NO20022045L - Tidsreferanseoscillator med mikromekanisk ringresonator - Google Patents

Tidsreferanseoscillator med mikromekanisk ringresonator

Info

Publication number
NO20022045L
NO20022045L NO20022045A NO20022045A NO20022045L NO 20022045 L NO20022045 L NO 20022045L NO 20022045 A NO20022045 A NO 20022045A NO 20022045 A NO20022045 A NO 20022045A NO 20022045 L NO20022045 L NO 20022045L
Authority
NO
Norway
Prior art keywords
oscillator
resonator
substrate
outer ring
oscillation
Prior art date
Application number
NO20022045A
Other languages
English (en)
Norwegian (no)
Other versions
NO20022045D0 (no
Inventor
Metin Giousouf
Heinz Kueck
Rainer Platz
Original Assignee
Ebauchesfabrik Eta Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebauchesfabrik Eta Ag filed Critical Ebauchesfabrik Eta Ag
Publication of NO20022045D0 publication Critical patent/NO20022045D0/no
Publication of NO20022045L publication Critical patent/NO20022045L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Micromachines (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Electric Clocks (AREA)
  • Gyroscopes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
NO20022045A 1999-11-02 2002-04-30 Tidsreferanseoscillator med mikromekanisk ringresonator NO20022045L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19952763 1999-11-02
PCT/CH2000/000583 WO2001033711A1 (en) 1999-11-02 2000-11-01 Time base comprising an integrated micromechanical ring resonator

Publications (2)

Publication Number Publication Date
NO20022045D0 NO20022045D0 (no) 2002-04-30
NO20022045L true NO20022045L (no) 2002-06-13

Family

ID=7927687

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20022045A NO20022045L (no) 1999-11-02 2002-04-30 Tidsreferanseoscillator med mikromekanisk ringresonator

Country Status (14)

Country Link
US (3) US6686807B1 (de)
EP (3) EP1313215B1 (de)
JP (3) JP4745575B2 (de)
KR (1) KR100776474B1 (de)
CN (3) CN100420148C (de)
AT (1) ATE271276T1 (de)
AU (1) AU771159B2 (de)
CA (1) CA2389980A1 (de)
DE (1) DE60012217T2 (de)
HK (1) HK1050433A1 (de)
IL (1) IL149397A0 (de)
NO (1) NO20022045L (de)
RU (1) RU2249299C2 (de)
WO (1) WO2001033711A1 (de)

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CN112352143B (zh) 2018-06-29 2024-09-24 斯塔特拉Ip控股公司 双输出微机电谐振器及其制造和操作方法
CN109353985B (zh) * 2018-10-15 2021-06-11 北京航天控制仪器研究所 一种微机械静电驱动的弧形梳齿结构
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CN113175923A (zh) * 2021-05-19 2021-07-27 瑞声开泰科技(武汉)有限公司 一种mems波动陀螺仪
CN116147600A (zh) * 2021-10-27 2023-05-23 苏州明皜传感科技股份有限公司 微机电多轴角速度感测器
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Also Published As

Publication number Publication date
DE60012217D1 (de) 2004-08-19
CN100420148C (zh) 2008-09-17
WO2001033711A1 (en) 2001-05-10
EP1313216A3 (de) 2005-07-13
JP4745907B2 (ja) 2011-08-10
EP1313215A2 (de) 2003-05-21
US20040041643A1 (en) 2004-03-04
KR100776474B1 (ko) 2007-11-16
EP1313215B1 (de) 2012-05-02
RU2002114350A (ru) 2004-03-10
AU771159B2 (en) 2004-03-18
CN100483941C (zh) 2009-04-29
JP2007010675A (ja) 2007-01-18
AU7897900A (en) 2001-05-14
EP1232563B1 (de) 2004-07-14
RU2249299C2 (ru) 2005-03-27
KR20020074147A (ko) 2002-09-28
EP1313216B1 (de) 2011-08-10
ATE271276T1 (de) 2004-07-15
US6894576B2 (en) 2005-05-17
IL149397A0 (en) 2002-11-10
NO20022045D0 (no) 2002-04-30
CN1265547C (zh) 2006-07-19
US6859113B2 (en) 2005-02-22
EP1313215A3 (de) 2005-07-13
US20040004520A1 (en) 2004-01-08
JP2007024901A (ja) 2007-02-01
CN1387696A (zh) 2002-12-25
EP1313216A2 (de) 2003-05-21
CN1549443A (zh) 2004-11-24
JP4745575B2 (ja) 2011-08-10
JP4814715B2 (ja) 2011-11-16
DE60012217T2 (de) 2005-08-18
JP2003530540A (ja) 2003-10-14
CN1592101A (zh) 2005-03-09
HK1050433A1 (en) 2003-06-20
EP1232563A1 (de) 2002-08-21
US6686807B1 (en) 2004-02-03
CA2389980A1 (en) 2001-05-10

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