu ] m or less.
(2) The protective film-forming composite sheet according to (1), wherein the adhesive layer is in direct contact with the concave-convex surface of the base material.
(3) The composite sheet for forming a protective film according to (1) or (2), wherein when the number of non-bonded regions between the protective film forming film and the supporting sheet is observed in a region of 1mm in the center portion in the width direction of the cross section of the test piece, the total number of the test pieces is 5 or less.
(4) A method for producing the protective film-forming composite sheet according to (1), comprising:
A step of preparing a first laminate sheet including a base material, an adhesive layer, and a first release film in this order, wherein the surface of the base material on the adhesive layer side is a concave-convex surface, and a laminate film including a third release film, a protective film forming film, and a second release film in this order;
a step of storing either one or both of the first laminate and the laminate film at 53 to 75 ℃ for 24 to 720 hours;
a step of removing the first release film and the second release film, and bonding the exposed surface of the adhesive layer and the exposed surface of the protective film forming film to each other to produce a second laminate sheet including the base material, the adhesive layer, the protective film forming film, and the third release film in this order; a kind of electronic device with high-pressure air-conditioning system
A step of storing the second laminate at 53 to 75 ℃ for 24 to 720 hours,
the step of bonding the exposed surface of the adhesive layer and the exposed surface of the protective film-forming film is performed while pressing at a pressure of 0.3 to 0.8MPa at 53 to 75 ℃.
(5) The production method according to (4), wherein the first laminate sheet, the laminate film, and the second laminate sheet are each a long laminate sheet or laminate film, and are wound into a roll and stored in the storage step.
Effects of the invention
By the configuration of the composite sheet for forming a protective film according to the present invention, good lamination of the adhesive layer and the film for forming a protective film and good printing visibility of the protective film or the film for forming a protective film via the support sheet can be achieved.
Drawings
Fig. 1 is a cross-sectional view schematically showing a support sheet and a protective film-forming composite sheet according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view schematically showing a composite sheet for forming a protective film and a supporting sheet according to an embodiment of the present invention.
Fig. 3 is a cross-sectional view schematically showing a composite sheet for forming a protective film and a supporting sheet according to an embodiment of the present invention.
Fig. 4 is an enlarged cross-sectional view of the support sheet and the protective film forming composite sheet shown in fig. 1.
Detailed Description
Support sheet and protective film-forming composite sheet
The support sheet according to one embodiment of the present invention includes a substrate, and an adhesive layer is provided on the substrate, and the surface of the substrate on the adhesive layer side is uneven, but is not particularly limited as long as the effect of the present invention is provided, and when a test piece is cut from 5 points of the support sheet and the minimum value and the maximum value of the thickness of the adhesive layer of the 5 test pieces are obtained, respectively, it is preferable that the average value of the minimum values (in this specification, referred to as "S value") is 1.5 μm or more and the average value of the maximum values (in this specification, referred to as "L value") is 9 μm or less.
In addition, the composite sheet for forming a protective film according to an embodiment of the present invention may include a protective film forming film on the adhesive layer in the support sheet.
The support sheet has an adhesive layer on the uneven surface side of the substrate, and in a composite sheet for forming a protective film comprising the support sheet, the influence of the uneven surface is suppressed.
More specifically, when the S value of the adhesive layer is 1.5 μm or more, the lamination property of the adhesive layer and the protective film forming film is good. In the present specification, unless otherwise specified, "stackability" refers to the degree of normality of the laminated state of two layers as a subject. The term "good lamination" means that, for example, there are no non-bonded regions (void portions) at all between two adjacent layers to be treated, or the number of non-bonded regions is small (for example, 5 or less) and the interlayer distance of the non-bonded regions is small.
On the other hand, the adhesive layer preferably has an L value of 9 μm or less, and thus the protective film or the film for forming the protective film is excellent in printing visibility through the support sheet.
The test piece can be cut from 5 parts of the support piece, and is obtained by cutting the entire area of the support piece in the thickness direction thereof. The test piece is a thin piece having all layers constituting the support piece.
The size of the test piece is not particularly limited, and the length of one side of the lamination surface or the exposed surface of each layer (substrate, adhesive layer, etc.) constituting the test piece is preferably 2mm or more. By using a test piece of such a size, the S value and the L value of the adhesive layer can be obtained with higher accuracy.
The maximum value of the length of the one side is not particularly limited. For example, the length of one side is preferably 10mm or less in terms of easier manufacturing of the test piece.
The planar shape of the test piece, that is, the shape of the lamination surface or the exposed surface of each layer (substrate, adhesive layer, etc.) constituting the test piece is preferably polygonal, and more preferably rectangular in terms of points where the test piece is more easily cut.
Examples of the preferable test piece include a test piece in which the lamination surface or exposure surface of each layer (substrate, adhesive layer, etc.) constituting the test piece is rectangular with a size of 3mm×3 mm. However, this is only one example of a preferred test strip.
The 5 cutting positions of the test piece in the support sheet are not particularly limited, but may be selected in consideration of the lamination scheduled position of the film for forming a protective film described later in order to obtain the S value and the L value of the adhesive layer with higher accuracy.
For example, the following 5 points can be cited: 1 of the positions of the support sheet where one protective film forming film is to be laminated, where the protective film forming film is to be arranged at the center (center of gravity) portion; and 4 positions which are arranged in a position close to the peripheral edge of the protective film forming film and are point-symmetrical with respect to the center (gravity center) portion.
In the support sheet, the distance between the centers (gravity centers) of the cutting positions of the test piece is preferably 50 to 200mm. By setting in this manner, the S value and the L value of the adhesive layer can be obtained with higher accuracy.
In order to determine the S value and the L value of the adhesive layer from the test pieces, a new cross section can be formed in the test pieces, and the minimum value and the maximum value of the thickness of the adhesive layer of each test piece are measured in the formed cross section.
For 1 test piece, the newly formed cross section may be 1 plane only, or 2 planes or more, and usually 1 plane only is sufficient.
The S value and the L value can be calculated from the at least 5 minimum values and the at least 5 maximum values.
The cross section of the test piece can be formed by a known method. For example, by using a known cross-section sample preparation device (Cross Section Polisher), a cross section can be formed in a test piece with high reproducibility while suppressing variations.
The minimum and maximum values of the thickness of the adhesive layer can be measured, for example, by observing the cross section of the test piece using a Scanning Electron Microscope (SEM).
In the cross section of each test piece, the region in which the minimum value and the maximum value of the thickness of the adhesive layer are measured is preferably a region of 50 to 1500 μm in a direction (a direction substantially parallel to the lamination surface or the exposed surface of each layer) orthogonal to the lamination direction of each layer (base material, adhesive layer, etc.) constituting the test piece. By setting the thickness of the adhesive layer in this manner, the minimum value and the maximum value of the thickness of the adhesive layer can be measured efficiently and accurately.
In one embodiment of the present invention, the protective film forming composite sheet is a protective film forming composite sheet including a protective film forming film on an adhesive layer in the support sheet, and when a test piece is cut from 5 positions of the protective film forming composite sheet and an interlayer distance between the protective film forming film of the 5 test pieces and a non-bonded region of the support sheet is measured, the interlayer distance is 0.5 μm or less. The interlayer distance is preferably 0.3 μm or less, more preferably 0.2 μm or less, still more preferably less than 0.1 μm, and may be 0 μm.
The test piece cut from the composite sheet for forming a protective film is obtained by cutting the entire region of the composite sheet for forming a protective film in the thickness direction thereof, and the test piece is a thin piece having all layers constituting the composite sheet for forming a protective film.
The overall structure of the composite sheet for forming a protective film according to the present invention will be described below with reference to the drawings. In order to facilitate understanding of the features of the present invention, important parts of the drawings used in the following description may be enlarged and displayed, and the dimensional ratios of the respective constituent elements and the like are not necessarily the same as those of actual ones.
Fig. 1 is a cross-sectional view schematically showing a support sheet and a protective film-forming composite sheet according to an embodiment of the present invention.
The protective film forming composite sheet 1A shown here includes a base material 11, an adhesive layer 12 provided on the base material 11, and a protective film forming film 13 provided on the adhesive layer 12. The support sheet 10 is a laminate of a base material 11 and an adhesive layer 12, in other words, the composite sheet 1A for forming a protective film has a structure in which a protective film 13 is laminated on one surface (in this specification, sometimes referred to as "first surface") 10a of the support sheet 10. The protective film forming composite sheet 1A further includes a release film 15 on the protective film forming film 13.
In the composite sheet 1A for forming a protective film, the adhesive layer 12 is laminated on one surface (in this specification, sometimes referred to as "first surface") 11A of the base material 11, the protective film 13 is laminated on the entire surface (in this specification, sometimes referred to as "first surface") 12a of the adhesive layer 12 opposite to the base material 11 side, the adhesive layer 16 for a jig is laminated on a part of the surface (in this specification, sometimes referred to as "first surface") 13a of the protective film 13 opposite to the adhesive layer 12 side, that is, a region near the peripheral edge portion, and the release film 15 is laminated on the surface 16a (upper surface and side surface) of the adhesive layer 16 for a jig, which is not in contact with the protective film 13, of the first surface 13a of the protective film 13.
In fig. 1, reference numeral 13b denotes a surface (in this specification, sometimes referred to as "second surface") of the protective film forming film 13 on the adhesive layer 12 side.
The pressure-sensitive adhesive layer 16 for jigs may have a single-layer structure containing a pressure-sensitive adhesive component, or may have a multilayer structure in which layers containing a pressure-sensitive adhesive component are laminated on both surfaces of a sheet serving as a core material.
In the protective film forming composite sheet 1A, the first surface 11A of the base material 11 is a concave-convex surface.
Further, the adhesive layer 12 is provided on the first surface (concave-convex surface) 11a of the base material 11 so as to be in direct contact therewith. Therefore, the surface (in this specification, sometimes referred to as "second surface") 12b of the adhesive layer 12 on the substrate 11 side is a concave-convex surface.
In the protective film forming composite sheet 1A, the surface (in this specification, sometimes referred to as "second surface") 11b of the base material 11 opposite to the adhesive layer 12 may be either an uneven surface or a smooth surface (non-uneven surface, glossy surface), but is preferably a smooth surface. The second surface 11b of the base material 11 may be referred to as a surface (in this specification, sometimes referred to as "second surface") 10b of the support sheet 10 opposite to the protective film forming film 13 side.
The "uneven surface" and the "smooth surface" will be described in detail later.
The protective film forming composite sheet 1A shown in fig. 1 is used in the following manner: with the release film 15 removed, the back surface of the semiconductor wafer (not shown) is attached to the first surface 13a of the protective film forming film 13, and the upper surface of the surface 16a of the jig adhesive layer 16 is attached to a jig such as a ring frame.
Fig. 2 is a cross-sectional view schematically showing a composite sheet for forming a protective film and a supporting sheet according to another embodiment of the present invention.
In the drawings subsequent to fig. 2, the same components as those shown in the already described drawings are denoted by the same reference numerals as those in the already described drawings, and detailed description thereof is omitted.
The protective film forming composite sheet 1B shown here is the same as the protective film forming composite sheet 1A shown in fig. 1 except that the jig adhesive layer 16 is not provided. That is, in the composite sheet 1B for forming a protective film, the adhesive layer 12 is laminated on the first surface 11a of the base material 11, the film 13 for forming a protective film is laminated on the entire surface of the first surface 12a of the adhesive layer 12, and the release film 15 is laminated on the entire surface of the first surface 13a of the film 13 for forming a protective film.
In the protective film forming composite sheet 1B, the first surface 11a of the base material 11 is also a concave-convex surface.
Further, the adhesive layer 12 is provided on the first surface (concave-convex surface) 11a of the base material 11 so as to be in direct contact therewith. Therefore, the surface (second surface) 12b of the adhesive layer 12 on the substrate 11 side is a concave-convex surface.
In the composite sheet 1B for forming a protective film, the second surface 11B of the base material 11 (in other words, the second surface 10B of the support sheet 10) may be either an uneven surface or a smooth surface (non-uneven surface), but is preferably a smooth surface.
The protective film forming composite sheet 1B shown in fig. 2 is used in the following manner: with the release film 15 removed, the rear surface of the semiconductor wafer (not shown) is attached to a partial region on the central side of the first surface 13a of the protective film forming film 13, and a region near the peripheral edge is attached to a jig such as a ring frame.
Fig. 3 is a cross-sectional view schematically showing a composite sheet and a support sheet for forming a protective film according to still another embodiment of the present invention.
The protective film forming composite sheet 1C shown here is the same as the protective film forming composite sheet 1B shown in fig. 2 except that the shape of the protective film forming film is different. That is, the composite sheet 1C for forming a protective film includes a base material 11, an adhesive layer 12 provided on the base material 11, and a film 23 for forming a protective film provided on the adhesive layer 12. The support sheet 10 is a laminate of the base material 11 and the adhesive layer 12, in other words, the composite sheet 1C for forming a protective film has a structure in which the protective film forming film 23 is laminated on the first surface (surface on the protective film forming film 23 side) 10a of the support sheet 10. The protective film forming composite sheet 1C further includes a release film 15 on the protective film forming film 23.
In the composite sheet 1C for forming a protective film, the adhesive layer 12 is laminated on the first surface 11a of the base material 11, and the protective film forming film 23 is laminated on a part of the first surface 12a of the adhesive layer 12, that is, a region on the center side. The release film 15 is laminated on the area of the first surface 12a of the adhesive layer 12 where the protective film forming film 23 is not laminated and the surface 23a (upper surface and side surface) of the protective film forming film 23 which is not in contact with the adhesive layer 12.
In fig. 3, a reference numeral 23b denotes a surface (in this specification, sometimes referred to as a "second surface") of the protective film forming film 23 on the adhesive layer 12 side.
When the protective film forming composite sheet 1C is viewed from above, the surface area of the protective film forming film 23 is smaller than that of the adhesive layer 12, and has a circular shape, for example.
In the protective film forming composite sheet 1C, the first surface 11a of the base material 11 is also a concave-convex surface.
Further, the adhesive layer 12 is provided on the first surface (concave-convex surface) 11a of the base material 11 so as to be in direct contact therewith. Therefore, the surface (second surface) 12b of the adhesive layer 12 on the substrate 11 side is a concave-convex surface.
In the composite sheet 1C for forming a protective film, the second surface 11b of the base material 11 (in other words, the second surface 10b of the support sheet 10) may be either an uneven surface or a smooth surface (non-uneven surface), but is preferably a smooth surface.
The protective film forming composite sheet 1C shown in fig. 3 is used in the following manner: in a state where the release film 15 is removed, the back surface of the semiconductor wafer (not shown) is attached to the surface 23a of the protective film forming film 23, and the region of the first surface 12a of the adhesive layer 12 where the protective film forming film 23 is not laminated is attached to a jig such as a ring frame.
In the protective film forming composite sheet 1C shown in fig. 3, a pressure-sensitive adhesive layer (not shown) for a jig may be laminated on the first surface 12a of the pressure-sensitive adhesive layer 12 in the same manner as in the protective film forming composite sheet 1A shown in fig. 1, in the region where the protective film forming film 23 is not laminated. Like the composite sheet for forming a protective film shown in fig. 1, the composite sheet for forming a protective film 1C provided with the adhesive layer for a jig is used by attaching the upper surface of the adhesive layer for a jig to a jig such as a ring frame.
In this way, the composite sheet for forming a protective film can be provided with the adhesive layer for a jig regardless of the form of the support sheet and the film for forming a protective film. However, as shown in fig. 1, a composite sheet for forming a protective film including a pressure-sensitive adhesive layer for a jig on a film for forming a protective film is generally preferable.
The composite sheet for forming a protective film according to one embodiment of the present invention is not limited to the composite sheet for forming a protective film shown in fig. 1 to 3, and may be a composite sheet in which a part of the composite sheet for forming a protective film shown in fig. 1 to 3 is modified or deleted, or may be a composite sheet in which another structure is further added to the composite sheet for forming a protective film described above, as long as the effects of the present invention are not impaired.
For example, in the composite sheet for forming a protective film shown in fig. 1 to 3, an intermediate layer may be provided between the base material 11 and the adhesive layer 12. That is, in the composite sheet for forming a protective film of the present invention, the support sheet may be formed by sequentially laminating the base material, the intermediate layer, and the adhesive layer in the thickness direction thereof. As the intermediate layer, an arbitrary intermediate layer may be selected according to the purpose.
The protective film-forming composite sheet shown in fig. 1 to 3 may be provided with a layer other than the intermediate layer at any position.
In the composite sheet for forming a protective film, a part of a gap may be generated between the release film and the layer in direct contact with the release film.
In the composite sheet for forming a protective film, the size and shape of each layer can be arbitrarily adjusted according to the purpose.
As shown in fig. 1 to 3, in the composite sheet for forming a protective film, it is preferable that the adhesive layer is in direct contact with the uneven surface (first surface) of the substrate, in other words, it is preferable that the adhesive layer is laminated on the substrate without providing an intermediate layer between the substrate and the adhesive layer.
In the composite sheet for forming a protective film, it is preferable that the protective film forming film is in direct contact with the first surface of the adhesive layer, in other words, it is preferable that no other layer is provided between the adhesive layer and the protective film forming film, and the protective film forming film is in direct contact with the adhesive layer and is laminated on the adhesive layer.
Further, it is more preferable to construct the protective film forming composite sheet by: the members satisfying the above conditions at the same time, that is, the base material, the adhesive layer, and the protective film forming film are laminated in order in their thickness directions so as to be in direct contact with each other.
Preferably, the support sheet is transparent.
The support sheet may be colored according to the purpose, and may be vapor-deposited with other layers.
For example, when the protective film forming film is energy ray curable, it is preferable that the support sheet transmits energy rays.
In the present specification, the term "energy ray" refers to an energy ray having energy quanta in an electromagnetic wave or a charged particle beam, and examples thereof include ultraviolet rays, radiation rays, and electron beams. The ultraviolet rays can be irradiated by using, for example, a high-pressure mercury lamp, a fusion lamp (fusion lamp), a xenon lamp, a black light lamp, an LED lamp, or the like as an ultraviolet source. The electron beam can irradiate an electron beam generated by an electron beam accelerator or the like.
In the present specification, "energy ray curability" refers to a property that is cured by irradiation with energy rays, and "non-energy ray curability" refers to a property that is not cured even when energy rays are irradiated.
In the support sheet, the transmittance of light having a wavelength of 375nm is preferably 30% or more, more preferably 50% or more, and particularly preferably 70% or more. When the light transmittance is in such a range, the curing degree of the protective film forming film is further improved by irradiation of the protective film forming film with energy rays (ultraviolet rays) through the support sheet.
In the support sheet, the upper limit value of the transmittance of light having a wavelength of 375nm is not particularly limited. For example, the transmittance of light may be 95% or less.
In the support sheet, the transmittance of light having a wavelength of 532nm is preferably 30% or more, more preferably 50% or more, and particularly preferably 70% or more. When the light transmittance is in such a range, printing can be performed more clearly when the protective film forming film or the protective film is irradiated with laser light through the support sheet and printed.
In the support sheet, the upper limit value of the transmittance of light having a wavelength of 532nm is not particularly limited. For example, the transmittance of light may be 95% or less.
In the support sheet, the transmittance of light having a wavelength of 1064nm is preferably 30% or more, more preferably 50% or more, and particularly preferably 70% or more. When the light transmittance is in such a range, printing can be performed more clearly when the protective film forming film or the protective film is irradiated with laser light through the support sheet and printed.
In the support sheet, the upper limit value of the transmittance of light having a wavelength of 1064nm is not particularly limited. For example, the transmittance of light may be 95% or less.
The transmission clarity of the support sheet is preferably 30 or more, more preferably 100 or more, and particularly preferably 200 or more. When the transmission clarity is in such a range, it is easier to confirm the peeling of the protective film forming film, the defects of printing, and the like via the support sheet.
The transmission clarity of the support sheet is not particularly limited. For example, the transmission clarity may be 430 or less.
The transmission clarity of the support sheet can be measured in accordance with JIS K7374-2007.
Next, each layer constituting the support sheet and the protective film forming composite sheet will be described in detail.
Base material
The substrate is sheet-shaped or film-shaped and has a concave-convex surface.
In the present specification, the term "uneven surface" refers to a surface having a maximum height roughness Rz of 0.01 μm or more as defined in JIS B0601:2013.
The "smooth surface" is a surface having high smoothness, which is not an uneven surface, and is sometimes referred to as a "non-uneven surface" or a "bright surface". For example, the smooth surface also includes a surface having an extremely small roughness, which is not smaller than the roughness of the surface.
In the substrate, only one surface may be a concave-convex surface, or both surfaces may be concave-convex surfaces, but it is preferable that only one surface be a concave-convex surface. In other words, in the base material, it is preferable that only one surface is a smooth surface. In the support sheet, the uneven surface of the base material is a surface on the side having the adhesive layer.
The substrate may be composed of one layer (single layer) or two or more layers, and when composed of a plurality of layers, the layers may be the same as or different from each other, and the combination of the layers is not particularly limited.
When the substrate is composed of a plurality of layers, the surface of the outermost layer (the surface closest to the adhesive layer or the two surfaces closest to and farthest from the adhesive layer) among the plurality of layers is the uneven surface.
In this specification, not only the case of the base material, "the plurality of layers may be the same as each other or may be different from each other" means "all the layers may be the same, all the layers may be different from each other, or only a part of the layers may be the same" and further "the plurality of layers are different from each other" means "at least one of the constituent materials and thicknesses of the respective layers is different from each other".
The maximum height roughness (Rz) measured in accordance with JIS B0601:2013 is preferably 0.01 to 8 μm, more preferably 0.1 to 7 μm, particularly preferably 0.5 to 6 μm, on the uneven surface (first surface) of the substrate on the side provided with the adhesive layer. By setting the Rz of the base material to the lower limit value or more, occurrence of defects when the base material is wound and unwound individually into a roll can be suppressed. Further, in the production process of the support sheet or the composite sheet for forming the protective film, the occurrence of defects in the laminate including the base material during winding and unwinding can be suppressed as well. On the other hand, when the Rz of the base material is equal to or less than the upper limit value, the lamination property of the adhesive layer and the film for forming a protective film and the printing visibility of the protective film or the film for forming a protective film across the support sheet are both improved.
When both surfaces of the substrate are uneven surfaces, the uneven surfaces of the two surfaces may be the same or different from each other.
Examples of the constituent material of the base material include various resins.
Examples of the resin include polyethylene such as Low Density Polyethylene (LDPE), linear Low Density Polyethylene (LLDPE), and High Density Polyethylene (HDPE); polyolefins other than polyethylene, such as polypropylene, polybutene, polybutadiene, polymethylpentene, and norbornene resin; ethylene-vinyl acetate copolymers, ethylene- (meth) acrylic acid ester copolymers, ethylene-norbornene copolymers and other ethylene copolymers (copolymers obtained by using ethylene as a monomer); vinyl chloride resins (resins obtained by using vinyl chloride as a monomer) such as polyvinyl chloride and vinyl chloride copolymers; a polystyrene; polycycloolefins; polyesters such as polyethylene terephthalate, polyethylene naphthalate, polybutylene terephthalate, polyethylene isophthalate, polyethylene 2, 6-naphthalate, and wholly aromatic polyesters each having an aromatic ring group in all the structural units; copolymers of two or more of the polyesters; poly (meth) acrylates; polyurethane; a urethane acrylate; polyimide; a polyamide; a polycarbonate; a fluororesin; polyacetal; modified polyphenylene ether; polyphenylene sulfide; polysulfone; polyetherketone, and the like.
Examples of the resin include polymer blends such as a mixture of the polyester and a resin other than the polyester. The amount of the resin other than the polyester in the polymer blend of the polyester and the resin other than the polyester is preferably a small amount.
Examples of the resin include crosslinked resins obtained by crosslinking one or more of the above resins; modified resins such as ionomers of one or two or more of the above resins exemplified are used.
In the present specification, "(meth) acrylic acid" is a concept including "acrylic acid" and "methacrylic acid". Similar terms to (meth) acrylic acid are also used, for example, "(meth) acryl" is a concept including "acryl" and "methacryl", and "(meth) acrylate" is a concept including "acrylate" and "methacrylate".
The resin constituting the base material may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
The thickness of the substrate is preferably in the range of 50 to 300. Mu.m, more preferably in the range of 60 to 150. Mu.m. By setting the thickness of the base material within such a range, the flexibility of the composite sheet for forming a protective film and the adhesion to a semiconductor wafer or a semiconductor chip are further improved.
As described above, since the substrate has the uneven surface, the thickness thereof varies depending on the portion of the substrate. Therefore, the minimum value of the thickness of the base material may be equal to or greater than the lower limit value, or the maximum value of the thickness of the base material may be equal to or less than the upper limit value.
The "thickness of the substrate" refers to the thickness of the entire substrate, and for example, the thickness of the substrate composed of a plurality of layers refers to the total thickness of all layers constituting the substrate.
The thickness of the substrate is measured, for example, by observing the side or cross section of the substrate using a Scanning Electron Microscope (SEM).
The cross section of the base material can be formed by the same method as in the case of the cross section of the test piece in which the support sheet and the composite sheet for forming a protective film are formed.
For example, by the method described above, a test piece is cut from a plurality of positions (for example, 5 positions) of the support sheet or the composite sheet for forming a protective film, and in the test piece, the minimum value and the maximum value of the thickness of the base material are obtained, and the average value of these minimum values and the average value of the maximum values are further obtained from these values, and in this case, the average value of the minimum values may be equal to or higher than the lower limit value of the thickness of the base material, and the average value of the maximum values may be equal to or lower than the upper limit value of the thickness of the base material.
In addition to the main constituent materials such as the resin, the base material may contain various known additives such as a filler, a colorant, an antistatic agent, an antioxidant, an organic lubricant, a catalyst, and a softener (plasticizer).
Preferably, the substrate is transparent.
The substrate may be colored according to the purpose, and may be vapor-deposited with other layers.
For example, when the protective film forming film is energy ray curable, it is preferable that the base material transmits energy rays.
In order to improve the adhesion between the substrate and the layer in direct contact with the adhesive layer or the like provided thereon, the substrate may be subjected to an oxidation treatment such as corona discharge treatment, electron beam irradiation treatment, plasma treatment, ozone-ultraviolet irradiation treatment, flame treatment, chromic acid treatment, hot air treatment, or the like on the surface.
Further, the substrate may be a substrate having a surface subjected to primer treatment.
In addition, when the antistatic coating layer and the protective film-forming composite sheet are laminated and stored, the substrate may have a layer or the like for preventing the adhesion of the substrate to another sheet or the adhesion of the substrate to a suction table.
The substrate can be produced by a known method. For example, a resin-containing substrate can be produced by molding a resin composition containing the resin.
When a substrate having no uneven surface (in other words, a substrate having smooth surfaces on both surfaces) is used, the smooth surface of the substrate may be subjected to an uneven treatment.
The asperity treatment can be performed by a known method. For example, a metal roller or a metal plate having an uneven surface is used, and the uneven surface of the metal roller or the metal plate is pressed against the smooth surface of the substrate, whereby the smooth surface of the substrate can be roughened. In this case, the heated metal roller or metal plate is preferably pressed against the smooth surface of the base material. The smooth surface of the substrate may be roughened by sandblasting, solvent treatment, or the like.
Adhesive layer
The adhesive layer is in the form of a sheet or film.
In the adhesive layer, at least the surface on the substrate side is generally uneven, regardless of the presence or absence of an intermediate layer between the substrate and the adhesive layer, due to the influence of the uneven surface of the substrate.
The adhesive layer may be formed of one layer (single layer) or two or more layers, and when the adhesive layer is formed of a plurality of layers, the layers may be the same as or different from each other, and the combination of the layers is not particularly limited.
When the adhesive layer is composed of a plurality of layers, the surface of the outermost layer (the surface closest to the substrate) among the plurality of layers is the uneven surface.
Here, the substrate and the adhesive layer will be described in further detail with reference to the drawings.
Fig. 4 is an enlarged cross-sectional view schematically showing a composite sheet for forming a protective film according to an embodiment of the present invention. Here, a protective film forming composite sheet 1A shown in fig. 1 will be described as an example. In fig. 4, the release film is not shown.
As described above, the first surface 11a of the substrate 11 is a concave-convex surface. The adhesive layer 12 is provided on the first surface (concave-convex surface) 11a of the base material 11 so as to be in direct contact therewith, and the second surface 12b of the adhesive layer 12 easily follows the first surface 11a of the base material 11. Therefore, the second surface 12b of the adhesive layer 12 is also uneven.
Thickness T of adhesive layer 12 a It is not necessarily required that the adhesive layer 12 varies depending on the position. Here, with the symbol T a1 Representing the minimum value of the thickness of the adhesive layer 12, denoted by the symbol T a2 The maximum value of the thickness of the adhesive layer 12 is shown.
Cutting test pieces from 5 of the composite sheet 1A for forming a protective film, forming cross sections in the 5 test pieces, and obtaining minimum values T of the thickness of the adhesive layer in the newly formed cross sections, respectively a1 Maximum T a2 . And according to at least 5T a1 When the average value (the S value) is obtained from the values of (a) the average value is preferably 1.5 μm or more, based on at least 5T a2 When the average value (the L value) is obtained, the average value is preferably 9 μm or less.
As described above, the test piece can be cut from the protective film forming composite sheet 1A, the cross section in the test piece can be formed, and the minimum value T of the thickness of the adhesive layer can be measured in the same manner as in the case of cutting the test piece from the support sheet that does not constitute the protective film forming composite sheet a1 Maximum T a2 。
The enlarged cross-sectional view of the support sheet that does not constitute the composite sheet for forming a protective film is the same as the view in which the protective film forming film 13 is omitted in fig. 4.
As the composite sheet 1A for forming a protective film, there is shown a composite sheet for forming a protective film in which a region (in this specification, sometimes referred to as "non-bonded region") 91 where the base material 11 and the adhesive layer 12 are not bonded is present between the base material 11 and the adhesive layer 12. However, even if the composite sheet 1A for forming a protective film has such a non-bonded region 91, the composite sheet 1A for forming a protective film, in which the size of the non-bonded region 91 in the thickness direction of the composite sheet 1A for forming a protective film is, for example, 0.5 μm or less, has good lamination properties between the base material 11 and the adhesive layer 12, and thus, it can be said that the composite sheet has good characteristics.
In the present specification, the "size of the non-bonded region in the thickness direction of the composite sheet for forming a protective film" refers to "interlayer distance between two adjacent layers in the composite sheet for forming a protective film" in the thickness direction of the sheet, and may be simply referred to as "interlayer distance". For example, the "size of the non-bonded region 91 in the thickness direction of the protective film-forming composite sheet 1A" refers to "the interlayer distance between the base material 11 and the adhesive layer 12 in the thickness direction of the sheet 1A".
When the size (interlayer distance) of the non-bonded region at 1 varies, the maximum value thereof is used as the size (interlayer distance) of the non-bonded region.
The size (interlayer distance) of the non-bonded region can be measured, for example, in the same manner as in the case of measuring the thickness of the adhesive layer. That is, a cross section can be formed in the test piece of the composite sheet for forming a protective film in the same manner as when the thickness of the adhesive layer is obtained, and the size of the non-bonded region can be obtained in the cross section. Alternatively, a cross section may be formed on the protective film-forming composite sheet itself without producing the test piece, and the size of the non-bonded region may be determined on the cross section.
The size of the non-bonded region 91 (the interlayer distance) may be, for example, any of 0.4 μm or less, 0.3 μm or less, 0.2 μm or less, and 0.1 μm or less.
In the protective film forming composite sheet 1A, the non-bonded region 91 may be completely absent. In the present specification, when the size of the non-bonded region between the substrate 11 and the adhesive layer 12 is 0.05 μm or more, the non-bonded region is considered to be present, and when the non-bonded region 91 is completely absent, the size (interlayer distance) of the non-bonded region 91 may be referred to as 0 μm.
The base material and the adhesive layer are described here by way of example of the composite sheet 1A for forming a protective film, but when the composite sheet for forming a protective film is the composite sheet for forming a protective film 1B, the composite sheet for forming a protective film 1C, or the like of another embodiment, the base material and the adhesive layer are the same as in the case of the composite sheet for forming a protective film 1A.
The S value of the adhesive layer is not particularly limited as long as the effect of the present invention is not impaired, but is preferably 1.5 μm or more and less than 9 μm, more preferably 1.7 μm or more, still more preferably 1.9 μm or more, and may be, for example, any of 2.3 μm or more, 2.7 μm or more, 3.1 μm or more, and 3.5 μm or more. When the S value is equal to or greater than the lower limit, the lamination of the adhesive layer and the protective film-forming film is further improved.
On the other hand, the adhesive layer may have an S value of 8 μm or less, for example. Such an adhesive layer can be formed more easily.
The S value of the adhesive layer can be appropriately adjusted within a range set by arbitrarily combining the above-described preferable lower limit value and upper limit value. For example, the S value of the adhesive layer is preferably 1.5 to 8. Mu.m, more preferably 1.7 to 8. Mu.m, still more preferably 1.9 to 8. Mu.m, and may be in the range of, for example, 2.3 to 8. Mu.m, 2.7 to 8. Mu.m, 3.1 to 8. Mu.m, or 3.5 to 8. Mu.m. However, these ranges are only one example of the S value of the adhesive layer.
The L value of the adhesive layer is not particularly limited as long as the effect of the present invention is not impaired, and is preferably 9 μm or less and more than 1.5. Mu.m, more preferably 8.6 μm or less, and even more preferably 8.3 μm or less, and may be, for example, any one of 7.7 μm or less, 7.3 μm or less, 6.9 μm or less and 6.5 μm or less. When the L value is equal to or less than the upper limit value, the protective film or the protective film forming film can be more favorably seen in printing through the support sheet.
On the other hand, the L value of the adhesive layer may be, for example, 2.5 μm or more. Such an adhesive layer can be formed more easily.
The L value of the adhesive layer can be appropriately adjusted within a range set by arbitrarily combining the above-described preferable lower limit value and upper limit value. For example, the L value of the adhesive layer is preferably 2.5 to 9. Mu.m, more preferably 2.5 to 8.6. Mu.m, still more preferably 2.5 to 8.3. Mu.m, and may be in any of the ranges of 2.5 to 7.7. Mu.m, 2.5 to 7.3. Mu.m, 2.5 to 6.9. Mu.m, and 2.5 to 6.5. Mu.m.
The thickness of the adhesive layer (e.g., T a ) The conditions of the S value and the L value are not particularly limited, but are preferably satisfied.
For example, the thickness of the adhesive layer may be 1.5 to 9 μm.
The "thickness of the adhesive layer" refers to the thickness of the entire adhesive layer, and for example, the thickness of the adhesive layer composed of a plurality of layers refers to the total thickness of all the layers constituting the adhesive layer. From such a point of view, the minimum and maximum values of the thickness of the adhesive layer are defined.
The adhesive layer contains an adhesive.
Examples of the adhesive include adhesive resins such as acrylic resins, urethane resins, rubber resins, silicone resins, epoxy resins, polyvinyl ethers, polycarbonates, and ester resins, and acrylic resins are preferable.
In the present specification, the term "adhesive resin" is a concept including a resin having an adhesive property and a resin having an adhesive property, and includes, for example, not only a resin having an adhesive property itself but also a resin exhibiting an adhesive property by being used together with other components such as an additive, a resin exhibiting an adhesive property due to the presence of a trigger such as heat or water, or the like.
Preferably the adhesive layer is transparent.
The adhesive layer may be colored according to the purpose.
For example, when the protective film forming film is energy ray curable, it is preferable that the adhesive layer transmits energy rays.
The adhesive layer may be formed using an energy ray-curable adhesive or a non-energy ray-curable adhesive. The adhesive layer formed using the energy ray-curable adhesive can easily adjust physical properties before and after curing.
Adhesive composition
The adhesive layer can be formed using an adhesive composition containing an adhesive. For example, the adhesive composition is applied to the surface of the adhesive layer to be formed, and dried as necessary, whereby the adhesive layer can be formed at the target site. A more specific method of forming the adhesive layer will be described in detail later together with a method of forming other layers. The content ratio of the components in the adhesive composition that do not vaporize at ordinary temperature to each other is generally the same as the content ratio of the components in the adhesive layer to each other.
In the present specification, the term "normal temperature" refers to a temperature at which cooling or heating is not particularly performed, that is, a normal temperature, and examples thereof include a temperature of 15 to 25 ℃.
The adhesive composition may be applied by a known method, and examples thereof include various coating machines such as an air knife coater, a blade coater, a bar coater, a gravure coater, a roll knife coater, a curtain coater, a die coater, a blade coater, a screen coater (screen coater), a meyer bar coater, and a kiss coater.
The drying condition of the adhesive composition is not particularly limited, but when the adhesive composition contains a solvent described later, it is preferable to perform heat drying. The adhesive composition containing the solvent is preferably dried at 70 to 130 ℃ for 10 seconds to 5 minutes, for example.
When the adhesive layer is energy ray-curable, examples of the adhesive composition containing an energy ray-curable adhesive, that is, an energy ray-curable adhesive composition, include: an adhesive composition (I-1) comprising a non-energy ray-curable adhesive resin (I-1 a) (hereinafter, sometimes abbreviated as "adhesive resin (I-1 a)") and an energy ray-curable compound; an adhesive composition (I-2) comprising an energy ray-curable adhesive resin (I-2 a) (hereinafter, sometimes abbreviated as "adhesive resin (I-2 a)") having an unsaturated group introduced into a side chain of the non-energy ray-curable adhesive resin (I-1 a); an adhesive composition (I-3) containing the adhesive resin (I-2 a) and an energy ray-curable compound.
< adhesive composition (I-1) >
As described above, the adhesive composition (I-1) contains the non-energy ray-curable adhesive resin (I-1 a) and the energy ray-curable compound.
[ adhesive resin (I-1 a) ]
Preferably, the adhesive resin (I-1 a) is an acrylic resin.
Examples of the acrylic resin include acrylic polymers having at least a structural unit derived from an alkyl (meth) acrylate.
The structural units of the acrylic resin may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
Examples of the alkyl (meth) acrylate include alkyl (meth) acrylates having 1 to 20 carbon atoms in the alkyl group constituting the alkyl ester, and the alkyl group is preferably linear or branched.
Examples of alkyl (meth) acrylates include methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, sec-butyl (meth) acrylate, tert-butyl (meth) acrylate, pentyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, isooctyl (meth) acrylate, n-octyl (meth) acrylate, n-nonyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, undecyl (meth) acrylate, dodecyl (also referred to as lauryl (meth) acrylate, tridecyl (meth) acrylate, tetradecyl (also referred to as myristyl (meth) acrylate, pentadecyl (meth) acrylate, hexadecyl (also referred to as palmityl (meth) acrylate), heptadecyl (meth) acrylate, octadecyl (meth) acrylate, and nonadecyl (meth) acrylate, eicosyl (meth) acrylate, and the like.
From the point of improving the adhesive force of the adhesive layer, it is preferable that the acrylic polymer has a structural unit derived from an alkyl (meth) acrylate having 4 or more carbon atoms in the alkyl group. The number of carbon atoms of the alkyl group is preferably 4 to 12, more preferably 4 to 8, from the point of further improving the adhesive force of the adhesive layer. Further, the alkyl (meth) acrylate in which the alkyl group has 4 or more carbon atoms is preferably an alkyl acrylate.
Preferably, the acrylic polymer further has a structural unit derived from a functional group-containing monomer in addition to a structural unit derived from an alkyl (meth) acrylate.
Examples of the functional group-containing monomer include a functional group-containing monomer in which the functional group reacts with a crosslinking agent described later to form a crosslinking starting point, or a functional group-containing monomer in which the functional group reacts with an unsaturated group in an unsaturated group-containing compound described later to introduce an unsaturated group into a side chain of an acrylic polymer.
Examples of the functional group in the functional group-containing monomer include a hydroxyl group, a carboxyl group, an amino group, and an epoxy group.
That is, examples of the functional group-containing monomer include a hydroxyl group-containing monomer, a carboxyl group-containing monomer, an amino group-containing monomer, an epoxy group-containing monomer, and the like.
Examples of the hydroxyl group-containing monomer include hydroxyalkyl (meth) acrylates such as hydroxymethyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, and 4-hydroxybutyl (meth) acrylate; and non (meth) acrylic unsaturated alcohols (unsaturated alcohols having no (meth) acryl skeleton) such as vinyl alcohol and allyl alcohol.
Examples of the carboxyl group-containing monomer include ethylenically unsaturated monocarboxylic acids (monocarboxylic acids having an ethylenically unsaturated bond) such as (meth) acrylic acid and crotonic acid; ethylenically unsaturated dicarboxylic acids (dicarboxylic acids having an ethylenically unsaturated bond) such as fumaric acid, itaconic acid, maleic acid, and citraconic acid; anhydrides of the ethylenically unsaturated dicarboxylic acids; and carboxyalkyl (meth) acrylates such as 2-carboxyethyl methacrylate.
Preferably, the functional group-containing monomer is a hydroxyl group-containing monomer, a carboxyl group-containing monomer, and more preferably a hydroxyl group-containing monomer.
The functional group-containing monomer constituting the acrylic polymer may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the acrylic polymer, the content of the structural unit derived from the functional group-containing monomer is preferably 1 to 35% by mass, more preferably 2 to 30% by mass, and particularly preferably 3 to 27% by mass, relative to the total amount of the structural units.
In addition to having structural units derived from alkyl (meth) acrylate and structural units derived from functional group-containing monomers, the acrylic polymer may further have structural units derived from other monomers.
The other monomer is not particularly limited as long as it can be copolymerized with an alkyl (meth) acrylate or the like.
Examples of the other monomer include styrene, α -methylstyrene, vinyltoluene, vinyl formate, vinyl acetate, acrylonitrile, and acrylamide.
The other monomers constituting the acrylic polymer may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
The acrylic polymer can be used as the above-mentioned non-energy ray-curable adhesive resin (I-1 a).
On the other hand, a product obtained by reacting an unsaturated group-containing compound having an energy ray-polymerizable unsaturated group (energy ray-polymerizable group) with a functional group in the acrylic polymer can be used as the above-mentioned energy ray-curable adhesive resin (I-2 a).
The adhesive resin (I-1 a) contained in the adhesive composition (I-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
The content of the adhesive resin (I-1 a) in the adhesive composition (I-1) is preferably 5 to 99% by mass, more preferably 10 to 95% by mass, and particularly preferably 15 to 90% by mass.
[ energy ray-curable Compound ]
The energy ray-curable compound contained in the adhesive composition (I-1) includes a monomer or oligomer having an energy ray-polymerizable unsaturated group and curable by irradiation with an energy ray.
Examples of the monomer in the energy ray-curable compound include polyvalent (meth) acrylates such as trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 1, 4-butanediol di (meth) acrylate, and 1, 6-hexanediol (meth) acrylate; urethane (meth) acrylate; polyester (meth) acrylates; polyether (meth) acrylates; epoxy (meth) acrylates, and the like.
Examples of the oligomer in the energy ray-curable compound include oligomers obtained by polymerizing the monomers exemplified above.
In terms of having a large molecular weight and being less likely to reduce the storage modulus of the adhesive layer, the energy ray-curable compound is preferably urethane (meth) acrylate or urethane (meth) acrylate oligomer.
The energy ray-curable compound contained in the adhesive composition (I-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-1), the content of the energy ray-curable compound is preferably 1 to 95% by mass, more preferably 5 to 90% by mass, and particularly preferably 10 to 85% by mass.
[ Cross-linking agent ]
When the acrylic polymer having a structural unit derived from a functional group-containing monomer in addition to a structural unit derived from an alkyl (meth) acrylate is used as the adhesive resin (I-1 a), it is preferable that the adhesive composition (I-1) further contains a crosslinking agent.
The crosslinking agent crosslinks the adhesive resins (I-1 a) to each other, for example, by reacting with the functional groups.
Examples of the crosslinking agent include isocyanate crosslinking agents (crosslinking agents having an isocyanate group) such as toluene diisocyanate, hexamethylene diisocyanate, xylylene diisocyanate, and adducts of these diisocyanates; epoxy-based crosslinking agents (crosslinking agents having a glycidyl group) such as ethylene glycol glycidyl ether; aziridine-based crosslinking agents (crosslinking agents having an aziridinyl group) such as hexa [1- (2-methyl) -aziridinyl ] triphosphatriazine; metal chelate crosslinking agents (crosslinking agents having a metal chelate structure) such as aluminum chelates; isocyanurate-based crosslinking agents (crosslinking agents having an isocyanuric acid skeleton), and the like.
The crosslinking agent is preferably an isocyanate-based crosslinking agent from the viewpoint of improving the cohesive force of the adhesive agent and thereby improving the adhesive force of the adhesive layer, from the viewpoint of easy availability, and the like.
The crosslinking agent contained in the adhesive composition (I-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-1), the content of the crosslinking agent is preferably 0.01 to 50 parts by mass, more preferably 0.1 to 20 parts by mass, and particularly preferably 0.3 to 15 parts by mass, relative to 100 parts by mass of the adhesive resin (I-1 a).
[ photopolymerization initiator ]
The adhesive composition (I-1) may further contain a photopolymerization initiator. Even if the adhesive composition (I-1) containing the photopolymerization initiator is irradiated with energy rays of relatively low energy such as ultraviolet rays, it sufficiently undergoes curing reaction.
Examples of the photopolymerization initiator include benzoin compounds such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzoin benzoic acid, benzoin methyl benzoate, and benzoin dimethyl ketal; acetophenone compounds such as acetophenone, 2-hydroxy-2-methyl-1-phenyl-propan-1-one, 2-dimethoxy-1, 2-diphenylethan-1-one, and the like; acylphosphine oxide compounds such as phenyl bis (2, 4, 6-trimethylbenzoyl) phosphine oxide and 2,4, 6-trimethylbenzoyl diphenyl phosphine oxide; sulfides such as benzyl phenyl sulfide and tetramethyl thiuram monosulfide; alpha-ketol compounds such as 1-hydroxycyclohexyl phenyl ketone; azo compounds such as azobisisobutyronitrile; a titanocene compound such as titanocene; thioxanthone compounds such as thioxanthone; a peroxide compound; diketone compounds such as butanedione; benzil; a dibenzoyl group; benzophenone; 2, 4-diethylthioxanthone; 1, 2-diphenylmethane; 2-hydroxy-2-methyl-1- [4- (1-methylvinyl) phenyl ] propanone; 2-chloroanthraquinone, and the like.
As the photopolymerization initiator, for example, a quinone compound such as 1-chloroanthraquinone can be used; amine and the like.
The photopolymerization initiator contained in the adhesive composition (I-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-1), the content of the photopolymerization initiator is preferably 0.01 to 20 parts by mass, more preferably 0.03 to 10 parts by mass, and particularly preferably 0.05 to 5 parts by mass, relative to 100 parts by mass of the content of the energy ray-curable compound.
[ other additives ]
The adhesive composition (I-1) may further contain other additives than any of the above components within a range not impairing the effects of the present invention.
Examples of the other additives include known additives such as antistatic agents, antioxidants, softeners (plasticizers), fillers (fillers), rust inhibitors, colorants (pigments and dyes), sensitizers, tackifiers, reaction retarders, and crosslinking accelerators (catalysts).
The reaction retarder is an additive for inhibiting an unintended crosslinking reaction in the adhesive composition (I-1) during storage, for example, by the action of a catalyst mixed in the adhesive composition (I-1). Examples of the reaction retarder include a reaction retarder that forms a chelate complex (chelate complex) with a chelate for a catalyst, and more specifically, a reaction retarder having two or more carbonyl groups (-C (=o) -) in one molecule.
The other additives contained in the adhesive composition (I-1) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
The content of the other additives in the adhesive composition (I-1) is not particularly limited, as long as it is appropriately selected according to the kind thereof.
[ solvent ]
The adhesive composition (I-1) may contain a solvent. By containing the solvent in the adhesive composition (I-1), the coating suitability of the adhesive composition to the surface to be coated can be improved.
Preferably, the solvent is an organic solvent, and examples of the organic solvent include ketones such as methyl ethyl ketone and acetone; esters (carboxylic acid esters) such as ethyl acetate; ethers such as tetrahydrofuran and dioxane; aliphatic hydrocarbons such as cyclohexane and n-hexane; aromatic hydrocarbons such as toluene and xylene; alcohols such as 1-propanol and 2-propanol.
The solvent may be used in the adhesive composition (I-1) without removing the solvent used for producing the adhesive resin (I-1 a) from the adhesive resin (I-1 a), or may be added separately in the adhesive composition (I-1) with the same or different solvent as the solvent used for producing the adhesive resin (I-1 a).
The solvent contained in the adhesive composition (I-1) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-1), the content of the solvent is not particularly limited, and may be appropriately adjusted.
< adhesive composition (I-2) >
As described above, the adhesive composition (I-2) contains the energy ray-curable adhesive resin (I-2 a) having an unsaturated group introduced into a side chain of the non-energy ray-curable adhesive resin (I-1 a).
[ adhesive resin (I-2 a) ]
The adhesive resin (I-2 a) is obtained, for example, by reacting an unsaturated group-containing compound having an energy ray polymerizable unsaturated group with a functional group in the adhesive resin (I-1 a).
The unsaturated group-containing compound is a compound having, in addition to the energy ray-polymerizable unsaturated group, a group capable of bonding to the adhesive resin (I-1 a) by reacting with a functional group in the adhesive resin (I-1 a).
Examples of the energy ray-polymerizable unsaturated group include a (meth) acryloyl group, a vinyl group (also referred to as an ethylene group), an allyl group (also referred to as a 2-propenyl group), and the like, and a (meth) acryloyl group is preferable.
Examples of the group capable of bonding to the functional group in the adhesive resin (I-1 a) include an isocyanate group and a glycidyl group capable of bonding to a hydroxyl group or an amino group, and a hydroxyl group and an amino group capable of bonding to a carboxyl group or an epoxy group.
Examples of the unsaturated group-containing compound include (meth) acryloyloxyethyl isocyanate, (meth) acryloyloxyisocyanate, and glycidyl (meth) acrylate.
The adhesive resin (I-2 a) contained in the adhesive composition (I-2) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-2), the content of the adhesive resin (I-2 a) is preferably 5 to 99% by mass, more preferably 10 to 95% by mass, and particularly preferably 10 to 90% by mass, relative to the total mass of the adhesive composition (I-2).
[ Cross-linking agent ]
For example, when the acrylic polymer having a structural unit derived from a functional group-containing monomer as in the adhesive resin (I-1 a) is used as the adhesive resin (I-2 a), the adhesive composition (I-2) may further contain a crosslinking agent.
The crosslinking agent in the adhesive composition (I-2) may be the same as the crosslinking agent in the adhesive composition (I-1).
The crosslinking agent contained in the adhesive composition (I-2) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-2), the content of the crosslinking agent is preferably 0.01 to 50 parts by mass, more preferably 0.1 to 20 parts by mass, and particularly preferably 0.3 to 15 parts by mass, relative to 100 parts by mass of the content of the adhesive resin (I-2 a).
[ photopolymerization initiator ]
The adhesive composition (I-2) may further contain a photopolymerization initiator. Even if the adhesive composition (I-2) containing the photopolymerization initiator is irradiated with energy rays of relatively low energy such as ultraviolet rays, it sufficiently undergoes curing reaction.
The photopolymerization initiator in the adhesive composition (I-2) may be the same as the photopolymerization initiator in the adhesive composition (I-1).
The photopolymerization initiator contained in the adhesive composition (I-2) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-2), the content of the photopolymerization initiator is preferably 0.01 to 20 parts by mass, more preferably 0.03 to 10 parts by mass, and particularly preferably 0.05 to 5 parts by mass, relative to 100 parts by mass of the adhesive resin (I-2 a).
[ other additives ]
The adhesive composition (I-2) may further contain other additives than any of the above components within a range not impairing the effects of the present invention.
The other additives in the adhesive composition (I-2) may be the same as those in the adhesive composition (I-1).
The other additives contained in the adhesive composition (I-2) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
The content of the other additives in the adhesive composition (I-2) is not particularly limited, as long as it is appropriately selected according to the kind thereof.
[ solvent ]
The adhesive composition (I-2) may also contain a solvent for the same purpose as in the case of the adhesive composition (I-1).
The solvent in the adhesive composition (I-2) may be the same as the solvent in the adhesive composition (I-1).
The solvent contained in the adhesive composition (I-2) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-2), the content of the solvent is not particularly limited, and may be appropriately adjusted.
< adhesive composition (I-3) >
As described above, the adhesive composition (I-3) contains the adhesive resin (I-2 a) and an energy ray-curable compound.
In the adhesive composition (I-3), the content of the adhesive resin (I-2 a) is preferably 5 to 99% by mass, more preferably 10 to 95% by mass, and particularly preferably 15 to 90% by mass, relative to the total mass of the adhesive composition (I-3).
[ energy ray-curable Compound ]
The energy ray-curable compound contained in the adhesive composition (I-3) includes monomers and oligomers having an energy ray-polymerizable unsaturated group and curable by irradiation with an energy ray, and includes the same energy ray-curable compound as the energy ray-curable compound contained in the adhesive composition (I-1).
The energy ray-curable compound contained in the adhesive composition (I-3) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-3), the content of the energy ray-curable compound is preferably 0.01 to 300 parts by mass, more preferably 0.03 to 200 parts by mass, and particularly preferably 0.05 to 100 parts by mass, relative to 100 parts by mass of the adhesive resin (I-2 a).
[ photopolymerization initiator ]
The adhesive composition (I-3) may further contain a photopolymerization initiator. Even if the adhesive composition (I-3) containing the photopolymerization initiator is irradiated with energy rays of relatively low energy such as ultraviolet rays, it sufficiently undergoes curing reaction.
The photopolymerization initiator in the adhesive composition (I-3) may be the same as the photopolymerization initiator in the adhesive composition (I-1).
The photopolymerization initiator contained in the adhesive composition (I-3) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-3), the content of the photopolymerization initiator is preferably 0.01 to 20 parts by mass, more preferably 0.03 to 10 parts by mass, and particularly preferably 0.05 to 5 parts by mass, relative to 100 parts by mass of the total content of the adhesive resin (I-2 a) and the energy ray-curable compound.
[ other additives ]
The adhesive composition (I-3) may further contain other additives than any of the above components within a range not impairing the effects of the present invention.
The other additives mentioned above are the same as those in the adhesive composition (I-1).
The other additives contained in the adhesive composition (I-3) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-3), the content of the other additives is not particularly limited, as long as it is appropriately selected according to the kind thereof.
[ solvent ]
The adhesive composition (I-3) may also contain a solvent for the same purpose as in the case of the adhesive composition (I-1).
The solvent in the adhesive composition (I-3) may be the same as the solvent in the adhesive composition (I-1).
The solvent contained in the adhesive composition (I-3) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-3), the content of the solvent is not particularly limited, and may be appropriately adjusted.
< adhesive composition other than adhesive compositions (I-1) to (I-3) >)
The adhesive composition (I-1), the adhesive composition (I-2) and the adhesive composition (I-3) have been mainly described so far, but the components described as the components contained therein can be used in all the adhesive compositions other than the three adhesive compositions (in this specification, referred to as "adhesive compositions other than the adhesive compositions (I-1) to (I-3)").
The adhesive compositions other than the adhesive compositions (I-1) to (I-3) include non-energy ray-curable adhesive compositions other than the energy ray-curable adhesive compositions.
Examples of the non-energy ray-curable adhesive composition include an adhesive composition (I-4) containing a non-energy ray-curable adhesive resin (I-1 a) such as an acrylic resin, a urethane resin, a rubber resin, a silicone resin, an epoxy resin, a polyvinyl ether, a polycarbonate, and an ester resin, and a non-energy ray-curable adhesive composition containing an acrylic resin is preferable.
The adhesive compositions other than the adhesive compositions (I-1) to (I-3) preferably contain one or more kinds of crosslinking agents, and the content thereof may be set to be the same as in the case of the adhesive composition (I-1) or the like.
< adhesive composition (I-4) >
As a preferred adhesive composition (I-4), for example, an adhesive composition containing the adhesive resin (I-1 a) and a crosslinking agent can be mentioned.
[ adhesive resin (I-1 a) ]
As the adhesive resin (I-1 a) in the adhesive composition (I-4), the same adhesive resin (I-1 a) as that in the adhesive composition (I-1) can be mentioned.
The adhesive resin (I-1 a) contained in the adhesive composition (I-4) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-4), the content of the adhesive resin (I-1 a) is preferably 5 to 99% by mass, more preferably 10 to 95% by mass, and particularly preferably 15 to 90% by mass, relative to the total mass of the adhesive composition (I-4).
In the adhesive composition (I-4), the ratio of the content of the adhesive resin (I-1 a) to the total content of all components except the solvent (i.e., the content of the adhesive resin (I-1 a) of the adhesive layer) is preferably 30 to 90% by mass, more preferably 40 to 85% by mass, particularly preferably 50 to 80% by mass.
[ Cross-linking agent ]
When the acrylic polymer having a structural unit derived from a functional group-containing monomer in addition to a structural unit derived from an alkyl (meth) acrylate is used as the adhesive resin (I-1 a), it is preferable that the adhesive composition (I-4) further contains a crosslinking agent.
The crosslinking agent in the adhesive composition (I-4) may be the same as the crosslinking agent in the adhesive composition (I-1).
The crosslinking agent contained in the adhesive composition (I-4) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-4), the content of the crosslinking agent is preferably 0.01 to 50 parts by mass, more preferably 0.3 to 50 parts by mass, still more preferably 1 to 50 parts by mass, and for example, may be in any of 10 to 50 parts by mass, 15 to 50 parts by mass, 20 to 50 parts by mass, and the like, relative to 100 parts by mass of the content of the adhesive resin (I-1 a).
[ other additives ]
The adhesive composition (I-4) may further contain other additives than any of the above components within a range not impairing the effects of the present invention.
The other additives mentioned above are the same as those in the adhesive composition (I-1).
The other additives contained in the adhesive composition (I-4) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-4), the content of the other additives is not particularly limited, as long as it is appropriately selected according to the kind thereof.
[ solvent ]
The adhesive composition (I-4) may also contain a solvent for the same purpose as in the case of the adhesive composition (I-1).
The solvent in the adhesive composition (I-4) may be the same as the solvent in the adhesive composition (I-1).
The solvent contained in the adhesive composition (I-4) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
In the adhesive composition (I-4), the content of the solvent is not particularly limited, and may be appropriately adjusted.
In the protective film-forming composite sheet, the adhesive layer is preferably non-energy ray-curable. This is because, if the adhesive layer is energy ray curable, the adhesive layer may not be prevented from being cured at the same time when the protective film forming film is cured by irradiation with energy rays. If the adhesive layer and the protective film forming film are cured at the same time, the cured protective film forming film (i.e., protective film) and the adhesive layer may adhere to each other at the interface thereof to such an extent that peeling cannot be performed. In this case, it is difficult to peel off the semiconductor chip (semiconductor chip with protective film) having the protective film forming film after curing, that is, the protective film on the back surface, from the support sheet having the adhesive layer after curing, and the semiconductor chip with protective film cannot be picked up normally. In the support sheet, by making the adhesive layer non-energy ray curable, such a problem can be avoided with certainty, and the semiconductor chip with the protective film can be picked up more easily.
The effect of the adhesive layer being non-energy ray curable is described here, but even if the layer of the support sheet in direct contact with the protective film forming film is a layer other than the adhesive layer, the same effect is exhibited as long as the layer is non-energy ray curable.
Method for producing adhesive composition
The adhesive compositions other than the adhesive compositions (I-1) to (I-3), such as the adhesive compositions (I-1) to (I-3) and the adhesive composition (I-4), can be obtained by blending the components for constituting the adhesive composition, that is, by blending the adhesive and, if necessary, the components other than the adhesive, and the like.
The order of addition in blending the components is not particularly limited, and two or more components may be added simultaneously.
When a solvent is used, the solvent may be mixed with any blend component other than the solvent to dilute the blend component in advance, or the solvent may be mixed with any blend component other than the solvent to use the blend component without diluting the blend component in advance.
The method of mixing the components at the time of blending is not particularly limited, and may be appropriately selected from the following known methods: a method of mixing by rotating a stirrer, a stirring blade, or the like; a method of mixing using a mixer (mixer); and a method of mixing by applying ultrasonic waves.
The temperature and time at the time of adding and mixing the components are not particularly limited as long as the components to be blended are not degraded, and the temperature is preferably 15 to 30 ℃.
Film for forming protective film
The protective film forming film is cured to form a protective film, or is directly formed as a protective film in its own state without curing. The protective film is used to protect the back surface (surface opposite to the electrode forming surface) of the semiconductor wafer or the semiconductor chip. The protective film forming film is soft and can be easily attached to an object to be attached.
The protective film-forming film may be curable or non-curable.
The curable protective film-forming film may be either thermosetting or energy ray-curable, or may have both thermosetting and energy ray-curable properties.
The protective film-forming film can be formed using a protective film-forming composition containing the constituent materials thereof.
In the present specification, "non-curable" means a property that does not undergo curing even by any means such as heating or irradiation with energy rays.
In the present invention, as long as the laminated structure of the cured product of the support sheet and the film for forming a protective film (in other words, the support sheet and the protective film) is maintained, the laminated body will be referred to as "composite sheet for forming a protective film" even after the film for forming a protective film is cured.
The protective film may be formed of one layer (single layer) or a plurality of two or more layers, regardless of the type of the protective film. When the protective film forming film is composed of a plurality of layers, the layers may be the same as or different from each other.
Here, the adhesive layer and the protective film forming film will be described in further detail with reference to fig. 4.
As described above, the first surface 11a of the substrate 11 is a concave-convex surface. Among them, for example, since the S value of the adhesive layer 12 is 1.5 μm or more, the influence of the uneven surface is suppressed, and the uneven surface of the first surface 12a of the adhesive layer 12 becomes smaller. Therefore, the lamination of the adhesive layer 12 and the protective film forming film 13 becomes good. For example, even if there are areas (non-bonded areas) 92 between the adhesive layer 12 and the protective film forming film 13 where the adhesive layer 12 and the protective film forming film 13 are not bonded, the number thereof is extremely small, and 5 or less, more preferably 3 or less, in the entire area of the protective film forming film 13 forming area in the protective film forming composite sheet 1A. The non-bonded region 92 can be easily confirmed by, for example, viewing the protective film forming composite sheet 1A from the side of the base material 11.
Even if the composite sheet 1A for forming a protective film has such a non-bonded region 92, the lamination of the adhesive layer 12 and the film 13 for forming a protective film is more excellent in the composite sheet 1A for forming a protective film in which the size (interlayer distance) of the non-bonded region 92 in the thickness direction of the composite sheet 1A for forming a protective film is, for example, 0.5 μm or less. Here, the "size (interlayer distance) of the non-bonded region 92" refers to the "interlayer distance between the adhesive layer 12 and the protective film forming film 13 in the thickness direction of the protective film forming composite sheet 1A".
The size (the interlayer distance) of the non-bonded region 92 is preferably 0.5 μm or less, for example, may be in the range of 0.4 μm or less, 0.3 μm or less, 0.2 μm or less, or 0.1 μm or less, as in the case of the interlayer distance (the size) of the non-bonded region 91.
For example, the size (interlayer distance) of the non-bonded region 92 may be obtained by the same method as that for obtaining the size (interlayer distance) of the non-bonded region 91, except that the combination of the two layers to be subjected to the determination is different.
In the protective film forming composite sheet 1A, the non-bonded region 92 may not be present at all. In the present specification, when the size of the non-bonded region between the adhesive layer 12 and the protective film forming film 13 is 0.05 μm or more, the non-bonded region is considered to be present, and when the non-bonded region 92 is completely absent, the size (interlayer distance) of the non-bonded region 92 may be referred to as 0 μm.
On the other hand, as described above, the roughness of the first face 12a of the adhesive layer 12 becomes small. Therefore, the thickness T of the protective film forming film 13 p Not necessarily, although the thickness T p The fluctuation occurs depending on the position of the protective film forming film 13 (adhesive layer 12), but the fluctuation range is extremely small.
Further, as described above, since the roughness of the first surface 12a of the adhesive layer 12 becomes small, the surface (second surface) 13b of the protective film forming film 13 on the adhesive layer 12 side becomes smooth or the roughness becomes small. Therefore, the appearance of the protective film forming film 13 is not impaired.
In the protective film formed by the protective film forming film 13, the surface (second surface) on the adhesive layer 12 side is also smooth or has a small uneven surface, and the appearance of the protective film is not impaired.
In this way, in the composite sheet 1A for forming a protective film, the design of the film 13 for forming a protective film and the protective film can be made excellent.
The maximum difference in height between the highest portion of the convex portion and the deepest portion of the concave portion in the second surface 13b of the protective film forming film 13 is preferably 2 μm or less, and may be, for example, in any of the ranges of 1.5 μm or less and 1 μm or less. Such a protective film forming film 13 and a protective film are particularly excellent in design.
The maximum height difference of the second surface 13b of the protective film 13 can be obtained, for example, by forming a cross section in a test piece of the protective film forming composite sheet or the protective film forming composite sheet itself by the method described above, and observing the cross section with a Scanning Electron Microscope (SEM).
The adhesive layer and the protective film forming film will be described here by taking the protective film forming composite sheet 1A as an example, but when the protective film forming composite sheet is the protective film forming composite sheet 1B, the protective film forming composite sheet 1C, or the like of another embodiment, the adhesive layer and the protective film forming film are the same as in the case of the protective film forming composite sheet 1A.
In the composite sheet for forming a protective film of the present invention, the thickness of the film for forming a protective film (e.g., T p ) Preferably 1 to 100. Mu.m, more preferably 3 to 75. Mu.m, particularly preferably 5 to 50. Mu.m. By setting the thickness of the protective film forming film to the above lower limit value or more, a protective film having higher protective performance can be formed. By setting the thickness of the protective film forming film to the above upper limit or less, the thickness can be prevented from becoming excessively thick.
When the thickness of the protective film varies depending on the portion of the protective film, the minimum value of the thickness of the protective film may be equal to or higher than the lower limit value, or the maximum value of the thickness of the protective film may be equal to or lower than the upper limit value.
The "thickness of the protective film forming film" refers to the thickness of the entire protective film forming film, and for example, the thickness of the protective film forming film composed of a plurality of layers refers to the total thickness of all layers constituting the protective film forming film.
The thickness of the protective film-forming film can be measured by observing the side surface or the cross section of the protective film-forming film using, for example, a Scanning Electron Microscope (SEM).
The cross section of the protective film-forming film can be formed by the same method as in the case of the cross section of the test piece in which the support sheet and the protective film-forming composite sheet are formed.
For example, by the method described above, the test piece is cut from a plurality of positions (for example, 5 positions) of the composite sheet for forming a protective film, the minimum value and the maximum value of the thickness of the film for forming a protective film in the test piece are obtained, and the average value of the minimum value and the average value of the maximum value are further obtained from these values, and in this case, the average value of the minimum value may be equal to or higher than the lower limit value of the thickness of the film for forming a protective film, and the average value of the maximum value may be equal to or lower than the upper limit value of the thickness of the film for forming a protective film.
The protective film-forming film can be formed using a protective film-forming composition containing the constituent materials thereof. For example, the protective film forming composition is applied to the surface of the protective film forming film to be formed, and dried as necessary, whereby the protective film forming film can be formed at the target site. The content ratio of the components in the composition for forming a protective film, which are not vaporized at normal temperature, is generally the same as the content ratio of the components in the film for forming a protective film.
The composition for forming a protective film may be applied by a known method, and examples thereof include methods using various coaters such as an air knife coater, a blade coater, a bar coater, a gravure coater, a roll knife coater, a curtain coater, a die coater, a knife coater, a screen coater, a meyer bar coater, and a kiss coater.
The drying condition of the composition for forming a protective film is not particularly limited, but when the composition for forming a protective film contains a solvent described later, it is preferable to perform heat drying. The solvent-containing composition for forming a protective film is preferably dried at 70 to 130 ℃ for 10 seconds to 5 minutes, for example. Among them, when the composition for forming a protective film is thermosetting, the composition for forming a protective film is preferably dried so that the formed film for forming a protective film is not thermally cured.
Hereinafter, the protective film forming film and the protective film forming composition will be described in detail according to their types.
Film for forming thermosetting protective film
Preferable examples of the film for forming a thermosetting protective film include a film for forming a thermosetting protective film containing a polymer component (a) and a thermosetting component (B).
The polymer component (a) can be regarded as a component formed by polymerizing a polymerizable compound.
The thermosetting component (B) is a component that can undergo a curing (polymerization) reaction by taking heat as a reaction initiator. In addition, the polymerization reaction in the present invention also includes a polycondensation reaction.
The curing conditions for thermally curing the film for forming a thermosetting protective film after the film for forming a thermosetting protective film is attached to the back surface of the semiconductor wafer are not particularly limited as long as the curing degree is such that the cured product sufficiently exhibits its function.
For example, the heating temperature at the time of thermosetting of the film for forming a thermosetting protective film is preferably 100 to 200 ℃, more preferably 110 to 180 ℃, and particularly preferably 120 to 170 ℃. The heating time during curing is preferably 0.5 to 5 hours, more preferably 0.5 to 3 hours, and particularly preferably 1 to 2 hours.
< composition (III-1) for Forming thermosetting protective film >
Examples of the preferable thermosetting protective film-forming composition include a thermosetting protective film-forming composition (III-1) (in this specification, the composition (III-1) may be abbreviated as "composition (III-1)") containing a polymer component (a) and a thermosetting component (B).
[ Polymer component (A) ]
The polymer component (a) is a component for imparting film-forming properties, flexibility, and the like to the film for forming a thermosetting protective film.
The polymer component (A) contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
Examples of the polymer component (a) include acrylic resins, polyesters, urethane resins, acrylic urethane resins, silicone resins, rubber resins, phenoxy resins, thermosetting polyimides, and the like, and acrylic resins are preferable.
The acrylic resin in the polymer component (a) may be a known acrylic polymer.
Weight average molecular weight (M) of acrylic resin W ) Preferably 10000 ～ 2000000, more preferably 100000 ～ 1500000. By setting the weight average molecular weight of the acrylic resin to the above lower limit or more, the shape stability (stability with time during storage) of the film for forming a thermosetting protective film is improved. In addition, by setting the weight average molecular weight of the acrylic resin to the above-described upper limit value or less, the thermosetting protective film-forming film easily follows the uneven surface of the adherend, and the occurrence of voids (void) or the like between the adherend and the thermosetting protective film-forming film is further suppressed.
In the present specification, unless otherwise indicated, the weight average molecular weight refers to a polystyrene equivalent measured by a Gel Permeation Chromatography (GPC) method.
The glass transition temperature (Tg) of the acrylic resin is preferably-60 to 70℃and more preferably-30 to 50 ℃. By setting the Tg of the acrylic resin to the above lower limit value or more, for example, the adhesion between the cured product of the protective film forming film (i.e., the protective film) and the support sheet can be suppressed, and the peelability of the support sheet can be suitably improved. In addition, by setting Tg of the acrylic resin to the above upper limit value or less, the film for forming a thermosetting protective film and the adhesive force between the protective film and the adherend can be improved.
The Tg of the resin in the present specification is not limited to the acrylic resin, and is determined, for example, by the following method: the inflection point was confirmed by changing the temperature of the object to be measured between-70℃and 150℃with a Differential Scanning Calorimeter (DSC) at a temperature rise rate or a temperature drop rate of 10℃per minute.
Examples of the acrylic resin include polymers of one or more (meth) acrylic esters; copolymers of two or more monomers selected from (meth) acrylic acid, itaconic acid, vinyl acetate, acrylonitrile, styrene, N-methylolacrylamide, and the like.
Examples of the (meth) acrylic acid ester constituting the acrylic resin include methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, sec-butyl (meth) acrylate, tert-butyl (meth) acrylate, pentyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, isooctyl (meth) acrylate, n-octyl (meth) acrylate, n-nonyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, undecyl (meth) acrylate, dodecyl (meth) acrylate (also referred to as lauryl (meth) acrylate), tridecyl (meth) acrylate, tetradecyl (also referred to as myristyl (meth) acrylate), pentadecyl (meth) acrylate, hexadecyl (also referred to as palmityl (meth) acrylate), heptadecyl (meth) acrylate, octadecyl (meth) acrylate, and the like Alkyl (meth) acrylate having a chain structure in which the alkyl group constituting the alkyl ester has 1 to 18 carbon atoms;
Cycloalkyl (meth) acrylates such as isobornyl (meth) acrylate and dicyclopentyl (meth) acrylate;
aralkyl (meth) acrylates such as benzyl (meth) acrylate;
cycloalkenyl (meth) acrylates such as dicyclopentenyl (meth) acrylate;
cycloalkenyl oxyalkyl (meth) acrylates such as dicyclopentenyloxyalkyl (meth) acrylate;
(meth) acrylimide;
glycidyl group-containing (meth) acrylates such as glycidyl (meth) acrylate;
hydroxy group-containing (meth) acrylates such as hydroxymethyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, and 4-hydroxybutyl (meth) acrylate;
substituted amino group-containing (meth) acrylates such as N-methylaminoethyl (meth) acrylate, and the like. Here, "substituted amino group" refers to a group in which one or two hydrogen atoms of the amino group are substituted with a group other than a hydrogen atom.
In addition to the (meth) acrylic acid ester, the acrylic resin may be copolymerized with one or more monomers selected from the group consisting of (meth) acrylic acid, itaconic acid, vinyl acetate, acrylonitrile, styrene, and N-methylolacrylamide.
The monomers constituting the acrylic resin may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
The acrylic resin may have a functional group capable of bonding with other compounds, such as a vinyl group, a (meth) acryloyl group, an amino group, a hydroxyl group, a carboxyl group, and an isocyanate group. The functional group of the acrylic resin may be bonded to other compounds via a crosslinking agent (F) described later, or may be directly bonded to other compounds without via the crosslinking agent (F). The acrylic resin is bonded to other compounds through the functional group, and thus the reliability of the package obtained by using the composite sheet for forming a protective film tends to be improved.
In the present invention, as the polymer component (a), a thermoplastic resin other than an acrylic resin (hereinafter, may be abbreviated as "thermoplastic resin") may be used alone instead of an acrylic resin, or both an acrylic resin and a thermoplastic resin other than an acrylic resin may be used. By using the thermoplastic resin, the peelability of the protective film from the support sheet may be improved, or the thermosetting protective film forming film may easily follow the uneven surface of the adherend, and the occurrence of voids or the like between the adherend and the thermosetting protective film forming film may be further suppressed.
The weight average molecular weight of the thermoplastic resin is preferably 1000 to 100000, more preferably 3000 to 80000.
The glass transition temperature (Tg) of the thermoplastic resin is preferably-30 to 150℃and more preferably-20 to 120 ℃.
Examples of the thermoplastic resin include polyesters, polyurethanes, phenoxy resins, polybutenes, polybutadiene, and polystyrene.
The thermoplastic resin contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the composition (III-1), the ratio of the content of the polymer component (a) to the total content of all components except the solvent (i.e., the content of the polymer component (a)) is preferably 5 to 85% by mass, more preferably 5 to 75% by mass, and may be, for example, any one of 5 to 65% by mass, 5 to 50% by mass, 10 to 35% by mass, and the like, regardless of the kind of the polymer component (a).
The polymer component (A) may also belong to the thermosetting component (B). In the present invention, when the composition (III-1) contains such a component belonging to both the polymer component (A) and the thermosetting component (B), the composition (III-1) is regarded as containing the polymer component (A) and the thermosetting component (B).
[ thermosetting component (B) ]
The thermosetting component (B) is a component for curing the film for forming a thermosetting protective film.
The thermosetting component (B) contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
Examples of the thermosetting component (B) include epoxy thermosetting resins, thermosetting polyimides, polyurethanes, unsaturated polyesters, silicone resins, and the like, and epoxy thermosetting resins are preferable.
(epoxy thermosetting resin)
The epoxy thermosetting resin is composed of an epoxy resin (B1) and a thermosetting agent (B2).
The epoxy thermosetting resin contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
Epoxy resin (B1)
The epoxy resin (B1) may be a known epoxy resin, for example, a polyfunctional epoxy resin, a biphenyl compound, bisphenol a diglycidyl ether and its hydride, an o-cresol novolac epoxy resin, a dicyclopentadiene type epoxy resin, a biphenyl type epoxy resin, a bisphenol a type epoxy resin, a bisphenol F type epoxy resin, a phenylene skeleton type epoxy resin, or other epoxy compounds having a double functionality or more.
As the epoxy resin (B1), an epoxy resin having an unsaturated hydrocarbon group may be used. The compatibility of an epoxy resin having an unsaturated hydrocarbon group with an acrylic resin is greater than the compatibility of an epoxy resin having no unsaturated hydrocarbon group with an acrylic resin. Therefore, by using an epoxy resin having an unsaturated hydrocarbon group, the reliability of the semiconductor chip with a protective film obtained by using the composite sheet for forming a protective film is improved.
Examples of the epoxy resin having an unsaturated hydrocarbon group include a compound in which a part of the epoxy groups of a polyfunctional epoxy resin is converted into groups having an unsaturated hydrocarbon group. Such a compound can be obtained, for example, by subjecting (meth) acrylic acid or a derivative thereof to an addition reaction with an epoxy group.
Examples of the epoxy resin having an unsaturated hydrocarbon group include a compound in which a group having an unsaturated hydrocarbon group is directly bonded to an aromatic ring or the like constituting the epoxy resin.
The unsaturated hydrocarbon group is a polymerizable unsaturated group, and specific examples thereof include an ethylene group (also referred to as a vinyl group), a 2-propenyl group (also referred to as an allyl group), a (meth) acryl group, and a (meth) acrylamide group, and the like, and acryl is preferable.
The number average molecular weight of the epoxy resin (B1) is not particularly limited, but is preferably 300 to 30000, more preferably 300 to 10000, particularly preferably 300 to 3000, from the viewpoint of curability of the film for forming a thermosetting protective film and strength and heat resistance of the protective film after curing.
In the present specification, unless otherwise indicated, the number average molecular weight refers to a polystyrene equivalent measured by a Gel Permeation Chromatography (GPC) method.
The epoxy equivalent of the epoxy resin (B1) is preferably 100 to 1000g/eq, more preferably 150 to 950g/eq.
In the present specification, "epoxy equivalent" means the gram-number (g/eq) of an epoxy compound containing 1 gram-equivalent of an epoxy group, and can be measured according to the method of JIS K7236:2001.
The epoxy resin (B1) may be used alone or in combination of two or more, and when two or more are used at the same time, the combination and ratio thereof may be arbitrarily selected.
Thermosetting agent (B2)
The thermosetting agent (B2) functions as a curing agent for the epoxy resin (B1).
Examples of the thermosetting agent (B2) include compounds having two or more functional groups capable of reacting with an epoxy group in one molecule. Examples of the functional group include a group obtained by anhydrating a phenolic hydroxyl group, an alcoholic hydroxyl group, an amino group, a carboxyl group, and an acid group, and a group obtained by anhydrating a phenolic hydroxyl group, an amino group, and an acid group is preferable, and a phenolic hydroxyl group or an amino group is more preferable.
Examples of the phenolic curing agent having a phenolic hydroxyl group in the thermosetting agent (B2) include polyfunctional phenol resins, biphenol, novolak-type phenol resins, dicyclopentadiene-type phenol resins, and aralkyl-type phenol resins.
Examples of amine curing agents having an amino group in the thermosetting agent (B2) include dicyandiamide.
The thermosetting agent (B2) may have an unsaturated hydrocarbon group.
Examples of the thermosetting agent (B2) having an unsaturated hydrocarbon group include a compound in which a part of the hydroxyl groups of a phenol resin is substituted with a group having an unsaturated hydrocarbon group, a compound in which a group having an unsaturated hydrocarbon group is directly bonded to an aromatic ring of a phenol resin, and the like.
The unsaturated hydrocarbon group in the thermosetting agent (B2) is the same as that in the above-mentioned epoxy resin having an unsaturated hydrocarbon group.
When a phenol curing agent is used as the thermosetting agent (B2), the softening point or glass transition temperature of the thermosetting agent (B2) is preferably high from the point of improving the peelability of the protective film from the support sheet.
In the thermosetting agent (B2), for example, the number average molecular weight of the resin component such as a polyfunctional phenol resin, a novolak phenol resin, a dicyclopentadiene phenol resin, an aralkyl phenol resin is preferably 300 to 30000, more preferably 400 to 10000, and particularly preferably 500 to 3000.
In the thermosetting agent (B2), the molecular weight of the non-resin component such as biphenol and dicyandiamide is not particularly limited, and is preferably 60 to 500, for example.
The thermosetting agent (B2) may be used alone or in combination of two or more, and when two or more are used at the same time, the combination and ratio thereof may be arbitrarily selected.
In the composition (III-1) and the film for forming a thermosetting protective film, the content of the thermosetting agent (B2) is preferably 0.1 to 500 parts by mass, more preferably 1 to 200 parts by mass, and for example, may be in any of 1 to 100 parts by mass, 1 to 50 parts by mass, 1 to 25 parts by mass, 1 to 10 parts by mass, and the like, relative to 100 parts by mass of the content of the epoxy resin (B1). By setting the content of the thermosetting agent (B2) to the lower limit value or more, the film for forming a thermosetting protective film is more easily cured. Further, by setting the content of the thermosetting agent (B2) to the upper limit value or less, the moisture absorption rate of the film for forming a thermosetting protective film is reduced, and the reliability of the package obtained by using the composite sheet for forming a protective film is further improved.
In the composition (III-1) and the film for forming a thermosetting protective film, the content of the thermosetting component (B) (for example, the total content of the epoxy resin (B1) and the thermosetting agent (B2)) is preferably 20 to 500 parts by mass, more preferably 30 to 300 parts by mass, still more preferably 40 to 150 parts by mass, and for example, may be 45 to 100 parts by mass, 50 to 80 parts by mass, or the like, relative to 100 parts by mass of the content of the polymer component (a). By setting the content of the thermosetting component (B) to such a range, for example, adhesion between the cured product of the protective film forming film and the support sheet can be suppressed, and peelability of the support sheet can be improved.
[ curing accelerator (C) ]
The composition (III-1) and the film for forming a thermosetting protective film may contain a curing accelerator (C). The curing accelerator (C) is a component for adjusting the curing rate of the composition (III-1).
Examples of the preferable curing accelerator (C) include tertiary amines such as triethylenediamine, benzyldimethylamine, triethanolamine, dimethylaminoethanol, and tris (dimethylaminomethyl) phenol; imidazoles (imidazoles in which one or more hydrogen atoms are substituted with a group other than a hydrogen atom) such as 2-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 2-phenyl-4, 5-dihydroxymethylimidazole, and 2-phenyl-4-methyl-5-hydroxymethylimidazole; organic phosphines (phosphines in which one or more hydrogen atoms are replaced with an organic group) such as tributylphosphine, diphenylphosphine, and triphenylphosphine; tetraphenylboron salts such as tetraphenylboron tetraphenylphosphine and triphenylphosphine tetraphenylborate.
The curing accelerator (C) contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
When the curing accelerator (C) is used, the content of the curing accelerator (C) is preferably 0.01 to 10 parts by mass, more preferably 0.1 to 7 parts by mass, per 100 parts by mass of the content of the thermosetting component (B) in the composition (III-1) and the film for forming a thermosetting protective film. By setting the content of the curing accelerator (C) to the above lower limit value or more, the effect of using the curing accelerator (C) can be more significantly obtained. Further, by setting the content of the curing accelerator (C) to the above-described upper limit value or less, for example, the effect of inhibiting the curing accelerator (C) having a high polarity from moving to the adhesion interface side with the adherend in the film for forming a thermosetting protective film under the conditions of high temperature and high humidity is improved, and the reliability of the semiconductor chip with the protective film obtained by using the composite sheet for forming a protective film is further improved.
[ Filler (D) ]
The composition (III-1) and the film for forming a thermosetting protective film may contain a filler (D). By containing the filler (D) in the thermosetting protective film-forming film, the water absorption rate and the adhesive force change rate can be more easily adjusted to the target ranges. In addition, by including the filler (D) in the thermosetting protective film forming film and the protective film, the adjustment of the thermal expansion coefficient is made easier, and by optimizing the thermal expansion coefficient with respect to the thermosetting protective film forming film or the object to be formed of the protective film, the reliability of the semiconductor chip with the protective film obtained by using the composite sheet for forming the protective film is further improved. Further, by containing the filler (D) in the film for forming a thermosetting protective film, the moisture absorption rate of the protective film can be reduced or the heat radiation property can be improved.
The filler (D) may be any of an organic filler and an inorganic filler, but is preferably an inorganic filler.
Examples of the preferable inorganic filler include powders of silica, alumina, talc, calcium carbonate, titanium white, red lead, silicon carbide, boron nitride, and the like; beads obtained by spheroidizing these inorganic fillers; surface modifications of these inorganic filler materials; single crystal fibers of these inorganic filler materials; glass fiber, and the like.
Among them, the inorganic filler is preferably silica or alumina, more preferably silica.
The filler (D) contained in the composition (III-1) and the thermosetting protective film-forming film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
When the filler (D) is used, the proportion of the content of the filler (D) relative to the total content of all components except the solvent (i.e., the content of the filler (D) of the thermosetting protective film-forming film) in the composition (III-1) is preferably 5 to 80% by mass, more preferably 10 to 70% by mass, and may be, for example, any one of 20 to 65% by mass, 30 to 65% by mass, 40 to 65% by mass, and the like. By setting the content of the filler (D) to such a range, the adjustment of the coefficient of thermal expansion becomes easier, and the strength of the protective film forming film and the protective film is further improved.
[ coupling agent (E) ]
The composition (III-1) and the film for forming a thermosetting protective film may contain a coupling agent (E). By using a substance having a functional group reactive with an inorganic compound or an organic compound as the coupling agent (E), the adhesiveness and the adhesiveness of the thermosetting protective film-forming film to an adherend can be improved. Further, by using the coupling agent (E), the water resistance of the cured product (protective film) of the film for forming a thermosetting protective film is improved without impairing the heat resistance.
The coupling agent (E) is preferably a compound having a functional group reactive with the functional groups of the polymer component (a), the thermosetting component (B), and the like, and more preferably a silane coupling agent.
Preferable examples of the silane coupling agent include 3-glycidoxypropyl trimethoxysilane, 3-glycidoxypropyl methyl diethoxysilane, 3-glycidoxypropyl triethoxysilane, 2- (3, 4-epoxycyclohexyl) ethyl trimethoxysilane, 3-methacryloxypropyl trimethoxysilane, 3-aminopropyl trimethoxysilane, 3- (2-aminoethylamino) propyl methyl diethoxysilane, 3- (phenylamino) propyl trimethoxysilane, 3-anilinopropyl trimethoxysilane, 3-ureidopropyl triethoxysilane, 3-mercaptopropyl trimethoxysilane, 3-mercaptopropyl methyl dimethoxysilane, bis (3-triethoxysilylpropyl) tetrasulfide, methyltrimethoxysilane, vinyltrimethoxysilane, vinyltriacetoxysilane, and imidazole silane.
The coupling agent (E) contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
When the coupling agent (E) is used, the content of the coupling agent (E) is preferably 0.03 to 20 parts by mass, more preferably 0.05 to 10 parts by mass, particularly preferably 0.1 to 5 parts by mass, based on 100 parts by mass of the total content of the polymer component (A) and the thermosetting component (B) in the composition (III-1) and the film for forming a thermosetting protective film. By setting the content of the coupling agent (E) to the lower limit value or more, the effect of using the coupling agent (E) such as an improvement in dispersibility of the filler (D) in the resin, an improvement in adhesiveness between the thermosetting protective film-forming film and the adherend, and the like can be more significantly obtained. Further, by setting the content of the coupling agent (E) to the upper limit value or less, the occurrence of degassing can be further suppressed.
[ Cross-linker (F) ]
When a substance having a functional group such as a vinyl group, (meth) acryloyl group, amino group, hydroxyl group, carboxyl group, isocyanate group, or the like, which can be bonded to other compounds, such as the acrylic resin, is used as the polymer component (a), the composition (III-1) and the film for forming a thermosetting protective film may contain a crosslinking agent (F). The crosslinking agent (F) is a component for bonding and crosslinking the functional group in the polymer component (a) with other compounds, and by crosslinking in this manner, the initial adhesion and cohesive force of the film for forming a thermosetting protective film can be adjusted.
Examples of the crosslinking agent (F) include an organic polyisocyanate (polyisocyanate) compound, an organic polyimide compound, a metal chelate crosslinking agent (crosslinking agent having a metal chelate structure), an aziridine crosslinking agent (crosslinking agent having an aziridine group), and the like.
Examples of the organic polyisocyanate compound include aromatic polyisocyanate compounds, aliphatic polyisocyanate compounds, and alicyclic polyisocyanate compounds (hereinafter, these compounds may be collectively abbreviated as "aromatic polyisocyanate compounds and the like"); a trimer, isocyanurate body, or adduct of the aromatic polyisocyanate compound or the like; and a terminal isocyanate urethane prepolymer obtained by reacting the aromatic polyisocyanate compound or the like with a polyol compound. The "adduct" refers to a reactant of the aromatic polyisocyanate compound, aliphatic polyisocyanate compound or alicyclic polyisocyanate compound with a low molecular active hydrogen-containing compound such as ethylene glycol, propylene glycol, neopentyl glycol, trimethylolpropane or castor oil. Examples of the adducts include xylylene diisocyanate adducts of trimethylolpropane, which will be described later. Further, "terminal isocyanate urethane prepolymer" is the same as that described hereinabove.
More specifically, examples of the organic polyisocyanate compound include 2, 4-toluene diisocyanate; 2, 6-toluene diisocyanate; 1, 3-xylylene diisocyanate; 1, 4-xylylene diisocyanate; diphenylmethane-4, 4' -diisocyanate; diphenylmethane-2, 4' -diisocyanate; 3-methyldiphenylmethane diisocyanate; hexamethylene diisocyanate; isophorone diisocyanate; dicyclohexylmethane-4, 4' -diisocyanate; dicyclohexylmethane-2, 4' -diisocyanate; any one or two or more compounds selected from toluene diisocyanate, hexamethylene diisocyanate and xylylene diisocyanate are added to all or a part of hydroxyl groups of a polyhydric alcohol such as trimethylolpropane; lysine diisocyanate, and the like.
Examples of the organic polyimine compound include N, N ' -diphenylmethane-4, 4' -bis (1-aziridinecarboxamide), trimethylolpropane-tris- β -aziridinyl propionate, tetramethylolmethane-tris- β -aziridinylpropionate, and N, N ' -toluene-2, 4-bis (1-aziridinyl carboxamide) triethylenemelamine.
When an organic polyisocyanate compound is used as the crosslinking agent (F), a hydroxyl group-containing polymer is preferably used as the polymer component (A). When the crosslinking agent (F) has an isocyanate group and the polymer component (a) has a hydroxyl group, the crosslinking structure can be easily introduced into the thermosetting protective film-forming film by the reaction of the crosslinking agent (F) with the polymer component (a).
The crosslinking agent (F) contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
When the crosslinking agent (F) is used, the content of the crosslinking agent (F) in the composition (III-1) is preferably 0.01 to 20 parts by mass, more preferably 0.1 to 10 parts by mass, particularly preferably 0.5 to 5 parts by mass, relative to 100 parts by mass of the content of the polymer component (A). By setting the content of the crosslinking agent (F) to the lower limit value or more, the effect of using the crosslinking agent (F) can be more remarkably obtained. Further, by setting the content of the crosslinking agent (F) to the upper limit value or less, excessive use of the crosslinking agent (F) can be suppressed.
[ energy ray-curable resin (G) ]
The composition (III-1) may contain an energy ray curable resin (G). By incorporating the energy ray-curable resin (G) into the film for forming a thermosetting protective film, the characteristics can be changed by irradiation with energy rays.
The energy ray-curable resin (G) is obtained by polymerizing (curing) an energy ray-curable compound.
Examples of the energy ray-curable compound include compounds having at least one polymerizable double bond in the molecule, and acrylic compounds having a (meth) acryloyl group are preferable.
Examples of the acrylic acid ester compound include (meth) acrylic acid esters having a chain aliphatic skeleton, such as trimethylolpropane tri (meth) acrylate, tetramethylolmethane tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol monohydroxy penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 1, 4-butanediol di (meth) acrylate, and 1, 6-hexanediol di (meth) acrylate; (meth) acrylic esters having a cyclic aliphatic skeleton such as dicyclopentyl di (meth) acrylate; polyalkylene glycol (meth) acrylates such as polyethylene glycol di (meth) acrylate; an oligoester (meth) acrylate; urethane (meth) acrylate oligomer; epoxy modified (meth) acrylates; polyether (meth) acrylates other than the polyalkylene glycol (meth) acrylate; itaconic acid oligomers, and the like.
The weight average molecular weight of the energy ray-curable compound is preferably 100 to 30000, more preferably 300 to 10000.
The energy ray-curable compound used in the polymerization may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
The energy ray-curable resin (G) contained in the composition (III-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
When the energy ray-curable resin (G) is used, the content of the energy ray-curable resin (G) in the composition (III-1) is preferably 1 to 95% by mass, more preferably 5 to 90% by mass, and particularly preferably 10 to 85% by mass, relative to the total content of all components except the solvent.
[ photopolymerization initiator (H) ]
When the composition (III-1) contains the energy ray-curable resin (G), a photopolymerization initiator (H) may be contained in order to efficiently advance the polymerization reaction of the energy ray-curable resin (G).
Examples of the photopolymerization initiator (H) in the composition (III-1) include benzoin compounds such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzoin benzoic acid, benzoin methyl benzoate, and benzoin dimethyl ketal; acetophenone compounds such as acetophenone, 2-hydroxy-2-methyl-1-phenyl-propan-1-one, 2-dimethoxy-1, 2-diphenylethan-1-one, and the like; acylphosphine oxide compounds such as phenyl bis (2, 4, 6-trimethylbenzoyl) phosphine oxide and 2,4, 6-trimethylbenzoyl diphenyl phosphine oxide; sulfides such as benzyl phenyl sulfide and tetramethyl thiuram monosulfide; alpha-ketol compounds such as 1-hydroxycyclohexyl phenyl ketone; azo compounds such as azobisisobutyronitrile; a titanocene compound such as titanocene; thioxanthone compounds such as thioxanthone; a peroxide compound; diketone compounds such as butanedione; benzil; a dibenzoyl group; benzophenone; 2, 4-diethylthioxanthone; 1, 2-diphenylmethane; 2-hydroxy-2-methyl-1- [4- (1-methylvinyl) phenyl ] propanone; 2-chloroanthraquinone, and the like.
Examples of the photopolymerization initiator include quinone compounds such as 1-chloroanthraquinone; amine and the like.
The photopolymerization initiator (H) contained in the composition (III-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
When the photopolymerization initiator (H) is used, the content of the photopolymerization initiator (H) in the composition (III-1) is preferably 0.1 to 20 parts by mass, more preferably 1 to 10 parts by mass, and particularly preferably 2 to 5 parts by mass, relative to 100 parts by mass of the energy ray curable resin (G).
[ colorant (I) ]
The composition (III-1) and the film for forming a thermosetting protective film may contain a colorant (I).
Examples of the colorant (I) include known colorants such as inorganic pigments, organic pigments, and organic dyes.
Examples of the organic pigment and organic dye include an aminium (amium) pigment, a cyanine pigment, a merocyanine pigment, a croconium (croconium) pigment, a squarylium (squarylium) pigment, a azulenium (azulenium) pigment, a polymethine pigment, a naphthoquinone pigment, a pyrylium pigment, a phthalocyanine pigment, a naphthalocyanine pigment, a naphthalenium (naphthalolactam) pigment, an azo pigment, a condensed azo pigment, an indigo pigment, a viologen (perinone) pigment, a perylene pigment, a dioxazine pigment, a quinacridone pigment, an isoindolinone pigment, a quinophthalone pigment, a pyrrole pigment, a thioindigo pigment, a metal complex pigment (metal complex dye), a dithiol metal complex pigment, an indophenol pigment, a triarylmethane pigment, an anthraquinone pigment, a dioxazine pigment, a naphthol pigment, a benzimidazole pigment, an anthranile pigment, and a xanthone pigment.
Examples of the inorganic pigment include carbon black, cobalt-based pigment, iron-based pigment, chromium-based pigment, titanium-based pigment, vanadium-based pigment, zirconium-based pigment, molybdenum-based pigment, ruthenium-based pigment, platinum-based pigment, ITO (indium tin oxide) based pigment, ATO (antimony tin oxide) based pigment, and the like.
The colorant (I) contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
When the colorant (I) is used, the content of the colorant (I) in the film for forming a thermosetting protective film may be appropriately adjusted according to the purpose. For example, by adjusting the content of the colorant (I) in the thermosetting protective film-forming film and adjusting the light transmittance of the protective film, the printing visibility when laser printing is performed on the protective film can be adjusted. In addition, by adjusting the content of the colorant (I) in the thermosetting protective film-forming film, the designability of the protective film can be improved, or grinding marks on the back surface of the semiconductor wafer can be made less noticeable. Considering these points, in the composition (III-1), the ratio of the content of the colorant (I) to the total content of all components except the solvent (i.e., the content of the colorant (I) of the film for forming a thermosetting protective film) is preferably 0.1 to 10% by mass, more preferably 0.1 to 7.5% by mass, particularly preferably 0.1 to 5% by mass. By setting the content of the colorant (I) to the lower limit value or more, the effect of using the colorant (I) can be more remarkably obtained. Further, by setting the content of the colorant (I) to the upper limit value or less, excessive decrease in light transmittance of the film for forming a thermosetting protective film can be suppressed.
General purpose additive (J)
The composition (III-1) and the film for forming a thermosetting protective film may further contain a general-purpose additive (J) within a range not impairing the effect of the present invention.
The general-purpose additive (J) may be any known additive, and may be arbitrarily selected according to the purpose, but is not particularly limited, and examples of preferable additives include plasticizers, antistatic agents, antioxidants, getters (binder agents), and the like.
The general-purpose additive (J) contained in the composition (III-1) and the film for forming a thermosetting protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
The content of the composition (III-1) and the general-purpose additive (J) for a film for forming a thermosetting protective film is not particularly limited, and may be appropriately selected according to the purpose.
[ solvent ]
Preferably, the composition (III-1) further contains a solvent. The solvent-containing composition (III-1) was excellent in handleability.
The solvent is not particularly limited, but examples of the preferable solvent include hydrocarbons such as toluene and xylene; alcohols such as methanol, ethanol, 2-propanol, isobutanol (2-methylpropan-1-ol), and 1-butanol; esters such as ethyl acetate; ketones such as acetone and methyl ethyl ketone; ethers such as tetrahydrofuran; and amides (compounds having an amide bond) such as dimethylformamide and N-methylpyrrolidone.
The solvent contained in the composition (III-1) may be one or two or more, and when two or more are used, the combination and ratio thereof may be arbitrarily selected.
The solvent contained in the composition (III-1) is preferably methyl ethyl ketone or the like from the point where the components contained in the composition (III-1) can be mixed more uniformly.
Method for producing composition for forming thermosetting protective film
The composition for forming a thermosetting protective film such as the composition (III-1) can be obtained by blending the components constituting the composition.
The order of addition in blending the components is not particularly limited, and two or more components may be added simultaneously.
When a solvent is used, the solvent may be mixed with any blend component other than the solvent to dilute the blend component in advance, or the solvent may be mixed with any blend component other than the solvent to use the blend component without diluting the blend component in advance.
The method of mixing the components at the time of blending is not particularly limited, and may be appropriately selected from the following known methods: a method of mixing by rotating a stirrer, a stirring blade, or the like; a method of mixing using a mixer; and a method of mixing by applying ultrasonic waves.
The temperature and time at the time of adding and mixing the components are not particularly limited as long as the components to be blended are not degraded, and the temperature is preferably 15 to 30 ℃.
Film for forming energy ray-curable protective film
The energy ray-curable protective film-forming film includes an energy ray-curable protective film-forming film containing an energy ray-curable component (a), and preferably an energy ray-curable protective film-forming film containing an energy ray-curable component (a) and a filler.
In the film for forming an energy ray-curable protective film, the energy ray-curable component (a) is preferably uncured, preferably has tackiness, more preferably is uncured and has tackiness. Here, "energy ray" and "energy ray curability" are the same as those described above.
The curing conditions at the time of curing the energy ray-curable protective film-forming film after the film is attached to the back surface of the semiconductor wafer are not particularly limited as long as the degree of curing of the cured product is such that the function thereof is sufficiently exhibited, and the curing conditions are appropriately selected according to the type of the energy ray-curable protective film-forming film.
For example, in the case of curing the film for forming an energy ray-curable protective film, the illuminance of the energy ray is preferably 120 to 280mW/cm 2 . The amount of the energy ray at the time of curing is preferably 100 to 1000mJ/cm 2 。
< composition (IV-1) for Forming an energy ray-curable protective film >
The preferable composition for forming an energy ray-curable protective film includes, for example, a composition (IV-1) for forming an energy ray-curable protective film containing the above-mentioned energy ray-curable component (a) (in this specification, the composition (IV-1) may be abbreviated as "composition (IV-1)").
[ energy ray-curable component (a) ]
The energy ray-curable component (a) is a component that is cured by irradiation with energy rays, and is also a component for imparting film-forming properties, flexibility, and the like to the energy ray-curable protective film-forming film, and for forming a hard protective film after curing.
Examples of the energy ray-curable component (a) include a polymer (a 1) having an energy ray-curable group and having a weight average molecular weight of 80000 ～ 2000000; and a compound (a 2) having an energy ray-curable group and having a molecular weight of 100 to 80000. At least a part of the polymer (a 1) may be crosslinked by a crosslinking agent or may not be crosslinked.
(Polymer (a 1) having an energy ray-curable group and having a weight-average molecular weight of 80000 ～ 2000000)
Examples of the polymer (a 1) having an energy ray-curable group and a weight average molecular weight of 80000 ～ 2000000 include an acrylic resin (a 1-1) obtained by reacting an acrylic polymer (a 11) with an energy ray-curable compound (a 12), the acrylic polymer (a 11) having a functional group capable of reacting with a group of another compound, the energy ray-curable compound (a 12) having a group reactive with the functional group, and an energy ray-curable group such as an energy ray-curable double bond.
Examples of the functional group capable of reacting with a group of another compound include a hydroxyl group, a carboxyl group, an amino group, a substituted amino group (a group in which one or two hydrogen atoms of an amino group are replaced with groups other than hydrogen atoms), an epoxy group, and the like. However, in the point of preventing corrosion of circuits of a semiconductor wafer, a semiconductor chip, or the like, it is preferable that the functional group is a group other than a carboxyl group.
Wherein preferably the functional group is a hydroxyl group.
Acrylic Polymer having functional group (a 11)
Examples of the acrylic polymer (a 11) having a functional group include a polymer obtained by copolymerizing an acrylic monomer having a functional group and an acrylic monomer having no functional group, and a polymer obtained by copolymerizing a monomer other than an acrylic monomer (a non-acrylic monomer) in addition to these monomers.
The acrylic polymer (a 11) may be a random copolymer or a block copolymer, and a known polymerization method may be used.
Examples of the acrylic monomer having the functional group include a hydroxyl group-containing monomer, a carboxyl group-containing monomer, an amino group-containing monomer, a substituted amino group-containing monomer, and an epoxy group-containing monomer.
Examples of the hydroxyl group-containing monomer include hydroxyalkyl (meth) acrylates such as hydroxymethyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, and 4-hydroxybutyl (meth) acrylate; and non (meth) acrylic unsaturated alcohols (unsaturated alcohols having no (meth) acryl skeleton) such as vinyl alcohol and allyl alcohol.
Examples of the carboxyl group-containing monomer include ethylenically unsaturated monocarboxylic acids (monocarboxylic acids having an ethylenically unsaturated bond) such as (meth) acrylic acid and crotonic acid; ethylenically unsaturated dicarboxylic acids (dicarboxylic acids having an ethylenically unsaturated bond) such as fumaric acid, itaconic acid, maleic acid, and citraconic acid; anhydrides of the ethylenically unsaturated dicarboxylic acids; and carboxyalkyl (meth) acrylates such as 2-carboxyethyl methacrylate.
Preferably, the acrylic monomer having the functional group is a hydroxyl group-containing monomer.
The acrylic monomer having the functional group constituting the acrylic polymer (a 11) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
Examples of the acrylic monomer having no functional group include methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, sec-butyl (meth) acrylate, tert-butyl (meth) acrylate, pentyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, isooctyl (meth) acrylate, n-octyl (meth) acrylate, n-nonyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, undecyl (meth) acrylate, dodecyl (meth) acrylate (also referred to as lauryl (meth) acrylate), tridecyl (meth) acrylate, tetradecyl (also referred to as myristyl (meth) acrylate), pentadecyl (meth) acrylate, hexadecyl (also referred to as palmityl (meth) acrylate), heptadecyl (meth) acrylate, octadecyl (meth) acrylate, and stearyl (meth) acrylate The alkyl group constituting the alkyl ester is a chain-structured alkyl (meth) acrylate having 1 to 18 carbon atoms, or the like.
Examples of the acrylic monomer having no functional group include alkoxyalkyl-containing (meth) acrylates such as methoxymethyl (meth) acrylate, methoxyethyl (meth) acrylate, ethoxymethyl (meth) acrylate, ethoxyethyl (meth) acrylate, and the like; (meth) acrylic esters having an aromatic group, including aryl (meth) acrylates such as phenyl (meth) acrylate; non-crosslinking (meth) acrylamides and derivatives thereof; non-crosslinkable (meth) acrylic acid esters having tertiary amino groups such as N, N-dimethylaminoethyl (meth) acrylate and N, N-dimethylaminopropyl (meth) acrylate.
The acrylic monomer not having the functional group constituting the acrylic polymer (a 11) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
Examples of the non-acrylic monomer include olefins such as ethylene and norbornene; vinyl acetate; styrene, and the like.
The non-acrylic monomer constituting the acrylic polymer (a 11) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the acrylic polymer (a 11), the ratio (content) of the amount of the structural unit derived from the acrylic monomer having the functional group to the total amount of the structural units constituting the acrylic polymer (a 11) is preferably 0.1 to 50% by mass, more preferably 1 to 40% by mass, and particularly preferably 3 to 30% by mass. By setting the ratio to such a range, the content of the energy ray-curable groups in the acrylic resin (a 1-1) obtained by copolymerizing the acrylic polymer (a 11) with the energy ray-curable compound (a 12) can be easily adjusted to a preferable range.
The acrylic polymer (a 11) constituting the acrylic resin (a 1-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the composition (IV-1), the ratio of the content of the acrylic resin (a 1-1) to the total content of the components other than the solvent (i.e., the content of the acrylic resin (a 1-1) of the film for forming an energy ray-curable protective film) is preferably 1 to 70% by mass, more preferably 5 to 60% by mass, and particularly preferably 10 to 50% by mass.
Energy ray-curable Compound (a 12)
The energy ray-curable compound (a 12) preferably has one or more groups selected from the group consisting of isocyanate groups, epoxy groups, and carboxyl groups as groups capable of reacting with the functional groups of the acrylic polymer (a 11), and more preferably the energy ray-curable compound (a 12) has isocyanate groups as the groups. For example, when the energy ray-curable compound (a 12) has an isocyanate group as the group, the isocyanate group easily reacts with the hydroxyl group of the acrylic polymer (a 11) having a hydroxyl group as the functional group.
The energy ray-curable compound (a 12) preferably has 1 to 5 energy ray-curable groups in one molecule, more preferably 1 to 3 energy ray-curable groups.
Examples of the energy ray-curable compound (a 12) include 2-methacryloxyethyl isocyanate, m-isopropenyl- α, α -dimethylbenzyl isocyanate, methacryloyl isocyanate, allyl isocyanate, and 1,1- (bisacryloxymethyl) ethyl isocyanate;
an acryl monoisocyanate compound obtained by reacting a diisocyanate compound or a polyisocyanate compound with hydroxyethyl (meth) acrylate;
And acryl monoisocyanate compounds obtained by reacting a diisocyanate compound or polyisocyanate compound with a polyol compound and hydroxyethyl (meth) acrylate.
Among them, the energy ray-curable compound (a 12) is preferably 2-methacryloyloxyethyl isocyanate.
The energy ray-curable compound (a 12) constituting the acrylic resin (a 1-1) may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the acrylic resin (a 1-1), the ratio of the content of the energy ray-curable group derived from the energy ray-curable compound (a 12) to the content of the functional group derived from the acrylic polymer (a 11) is preferably 20 to 120 mol%, more preferably 35 to 100 mol%, and particularly preferably 50 to 100 mol%. By making the ratio of the content in such a range, the adhesive force of the protective film after curing becomes larger. Further, when the energy ray-curable compound (a 12) is a monofunctional compound (one of the groups is present in one molecule), the upper limit of the content is 100 mol%, but when the energy ray-curable compound (a 12) is a polyfunctional compound (two or more of the groups are present in one molecule), the upper limit of the content may exceed 100 mol%.
The weight average molecular weight of the polymer (a 1)M W ) Preferably 100000 ～ 2000000, more preferably 300000 ～ 1500000.
When at least a part of the polymer (a 1) is crosslinked by a crosslinking agent, the polymer (a 1) may be a polymer obtained by polymerizing a monomer having a group reactive with the crosslinking agent, which is not any of the above monomers described as monomers constituting the acrylic polymer (a 11), and which is crosslinked at a group reactive with the crosslinking agent, or a polymer obtained by crosslinking at a group reactive with the functional group, which is derived from the energy ray curable compound (a 12)
The polymer (a 1) contained in the composition (IV-1) and the energy ray-curable protective film-forming film may be one kind only, or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
(Compound (a 2) having an energy ray-curable group and having a molecular weight of 100 to 80000)
The energy ray-curable group in the compound (a 2) having an energy ray-curable group and a molecular weight of 100 to 80000 includes a group containing an energy ray-curable double bond, and preferable groups include a (meth) acryloyl group, a vinyl group, and the like.
The compound (a 2) is not particularly limited as long as the above conditions are satisfied, and examples thereof include low molecular weight compounds having an energy ray-curable group, epoxy resins having an energy ray-curable group, phenol resins having an energy ray-curable group, and the like.
The low molecular weight compound having an energy ray-curable group in the compound (a 2) includes, for example, a polyfunctional monomer or oligomer, and the like, and an acrylic compound having a (meth) acryloyl group is preferable.
As the above-mentioned acrylic acid ester-based compound, examples thereof include 2-hydroxy-3- (meth) acryloxypropyl methacrylate, polyethylene glycol di (meth) acrylate, propoxylated ethoxylated bisphenol A di (meth) acrylate, 2-bis [4- ((meth) acryloxypolyethoxy) phenyl ] propane, ethoxylated bisphenol A di (meth) acrylate, 2-bis [4- ((meth) acryloxydiethoxy) phenyl ] propane, 9-bis [4- (2- (meth) acryloxyethoxy) phenyl ] fluorene, 2-bis [4- ((meth) acryloxypolypropoxy) phenyl ] propane tricyclodecane dimethanol di (meth) acrylate, 1, 10-decane diol di (meth) acrylate, 1, 6-hexanediol di (meth) acrylate, 1, 9-nonanediol di (meth) acrylate, dipropylene glycol di (meth) acrylate, tripropylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, polytetramethylene glycol di (meth) acrylate, ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, 2-bis [4- ((meth) acryloyloxyethoxy) phenyl ] propane, difunctional (meth) acrylates such as neopentyl glycol di (meth) acrylate, ethoxylated polypropylene glycol di (meth) acrylate, and 2-hydroxy-1, 3-di (meth) acryloxypropane;
Polyfunctional (meth) acrylates such as tris (2- (meth) acryloyloxyethyl) isocyanurate, epsilon-caprolactone-modified tris- (2- (meth) acryloyloxyethyl) isocyanurate, ethoxylated glycerol tri (meth) acrylate, pentaerythritol tri (meth) acrylate, trimethylolpropane tri (meth) acrylate, ditrimethylolpropane tetra (meth) acrylate, ethoxylated pentaerythritol tetra (meth) acrylate, dipentaerythritol poly (meth) acrylate, dipentaerythritol hexa (meth) acrylate;
polyfunctional (meth) acrylate oligomers such as urethane (meth) acrylate oligomers.
As the epoxy resin having an energy ray-curable group or the phenol resin having an energy ray-curable group in the compound (a 2), for example, the resin described in paragraph 0043 or the like of "japanese patent application laid-open No. 2013-194102" can be used. Such a resin also belongs to a resin constituting a thermosetting component described later, but is regarded as the compound (a 2) in the present invention.
The weight average molecular weight of the compound (a 2) is preferably 100 to 30000, more preferably 300 to 10000.
The compound (a 2) contained in the composition (IV-1) and the energy ray-curable protective film-forming film may be one kind only, or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
[ Polymer (b) having no energy ray-curable group ]
When the composition (IV-1) and the film for forming an energy ray-curable protective film contain the compound (a 2) as the energy ray-curable component (a), it is preferable that the composition further contain a polymer (b) having no energy ray-curable group.
The polymer (b) may be a substance at least a part of which is crosslinked by a crosslinking agent, or may be an uncrosslinked substance.
Examples of the polymer (b) having no energy ray-curable group include an acrylic polymer, a phenoxy resin, a urethane resin, a polyester, a rubber-based resin, and an acrylic urethane resin.
Among them, the polymer (b) is preferably an acrylic polymer (hereinafter, abbreviated as "acrylic polymer (b-1)").
The acrylic polymer (b-1) may be a known acrylic polymer, and may be, for example, a homopolymer of one acrylic monomer, a copolymer of two or more acrylic monomers, or a copolymer of one or more acrylic monomers and one or more monomers other than acrylic monomers (non-acrylic monomers).
Examples of the acrylic monomer constituting the acrylic polymer (b-1) include alkyl (meth) acrylates, (meth) acrylates having a cyclic skeleton, glycidyl group-containing (meth) acrylates, hydroxyl group-containing (meth) acrylates, and substituted amino group-containing (meth) acrylates. Here, "substituted amino group" is the same as that described hereinabove.
Examples of the alkyl (meth) acrylate include methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, sec-butyl (meth) acrylate, tert-butyl (meth) acrylate, pentyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, isooctyl (meth) acrylate, n-octyl (meth) acrylate, n-nonyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, undecyl (meth) acrylate, dodecyl (also referred to as lauryl (meth) acrylate, tridecyl (meth) acrylate, tetradecyl (also referred to as myristyl (meth) acrylate, pentadecyl (meth) acrylate, hexadecyl (also referred to as palmityl (meth) acrylate), heptadecyl (meth) acrylate, octadecyl (meth) acrylate, and the like The alkyl group constituting the alkyl ester is a chain-structured alkyl (meth) acrylate having 1 to 18 carbon atoms, or the like.
Examples of the (meth) acrylic acid ester having a cyclic skeleton include cycloalkyl (meth) acrylates such as isobornyl (meth) acrylate and dicyclopentyl (meth) acrylate;
aralkyl (meth) acrylates such as benzyl (meth) acrylate;
cycloalkenyl (meth) acrylates such as dicyclopentenyl (meth) acrylate;
and cycloalkenyloxyalkyl (meth) acrylates such as dicyclopentenyloxyethyl (meth) acrylate.
Examples of the glycidyl group-containing (meth) acrylate include glycidyl (meth) acrylate.
Examples of the hydroxyl group-containing (meth) acrylate include hydroxymethyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, and 4-hydroxybutyl (meth) acrylate.
Examples of the substituted amino group-containing (meth) acrylate include N-methylaminoethyl (meth) acrylate and the like.
Examples of the non-acrylic monomer constituting the acrylic polymer (b-1) include olefins such as ethylene and norbornene; vinyl acetate; styrene, and the like.
The polymer (b) having no energy ray-curable group, at least a part of which is crosslinked by a crosslinking agent, may be, for example, a polymer obtained by reacting a reactive functional group in the polymer (b) with a crosslinking agent.
The reactive functional group is not particularly limited, as long as it is appropriately selected according to the kind of the crosslinking agent and the like. For example, when the crosslinking agent is a polyisocyanate compound, the reactive functional group includes a hydroxyl group, a carboxyl group, an amino group, and the like, and among them, a hydroxyl group having high reactivity with an isocyanate group is preferable. In addition, when the crosslinking agent is an epoxy compound, examples of the reactive functional group include a carboxyl group, an amino group, an amide group, and the like, and among these, a carboxyl group having high reactivity with an epoxy group is preferable. However, in terms of preventing corrosion of the circuit of the semiconductor wafer or the semiconductor chip, it is preferable that the reactive functional group is a group other than a carboxyl group.
Examples of the polymer (b) having the reactive functional group and not having an energy ray-curable group include a polymer obtained by polymerizing a monomer having at least the reactive functional group. When the polymer (b) is the acrylic polymer (b-1), any one or both of the acrylic monomer and the non-acrylic monomer listed as monomers constituting the acrylic polymer (b-1) may be used. Examples of the polymer (b) having a hydroxyl group as a reactive functional group include a polymer obtained by polymerizing a hydroxyl group-containing (meth) acrylate, and other examples of the polymer (b) include a polymer obtained by polymerizing a monomer obtained by substituting the reactive functional group with one or more hydrogen atoms in the acrylic monomer or the non-acrylic monomer listed above.
In the polymer (b) having a reactive functional group, the proportion (content) of the amount of the structural unit derived from the monomer having a reactive functional group is preferably 1 to 20% by mass, more preferably 2 to 10% by mass, relative to the total amount of the structural units constituting it. By setting the ratio to such a range, the degree of crosslinking in the polymer (b) becomes a more preferable range.
From the viewpoint of improving the film-forming property of the composition (IV-1), the weight average molecular weight (M) of the polymer (b) having no energy ray-curable group is preferably W ) 10000 ～ 2000000, more preferably 100000 ～ 1500000. Here, the "weight average molecular weight" is the same as that described hereinabove.
The polymer (b) having no energy ray-curable group contained in the composition (IV-1) and the energy ray-curable protective film-forming film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
The composition (IV-1) may be a composition containing any one or both of the polymer (a 1) and the compound (a 2). When the composition (IV-1) contains the compound (a 2), it preferably further contains the polymer (b) having no energy ray-curable group, and in this case, it preferably further contains the compound (a 1). The composition (IV-1) may not contain the compound (a 2) but may contain the polymer (a 1) and the polymer (b) having no energy ray-curable group.
When the composition (IV-1) contains the polymer (a 1), the compound (a 2) and the polymer (b) having no energy ray-curable group, the content of the compound (a 2) is preferably 10 to 400 parts by mass, more preferably 30 to 350 parts by mass, relative to 100 parts by mass of the total content of the polymer (a 1) and the polymer (b) having no energy ray-curable group in the composition (IV-1).
In the composition (IV-1), the ratio of the total content of the energy ray-curable component (a) and the polymer (b) having no energy ray-curable group to the total content of the components other than the solvent (that is, the total content of the energy ray-curable component (a) and the polymer (b) having no energy ray-curable group) of the film for forming an energy ray-curable protective film) is preferably 5 to 90% by mass, more preferably 10 to 80% by mass, and particularly preferably 20 to 70% by mass. When the content of the energy ray-curable component is in such a range, the energy ray-curability of the film for forming an energy ray-curable protective film is further improved.
In addition to the energy ray-curable component, the composition (IV-1) may contain one or more selected from the group consisting of a thermosetting component, a filler, a coupling agent, a crosslinking agent, a photopolymerization initiator, a colorant, and a general-purpose additive, depending on the purpose.
For example, by using the composition (IV-1) containing the energy ray-curable component and the thermosetting component, the adhesion of the formed energy ray-curable protective film to an adherend is improved by heating, and the strength of the protective film formed from the energy ray-curable protective film is also improved.
Further, by using the composition (IV-1) containing the energy ray-curable component and the colorant, the formed film for forming an energy ray-curable protective film can exhibit the same effects as those when the film for forming a thermosetting protective film described hereinabove contains the colorant (I).
The thermosetting component (B), the filler (D), the coupling agent (E), the crosslinking agent (F), the photopolymerization initiator (H), the colorant (I) and the general-purpose additive (J) in the composition (IV-1) are the same as those in the composition (III-1), respectively.
In the composition (IV-1), the thermosetting component, the filler, the coupling agent, the crosslinking agent, the photopolymerization initiator, the colorant and the general-purpose additive may be used singly or in combination of two or more, and when two or more are used simultaneously, the combination and ratio thereof may be arbitrarily selected.
The content of the thermosetting component, filler, coupling agent, crosslinking agent, photopolymerization initiator, colorant and general-purpose additive in the composition (IV-1) is not particularly limited as long as it is appropriately adjusted according to the purpose.
Since the workability of the composition (IV-1) is improved by dilution, it is preferable to further contain a solvent.
Examples of the solvent contained in the composition (IV-1) include the same solvents as those in the composition (III-1).
The solvent contained in the composition (IV-1) may be one or two or more.
Method for producing composition for Forming energy ray-curable protective film
The composition for forming an energy ray-curable protective film such as the composition (IV-1) can be obtained by blending the components constituting the composition.
The order of addition in blending the components is not particularly limited, and two or more components may be added simultaneously.
When a solvent is used, the solvent may be mixed with any blend component other than the solvent to dilute the blend component in advance, or the solvent may be mixed with any blend component other than the solvent to use the blend component without diluting the blend component in advance.
The method of mixing the components at the time of blending is not particularly limited, and may be appropriately selected from the following known methods: a method of mixing by rotating a stirrer, a stirring blade, or the like; a method of mixing using a mixer; and a method of mixing by applying ultrasonic waves.
The temperature and time at the time of adding and mixing the components are not particularly limited as long as the components to be blended are not degraded, and the temperature is preferably 15 to 30 ℃.
Film for forming non-curable protective film
The non-curable protective film forming film does not exhibit a characteristic change due to curing, and in the present invention, the protective film is formed at the stage of attaching the film to the target portion such as the back surface of the semiconductor wafer.
Preferable examples of the film for forming a non-curable protective film include films for forming a non-curable protective film containing a thermoplastic resin.
< composition (V-1) for Forming non-curable protective film >
Examples of the composition for forming a non-curable protective film include a composition (V-1) for forming a non-curable protective film containing the thermoplastic resin (in this specification, the composition may be abbreviated as "composition (V-1)").
[ thermoplastic resin ]
The thermoplastic resin is not particularly limited.
More specifically, the thermoplastic resin may be, for example, the same resin as the resin which is not curable, such as an acrylic resin, polyester, polyurethane, phenoxy resin, polybutene, polybutadiene, polystyrene, etc., which is exemplified as the component contained in the above-mentioned composition (III-1).
The thermoplastic resin contained in the composition (V-1) and the film for forming a non-curable protective film may be one kind or two or more kinds, and when two or more kinds are used, the combination and ratio thereof may be arbitrarily selected.
In the composition (V-1), the ratio of the content of the thermoplastic resin to the total content of the components other than the solvent (that is, the content of the thermoplastic resin in the film for forming a non-curable protective film) is preferably 5 to 90% by mass, and may be, for example, any one of 10 to 80% by mass, 20 to 70% by mass, and the like.
In addition to the thermoplastic resin, the composition (V-1) may contain one or more selected from the group consisting of a filler, a coupling agent, a crosslinking agent, a colorant, and a general-purpose additive, depending on the purpose.
For example, by using the composition (V-1) containing the thermoplastic resin and the colorant, the film for forming a non-curable protective film exhibits the same effect as when the film for forming a thermosetting protective film described hereinabove contains the colorant (I).
The filler, coupling agent, crosslinking agent, colorant and general-purpose additive in the composition (V-1) are the same as the filler (D), coupling agent (E), crosslinking agent (F), colorant (I) and general-purpose additive (J) in the composition (III-1), respectively.
In the composition (V-1), the filler, the coupling agent, the crosslinking agent, the colorant and the general-purpose additive may be used singly or in combination, and when two or more are used simultaneously, the combination and ratio thereof may be arbitrarily selected.
The contents of the filler, the coupling agent, the crosslinking agent, the colorant and the general-purpose additive in the composition (V-1) are not particularly limited as long as they are appropriately adjusted according to the purpose.
Since the workability of the composition (V-1) is improved by dilution, it is preferable to further contain a solvent.
Examples of the solvent contained in the composition (V-1) include the same solvents as those in the composition (III-1).
The solvent contained in the composition (V-1) may be one or two or more.
Method for producing composition for forming non-curable protective film
The composition for forming a non-curable protective film such as the composition (V-1) can be obtained by blending the components for constituting the composition.
The order of addition in blending the components is not particularly limited, and two or more components may be added simultaneously.
When a solvent is used, the solvent may be mixed with any blend component other than the solvent to dilute the blend component in advance, or the solvent may be mixed with any blend component other than the solvent to use the blend component without diluting the blend component in advance.
The method of mixing the components at the time of blending is not particularly limited, and may be appropriately selected from the following known methods: a method of mixing by rotating a stirrer, a stirring blade, or the like; a method of mixing using a mixer; and a method of mixing by applying ultrasonic waves.
The temperature and time at the time of adding and mixing the components are not particularly limited as long as the components to be blended are not degraded, and the temperature is preferably 15 to 30 ℃.
Layer of @, other
The support sheet may be provided with other layers such as the intermediate layer, in addition to the base material and the adhesive layer, within a range that does not impair the effects of the present invention.
In addition to the base material, the adhesive layer, and the protective film forming film, the protective film forming composite sheet may be provided with other layers within a range that does not impair the effects of the present invention, and the other layers may be provided on the support sheet or may be disposed so as not to be in direct contact with the support sheet.
The other layer may be arbitrarily selected according to the purpose, and the kind thereof is not particularly limited.
As an embodiment of the support sheet and the protective film-forming composite sheet, for example, there may be mentioned: the adhesive layer is non-energy ray-curable, and contains a support sheet and a protective film-forming composite sheet, wherein the support sheet contains at least the acrylic polymer having a structural unit derived from an alkyl (meth) acrylate and a crosslinking agent, the crosslinking agent is contained in an amount of 0.3 to 50 parts by mass relative to 100 parts by mass of the acrylic polymer, and the maximum height roughness (Rz) of the first surface of the substrate is 0.01 to 8 [ mu ] m.
As an embodiment of the support sheet and the protective film-forming composite sheet, for example, there may be mentioned: the adhesive layer is non-energy ray-curable, and contains the acrylic polymer having at least a structural unit derived from an alkyl (meth) acrylate and a crosslinking agent, wherein the content of the crosslinking agent in the adhesive layer is 0.3 to 50 parts by mass relative to 100 parts by mass of the acrylic polymer, the acrylic polymer has a structural unit derived from an alkyl (meth) acrylate having 4 or more carbon atoms and a structural unit derived from a hydroxyl-containing monomer, and the maximum height roughness (Rz) of the first surface of the substrate is 0.01 to 8 [ mu ] m.
As an embodiment of the support sheet and the protective film-forming composite sheet, for example, there may be mentioned: the adhesive layer is non-energy ray-curable, and contains the acrylic polymer having at least a structural unit derived from an alkyl (meth) acrylate and a crosslinking agent, wherein the content of the crosslinking agent in the adhesive layer is 0.3 to 50 parts by mass relative to 100 parts by mass of the acrylic polymer, the acrylic polymer has a structural unit derived from an alkyl (meth) acrylate having 4 or more carbon atoms and a structural unit derived from a hydroxyl-containing monomer, and the content of the structural unit derived from the hydroxyl-containing monomer in the acrylic polymer is 1 to 35% by mass relative to the total amount of the structural units, and the maximum height (Rz) of the first surface of the base material is 0.01 to 8 [ mu ] m.
As an embodiment of the support sheet and the protective film-forming composite sheet, for example, there may be mentioned: the adhesive layer is non-energy ray-curable, and contains the acrylic polymer having at least a structural unit derived from an alkyl (meth) acrylate and a crosslinking agent, wherein the content of the crosslinking agent in the adhesive layer is 0.3 to 50 parts by mass relative to 100 parts by mass of the acrylic polymer, the acrylic polymer has a structural unit derived from an alkyl (meth) acrylate having 4 or more carbon atoms and a structural unit derived from a hydroxyl-containing monomer, the content of the structural unit derived from the hydroxyl-containing monomer in the acrylic polymer is 1 to 35% by mass relative to the total amount of the structural units, the crosslinking agent is an isocyanate-based crosslinking agent, and the maximum height roughness (Rz) of the first surface of the base material is 0.01 to 8 [ mu ] m.
As an embodiment of the support sheet and the composite sheet for forming a protective film, for example, there may be mentioned a support sheet and a composite sheet for forming a protective film, wherein the film for forming a protective film contains, with respect to the total content of all components except the solvent: 20 to 30% by mass of an acrylic polymer or the like as a polymer component; 12 to 20 mass% of bisphenol A type epoxy resin, dicyclopentadiene type epoxy resin, or the like as a thermosetting component; dicyandiamide as a thermosetting agent in an amount of 0.1 to 0.5 mass%; 0.1 to 0.5 mass% of 2-phenyl-4, 5-dihydroxymethylimidazole or the like as a curing accelerator; 45 to 60 mass% of silica filler and the like as filler, and 0.1 to 0.5 mass% of 3-aminopropyl trimethoxysilane and the like as coupling agent; and 1 to 5 mass% of a black pigment or the like as a colorant (wherein the sum of the contents of the respective components does not exceed 100 mass% relative to the total mass of all the components except the solvent of the film for forming a protective film).
Method for producing composite sheet for forming protective film
The composite sheet for forming a protective film can be produced, for example, by a production method (in this specification, sometimes referred to as "production method (S1)") having the following steps: a step of producing a laminate sheet (in this specification, sometimes referred to as a "laminate sheet producing step (1)") in which a base material, an adhesive layer, and a protective film-forming film are laminated in this order in the thickness direction thereof; a step of storing the laminate while pressing it in the thickness direction (in this specification, this step may be referred to as a "laminate storage step").
The formation method of each layer (substrate, adhesive layer, and protective film forming film) is as described above.
The manufacturing method (S1) is described in further detail below in terms of the respective steps.
Method for producing the same (S1)
Laminate production Process (1)
In the laminate manufacturing step (1), a laminate is manufactured in which a base material, an adhesive layer, and a protective film forming film are laminated in this order in the thickness direction.
In this step, for example, the above layers (base material, adhesive layer, protective film forming film, etc.) are laminated so as to have a corresponding positional relationship, whereby a laminate sheet having the same laminate structure as the target protective film forming composite sheet is produced.
In this specification, unless otherwise indicated, "laminate sheet" means a laminate sheet having the same laminate structure as the target protective film-forming composite sheet as described above, and for which the laminate sheet storage process has not been performed yet.
For example, in the case of laminating an adhesive layer on a substrate in the production of a support sheet, the adhesive composition may be applied to the substrate and dried as necessary.
On the other hand, for example, when a protective film forming film is further laminated on an adhesive layer laminated on a substrate, the protective film forming composition may be applied on the adhesive layer to directly form the protective film forming film. The same method can be used for the layers other than the protective film forming film, and the layers can be laminated on the adhesive layer using the composition for forming the layers. Thus, when a laminated structure of two continuous layers is formed using any one of the compositions, the composition may be further coated on the layer formed of the composition to form a new layer. Among these, the composition is preferably used to form a layer stacked later of the two layers on another release film, and the formed layer is bonded to the formed exposed surface of the other layer by bonding the exposed surface of the formed layer on the opposite side to the side in contact with the release film, thereby forming a continuous two-layer stacked structure. In this case, the composition is preferably applied to the release treated surface of the release film. After the laminated structure is formed, the release film may be removed as needed.
For example, when a composite sheet for forming a protective film (a composite sheet for forming a protective film in which a support sheet is a laminate of a base material and an adhesive layer) is produced by laminating an adhesive layer on a base material and laminating a film for forming a protective film on the adhesive layer, the adhesive layer is laminated on the base material by applying the adhesive composition to the base material and drying it if necessary, and the protective film-forming composition is further applied to a release film and dried if necessary, so that a film for forming a protective film is formed on the release film. Then, the protective film forming film is laminated on the adhesive layer by bonding the exposed surface of the protective film forming film to the exposed surface of the adhesive layer laminated on the substrate, thereby obtaining the laminated sheet.
In addition, when the adhesive layer is laminated on the substrate, as described above, the adhesive composition may be applied to the release film and dried as necessary, thereby forming the adhesive layer on the release film, and the adhesive layer may be laminated on the substrate by bonding the exposed surface of the layer to one surface of the substrate, instead of the method of applying the adhesive composition to the substrate.
In any of the methods, the release film may be removed at any timing after the formation of the target laminated structure.
In this way, the layers constituting the composite sheet for forming a protective film other than the base material may be formed on the release film in advance and laminated by a method of bonding to the surface of the target layer, and thus the layer in such a process may be appropriately selected as needed to manufacture the laminated sheet.
For example, the composite sheet for forming a protective film is usually stored in a state in which a release film is bonded to the surface of the outermost layer (for example, a protective film forming film) on the opposite side of the support sheet. Therefore, even when the composition for forming the layer constituting the outermost layer, such as the composition for forming a protective film, is applied onto the release film (preferably on the release treated surface thereof) and dried as necessary, the layer constituting the outermost layer is formed on the release film, and other layers are laminated on the exposed surface of the layer on the opposite side to the side in contact with the release film by any of the above methods, the laminated sheet can be obtained while the release film is adhered without removal.
When the protective film forming composite sheet includes the other layer, the step of providing the other layer may be appropriately added so that the other layer is positioned at an appropriate position at an appropriate timing in the laminate sheet manufacturing step (1).
The shape of the laminate sheet produced in the laminate sheet producing step (1) is not particularly limited. For example, a long laminate suitable for winding into a roll may be produced, or a laminate having another shape than a long laminate may be produced.
Laminate preservation Process
In the laminate storage step, the laminate is stored while being pressed in the thickness direction of the laminate.
In this step, the laminate sheet is stored while being pressed, for example, by the following method: a method of winding the long laminated sheet into a roll shape, keeping the state of the wound laminated sheet, and preserving the laminated sheet while applying pressure generated by winding to one side or both sides of the laminated sheet; and a method of storing a laminate sheet in an expanded state or a laminate sheet other than a long laminate sheet while applying pressure to one or both surfaces thereof, without winding the long laminate sheet into a roll shape.
When the long laminate is wound into a roll, the laminate is preferably wound in the longitudinal direction.
When winding the laminate sheet, for example, the winding tension is preferably 150 to 170N/m, the winding speed is preferably 45 to 55 m/min, and the taper ratio (lowering rate) of the winding tension is preferably 85 to 95%. By adopting such winding conditions, the laminated sheet can be stored under pressure at a more appropriate pressure. Such winding conditions are particularly suitable for use in, for example, a laminate sheet having a thickness of 100 to 300 μm, a width of 300 to 500mm, and a length of 40 to 270m, but the size of the laminate sheet is not limited thereto.
For example, the laminate may be wound at room temperature or at room temperature, or may be wound under the same temperature conditions as those when the wound laminate is stored under heat and pressure, as described later.
The laminate sheet wound in a roll shape may be stored at ordinary temperature or room temperature, but is preferably stored while being heated. By performing the heat and pressure storage in this manner, a composite sheet for forming a protective film can be obtained which is excellent in both the lamination property of the adhesive layer and the film for forming a protective film and the visibility of printing of the protective film or the film for forming a protective film via the support sheet.
The heating temperature at the time of storing the laminate sheet when it is wound into a roll is not particularly limited, but is preferably 53 to 75 ℃, more preferably 55 to 70 ℃, and particularly preferably 57 to 65 ℃.
The storage time when the laminate is wound into a roll is not particularly limited, but is preferably 24 to 720 hours (1 to 30 days), more preferably 48 to 480 hours (2 to 20 days), particularly preferably 72 to 240 hours (3 to 10 days).
The laminate wound into a roll may be, for example, the following laminate: the protective film forming film and the support sheet are processed into a specific shape, and a plurality of support sheets and protective film forming film laminates processed in this manner are attached to a long release film on the protective film forming side, and the laminates are aligned in the longitudinal direction of the release film. The protective film forming film in this case preferably has the same or substantially the same planar shape (generally circular shape) as the semiconductor wafer. Further, it is preferable that the support sheet at this time has the same or almost the same outer peripheral shape as the jig for fixing the support sheet in the cutting device. In this case, it is preferable that a band-shaped sheet is provided in the vicinity of the peripheral edge portion in the short side direction of the lamination surface of the laminate of the release film so as not to overlap the laminate. When the laminate sheet is wound into a roll, the sheet is used to suppress the occurrence of level differences (sometimes referred to as "lamination marks" in this specification) on the surface of the laminate. In the roll for laminating sheets, the lamination positions of the laminate (laminate of the support sheet and the protective film-forming film subjected to processing) are not uniform in the radial direction of the roll, and therefore the lamination marks are generated by applying a large pressure to the surface of the laminate. When the sheet is provided near the peripheral edge portion, the occurrence of the lamination mark can be suppressed without applying such a large pressure to the surface of the laminate.
When the long laminated sheet is in an expanded state and is not wound into a roll shape, and when the laminated sheet is not long, it is preferable to further laminate and store a plurality of the laminated sheets. In the case of stacking the laminated sheets in this manner, it is preferable that the positions of the plurality of laminated sheets and the peripheral edge portion are set to coincide with each other.
The shape and size of the laminated sheet (in other words, the plate-shaped laminated sheet) are not particularly limited. For example, it is preferable that: the shape and size of the laminate sheet are adjusted using a dicing apparatus according to the shape and size of the semiconductor wafer and the shape and size of a jig for fixing the support sheet in the dicing apparatus so as to be suitable for processing 1 semiconductor wafer.
The laminated sheet in the laminated state may be stored at ordinary temperature or room temperature, but is preferably stored while being heated. By performing the heat and pressure storage in this manner, a composite sheet for forming a protective film can be obtained which is excellent in both the lamination property of the adhesive layer and the film for forming a protective film and the visibility of printing of the protective film or the film for forming a protective film via the support sheet.
Further, the heating temperature and the storage time in the case of pressure-storing the laminated sheet in a laminated state can be set to be the same as in the case of winding the laminated sheet into a roll shape.
In the manufacturing method (S1), after the laminate storage step is completed, the laminate is pressed and heated as necessary, thereby obtaining the composite sheet for forming the target protective film.
In the lamination sheet producing step (1) of the producing method (S1), the lamination (bonding) order of the base material, the adhesive layer and the film for forming a protective film is not particularly limited, but when the support sheet is produced in advance (the adhesive layer is laminated on the base material in advance), and the film for forming a protective film is produced in advance, and the film for forming a protective film is laminated on the support sheet, before laminating the support sheet and the film for forming a protective film, either one or both of the support sheet and the film for forming a protective film may be stored under pressure by the same method as in the case of the laminate sheet. By separately storing the support sheet before lamination under pressure, the occurrence of the non-bonded region between the base material and the adhesive layer can be more effectively suppressed. Further, by separately storing the protective film-forming film before lamination under pressure, the roughness of the surface (second surface) of the protective film-forming film and the adhesive layer side of the protective film becomes small (smoothness becomes large), and the design of the protective film-forming film and the protective film is improved.
That is, the composite sheet for forming a protective film may be produced by, for example, a production method (in this specification, sometimes referred to as "production method (S2)") including: a step of forming a laminate sheet by laminating a protective film forming film on the adhesive layer of a support sheet formed by laminating a base material and an adhesive layer, the base material, the adhesive layer, and the protective film forming film being laminated in this order in the thickness direction (in this specification, this step is sometimes referred to as a "laminate sheet forming step (2)"); and a step (preservation step) of preserving the laminate while pressing it in the thickness direction, wherein the manufacturing method (S2) further includes a step (in this specification, the step of preserving the support sheet is sometimes referred to as a "support sheet preservation step", and the step of preserving the film for forming the protective film is sometimes referred to as a "protective film formation film preservation step") of preserving either or both of the support sheet and the film for forming the protective film while pressing it in the thickness direction, before the laminate manufacturing step (2) (that is, before the support sheet and the film for forming the protective film are laminated).
Method for producing the same (S2)
The laminate manufacturing step (2) is performed as the laminate manufacturing step (1), and one or both of the support sheet storage step and the protective film forming film storage step are additionally performed, and the manufacturing method (S2) is the same as the manufacturing method (S1) except for these points.
Laminate production Process (2)
The laminate manufacturing step (2) is the same as the laminate manufacturing step (1) in the manufacturing method (S1), except that the support sheet is previously manufactured as described above, and the protective film forming film is previously manufactured so that the lamination order of the respective layers is defined so that the protective film forming film is laminated on the support sheet.
Support sheet storage step, protective film-forming film storage step
The supporting sheet storage step and the protective film forming film storage step can be performed in the same manner as the laminated sheet storage step in the manufacturing method (S1), except that the object to be stored is not a laminated sheet, but a supporting sheet or a protective film forming film.
In this case, for example, the holding time of the support sheet and the protective film-forming film may be in the range of 24 to 720 hours (1 to 30 days), 48 to 480 hours (2 to 20 days), and 72 to 240 hours (3 to 10 days), respectively, independently, as in the case of the laminate sheet.
On the other hand, the supporting sheet storage step and the protective film forming film storage step may be performed in the same manner as the laminated sheet storage step in the manufacturing method (S1), except that the object to be stored is changed as described above, and the storage time of the object to be stored (supporting sheet or protective film forming film) is further changed.
In this case, for example, the holding time of the support sheet and the protective film-forming film may be independently in any of 12 to 720 hours (0.5 to 30 days), 12 to 480 hours (0.5 to 20 days), and 12 to 240 hours (0.5 to 10 days). However, these ranges are only one example of the preservation time.
One embodiment of the present invention is a method for producing a composite sheet for forming a protective film according to the present invention, comprising: a step of preparing a first laminate sheet including a base material, an adhesive layer, and a first release film in this order, wherein the surface of the base material on the adhesive layer side is a concave-convex surface, and a laminate film including a third release film, a protective film forming film, and a second release film in this order;
a step of storing either one or both of the first laminate and the laminate film at 53 to 75 ℃ for 24 to 720 hours;
A step of removing the first release film and the second release film, and bonding the exposed surface of the adhesive layer and the exposed surface of the protective film forming film to each other to produce a second laminate sheet including the base material, the adhesive layer, the protective film forming film, and the third release film in this order; a kind of electronic device with high-pressure air-conditioning system
A step of storing the second laminate at 53 to 75 ℃ for 24 to 720 hours,
the step of bonding the exposed surface of the adhesive layer and the exposed surface of the protective film-forming film is performed while pressing at a pressure of 0.3 to 0.8MPa at 53 to 75 ℃, more preferably at 58 to 63 ℃, and particularly preferably at 60 ℃.
In another embodiment of the present invention, the first laminate sheet, the laminate film, and the second laminate sheet are each a long laminate sheet or laminate film, and the storage step is the above-described manufacturing method in which the laminate sheets are wound into a roll and stored.
The "step of preparing a first laminate sheet having a substrate, an adhesive layer, and a first release film in this order, and a surface of the substrate on the adhesive layer side being a concave-convex surface, and a laminate film having a third release film, a protective film forming film, and a second release film in this order" can be performed by manufacturing either one or both of the first laminate sheet and the laminate film according to a method known per se or the manufacturing method (S1), or by obtaining a product manufactured by a third party.
The long laminate sheet or laminate film is wound into a roll and stored, whereby the laminate sheet or laminate film is stored in a pressurized state.
Examples
Hereinafter, the present invention will be described in more detail with reference to specific examples. The present invention is not limited to the examples shown below.
< raw Material for producing composition for Forming protective film >
The raw materials used for preparing the composition for forming a protective film are shown below.
Polymer component (A)
(A) -1: acrylic Polymer (weight-average molecular weight 37000glass transition temperature 6 ℃ C.) obtained by copolymerizing methyl acrylate (85 parts by mass) and 2-hydroxyethyl acrylate (15 parts by mass)
Thermosetting component (B1)
(B1) -1: bisphenol A type epoxy resin (jER 828 manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 184-194 g/eq)
(B1) -2: bisphenol A type epoxy resin (jER 1055 manufactured by Mitsubishi Chemical Corporation, epoxy equivalent weight 800-900 g/eq)
(B1) -3: dicyclopentadiene type epoxy resin (EPICLON HP-7200HH manufactured by DIC CORPORATION), epoxy equivalent of 255-260 g/eq)
Thermosetting agent (B2)
(B2) -1: dicyandiamide (ADEKA HARDENER EH-3636AS manufactured by ADEKA CORPORATION, thermally active latent epoxy resin curing agent, active hydrogen equivalent 21 g/eq)
Curing accelerator (C)
(C) -1: 2-phenyl-4, 5-dihydroxymethylimidazole (manufactured by SHIKOKU CHEMICALS CORPORATION, "CUREZOL 2 PHZ-PW")
Filler (D)
(D) -1: silica filler (silica filler surface-modified with epoxy compound, average particle size 0.5 μm "SC2050MA", manufactured by Admatechs Co., ltd.)
Coupling agent (E)
(E) -1: 3-aminopropyl trimethoxysilane (NUC CO., LTD. Manufactured "A-1110")
Coloring agent (I)
(I) -1: black pigment (Dainichiseika Color & Chemicals mfg. Co., ltd.)
Example 1
< production of supporting sheet >
(preparation of adhesive composition (I-4))
A non-energy ray-curable adhesive composition (I-4) having a solid content of 30% by mass, which contains an acrylic polymer (100 parts by mass, solid content) and a trifunctional xylylene diisocyanate-based crosslinking agent (Takenate D110N) (40 parts by mass, solid content) and further contains methyl ethyl ketone, toluene and ethyl acetate as a solvent was prepared. The acrylic polymer was a pre-copolymer having a weight average molecular weight of 800000, which was obtained by copolymerizing 2-ethylhexyl acrylate (2 EHA) (80 parts by mass) and 2-hydroxyethyl acrylate (HEA) (20 parts by mass).
(production of supporting sheet)
The adhesive composition (I-4) obtained above was applied to the release treated surface of a first release film (manufactured by Lintec Corporation as "SP-PET381031", 38 μm thick) obtained by releasing a polyethylene terephthalate film on one surface thereof by silicone treatment, and was dried by heating at 120 ℃ for 2 minutes, thereby forming a non-energy ray-curable adhesive layer. At this time, the conditions were set so that the thickness of the adhesive layer was 4. Mu.m, and the adhesive composition (I-4) was applied.
A substrate having a surface with a concave-convex shape and a smooth surface (bright surface) was produced by pressing a surface with a thickness of 80 μm against one surface of a polypropylene film (Mitsubishi Plastics, inc. Manufactured) while heating the concave-convex surface of a metal roll. The maximum height roughness (Rz) of the uneven surface of the substrate was measured with JIS B0601:2013 as a reference, and the result was 5. Mu.m.
Next, the uneven surface of the base material is bonded to the exposed surface of the adhesive layer obtained as described above, whereby a first laminate sheet is obtained in which the base material, the adhesive layer, and the first release film are laminated in this order in the thickness direction thereof. The resulting first laminate has a width (i.e., the width of the substrate and the adhesive layer) of 400mm and a length of at least 250m.
Next, the first laminate sheet having an overall size of 400mm×250m obtained as described above was wound around the ABS resin core in a roll shape under conditions of a winding tension of 160N/m, a winding speed of 50 m/min, and a taper ratio of the winding tension of 90%. At this time, the first laminate sheet is wound up so that the base material faces outward in the radial direction of the roller (in other words, so that the first release film is brought into contact with the core).
Then, the first laminate sheet in the form of a roll was left to stand under an air atmosphere at a temperature of 60℃for 7 days (168 hours).
In the above manner, the support sheet is obtained.
The support sheet can be immediately evaluated for a non-bonded region between the substrate and the adhesive layer, which will be described later. The support sheet is used for manufacturing a protective film-forming composite sheet described later.
< production of composite sheet for Forming protective film >
(preparation of composition for Forming protective film (III-1))
The polymer component (A) -1 (150 parts by mass), the thermosetting component (B1) -1 (60 parts by mass), (B1) -2 (10 parts by mass), (B1) -3 (30 parts by mass), (B2) -1 (2 parts by mass), the curing accelerator (C) -1 (2 parts by mass), the filler (D) -1 (320 parts by mass), the coupling agent (E) -1 (2 parts by mass) and the colorant (I) -1 (18 parts by mass) were dissolved or dispersed in a mixed solvent of methyl ethyl ketone, toluene and ethyl acetate, and stirred at 23℃to obtain a thermosetting protective film-forming composition (III-1) having a solid content of 51% by mass. The blending amounts shown here are all solid component amounts.
(production of protective film-forming film)
A thermosetting protective film-forming film having a thickness of 25 μm was produced by using a release film (third release film, "SP-PET381031" manufactured by Lintec Corporation, thickness 38 μm) obtained by releasing one side of a polyethylene terephthalate film by silicone treatment, and applying the protective film-forming composition (III-1) obtained above to the release-treated side of the third release film by using a doctor blade coater, and drying at 100℃for 2 minutes.
Further, a release-treated surface of a release film (second release film, 38 μm thick, "SP-PET381031" manufactured by Lintec Corporation) was bonded to the exposed surface of the obtained protective film-forming film on the side not provided with the third release film, whereby a laminated film having the second release film on one surface and the third release film on the other surface of the protective film-forming film was obtained. The obtained laminate film had a width (in other words, the width of the protective film forming film, the second release film, and the third release film) of 400mm and a length of at least 250m.
Next, the laminate film having an overall size of 400mm×250m obtained above was wound around the ABS resin core in a roll shape under conditions of a winding tension of 160N/m, a winding speed of 50 m/min, and a taper ratio of the winding tension of 90%. At this time, the laminated film is wound so that the third release film faces outward in the radial direction of the roller (in other words, so that the second release film is brought into contact with the core).
Then, the roll-shaped laminated film was left to stand under an air atmosphere at a temperature of 60℃for 7 days (168 hours).
In this way, a protective film forming film (laminated film) sandwiched between the second and third release films is obtained.
The laminated film is used for manufacturing a protective film-forming composite sheet described later.
(production of composite sheet for Forming protective film)
1 set (2) of rolls composed of heat-resistant silicone rubber having a hardness of 50 degrees were prepared in which the diameter was 5cm and the depth was 3mm from the surface.
The first release film was removed from the adhesive layer of the support sheet obtained as described above. Further, the second release film was removed from the laminated film obtained as described above.
The exposed surface of the adhesive layer obtained by removing the first release film was opposed to the exposed surface of the protective film forming film obtained by removing the second release film, and the support sheet was laminated with the protective film forming film to form a laminate, and the laminate was passed through the gap between the rolls at a temperature of 60 ℃ at a speed of 0.3 m/min, whereby the laminate was heated and pressed (heat lamination) at a pressure of 0.5 MPa. Thus, a second laminate sheet (protective film-forming composite sheet before storage) having the same laminate structure as the target protective film-forming composite sheet, which is formed by laminating the base material, the adhesive layer, the protective film-forming film, and the third release film in this order in the thickness direction thereof, was produced.
The resulting second laminate has a width (in other words, the width of the support sheet) of 400mm and a length of at least 250m.
Next, the second laminate sheet having an overall size of 400mm×250m obtained as described above was wound around the ABS resin core in a roll shape under conditions of a winding tension of 160N/m, a winding speed of 50 m/min, and a taper ratio of the winding tension of 90%. At this time, the second laminate sheet is wound up so that the base material faces outward in the radial direction of the roller (in other words, so that the third release film is brought into contact with the core).
Then, the second laminate sheet in the form of a roll was left to stand under an air atmosphere at a temperature of 60℃for 7 days (168 hours).
In this way, the composite sheet for forming a protective film of the present invention having the structure shown in fig. 2 is obtained.
Next, the protective film-forming composite sheet of the present invention after storage under such heating and pressurizing conditions was evaluated for the following items.
< evaluation of support sheet and protective film Forming composite sheet >
(evaluation of the presence or absence of non-bonded region between the substrate and the adhesive layer and the interlayer distance between the substrate and the adhesive layer)
Test pieces having a size of 3mm×3mm were cut from 5 points of the protective film-forming composite sheet obtained above. The 5 cut positions are set as: 1 part corresponding to the center part of the round protective film forming film; and 4 positions corresponding to positions near the peripheral edge and substantially point-symmetrical with respect to the central portion. Of these 5 cutting positions, the center-to-center distance between 1 position corresponding to the center portion and 4 positions other than the portion near the peripheral edge portion was 100mm.
Using a cross-section sample preparation apparatus (JEOL ltd. Manufactured "Cross Section Polisher SM-09010"), the conditions of an intermittent light valve (router) were set to "in"10 seconds "and" out "5 seconds, the voltage of the ion source was set to 3kV, the total polishing time was set to 24 hours, and the cross section was formed on the test piece. Only 1 section was newly formed on each 1 test piece.
The presence or absence of a non-bonded region between the base material and the adhesive layer of the obtained composite sheet for forming a protective film was confirmed by using a scanning electron microscope (SEM, manufactured by KEYENCE CORPORATION). When the non-bonded region is present, the interlayer distance is measured. In this case, the confirmation and measurement were performed over the entire areas of the substrate and the adhesive layer.
In addition, when the interlayer distance is measured, a cross section is formed in the protective film-forming composite sheet by the same method as in the case of the test piece, and the interlayer distance between the base material and the adhesive layer is measured in the cross section.
(evaluation of the presence or absence of non-bonded region between the adhesive layer and the protective film-forming film and the interlayer distance between the adhesive layer and the protective film-forming film)
The presence or absence of a non-bonded region between the adhesive layer and the protective film-forming film of the obtained composite sheet for forming a protective film was confirmed using a scanning electron microscope (SEM, hitachi High-Tech corporation, manufactured by "FE-SEM S-4700"). Here, when the size of the non-bonded region between the adhesive layer and the protective film forming film is 0.05 μm or more, it is considered that the non-bonded region exists. When the non-bonded region is present, the interlayer distance is measured. The observation area of the cross section of the test piece at this time was set to be an area of 1mm in the center portion in the width direction of the cross section (in other words, an area of 1mm in the width direction centered on the midpoints of the 2 end portions in the width direction of the cross section).
In addition, when the interlayer distance is measured, a cross section is formed in the protective film forming composite sheet by the same method as in the case of the test piece, and the interlayer distance between the adhesive layer and the protective film forming film is measured in this cross section.
Then, the non-bonded region between the adhesive layer and the protective film forming film was evaluated according to the following criteria. The number of non-bonded regions between the adhesive layer and the protective film forming film was the total of the number of non-bonded regions in the 5 test pieces. The results are shown in Table 1.
(evaluation of the number of non-bonded regions)
A: the number of non-bonded regions is 5 or less.
B: the number of non-bonded regions is 6 to 9.
C: the number of non-bonded regions is 10 or more.
(evaluation of printing visibility of protective film)
The third release film was removed from the protective film-forming composite sheet obtained as described above, and the exposed surface (surface opposite to the adhesive layer side) of the protective film-forming film thus produced was attached to the back surface of the 8-inch semiconductor wafer. The application at this time was performed using a chip mounter (manufactured by Lintec Corporation as "RAD 2700"). Thus, a first laminated structure is produced in which the base material, the adhesive layer, the protective film forming film, and the semiconductor wafer are laminated in this order in the thickness direction.
Next, a laser printing apparatus (EO technologies co., ltd., "CSM 300M") was used to irradiate the surface (second surface) of the protective film forming film on the adhesive layer side of the first laminated structure with laser light via the support sheet, thereby printing. At this time, characters with a printing size of 0.3mm×0.2mm are printed.
Next, the printing (laser printing) of the protective film forming film was observed with the naked eye through the support sheet, and the visibility of the printing (letters) was evaluated according to the following criteria. The results are shown in Table 1. The visibility of printing of the protective film-forming film evaluated here can be regarded as equivalent to the visibility of printing of the protective film.
A: the printing is clear and can be easily visually recognized.
B: the print is slightly blurred and cannot be easily visually recognized.
C: the print was not clear and could not be visually recognized.
Then, the support sheet (base material and adhesive layer) is peeled off from the protective film-forming film. The thickness of the printed lines (letters) formed on the protective film forming film was measured using an optical microscope (manufactured by KEYENCE CORPORATION). As a result, the thickness of the lines was 40 μm or more, and the printing was clear.
(evaluation of adhesion between substrate and adhesive layer)
The adhesion between the base material in the support sheet and the adhesive layer was tested by forming 100 grids in a checkerboard pattern of 1mm square on the adhesive layer of the support sheet using a rotary cutter (rotary cutter) in accordance with JIS K5600-5-6, and pressing an adhesive tape (Cellotagene [ NICHIBAN CO., LTD. Manufactured by registered trademark ]), and then peeling the adhesive tape at an angle of about 60℃for 0.5 seconds to 1.0 seconds, and counting the number of remaining grids in the 100 grids at this time. The adhesion was evaluated based on the following criteria. The results are shown in Table 1.
A: the number of residual grids is more than 90.
B: the number of residual meshes is 70 or more and less than 90.
C: the number of residual grids is less than 70.
(measurement of thickness of adhesive layer)
The newly formed cross sections of the 5 test pieces obtained by the above method were observed using a Scanning Electron Microscope (SEM), and the minimum and maximum values of the thickness of the adhesive layer of each test piece were obtained. The observation area of the cross section of the test piece at this time was set to be an area of 1mm in the width direction of the cross section.
Then, the average value of these minimum values is used as the S value of the adhesive layer, and the average value of these maximum values is used as the L value of the adhesive layer.
(evaluation of the roughness of the second surface of the protective film-forming film)
The third release film was removed from the protective film-forming composite sheet obtained as described above, and the exposed surface (the surface opposite to the adhesive layer side, the first surface) of the protective film-forming film thus produced was attached to the back surface of an 8-inch semiconductor wafer (thickness 200 μm). The application at this time was performed using a chip mounter (manufactured by Lintec Corporation as "RAD 2700"). Thus, a first laminated structure is produced in which the base material, the adhesive layer, the protective film forming film, and the semiconductor wafer are laminated in this order in the thickness direction.
Next, the state of the surface (second surface) on the adhesive layer side in the protective film forming film attached to the semiconductor wafer was confirmed with the naked eye via the support sheet, and evaluated according to the following criteria.
The roughness of the second surface of the protective film-forming film evaluated here can be regarded as equivalent to the roughness of the surface (second surface) of the protective film on the opposite side from the semiconductor wafer side.
A: the smoothness or the roughness is extremely small, and the appearance of the protective film-forming film is not impaired.
B: the surface roughness was extremely small, and the appearance of the protective film-forming film was not impaired.
C: the roughness is large, and the appearance of the protective film forming film is impaired.
< production of support sheet and composite sheet for Forming protective film > evaluation of support sheet and composite sheet for Forming protective film >
Example 2
A support sheet and a protective film-forming composite sheet were produced and evaluated in the same manner as in example 1, except that the first laminate sheet was not left to stand under an air atmosphere at a temperature of 60 ℃ for 7 days (168 hours) during the production of the support sheet (in other words, the first laminate sheet was wound into a roll shape and regarded as a support sheet).
The results are shown in Table 1.
Example 3
In the production of the film for forming a protective film, the laminated film was not left to stand under an air atmosphere at a temperature of 60 ℃ for 7 days (168 hours) (in other words, the laminated film was wound into a roll shape and regarded as a film for forming a protective film); in the production of the support sheet, the storage period of the first laminate sheet was set to 3 days; and in the production of the composite sheet for forming a protective film, the support sheet and the composite sheet for forming a protective film were produced and evaluated in the same manner as in example 1 except that the storage period of the second laminate sheet was set to 3 days.
The results are shown in Table 1.
Comparative example 1
In the production of the film for forming a protective film, the laminated film was not left to stand under an air atmosphere at a temperature of 60 ℃ for 7 days (168 hours) (in other words, the laminated film was wound into a roll shape and regarded as a film for forming a protective film); in the production of the support sheet, the storage temperature of the first laminate sheet was set at 23 ℃; the first laminate was not left to stand under an air atmosphere at a temperature of 60 ℃ for 7 days (168 hours) (in other words, the first laminate was wound into a roll shape and regarded as a support sheet); and in the production of the composite sheet for forming a protective film, the second laminate sheet was not left to stand under an air atmosphere at a temperature of 60 ℃ for 7 days (168 hours) (in other words, the second laminate sheet was wound into a roll shape and regarded as a composite sheet for forming a protective film), and the support sheet and the composite sheet for forming a protective film were produced and evaluated by the same method as in the case of example 1 except for these points.
The results are shown in Table 1.
Comparative example 2
In the production of the film for forming a protective film, the laminated film was not left to stand under an air atmosphere at a temperature of 60 ℃ for 7 days (168 hours) (in other words, the laminated film was wound into a roll shape and regarded as a film for forming a protective film); in the production of the support sheet, the storage temperature of the first laminate sheet was set at 23 ℃; the first laminate was not left to stand under an air atmosphere at a temperature of 60 ℃ for 7 days (168 hours) (in other words, the first laminate was wound into a roll shape and regarded as a support sheet); and in the production of a composite sheet for forming a protective film, a laminate obtained by laminating a support sheet and a film for forming a protective film was laminated at room temperature to produce a second laminate sheet, and the second laminate sheet was wound up in a roll shape and regarded as a composite sheet for forming a protective film without leaving the second laminate sheet to stand for 7 days (168 hours) under an air atmosphere at a temperature of 60 ℃, and the composite sheet for forming a support sheet and a protective film was produced and evaluated in the same manner as in the case of example 1 except for these points.
The results are shown in Table 1.
TABLE 1
From the above results, it is apparent that in examples 1 to 3, the interlayer distance between the protective film forming film and the non-bonded region of the support sheet was 0.3 μm or less, and the smaller the interlayer distance was, the more excellent the lamination property between the base material and the adhesive layer was. In these examples, the protective film (film for forming a protective film) was excellent in printing visibility.
In contrast, in comparative example 1, the interlayer distance between the protective film forming film and the non-bonded region of the support sheet was 0.7 μm, and the lamination properties of the base material and the adhesive layer were poor. Further, since the non-bonded region is present in this manner, the protective film (protective film forming film) provided with the support sheet therebetween is also poor in printing visibility. The reason for this is considered to be that since the interlayer distance between the protective film forming film and the non-bonded region of the support sheet is large, voids in the non-bonded region tend to expand during laser printing, and thus printability is reduced.
Industrial applicability
The invention can be used for manufacturing semiconductor devices.
Description of the reference numerals
1A, 1B, 1C: a protective film-forming composite sheet; 10: a support sheet; 10a: a protective film-forming film-side surface (first surface) of the support sheet; 11: a substrate; 11a: the adhesive layer side surface (first surface, uneven surface) of the base material; 12: an adhesive layer; 12a: a surface (first surface) of the adhesive layer opposite to the substrate side; 12b: a substrate-side surface (second surface) of the adhesive layer; 13. 23: a protective film forming film; 13b: a surface (second surface) of the protective film forming film on the adhesive layer side; t (T) a : thickness of the adhesive layer; t (T) a1 : minimum value of thickness of the adhesive layer; t (T) a2 : maximum value of the thickness of the adhesive layer.
Claims (8)
1. A composite sheet for forming a protective film, comprising a support sheet having a base material and an adhesive layer provided on the base material, wherein a film for forming a protective film is provided on the adhesive layer in the support sheet,
the surface of the base material on the adhesive layer side is a concave-convex surface,
the roughness (Rz) of the uneven surface at the maximum height measured in accordance with JIS B0601:2013 is 0.01-8 mu m,
the thickness of the adhesive layer is 1.5-9 mu m,
and cutting test pieces from 5 parts of the composite sheet for forming the protective film, and measuring interlayer distances between the protective film forming films and non-bonding areas of the support sheets of the 5 test pieces, wherein the interlayer distances are less than or equal to 0.5 μm.
2. The composite sheet for forming a protective film according to claim 1, wherein the roughness (Rz) of the uneven surface at the maximum height measured in accordance with JIS B0601:2013 is 5 to 8 μm.
3. The protective film-forming composite sheet according to claim 2, wherein the adhesive layer has a thickness of 1.5 to 4 μm.
4. The composite sheet for forming a protective film according to any one of claims 1 to 3, wherein the adhesive layer is in direct contact with the uneven surface of the base material.
5. The composite sheet for forming a protective film according to any one of claims 1 to 3, wherein when the number of non-bonded regions between the protective film forming film and the supporting sheet is observed in a region of 1mm in the center portion in the width direction of the cross section of the test piece, the total number of the test pieces is 5 or less.
6. The composite sheet for forming a protective film according to claim 4, wherein when the number of non-bonded regions of the protective film forming film and the supporting sheet is observed in a region of 1mm in the center portion in the width direction of the cross section of the test piece, the total number of the test pieces is 5 or less.
7. A method for producing a composite sheet for forming a protective film,
the composite sheet for forming a protective film comprises a support sheet having a base material and an adhesive layer on the base material, and a protective film forming film on the adhesive layer in the support sheet,
the surface of the base material on the adhesive layer side is a concave-convex surface,
cutting test pieces from 5 positions of the composite sheet for forming a protective film, and measuring the interlayer distance between the film for forming a protective film and the non-bonded region of the support sheet in each of the 5 test pieces, wherein the interlayer distance is 0.5 μm or less,
The manufacturing method comprises the following steps:
a step of preparing a first laminate sheet including a base material, an adhesive layer, and a first release film in this order, wherein the surface of the base material on the adhesive layer side is a concave-convex surface, and a laminate film including a third release film, a protective film forming film, and a second release film in this order;
a step of storing either one or both of the first laminate and the laminate film at 53 to 75 ℃ for 24 to 720 hours;
a step of removing the first release film and the second release film, and bonding the exposed surface of the adhesive layer and the exposed surface of the protective film forming film to each other to produce a second laminate sheet including the base material, the adhesive layer, the protective film forming film, and the third release film in this order; a kind of electronic device with high-pressure air-conditioning system
A step of storing the second laminate at 53 to 75 ℃ for 24 to 720 hours,
the step of bonding the exposed surface of the adhesive layer and the exposed surface of the protective film-forming film is performed while pressing at a pressure of 0.3 to 0.8MPa at 53 to 75 ℃.
8. The production method according to claim 7, wherein the first laminate sheet, the laminate film, and the second laminate sheet are each a long laminate sheet or laminate film, and are wound into a roll and stored in the storage step.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2018/013624 WO2019187010A1 (en) | 2018-03-30 | 2018-03-30 | Composite sheet for protective film formation and method for producing same |
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| Publication Number | Publication Date |
|---|---|
| CN111466014A CN111466014A (en) | 2020-07-28 |
| CN111466014B true CN111466014B (en) | 2024-01-02 |
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| CN201880079841.2A Active CN111466014B (en) | 2018-03-30 | 2018-03-30 | Composite sheet for forming protective film and method for producing same |
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| Country | Link |
|---|---|
| JP (1) | JP7203087B2 (en) |
| KR (1) | KR102524205B1 (en) |
| CN (1) | CN111466014B (en) |
| TW (1) | TW201941934A (en) |
| WO (1) | WO2019187010A1 (en) |
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| CN105074878A (en) * | 2013-03-27 | 2015-11-18 | 琳得科株式会社 | Composite sheet for forming protective film |
| CN106103083A (en) * | 2014-02-18 | 2016-11-09 | 夏普株式会社 | Stacked film and method for adhering film |
| JPWO2015016064A1 (en) * | 2013-08-01 | 2017-03-02 | リンテック株式会社 | Composite sheet for protective film formation |
| JPWO2016027883A1 (en) * | 2014-08-22 | 2017-06-01 | リンテック株式会社 | Protective film forming sheet and manufacturing method of semiconductor chip with protective film |
| WO2017163971A1 (en) * | 2016-03-24 | 2017-09-28 | リンテック株式会社 | Supporting sheet and composite sheet for protective film formation |
| JP6298226B1 (en) * | 2017-03-30 | 2018-03-20 | リンテック株式会社 | Composite sheet for protective film formation |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5432853B2 (en) | 1971-10-11 | 1979-10-17 | ||
| JP2012015342A (en) * | 2010-06-30 | 2012-01-19 | Dainippon Printing Co Ltd | Separator-less type dicing tape |
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2018
- 2018-03-30 WO PCT/JP2018/013624 patent/WO2019187010A1/en active Application Filing
- 2018-03-30 JP JP2020508797A patent/JP7203087B2/en active Active
- 2018-03-30 CN CN201880079841.2A patent/CN111466014B/en active Active
- 2018-03-30 KR KR1020207016240A patent/KR102524205B1/en active IP Right Grant
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2019
- 2019-03-19 TW TW108109279A patent/TW201941934A/en unknown
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5841194A (en) * | 1996-03-19 | 1998-11-24 | Matsushita Electric Industrial Co., Ltd. | Chip carrier with peripheral stiffener and semiconductor device using the same |
| EP0926732A2 (en) * | 1997-12-10 | 1999-06-30 | Nitto Denko Corporation | Process for producing semiconductor device and pressure-sensitive adhesive sheet for surface protection |
| JP2011190339A (en) * | 2010-03-15 | 2011-09-29 | Shin-Etsu Chemical Co Ltd | Adhesive composition, semiconductor wafer protective film-forming sheet |
| CN105074878A (en) * | 2013-03-27 | 2015-11-18 | 琳得科株式会社 | Composite sheet for forming protective film |
| JPWO2015016064A1 (en) * | 2013-08-01 | 2017-03-02 | リンテック株式会社 | Composite sheet for protective film formation |
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| JPWO2016027883A1 (en) * | 2014-08-22 | 2017-06-01 | リンテック株式会社 | Protective film forming sheet and manufacturing method of semiconductor chip with protective film |
| WO2017163971A1 (en) * | 2016-03-24 | 2017-09-28 | リンテック株式会社 | Supporting sheet and composite sheet for protective film formation |
| JP6298226B1 (en) * | 2017-03-30 | 2018-03-20 | リンテック株式会社 | Composite sheet for protective film formation |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201941934A (en) | 2019-11-01 |
| KR20200138152A (en) | 2020-12-09 |
| KR102524205B1 (en) | 2023-04-20 |
| JPWO2019187010A1 (en) | 2021-03-18 |
| WO2019187010A1 (en) | 2019-10-03 |
| CN111466014A (en) | 2020-07-28 |
| JP7203087B2 (en) | 2023-01-12 |
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