NO306529B1 - Transistor - Google Patents
TransistorInfo
- Publication number
- NO306529B1 NO306529B1 NO985472A NO985472A NO306529B1 NO 306529 B1 NO306529 B1 NO 306529B1 NO 985472 A NO985472 A NO 985472A NO 985472 A NO985472 A NO 985472A NO 306529 B1 NO306529 B1 NO 306529B1
- Authority
- NO
- Norway
- Prior art keywords
- electrode
- effect transistor
- field
- transistor
- semiconductor material
- Prior art date
Links
- 230000005669 field effect Effects 0.000 abstract 6
- 239000004065 semiconductor Substances 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66848—Unipolar field-effect transistors with a Schottky gate, i.e. MESFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66893—Unipolar field-effect transistors with a PN junction gate, i.e. JFET
- H01L29/66916—Unipolar field-effect transistors with a PN junction gate, i.e. JFET with a PN heterojunction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78642—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
- H01L29/8083—Vertical transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
- Electronic Switches (AREA)
Priority Applications (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO985472A NO306529B1 (no) | 1998-01-16 | 1998-11-23 | Transistor |
AT99905363T ATE222027T1 (de) | 1998-01-16 | 1999-01-14 | Feldeffekttransistor |
DK99905363T DK1051754T3 (da) | 1998-01-16 | 1999-01-14 | Felteffekttransistor |
CA002317759A CA2317759C (en) | 1998-01-16 | 1999-01-14 | A field-effect transistor |
DE69902441T DE69902441T2 (de) | 1998-01-16 | 1999-01-14 | Feldeffekttransistor |
JP2000530947A JP3495703B2 (ja) | 1998-01-16 | 1999-01-14 | 電界効果トランジスタおよび電界効果トランジスタの製造方法 |
US09/380,611 US6429457B1 (en) | 1998-01-16 | 1999-01-14 | Field-effect transistor |
ES99905363T ES2179619T3 (es) | 1998-01-16 | 1999-01-14 | Transistor con efecto de campo. |
AU25520/99A AU732134C (en) | 1998-01-16 | 1999-01-14 | A field-effect transistor |
PCT/NO1999/000013 WO1999040631A1 (no) | 1998-01-16 | 1999-01-14 | A field effect transistor |
EP99905363A EP1051754B1 (en) | 1998-01-16 | 1999-01-14 | A field-effect transistor |
KR10-2000-7007821A KR100368818B1 (ko) | 1998-01-16 | 1999-01-14 | 전계 효과 트랜지스터 |
RU2000121548/28A RU2189665C2 (ru) | 1998-01-16 | 1999-01-14 | Полевой транзистор |
CNB998039977A CN1210808C (zh) | 1998-01-16 | 1999-01-14 | 场效应晶体管 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO980224A NO306528B1 (no) | 1998-01-16 | 1998-01-16 | Felteffekttransistor |
NO985472A NO306529B1 (no) | 1998-01-16 | 1998-11-23 | Transistor |
Publications (3)
Publication Number | Publication Date |
---|---|
NO985472D0 NO985472D0 (no) | 1998-11-23 |
NO985472L NO985472L (no) | 1999-07-19 |
NO306529B1 true NO306529B1 (no) | 1999-11-15 |
Family
ID=26648813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO985472A NO306529B1 (no) | 1998-01-16 | 1998-11-23 | Transistor |
Country Status (14)
Country | Link |
---|---|
US (1) | US6429457B1 (no) |
EP (1) | EP1051754B1 (no) |
JP (1) | JP3495703B2 (no) |
KR (1) | KR100368818B1 (no) |
CN (1) | CN1210808C (no) |
AT (1) | ATE222027T1 (no) |
AU (1) | AU732134C (no) |
CA (1) | CA2317759C (no) |
DE (1) | DE69902441T2 (no) |
DK (1) | DK1051754T3 (no) |
ES (1) | ES2179619T3 (no) |
NO (1) | NO306529B1 (no) |
RU (1) | RU2189665C2 (no) |
WO (1) | WO1999040631A1 (no) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6859548B2 (en) | 1996-09-25 | 2005-02-22 | Kabushiki Kaisha Toshiba | Ultrasonic picture processing method and ultrasonic picture processing apparatus |
NO315728B1 (no) * | 2000-03-22 | 2003-10-13 | Thin Film Electronics Asa | Multidimensjonal adresseringsarkitektur for elektroniske innretninger |
JP2004507096A (ja) * | 2000-08-18 | 2004-03-04 | シーメンス アクチエンゲゼルシヤフト | 有機電界効果トランジスタ(ofet),該有機電界効果トランジスタの製造方法、前記有機電界効果トランジスタから形成される集積回路、及び該集積回路の使用 |
DE10045192A1 (de) | 2000-09-13 | 2002-04-04 | Siemens Ag | Organischer Datenspeicher, RFID-Tag mit organischem Datenspeicher, Verwendung eines organischen Datenspeichers |
AU2002340795A1 (en) | 2001-05-07 | 2002-11-18 | Advanced Micro Devices, Inc. | Reversible field-programmable electric interconnects |
CN100403450C (zh) * | 2001-05-07 | 2008-07-16 | 先进微装置公司 | 具有自组装聚合物薄膜的内存装置及其制造方法 |
WO2002091495A2 (en) * | 2001-05-07 | 2002-11-14 | Coatue Corporation | Molecular memory device |
US6627944B2 (en) | 2001-05-07 | 2003-09-30 | Advanced Micro Devices, Inc. | Floating gate memory device using composite molecular material |
WO2002091385A1 (en) * | 2001-05-07 | 2002-11-14 | Advanced Micro Devices, Inc. | Molecular memory cell |
KR100895901B1 (ko) * | 2001-05-07 | 2009-05-04 | 어드밴스드 마이크로 디바이시즈, 인코포레이티드 | 메모리 효과를 갖는 스위치 요소 |
JP4841751B2 (ja) * | 2001-06-01 | 2011-12-21 | 株式会社半導体エネルギー研究所 | 有機半導体装置及びその作製方法 |
US6756620B2 (en) * | 2001-06-29 | 2004-06-29 | Intel Corporation | Low-voltage and interface damage-free polymer memory device |
US6624457B2 (en) | 2001-07-20 | 2003-09-23 | Intel Corporation | Stepped structure for a multi-rank, stacked polymer memory device and method of making same |
US6858481B2 (en) | 2001-08-13 | 2005-02-22 | Advanced Micro Devices, Inc. | Memory device with active and passive layers |
US6838720B2 (en) * | 2001-08-13 | 2005-01-04 | Advanced Micro Devices, Inc. | Memory device with active passive layers |
US6768157B2 (en) | 2001-08-13 | 2004-07-27 | Advanced Micro Devices, Inc. | Memory device |
US6806526B2 (en) | 2001-08-13 | 2004-10-19 | Advanced Micro Devices, Inc. | Memory device |
US6992323B2 (en) | 2001-08-13 | 2006-01-31 | Advanced Micro Devices, Inc. | Memory cell |
JP4247377B2 (ja) * | 2001-12-28 | 2009-04-02 | 独立行政法人産業技術総合研究所 | 薄膜トランジスタ及びその製造方法 |
KR100433407B1 (ko) * | 2002-02-06 | 2004-05-31 | 삼성광주전자 주식회사 | 업라이트형 진공청소기 |
US6885146B2 (en) * | 2002-03-14 | 2005-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising substrates, contrast medium and barrier layers between contrast medium and each of substrates |
EP1367659B1 (en) * | 2002-05-21 | 2012-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Organic field effect transistor |
KR100417461B1 (ko) * | 2002-07-12 | 2004-02-05 | 주식회사 하이닉스반도체 | 반도체 소자의 제조 방법 |
US6821811B2 (en) * | 2002-08-02 | 2004-11-23 | Semiconductor Energy Laboratory Co., Ltd. | Organic thin film transistor and method of manufacturing the same, and semiconductor device having the organic thin film transistor |
CN100364108C (zh) * | 2002-08-28 | 2008-01-23 | 中国科学院长春应用化学研究所 | 含有有机半导体的夹心型场效应晶体管及制作方法 |
US7012276B2 (en) * | 2002-09-17 | 2006-03-14 | Advanced Micro Devices, Inc. | Organic thin film Zener diodes |
CN1186822C (zh) | 2002-09-23 | 2005-01-26 | 中国科学院长春应用化学研究所 | 有机薄膜晶体管及制备方法 |
US7132680B2 (en) * | 2003-06-09 | 2006-11-07 | International Business Machines Corporation | Organic field-effect transistor and method of making same based on polymerizable self-assembled monolayers |
EP1498957A1 (de) * | 2003-07-14 | 2005-01-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Feldeffekttransistor und Verfahren zum Herstellen eines Feldeffekttransistors |
US7554121B2 (en) * | 2003-12-26 | 2009-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Organic semiconductor device |
US7659138B2 (en) * | 2003-12-26 | 2010-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing an organic semiconductor element |
RU2004133958A (ru) * | 2004-11-23 | 2006-05-10 | Брон Цой (RU) | Пучковый микроэлектронный элемент |
JP4667096B2 (ja) * | 2005-03-25 | 2011-04-06 | 株式会社半導体エネルギー研究所 | 有機半導体装置及びその作製方法 |
CN101661993B (zh) * | 2008-08-28 | 2011-10-26 | 中国科学院微电子研究所 | 应用于有机电路的双金属电极结构及其制备方法 |
GB0912034D0 (en) | 2009-07-10 | 2009-08-19 | Cambridge Entpr Ltd | Patterning |
GB0913456D0 (en) | 2009-08-03 | 2009-09-16 | Cambridge Entpr Ltd | Printed electronic device |
CN102779855B (zh) * | 2012-07-06 | 2015-08-12 | 哈尔滨理工大学 | 双肖特基结氧化锌半导体薄膜晶体管及制作方法 |
US10032924B2 (en) | 2014-03-31 | 2018-07-24 | The Hong Kong University Of Science And Technology | Metal oxide thin film transistor with channel, source and drain regions respectively capped with covers of different gas permeability |
CN104465989B (zh) * | 2014-12-26 | 2017-02-22 | 中国科学院微电子研究所 | 三端原子开关器件及其制备方法 |
US9653493B2 (en) * | 2015-06-12 | 2017-05-16 | Eastman Kodak Company | Bottom-gate and top-gate VTFTs on common structure |
US10504939B2 (en) | 2017-02-21 | 2019-12-10 | The Hong Kong University Of Science And Technology | Integration of silicon thin-film transistors and metal-oxide thin film transistors |
CN109037347A (zh) * | 2018-07-28 | 2018-12-18 | 张玉英 | 一种具有三明治结构的钛酸铋薄膜晶体管及制备方法 |
KR102551995B1 (ko) * | 2018-11-16 | 2023-07-06 | 엘지디스플레이 주식회사 | 수직 구조 트랜지스터 및 전자장치 |
KR102580260B1 (ko) | 2021-10-12 | 2023-09-19 | 성균관대학교산학협력단 | 수직 성장한 결정립을 가지는 활성층을 포함하는 스페이스-프리 수직 전계 효과 트랜지스터 |
CN117810269A (zh) * | 2021-11-15 | 2024-04-02 | 武汉华星光电半导体显示技术有限公司 | 薄膜晶体管、电子装置及其制备方法及显示装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4587540A (en) * | 1982-04-05 | 1986-05-06 | International Business Machines Corporation | Vertical MESFET with mesa step defining gate length |
JPS59208783A (ja) * | 1983-05-12 | 1984-11-27 | Seiko Instr & Electronics Ltd | 薄膜トランジスタ |
US4735918A (en) * | 1985-05-24 | 1988-04-05 | Hughes Aircraft Company | Vertical channel field effect transistor |
US4677451A (en) * | 1985-05-24 | 1987-06-30 | Hughes Aircraft Company | Vertical channel field effect transistor |
US4903089A (en) * | 1988-02-02 | 1990-02-20 | Massachusetts Institute Of Technology | Vertical transistor device fabricated with semiconductor regrowth |
US5047812A (en) * | 1989-02-27 | 1991-09-10 | Motorola, Inc. | Insulated gate field effect device |
US5206531A (en) * | 1990-03-19 | 1993-04-27 | Lockheed Sanders, Inc. | Semiconductor device having a control gate with reduced semiconductor contact |
JPH0793441B2 (ja) | 1992-04-24 | 1995-10-09 | ヒュンダイ エレクトロニクス インダストリーズ カンパニー リミテッド | 薄膜トランジスタ及びその製造方法 |
US5668391A (en) * | 1995-08-02 | 1997-09-16 | Lg Semicon Co., Ltd. | Vertical thin film transistor |
US5780911A (en) | 1995-11-29 | 1998-07-14 | Lg Semicon Co., Ltd. | Thin film transistor and method for fabricating the same |
US5990509A (en) * | 1997-01-22 | 1999-11-23 | International Business Machines Corporation | 2F-square memory cell for gigabit memory applications |
-
1998
- 1998-11-23 NO NO985472A patent/NO306529B1/no not_active Application Discontinuation
-
1999
- 1999-01-14 DE DE69902441T patent/DE69902441T2/de not_active Expired - Fee Related
- 1999-01-14 CA CA002317759A patent/CA2317759C/en not_active Expired - Fee Related
- 1999-01-14 US US09/380,611 patent/US6429457B1/en not_active Expired - Fee Related
- 1999-01-14 CN CNB998039977A patent/CN1210808C/zh not_active Expired - Fee Related
- 1999-01-14 DK DK99905363T patent/DK1051754T3/da active
- 1999-01-14 JP JP2000530947A patent/JP3495703B2/ja not_active Expired - Fee Related
- 1999-01-14 AT AT99905363T patent/ATE222027T1/de not_active IP Right Cessation
- 1999-01-14 AU AU25520/99A patent/AU732134C/en not_active Ceased
- 1999-01-14 ES ES99905363T patent/ES2179619T3/es not_active Expired - Lifetime
- 1999-01-14 WO PCT/NO1999/000013 patent/WO1999040631A1/no active IP Right Grant
- 1999-01-14 EP EP99905363A patent/EP1051754B1/en not_active Expired - Lifetime
- 1999-01-14 RU RU2000121548/28A patent/RU2189665C2/ru not_active IP Right Cessation
- 1999-01-14 KR KR10-2000-7007821A patent/KR100368818B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2002503035A (ja) | 2002-01-29 |
CN1293825A (zh) | 2001-05-02 |
JP3495703B2 (ja) | 2004-02-09 |
EP1051754B1 (en) | 2002-08-07 |
CA2317759C (en) | 2004-06-22 |
CN1210808C (zh) | 2005-07-13 |
KR100368818B1 (ko) | 2003-01-24 |
NO985472D0 (no) | 1998-11-23 |
RU2189665C2 (ru) | 2002-09-20 |
AU2552099A (en) | 1999-08-23 |
ATE222027T1 (de) | 2002-08-15 |
WO1999040631A1 (no) | 1999-08-12 |
EP1051754A1 (en) | 2000-11-15 |
KR20010034186A (ko) | 2001-04-25 |
DE69902441D1 (de) | 2002-09-12 |
US6429457B1 (en) | 2002-08-06 |
ES2179619T3 (es) | 2003-01-16 |
DE69902441T2 (de) | 2003-04-17 |
NO985472L (no) | 1999-07-19 |
DK1051754T3 (da) | 2002-09-02 |
AU732134B2 (en) | 2001-04-12 |
AU732134C (en) | 2001-11-22 |
CA2317759A1 (en) | 1999-08-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69902441D1 (de) | Feldeffekttransistor | |
KR970007965B1 (en) | Structure and fabrication method of tft | |
RU2000121548A (ru) | Полевой транзистор | |
MY123831A (en) | Method for manufacturing a semiconductor device | |
TW429628B (en) | Transistor having substantially isolated body and method of making the same | |
KR900019245A (ko) | 박막트랜지스터 및 그 제조방법 | |
TW340965B (en) | Process to separate the doping of polygate and source drain regions in dual gate field effect transistors | |
KR940016937A (ko) | 트렌치 구조를 이용한 불균일 도우핑 채널을 갖는 모스 트랜지스터(mosfet) 및 그 제조방법 | |
ATE476752T1 (de) | Lateraler sic-basierter feldeffekttransitor, dessen herstellungsverfahren und der gebrauch eines solchen transistors | |
KR970013120A (ko) | 박막 트랜지스터 및 그 제조 방법 | |
KR940020593A (ko) | 실리콘 온 인슐레이터(soi) 구조의 모스 전계효과 트랜지스터(mosfet) 및 그의 제조방법 | |
KR970003682A (ko) | 저도핑 드레인 구조의 모스 트랜지스터 제조 방법 | |
JPS57199266A (en) | Field effect transistor and manufacture thereof | |
KR970054416A (ko) | 모스 전계효과 트랜지스터의 제조방법 | |
KR940016894A (ko) | 박막트랜지스터 제조방법 | |
KR900015351A (ko) | 비정질규소 박막트랜지스터 및 그 제조방법 | |
TW198130B (en) | Structure and method of manufacturing thin film transistors | |
KR940003093A (ko) | 반도체 장치의 박막 트랜지스터 제조방법 | |
KR950012645A (ko) | 반도체 장치의 박막 트랜지스터 제조방법 | |
KR950034459A (ko) | 반도체소자 제조방법 | |
JPS6484746A (en) | Semiconductor device | |
KR950007167A (ko) | 메스패트(mesfet) 제조방법 | |
KR960002702A (ko) | 모스펫 및 그 제조방법 | |
KR940016892A (ko) | 불순물 농도가 선형적으로 변하는 소오스-드레인을 갖는 폴리실리콘 박막 트랜지스터의 제조방법 | |
JPS6437059A (en) | Manufacture of semiconductor device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FC2A | Withdrawal, rejection or dismissal of laid open patent application |