IT1320867B1 - Polimero organico per rivestimento antiriflesso e sua preparazione. - Google Patents

Polimero organico per rivestimento antiriflesso e sua preparazione.

Info

Publication number
IT1320867B1
IT1320867B1 IT2000TO001220A ITTO20001220A IT1320867B1 IT 1320867 B1 IT1320867 B1 IT 1320867B1 IT 2000TO001220 A IT2000TO001220 A IT 2000TO001220A IT TO20001220 A ITTO20001220 A IT TO20001220A IT 1320867 B1 IT1320867 B1 IT 1320867B1
Authority
IT
Italy
Prior art keywords
preparation
organic polymer
reflective coating
reflective
coating
Prior art date
Application number
IT2000TO001220A
Other languages
English (en)
Inventor
Sung-Eun Hong
Min-Ho Jung
Ki-Ho Baik
Jae-Chang Jung
Geun-Su Lee
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Publication of ITTO20001220A0 publication Critical patent/ITTO20001220A0/it
Publication of ITTO20001220A1 publication Critical patent/ITTO20001220A1/it
Application granted granted Critical
Publication of IT1320867B1 publication Critical patent/IT1320867B1/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F120/00—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/34—Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
IT2000TO001220A 1999-12-23 2000-12-22 Polimero organico per rivestimento antiriflesso e sua preparazione. IT1320867B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-1999-0061344A KR100427440B1 (ko) 1999-12-23 1999-12-23 유기 반사방지 화합물 및 그의 제조방법

Publications (3)

Publication Number Publication Date
ITTO20001220A0 ITTO20001220A0 (it) 2000-12-22
ITTO20001220A1 ITTO20001220A1 (it) 2002-06-22
IT1320867B1 true IT1320867B1 (it) 2003-12-10

Family

ID=19628987

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2000TO001220A IT1320867B1 (it) 1999-12-23 2000-12-22 Polimero organico per rivestimento antiriflesso e sua preparazione.

Country Status (10)

Country Link
US (1) US6548613B2 (it)
JP (1) JP3960750B2 (it)
KR (1) KR100427440B1 (it)
CN (1) CN1200014C (it)
DE (1) DE10063263A1 (it)
FR (2) FR2802935B1 (it)
GB (1) GB2357511B (it)
IT (1) IT1320867B1 (it)
NL (1) NL1016942C2 (it)
TW (1) TWI265934B (it)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100687851B1 (ko) * 2000-06-30 2007-02-27 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR100721181B1 (ko) * 2000-06-30 2007-05-23 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR100721182B1 (ko) * 2000-06-30 2007-05-23 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR100574486B1 (ko) * 2000-06-30 2006-04-27 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR100687850B1 (ko) * 2000-06-30 2007-02-27 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR100480235B1 (ko) * 2002-07-18 2005-04-06 주식회사 하이닉스반도체 유기 반사방지막 조성물 및 이를 이용한 포토레지스트의패턴 형성 방법
US7056826B2 (en) * 2003-01-07 2006-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Method of forming copper interconnects
KR101156973B1 (ko) * 2005-03-02 2012-06-20 주식회사 동진쎄미켐 유기 반사방지막 형성용 유기 중합체 및 이를 포함하는 유기 조성물
US7704670B2 (en) * 2006-06-22 2010-04-27 Az Electronic Materials Usa Corp. High silicon-content thin film thermosets
US7666575B2 (en) 2006-10-18 2010-02-23 Az Electronic Materials Usa Corp Antireflective coating compositions
KR100870746B1 (ko) * 2006-11-27 2008-11-26 삼성전자주식회사 패턴 형성 방법 및 이를 이용한 커패시터 제조 방법
US8026040B2 (en) 2007-02-20 2011-09-27 Az Electronic Materials Usa Corp. Silicone coating composition
JP2010519398A (ja) 2007-02-27 2010-06-03 エイゼット・エレクトロニック・マテリアルズ・ユーエスエイ・コーポレイション ケイ素に基づく反射防止膜用組成物
WO2015150508A1 (de) * 2014-04-04 2015-10-08 Basf Se Wässrige polymerzusammensetzungen
US10329372B2 (en) * 2014-06-13 2019-06-25 Basf Se Polyurethanes with reduced aldehyde emission
CN107446452B (zh) * 2016-06-01 2021-06-01 东进世美肯株式会社 适用于负性显影的用于形成有机抗反射涂层的组合物

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3100077A1 (de) 1981-01-03 1982-08-05 Hoechst Ag, 6000 Frankfurt Lichtempfindliches gemisch, das einen naphthochinondiazidsulfonsaeureester enthaelt, und verfahren zur herstellung des naphthochinondiazidsulfonsaeureesters
US4822718A (en) 1982-09-30 1989-04-18 Brewer Science, Inc. Light absorbing coating
US5674648A (en) 1984-08-06 1997-10-07 Brewer Science, Inc. Anti-reflective coating
US5525457A (en) 1994-12-09 1996-06-11 Japan Synthetic Rubber Co., Ltd. Reflection preventing film and process for forming resist pattern using the same
DE19516470A1 (de) * 1995-05-05 1996-11-07 Roehm Gmbh Verfahren zur Herstellung von Oximmethacrylaten
US5886102A (en) * 1996-06-11 1999-03-23 Shipley Company, L.L.C. Antireflective coating compositions
US5948847A (en) * 1996-12-13 1999-09-07 Tokyo Ohka Kogyo Co., Ltd. Undercoating composition for photolithographic patterning
JP3854367B2 (ja) * 1997-06-04 2006-12-06 Ａｚエレクトロニックマテリアルズ株式会社 光吸収性ポリマー、光吸収膜形成性組成物及び光吸収膜とそれを用いた反射防止膜
US5919599A (en) * 1997-09-30 1999-07-06 Brewer Science, Inc. Thermosetting anti-reflective coatings at deep ultraviolet
JP4053631B2 (ja) * 1997-10-08 2008-02-27 Ａｚエレクトロニックマテリアルズ株式会社 反射防止膜又は光吸収膜用組成物及びこれに用いる重合体
US6190839B1 (en) * 1998-01-15 2001-02-20 Shipley Company, L.L.C. High conformality antireflective coating compositions
KR100363695B1 (ko) * 1998-12-31 2003-04-11 주식회사 하이닉스반도체 유기난반사방지중합체및그의제조방법
KR100465864B1 (ko) * 1999-03-15 2005-01-24 주식회사 하이닉스반도체 유기 난반사방지 중합체 및 그의 제조방법
KR100395904B1 (ko) * 1999-04-23 2003-08-27 주식회사 하이닉스반도체 유기 반사방지 중합체 및 그의 제조방법
KR100310252B1 (ko) * 1999-06-22 2001-11-14 박종섭 유기 반사방지 중합체 및 그의 제조방법
KR100355604B1 (ko) * 1999-12-23 2002-10-12 주식회사 하이닉스반도체 난반사 방지막용 중합체와 그 제조방법

Also Published As

Publication number Publication date
US20010034427A1 (en) 2001-10-25
DE10063263A1 (de) 2001-06-28
CN1308089A (zh) 2001-08-15
KR100427440B1 (ko) 2004-04-17
ITTO20001220A0 (it) 2000-12-22
TWI265934B (en) 2006-11-11
CN1200014C (zh) 2005-05-04
FR2808027A1 (fr) 2001-10-26
GB0031419D0 (en) 2001-02-07
FR2802935A1 (fr) 2001-06-29
GB2357511B (en) 2003-04-02
JP3960750B2 (ja) 2007-08-15
JP2001192422A (ja) 2001-07-17
US6548613B2 (en) 2003-04-15
GB2357511A (en) 2001-06-27
FR2802935B1 (fr) 2003-03-28
FR2808027B1 (fr) 2006-01-20
KR20010057925A (ko) 2001-07-05
NL1016942A1 (nl) 2001-06-26
NL1016942C2 (nl) 2002-05-01
ITTO20001220A1 (it) 2002-06-22

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