DE60012217D1 - Zeitbezug mit einem integrierten micromechanischen ringresonator - Google Patents

Zeitbezug mit einem integrierten micromechanischen ringresonator

Info

Publication number
DE60012217D1
DE60012217D1 DE60012217T DE60012217T DE60012217D1 DE 60012217 D1 DE60012217 D1 DE 60012217D1 DE 60012217 T DE60012217 T DE 60012217T DE 60012217 T DE60012217 T DE 60012217T DE 60012217 D1 DE60012217 D1 DE 60012217D1
Authority
DE
Germany
Prior art keywords
resonator
oscillation
substrate
frequency
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60012217T
Other languages
English (en)
Other versions
DE60012217T2 (de
Inventor
Metin Giousouf
Heinz Kueck
Rainer Platz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
Original Assignee
ETA SA Manufacture Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Priority to DE60012217T priority Critical patent/DE60012217T2/de
Application granted granted Critical
Publication of DE60012217D1 publication Critical patent/DE60012217D1/de
Publication of DE60012217T2 publication Critical patent/DE60012217T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Micromachines (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Electric Clocks (AREA)
  • Gyroscopes (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
  • Measuring Fluid Pressure (AREA)
DE60012217T 1999-11-02 2000-11-01 Zeitbezug mit einem integrierten micromechanischen ringresonator Expired - Lifetime DE60012217T2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE60012217T DE60012217T2 (de) 1999-11-02 2000-11-01 Zeitbezug mit einem integrierten micromechanischen ringresonator

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19952763 1999-11-02
DE19952763 1999-11-02
PCT/CH2000/000583 WO2001033711A1 (en) 1999-11-02 2000-11-01 Time base comprising an integrated micromechanical ring resonator
DE60012217T DE60012217T2 (de) 1999-11-02 2000-11-01 Zeitbezug mit einem integrierten micromechanischen ringresonator

Publications (2)

Publication Number Publication Date
DE60012217D1 true DE60012217D1 (de) 2004-08-19
DE60012217T2 DE60012217T2 (de) 2005-08-18

Family

ID=7927687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60012217T Expired - Lifetime DE60012217T2 (de) 1999-11-02 2000-11-01 Zeitbezug mit einem integrierten micromechanischen ringresonator

Country Status (14)

Country Link
US (3) US6686807B1 (de)
EP (3) EP1313215B1 (de)
JP (3) JP4745575B2 (de)
KR (1) KR100776474B1 (de)
CN (3) CN100420148C (de)
AT (1) ATE271276T1 (de)
AU (1) AU771159B2 (de)
CA (1) CA2389980A1 (de)
DE (1) DE60012217T2 (de)
HK (1) HK1050433A1 (de)
IL (1) IL149397A0 (de)
NO (1) NO20022045L (de)
RU (1) RU2249299C2 (de)
WO (1) WO2001033711A1 (de)

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Also Published As

Publication number Publication date
US6686807B1 (en) 2004-02-03
US20040041643A1 (en) 2004-03-04
IL149397A0 (en) 2002-11-10
ATE271276T1 (de) 2004-07-15
CN1592101A (zh) 2005-03-09
KR100776474B1 (ko) 2007-11-16
JP4814715B2 (ja) 2011-11-16
NO20022045D0 (no) 2002-04-30
EP1232563B1 (de) 2004-07-14
JP4745575B2 (ja) 2011-08-10
JP4745907B2 (ja) 2011-08-10
AU771159B2 (en) 2004-03-18
RU2002114350A (ru) 2004-03-10
KR20020074147A (ko) 2002-09-28
CN100420148C (zh) 2008-09-17
US6894576B2 (en) 2005-05-17
EP1313216B1 (de) 2011-08-10
CN100483941C (zh) 2009-04-29
CN1549443A (zh) 2004-11-24
NO20022045L (no) 2002-06-13
JP2007010675A (ja) 2007-01-18
AU7897900A (en) 2001-05-14
EP1313215A3 (de) 2005-07-13
EP1313216A3 (de) 2005-07-13
JP2007024901A (ja) 2007-02-01
JP2003530540A (ja) 2003-10-14
EP1232563A1 (de) 2002-08-21
WO2001033711A1 (en) 2001-05-10
DE60012217T2 (de) 2005-08-18
CA2389980A1 (en) 2001-05-10
RU2249299C2 (ru) 2005-03-27
EP1313216A2 (de) 2003-05-21
HK1050433A1 (en) 2003-06-20
EP1313215A2 (de) 2003-05-21
CN1265547C (zh) 2006-07-19
EP1313215B1 (de) 2012-05-02
CN1387696A (zh) 2002-12-25
US20040004520A1 (en) 2004-01-08
US6859113B2 (en) 2005-02-22

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