JP5445395B2 - 透明導電膜の製造方法、及び薄膜太陽電池の製造方法 - Google Patents
透明導電膜の製造方法、及び薄膜太陽電池の製造方法 Download PDFInfo
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- JP5445395B2 JP5445395B2 JP2010188027A JP2010188027A JP5445395B2 JP 5445395 B2 JP5445395 B2 JP 5445395B2 JP 2010188027 A JP2010188027 A JP 2010188027A JP 2010188027 A JP2010188027 A JP 2010188027A JP 5445395 B2 JP5445395 B2 JP 5445395B2
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Description
1.透明導電膜の製造方法
2.透明導電膜
3.薄膜太陽電池の製造方法
本発明の具体例として示す透明導電膜の製造方法は、酸化亜鉛を主成分とした酸化物焼結体ターゲットを用いて、透光性基板上に透明導電膜からなる表面電極膜を形成する表面電極付透明導電基板の製造方法において、スパッタリングガス種としてアルゴン(Ar)と水素(H2)との混合ガスを用い、混合ガスのモル比が、H2/(Ar+H2)=0.01〜0.43、スパッタリングガス圧が2.0〜15.0Pa、基板温度が300〜600℃の条件下で、透明導電膜を形成するものである。
本実施の形態の透明導電膜は、上記製造方法によって得られ、表面粗さ(Ra)が、35.0nm以上であることが好ましい。表面粗さ(Ra)が35.0nm未満であると、ヘイズ率の高い酸化亜鉛系透明導電膜が得られず、シリコン系薄膜太陽電池を作製したときに光閉じ込め効果が劣って、高い変換効率を実現できない。十分な光閉じ込め効果を持たせるためには、Raは35.0nm以上であることが好ましい。但し、透明導電膜の表面粗さ(Ra)が70nmを超えると、透明導電膜上に形成するシリコン系薄膜の成長に影響を及ぼすとともに、透明導電膜とシリコン系薄膜との界面に隙間が生じて接触性が悪化し、太陽電池特性が悪化するので、好ましくない。
本実施の形態の太陽電池は、上記透明導電膜を電極として用いてなる光電変換素子である。太陽電池素子の構造は、特に限定されず、p型半導体とn型半導体とを積層したPN接合型、p型半導体とn型半導体との間に絶縁層(I層)を介在したPIN接合型などが挙げられる。
アルミニウムを添加元素として含有した酸化亜鉛焼結体ターゲット(住友金属鉱山製)を用いて、次のようにして表面凹凸の大きい酸化亜鉛系透明導電膜を作製した。
実施例1〜3の製造法において、H2ガスの混合割合を変えた以外は、同様にしてアルミニウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。H2ガスの混合割合は、H2/(Ar+H2)のモル比において0原子%(比較例1)、0.005原子%(比較例2)、0.50原子%(比較例3)とした。H2ガスの混合割合を変えた以外は、実施例1〜3と全て同じ条件とした。
実施例2の製造法において、基板温度を変えた以外は、同様にしてアルミニウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。基板温度は300℃(実施例4)、600℃(実施例5)、250℃(比較例4)とした。基板温度を変えた以外は、実施例2と全て同じ条件とした。
実施例3の製造法において、基板温度とガス圧を変えた以外は、同様にしてアルミニウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。基板温度は、何れも本実施の形態の指定範囲内である350℃とし、ガス圧は2.0Pa(実施例6)、8.0Pa(実施例7)、15.0Pa(実施例8)、1.0Pa(比較例5)、20.0Pa(比較例6)とした。基板温度とガス圧を変えた以外は、実施例3と全て同じ条件とした。
実施例2の製造法において、基板温度とガス圧とターゲットへの投入電力を規定範囲内で変えた以外は、同様にしてアルミニウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。基板温度は、何れも指定範囲内である450℃とし、ガス圧は、何れも4.0Paとした。また、比較例7及び実施例9には、2.760W/cm2、実施例10、11には、3.312W/cm2のDC電力を投入した。そして、成膜時間を変えることで450nm(実施例9)、1450nm(実施例10)、2150nm(実施例11)、380nm(比較例7)の種々の膜厚の透明導電膜を作製した。基板温度、ガス圧、膜厚を変えた以外は、実施例2と全て同じ条件とした。
比較例1の製造法において、ターゲットへの投入電力密度だけ変えた以外は、同様にしてアルミニウムを含む同じ組成の酸化亜鉛焼結体ターゲットから、水素ガスを用いずに酸化亜鉛系透明導電膜を作製した。投入電力密度は、0.442W/cm2(比較例8)、1.105W/cm2(比較例9)、2.210W/cm2(比較例10)とし、成膜時間を調整して約800nmの膜厚を得た。
比較例1の製造法において、膜厚を変えた以外は、同様にしてアルミニウムを含む同じ組成の酸化亜鉛焼結体ターゲットから、水素ガスを用いずに酸化亜鉛系透明導電膜を作製した。膜厚は、1530nm(比較例11)とし、成膜時間を調整して所定の膜厚を得た。
ガリウムを添加元素として含有した酸化亜鉛焼結体ターゲット(住友金属鉱山製)を用いて、次のようにして表面凹凸の大きい酸化亜鉛系透明導電膜を作製した。
また、スパッタリングターゲットと基板との距離を60mmとした。なお、コーニング7059ガラス基板自体の可視光波長領域での平均光透過率は、92%である。
実施例12〜14の製造法において、H2ガスの混合割合を変えた以外は、同様にしてガリウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。H2ガスの混合割合は、H2/(Ar+H2)のモル比において0原子%(比較例12)、0.005原子%(比較例13)、0.50原子%(比較例14)とした。H2ガスの混合割合を変えた以外は、実施例12〜14と全て同じ条件とした。
実施例13の製造法において、基板温度を変えた以外は、同様にしてガリウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。基板温度は、310℃(実施例15)、550℃(実施例16)、270℃(比較例15)とした。基板温度を変えた以外は、実施例13と全て同じ条件とした。
実施例14の製造法において、基板温度とガス圧を変えた以外は、同様にしてガリウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。基板温度は、何れも指定範囲内である340℃とし、ガス圧は2.0Pa(実施例17)、8.0Pa(実施例18)、15.0Pa(実施例19)、1.0Pa(比較例16)、20.0Pa(比較例17)とした。基板温度とガス圧を変えた以外は、実施例14と全て同じ条件とした。
実施例13の製造法において、基板温度とガス圧とターゲットへの投入電力を規定範囲内で変えた以外は、同様にしてガリウムを含む同じ組成の酸化亜鉛焼結体ターゲットから酸化亜鉛系透明導電膜を作製した。基板温度は、何れも指定範囲内である480℃とし、ガス圧は何れも4.0Paとした。また、比較例18と実施例20には、2.760W/cm2、実施例21〜22は3.312W/cm2のDC電力を投入した。そして、成膜時間を変えることで420nm(実施例20)、1350nm(実施例21)、1850nm(実施例22)、365nm(比較例18)の種々の膜厚の透明導電膜を作製した。基板温度、ガス圧、膜厚を変えた以外は、実施例13と全て同じ条件とした。
比較例12の製造法において、ターゲットへの投入電力密度だけ変えた以外は、同様にしてガリウムを含む同じ組成の酸化亜鉛焼結体ターゲットから、水素ガスを用いずに酸化亜鉛系透明導電膜を作製した。投入電力密度は、0.442W/cm2(比較例19)、1.105W/cm2(比較例20)、2.210W/cm2(比較例21)とし、成膜時間を調整して約700nmの膜厚を得た。
比較例12の製造法において、膜厚だけ変えた以外は、同様にしてガリウムを含む同じ組成の酸化亜鉛焼結体ターゲットから、水素ガスを用いずに酸化亜鉛系透明導電膜を作製した。膜厚は、1730nm(比較例22)とし、成膜時間を調整して所定の膜厚を得た。
Al/(Zn+Al)で1.59原子%の割合でアルミニウムを含有した酸化亜鉛焼結体ターゲット(住友金属鉱山製)を用いて、実施例1〜11、比較例1〜11と同様の実験を行ったが、全く同じ傾向であった。
Al/(Zn+Al)で0.49原子%、Ga/(Zn+Ga)で0.49原子%の割合でアルミニウムとガリウムを含有した酸化亜鉛焼結体ターゲット(住友金属鉱山製)を用いて、実施例1〜11、比較例1〜11と同様の実験を行ったが、全く同じ傾向であった。
下地膜である透明導電膜が形成されたガラス基板上に本実施の形態の透明導電膜の形成を試みた。下地膜の透明導電膜は、実施例1で使用した成膜装置を用いて以下の手順、条件で合成した。すなわち、Sn/(In+Sn)で7.5原子%の割合で酸化スズが含有された酸化インジウム焼結体ターゲット(ITOターゲット)を用い、300℃に加熱したガラス基板をターゲット中心の直上に静止させて直流マグネトロンスパッタ成膜を行った。ターゲットと基板間距離を50mmとして、O2ガスを3体積%含有するArガスをスパッタガスとして用い、成膜圧力を0.6Paとして成膜を行った。ガラス基板上には、ターゲットと同じ組成のITO膜が180nmの膜厚だけ形成され、その表面抵抗は10.5Ω/□であった。また波長400〜800nmにおける透過率の平均値は85%以上であり透過率も良好であった。
下地膜の透明導電膜を、実施例1で使用した成膜装置を用いて以下の手順、条件で合成した。すなわち、Ti/(In+Ti)で1.5原子%の割合で酸化チタンが含有された酸化インジウム焼結体ターゲット(ITiOターゲット)を用い、350℃に加熱したガラス基板をターゲット中心の直上に静止させて直流マグネトロンスパッタ成膜を行った。ターゲットと基板間距離を60mmとして、O2ガスを4体積%含有するArガスをスパッタガスとして用い、成膜圧力を0.2Paとして成膜を行った。ガラス基板上には、ターゲットと同じ組成のITiO膜が220nmの膜厚だけ形成され、その表面抵抗は11.5Ω/□であった。また波長400〜800nmにおける透過率の平均値は85%以上であり透過率も良好であった。
下地膜の透明導電膜を、実施例1で使用した成膜装置を用いて以下の手順、条件で合成した。すなわち、Ga/(Zn+Ga)原子数比で4.96原子%の割合で酸化ガリウムが含有された酸化亜鉛焼結体ターゲット(GZOターゲット)を用い、190℃に加熱したガラス基板をターゲット中心の直上に静止させて直流マグネトロンスパッタ成膜を行った。ターゲットと基板との距離は70mmとし、Arガスをスパッタガスとして用い、成膜圧力を0.2Paとして成膜を行った。ガラス基板上には、ターゲットと同じ組成のGZO膜が380nmの膜厚だけ形成され、その表面抵抗は11.3Ω/□であった。また波長400〜800nmにおける透過率の平均値は85%以上であり透過率も良好であった。
下地膜の透明導電膜を、実施例1で使用した成膜装置を用いて以下の手順、条件で合成した。すなわち、Al/(Zn+Al)原子数比で1.59原子%の割合で酸化アルミニウムが含有された酸化亜鉛焼結体ターゲット(AZOターゲット)を用い、250℃に加熱したガラス基板をターゲット中心の直上に静止させて直流マグネトロンスパッタ成膜を行った。ターゲットと基板との距離は50mmとし、Arガスをスパッタガスとして用い、成膜圧力を0.4Paとして成膜を行った。ガラス基板上には、ターゲットと同じ組成のAZO膜が505nmの膜厚だけ形成され、その表面抵抗は13.1Ω/□であった。また波長400〜800nmにおける透過率の平均値は85%以上であり透過率も良好であった。
Claims (7)
- 酸化亜鉛を主成分とした酸化物焼結体ターゲットを用いて、透光性基板上に透明導電膜を形成する透明導電膜の製造方法において、
スパッタリングガス種としてArとH2との混合ガスを用い、混合ガスのモル比が、H2/(Ar+H2)=0.01〜0.43、スパッタリングガス圧が2.0〜15.0Pa、基板温度が300〜600℃の条件下で、直流スパッタリングにより透明導電膜を形成することを特徴とする透明導電膜の製造方法。 - ターゲット投入電力密度が、2.76〜5.5W/cm2であることを特徴とする請求項1記載の透明導電膜の製造方法。
- 前記酸化物焼結体ターゲットが、Al、Gaから選ばれる1種以上を含有することを特徴とする請求項1又は2記載の透明導電膜の製造方法。
- 前記透光性基板が、ガラス基板であることを特徴とする請求項1乃至3のいずれか1項に記載の透明導電膜の製造方法。
- 前記透明導電膜は、表面粗さ(Ra)が35.0nm以上、表面抵抗が25Ω/□以下の表面凹凸性を有することを特徴とする請求項1乃至4のいずれか1項に記載の透明導電膜の製造方法。
- 前記透光性基板は、下地膜を形成したガラス基板であり、
前記下地膜上に前記透明導電膜を形成することを特徴とする請求項1乃至5のいずれか1項に記載の透明導電膜の製造方法。 - スパッタリングガス種としてArとH2との混合ガスを用い、混合ガスのモル比が、H2/(Ar+H2)=0.01〜0.43、スパッタリングガス圧が2.0〜15.0Pa、基板温度が300〜600℃の条件下で、酸化亜鉛を主成分とした酸化物焼結体ターゲットを用いて、透光性基板上に直流スパッタリングにより透明導電膜を形成し、
前記透明導電膜上に、光電変換層ユニット、裏面電極層を順に形成することを特徴とする薄膜太陽電池の製造方法。
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US20130334688A1 (en) * | 2011-03-25 | 2013-12-19 | Ocean's King Lighting Science & Technology Co., Ltd. | Multi-elements-doped zinc oxide film, manufacturing method and application thereof |
JP5890757B2 (ja) * | 2012-06-29 | 2016-03-22 | 本田技研工業株式会社 | カルコパイライト型薄膜太陽電池 |
JP2014095098A (ja) * | 2012-11-07 | 2014-05-22 | Sumitomo Metal Mining Co Ltd | 透明導電膜積層体及びその製造方法、並びに薄膜太陽電池及びその製造方法 |
JP2014095099A (ja) * | 2012-11-07 | 2014-05-22 | Sumitomo Metal Mining Co Ltd | 透明導電膜積層体及びその製造方法、並びに薄膜太陽電池及びその製造方法 |
JP6409588B2 (ja) * | 2015-01-21 | 2018-10-24 | Tdk株式会社 | 透明導電体及びタッチパネル |
CN104991294B (zh) * | 2015-06-18 | 2017-04-12 | 中国科学院国家天文台南京天文光学技术研究所 | 极低温环境大口径反射式望远镜防霜膜系及其制备方法 |
JP2017193755A (ja) * | 2016-04-21 | 2017-10-26 | 住友金属鉱山株式会社 | 透明導電膜の製造方法、及び透明導電膜 |
JP7470677B2 (ja) * | 2018-09-24 | 2024-04-18 | ファースト・ソーラー・インコーポレーテッド | テクスチャ化tco層を有する光起電デバイス、およびtcoスタックを作る方法 |
WO2021239211A1 (en) * | 2020-05-25 | 2021-12-02 | Applied Materials, Inc. | Method for generating a layer stack and method for manufacturing a patterned layer stack |
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JP3697190B2 (ja) * | 2001-10-03 | 2005-09-21 | 三菱重工業株式会社 | 太陽電池 |
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CN103069045B (zh) | 2016-01-13 |
CN103069045A (zh) | 2013-04-24 |
WO2012026467A1 (ja) | 2012-03-01 |
JP2012049218A (ja) | 2012-03-08 |
TWI568008B (zh) | 2017-01-21 |
TW201240123A (en) | 2012-10-01 |
KR20130100292A (ko) | 2013-09-10 |
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