MY207744A - Photovoltaic devices with textured tco layers, and methods of making tco stacks - Google Patents

Photovoltaic devices with textured tco layers, and methods of making tco stacks

Info

Publication number
MY207744A
MY207744A MYPI2021001559A MYPI2021001559A MY207744A MY 207744 A MY207744 A MY 207744A MY PI2021001559 A MYPI2021001559 A MY PI2021001559A MY PI2021001559 A MYPI2021001559 A MY PI2021001559A MY 207744 A MY207744 A MY 207744A
Authority
MY
Malaysia
Prior art keywords
tco
textured
methods
stacks
making
Prior art date
Application number
MYPI2021001559A
Other languages
English (en)
Inventor
Rui Shao
Gopal Mor
Jing Guo
Qi Fang
Robert Clark-Phelps
Paulina Bourgeois
Original Assignee
First Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by First Solar Inc filed Critical First Solar Inc
Publication of MY207744A publication Critical patent/MY207744A/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/311Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/138Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/244Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/244Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • H10F77/247Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers comprising indium tin oxide [ITO]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/42Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
    • H10F77/484Refractive light-concentrating means, e.g. lenses
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/543Solar cells from Group II-VI materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Photovoltaic Devices (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Physical Vapour Deposition (AREA)
MYPI2021001559A 2018-09-24 2019-09-23 Photovoltaic devices with textured tco layers, and methods of making tco stacks MY207744A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862735328P 2018-09-24 2018-09-24
PCT/US2019/052370 WO2020068630A1 (en) 2018-09-24 2019-09-23 Photovoltaic devices with textured tco layers, and methods of making tco stacks

Publications (1)

Publication Number Publication Date
MY207744A true MY207744A (en) 2025-03-15

Family

ID=68136588

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2021001559A MY207744A (en) 2018-09-24 2019-09-23 Photovoltaic devices with textured tco layers, and methods of making tco stacks

Country Status (5)

Country Link
US (2) US12336321B2 (https=)
EP (1) EP3853908A1 (https=)
JP (1) JP7470677B2 (https=)
MY (1) MY207744A (https=)
WO (1) WO2020068630A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11155493B2 (en) * 2010-01-16 2021-10-26 Cardinal Cg Company Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods
US12249664B2 (en) 2020-09-21 2025-03-11 First Solar, Inc. Transparent conducting layers and photovoltaic devices including the same
JP2023548537A (ja) * 2020-11-03 2023-11-17 ファースト・ソーラー・インコーポレーテッド 導電層相互接続を備える光起電デバイス

Family Cites Families (26)

* Cited by examiner, † Cited by third party
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US6743488B2 (en) * 2001-05-09 2004-06-01 Cpfilms Inc. Transparent conductive stratiform coating of indium tin oxide
JPWO2003101158A1 (ja) 2002-05-29 2005-09-29 旭硝子株式会社 透明導電膜付き基板および有機el素子
JP2006249554A (ja) 2005-03-14 2006-09-21 Fuji Electric Holdings Co Ltd スパッタリングターゲット及びその調製方法ならびにスパッタ方法
US20070029186A1 (en) * 2005-08-02 2007-02-08 Alexey Krasnov Method of thermally tempering coated article with transparent conductive oxide (TCO) coating using inorganic protective layer during tempering and product made using same
US7601558B2 (en) 2006-10-24 2009-10-13 Applied Materials, Inc. Transparent zinc oxide electrode having a graded oxygen content
US8076571B2 (en) 2006-11-02 2011-12-13 Guardian Industries Corp. Front electrode for use in photovoltaic device and method of making same
US8203073B2 (en) * 2006-11-02 2012-06-19 Guardian Industries Corp. Front electrode for use in photovoltaic device and method of making same
US20080153280A1 (en) 2006-12-21 2008-06-26 Applied Materials, Inc. Reactive sputter deposition of a transparent conductive film
US20080308411A1 (en) * 2007-05-25 2008-12-18 Energy Photovoltaics, Inc. Method and process for deposition of textured zinc oxide thin films
US7888594B2 (en) * 2007-11-20 2011-02-15 Guardian Industries Corp. Photovoltaic device including front electrode having titanium oxide inclusive layer with high refractive index
US20090194155A1 (en) 2008-02-01 2009-08-06 Guardian Industries Corp. Front electrode having etched surface for use in photovoltaic device and method of making same
JP2008153714A (ja) * 2008-04-02 2008-07-03 Masayoshi Murata 薄膜太陽電池用基板及びその製造方法、並びにそれを用いた薄膜太陽電池
JP2010080358A (ja) 2008-09-29 2010-04-08 Hitachi Ltd 透明導電膜付基板、及びそれを用いた表示素子及び太陽電池
WO2010038954A2 (ko) 2008-09-30 2010-04-08 주식회사 엘지화학 투명 도전막 및 이를 구비한 투명 전극
WO2010144460A1 (en) 2009-06-08 2010-12-16 University Of Toledo Flexible photovoltaic cells having a polyimide material layer and method of producing same
US20110126875A1 (en) 2009-12-01 2011-06-02 Hien-Minh Huu Le Conductive contact layer formed on a transparent conductive layer by a reactive sputter deposition
JP5590922B2 (ja) 2010-03-04 2014-09-17 株式会社カネカ 透明電極付き基板及びその製造方法
JP5445395B2 (ja) 2010-08-25 2014-03-19 住友金属鉱山株式会社 透明導電膜の製造方法、及び薄膜太陽電池の製造方法
JP5542025B2 (ja) 2010-10-18 2014-07-09 三菱電機株式会社 光電変換装置
JP5729595B2 (ja) 2011-03-11 2015-06-03 三菱マテリアル株式会社 太陽電池用透明導電膜およびその製造方法
EP2523227A1 (en) 2011-05-13 2012-11-14 Applied Materials, Inc. Thin-film solar fabrication process, deposition method for TCO layer, and solar cell precursor layer stack
JP2013058638A (ja) 2011-09-08 2013-03-28 Ulvac Japan Ltd 太陽電池用透明導電性基板の製造方法及び太陽電池用透明導電性基板
JP2014010211A (ja) 2012-06-28 2014-01-20 Seiko Epson Corp 液晶装置、液晶装置の製造方法、電子機器
JP6261988B2 (ja) * 2013-01-16 2018-01-17 日東電工株式会社 透明導電フィルムおよびその製造方法
JP2016127179A (ja) 2015-01-06 2016-07-11 三菱電機株式会社 薄膜太陽電池およびその製造方法
JP6600492B2 (ja) 2015-03-26 2019-10-30 株式会社Screenホールディングス スパッタリング装置およびスパッタリング方法

Also Published As

Publication number Publication date
EP3853908A1 (en) 2021-07-28
JP2022502847A (ja) 2022-01-11
US20250311473A1 (en) 2025-10-02
JP7470677B2 (ja) 2024-04-18
US12336321B2 (en) 2025-06-17
US20220013674A1 (en) 2022-01-13
WO2020068630A1 (en) 2020-04-02

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