NL1015506A1 - Organische anti-reflecterende deklaagpolymeren en werkwijze ter bereiding hiervan. - Google Patents
Organische anti-reflecterende deklaagpolymeren en werkwijze ter bereiding hiervan.Info
- Publication number
- NL1015506A1 NL1015506A1 NL1015506A NL1015506A NL1015506A1 NL 1015506 A1 NL1015506 A1 NL 1015506A1 NL 1015506 A NL1015506 A NL 1015506A NL 1015506 A NL1015506 A NL 1015506A NL 1015506 A1 NL1015506 A1 NL 1015506A1
- Authority
- NL
- Netherlands
- Prior art keywords
- preparation
- reflective coating
- organic anti
- coating polymers
- polymers
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G75/00—Macromolecular compounds obtained by reactions forming a linkage containing sulfur with or without nitrogen, oxygen, or carbon in the main chain of the macromolecule
- C08G75/20—Polysulfones
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C303/00—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides
- C07C303/26—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids
- C07C303/28—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids by reaction of hydroxy compounds with sulfonic acids or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F120/00—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
- C08F120/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F120/52—Amides or imides
- C08F120/54—Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide
- C08F120/58—Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide containing oxygen in addition to the carbonamido oxygen, e.g. N-methylolacrylamide, N-acryloyl morpholine
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-1999-0024470A KR100400243B1 (ko) | 1999-06-26 | 1999-06-26 | 유기 반사방지 중합체 및 그의 제조방법 |
KR19990024470 | 1999-06-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
NL1015506A1 true NL1015506A1 (nl) | 2000-12-28 |
NL1015506C2 NL1015506C2 (nl) | 2001-04-09 |
Family
ID=19595633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL1015506A NL1015506C2 (nl) | 1999-06-26 | 2000-06-23 | Organische anti-reflecterende deklaagpolymeren en werkwijze ter bereiding hiervan. |
Country Status (10)
Country | Link |
---|---|
US (1) | US6423797B1 (nl) |
JP (1) | JP4024456B2 (nl) |
KR (1) | KR100400243B1 (nl) |
CN (1) | CN1290713A (nl) |
DE (1) | DE10028344A1 (nl) |
FR (1) | FR2795417B1 (nl) |
GB (1) | GB2351731B (nl) |
IT (1) | IT1320211B1 (nl) |
NL (1) | NL1015506C2 (nl) |
TW (1) | TW552270B (nl) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2398787B (en) * | 2000-06-13 | 2004-10-27 | Hyundai Electronics Ind | Organic anti-reflective polymer and preparation thereof |
KR100470938B1 (ko) * | 2002-05-17 | 2005-02-22 | (주)모레이 | 유기 난반사 방지막 형성용 광흡수성 고분자, 이를포함하는 조성물, 및 이를 이용한 반도체 소자 패턴의형성 방법 |
JP4798938B2 (ja) * | 2003-04-11 | 2011-10-19 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | フォトレジストシステム |
DE10349764B4 (de) * | 2003-10-24 | 2006-08-24 | Infineon Technologies Ag | Hartmaske zur Strukturierung einer Schicht und Verfahren zur Generierung einer Hartmaske für die Strukturierung einer Schicht |
KR100570211B1 (ko) * | 2003-12-24 | 2006-04-12 | 주식회사 하이닉스반도체 | 유기 반사방지막용 가교제 중합체, 이를 포함하는 유기반사 방지막 조성물 및 이를 이용한 포토레지스트의 패턴형성 방법 |
JP4509106B2 (ja) * | 2004-05-14 | 2010-07-21 | 日産化学工業株式会社 | ビニルエーテル化合物を含む反射防止膜形成組成物 |
KR100574496B1 (ko) | 2004-12-15 | 2006-04-27 | 주식회사 하이닉스반도체 | 상부반사방지막 중합체, 그 제조방법 및 이를 함유하는상부반사방지막 조성물 |
US7666575B2 (en) * | 2006-10-18 | 2010-02-23 | Az Electronic Materials Usa Corp | Antireflective coating compositions |
JP5842503B2 (ja) * | 2010-09-29 | 2016-01-13 | Jsr株式会社 | レジスト下層膜形成用組成物、レジスト下層膜及びその形成方法 |
WO2023017728A1 (ja) * | 2021-08-10 | 2023-02-16 | Jsr株式会社 | 半導体基板の製造方法及びレジスト下層膜形成用組成物 |
CN113913075B (zh) * | 2021-10-25 | 2022-09-20 | 嘉庚创新实验室 | 一种抗反射涂层组合物及可交联聚合物 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL185727B (nl) * | 1953-03-11 | Inst Francais Du Petrole | Werkwijze voor het stoomkraken van zware koolwaterstofvoedingen. | |
CS150825B1 (nl) * | 1971-02-11 | 1973-09-17 | ||
JPS5736283B2 (nl) * | 1973-01-25 | 1982-08-03 | ||
DE3100077A1 (de) | 1981-01-03 | 1982-08-05 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches gemisch, das einen naphthochinondiazidsulfonsaeureester enthaelt, und verfahren zur herstellung des naphthochinondiazidsulfonsaeureesters |
US4822718A (en) | 1982-09-30 | 1989-04-18 | Brewer Science, Inc. | Light absorbing coating |
US5674648A (en) | 1984-08-06 | 1997-10-07 | Brewer Science, Inc. | Anti-reflective coating |
JP2740837B2 (ja) | 1987-01-30 | 1998-04-15 | コニカ株式会社 | 多色転写画像形成方法 |
US5476913A (en) * | 1992-07-06 | 1995-12-19 | Otsuka Kagaku Kabushiki Kaisha | Polymerizable monomer, polymer thereof and process for preparing same |
US5652317A (en) * | 1996-08-16 | 1997-07-29 | Hoechst Celanese Corporation | Antireflective coatings for photoresist compositions |
JP3707632B2 (ja) * | 1996-10-18 | 2005-10-19 | 富士写真フイルム株式会社 | 反射防止膜用組成物 |
JP3852868B2 (ja) * | 1997-02-06 | 2006-12-06 | 富士写真フイルム株式会社 | 反射防止膜材料組成物及びそれを用いたレジストパターン形成方法 |
US5981145A (en) * | 1997-04-30 | 1999-11-09 | Clariant Finance (Bvi) Limited | Light absorbing polymers |
JP4053631B2 (ja) * | 1997-10-08 | 2008-02-27 | Azエレクトロニックマテリアルズ株式会社 | 反射防止膜又は光吸収膜用組成物及びこれに用いる重合体 |
TW457403B (en) | 1998-07-03 | 2001-10-01 | Clariant Int Ltd | Composition for forming a radiation absorbing coating containing blocked isocyanate compound and anti-reflective coating formed therefrom |
KR20000046952A (ko) * | 1998-12-31 | 2000-07-25 | 김영환 | 유기 난반사방지 중합체 및 그의 제조방법 |
-
1999
- 1999-06-26 KR KR10-1999-0024470A patent/KR100400243B1/ko not_active IP Right Cessation
-
2000
- 2000-06-03 TW TW089110843A patent/TW552270B/zh not_active IP Right Cessation
- 2000-06-08 DE DE10028344A patent/DE10028344A1/de not_active Withdrawn
- 2000-06-13 GB GB0014259A patent/GB2351731B/en not_active Expired - Fee Related
- 2000-06-19 JP JP2000182835A patent/JP4024456B2/ja not_active Expired - Fee Related
- 2000-06-22 IT IT2000TO000613A patent/IT1320211B1/it active
- 2000-06-23 NL NL1015506A patent/NL1015506C2/nl not_active IP Right Cessation
- 2000-06-23 US US09/603,561 patent/US6423797B1/en not_active Expired - Lifetime
- 2000-06-26 FR FR0008146A patent/FR2795417B1/fr not_active Expired - Fee Related
- 2000-06-26 CN CN00107858A patent/CN1290713A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN1290713A (zh) | 2001-04-11 |
FR2795417B1 (fr) | 2002-02-15 |
KR20010003934A (ko) | 2001-01-15 |
ITTO20000613A0 (it) | 2000-06-22 |
KR100400243B1 (ko) | 2003-10-01 |
FR2795417A1 (fr) | 2000-12-29 |
GB2351731A (en) | 2001-01-10 |
IT1320211B1 (it) | 2003-11-26 |
NL1015506C2 (nl) | 2001-04-09 |
GB2351731B (en) | 2004-02-11 |
ITTO20000613A1 (it) | 2000-12-27 |
JP4024456B2 (ja) | 2007-12-19 |
TW552270B (en) | 2003-09-11 |
JP2001048859A (ja) | 2001-02-20 |
US6423797B1 (en) | 2002-07-23 |
DE10028344A1 (de) | 2001-01-25 |
GB0014259D0 (en) | 2000-08-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NL1014997A1 (nl) | Organisch anti-reflecterend deklaagmateriaal en de bereiding hiervan. | |
NL1014639A1 (nl) | Organisch anti-reflecterend deklaagmateriaal en de bereiding hiervan. | |
DE60016449D1 (de) | Beschichtungsverfahren | |
ATE440872T1 (de) | Polymerisationsverfahren | |
ATE380203T1 (de) | Polymerizationsverfahren | |
ID29399A (id) | Proses polimerisasi | |
GB2351288B (en) | Organic anti-reflective polymer and method for manufacturing thereof | |
ITTO991027A0 (it) | Polimeri per rivestimenti anti-riflettenti e procedimento per la loro preparazione. | |
NO986023L (no) | Vannbasert, farmas°ytisk preparat | |
GB2357512B (en) | Organic anti-reflective coating polymer and preparation thereof | |
GB2357509B (en) | Organic anti-reflective coating polymer and preparation thereof | |
DE60036571D1 (de) | Rotationsbeschichtungsverfahren | |
AR021708A1 (es) | Proceso para elaborar un recubrimiento antiadherente. | |
DE60045339D1 (de) | Extrusionsbeschichtungsverfahren | |
IT1320867B1 (it) | Polimero organico per rivestimento antiriflesso e sua preparazione. | |
DE60017531D1 (de) | Gegenstände mit bebildbaren Beschichtungen | |
GB0031422D0 (en) | Organic anti-reflective coating polymer and preparation thereof | |
NL1015506A1 (nl) | Organische anti-reflecterende deklaagpolymeren en werkwijze ter bereiding hiervan. | |
GB2354005B (en) | Organic polymer for organic anti-reflective coating layer and preparation thereof | |
DE50011352D1 (de) | NiAl-B-Phase enthaltende Beschichtung | |
PT1198642E (pt) | Cor de revestimento | |
SG106646A1 (en) | Organic anti-reflective coating polymers, anti-reflective coating composition comprising the same and preparation methods thereof | |
GB2364306B (en) | Organic anti-reflective coating polymer,anti-reflective coating composition comprising the same and method of preparation thereof | |
DE19980077D2 (de) | Polymerzusammensetzung, ihre Herstellung, ihre Weiterverarbeitung zu Behältnissen | |
NO20015532L (no) | Fremgangsmåte til fremstilling av inherente mikrobedrepende polymeroverflater |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AD1A | A request for search or an international type search has been filed | ||
RD2N | Patents in respect of which a decision has been taken or a report has been made (novelty report) |
Effective date: 20010205 |
|
PD2B | A search report has been drawn up | ||
MM | Lapsed because of non-payment of the annual fee |
Effective date: 20160701 |