KR970030213A - 레시픽 복제기능을 가진 기판처리 시스템 - Google Patents

레시픽 복제기능을 가진 기판처리 시스템 Download PDF

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KR970030213A
KR970030213A KR1019960054860A KR19960054860A KR970030213A KR 970030213 A KR970030213 A KR 970030213A KR 1019960054860 A KR1019960054860 A KR 1019960054860A KR 19960054860 A KR19960054860 A KR 19960054860A KR 970030213 A KR970030213 A KR 970030213A
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processing
station
recipe
substrate
stations
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KR1019960054860A
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KR100231377B1 (ko
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데츠야 하마다
히데카즈 이노우에
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이시다 아키라
다이닛뽕스크린 세이조오 가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31151—Lan local area network
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31206—Exchange of parameters, data, programs between two station, station and central or host or remote
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32129—Select program for specified machine from library, file server
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

기판을 처리하기 위한 복수의 처리 스테이션; 및 컴퓨터 네트워크를 구성하도록 상기 복수의 처리 스테이션에 접속되는 관리 스테이션;을 구비하는 기판처리 시스템이 개시된다. 상기 처리 스테이션 각각은, 기판을 다루기 위한 복수의 처리 유닛과; 상기 복수의 처리 유닛 사이에서의 각 기판의 반송순서와 상기 처리 유닛 각각에서의 처리조건을 각각 포함하는 처리 레시피들을 기억하는 제1 기억수단과; 다른 처리 스테이션으로부터 소망의 처리 레시피를 복제하고 복제된 처리 레시피를 상기 제1 기억수단에 기억시키는 스테이션간 레시피 복제수단;을 구비한다. 상기 관리 스테이션은, 상기 복수의 처리 스테이션에 대한 처리 레시피들을 기억하기 위한 제2 기억수단과; 상기 제2 기억수단과 상기 복수의 처리 스테이션 각각에 포함된 상기 제1 기억수단 사이에 소망의 처리 레시피를 전송하고, 상기 전송된 처리 레시피를 기억시키기 위한 레시피 업로드/다운로드 수단을 구비한다.

Description

레시픽 복제기능을 가진 기판처리 시스템
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 제1도에 나타낸 각 스테이션들의 기능을 나타낸 블록도이다.

Claims (4)

  1. 기판을 처리하기 위한 복수의 처리 스테이션; 및 컴퓨터 네트워크를 구성하도록 상기 복수의 처리 스테이션에 접속되는 관리 스테이션을 구비하는 기판처리 시스템에 있어서, 상기 처리 스테이션 각각은, 기판을 다루기 위한 복수의 처리 유닛과; 상기 복수의 처리 유닛 사이에서의 각 기판의 반송순서와 상기 처리 유닛 각각에서의 처리조건을 각각 포함하는 처리 레시피들을 기억하는 제1 기억수단과; 다른 처리 스테이션으로부터 소망의 처리 레시피를 복제하고 복제된 처리 레시피를 상기 제1 기억수단에 기억시키는 스테이션간 레시피 복제수단을 구비하며, 상기 관리 스테이션은, 상기 복수의 처리 스테이션에 대한 처리 레시피들을 기억하는 제2 기억수단과; 상기 제2 기억수단과 상기 복수의 처리 스테이션 각각에 포함된 상기 제1 기억수단 사이에서 소망의 처리 레시피를 전송하고, 전송된 처리 레시피를 기억시키기 위한 레시피 업로드/다운로드 수단을 구비하는 것을 특징으로 하는 기판처리 시스템.
  2. 제1항에 있어서, 상기 관리 스테이션은 상기 복수의 처리 스테이션 중에서 작업자에 의해 선택된 선택 처리 스테이션의 처리상태를 받아들여 그 처리상태를 표시하는 스테이션 상태 표시수단을 더 구비하는 것을 특징으로 하는 기판처리 시스템.
  3. 제1항에 있어서, 상기 관리 시테이션은 상기 복수의 처리 스테이션 중에서 작업자에 의해 선택된 선택 처리 스테이션의 조작 이력(履歷) 데이타를 기록하기 위한 스테이션 조작정보 기록 수단을 더 구비하는 것을 특징으로 하는 기판 처리 시스템.
  4. 제1항에 있어서, 상기 관리 스텐이션은 상기 관리 스테이션으로부터 상기 복수의 처리 스테이션중에서 작업자에 의해 선택된 선택처리 스테이션으로 응용 프로그램을 설치하기 위한 스테이션 응용 설치 수단을 더 구비하는 것을 특징으로 하는 기판처리 시스템.
KR1019960054860A 1995-11-29 1996-11-18 레시피 복제가능을 가진 기판처리 시스템 KR100231377B1 (ko)

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Application Number Priority Date Filing Date Title
JP33588595A JP3892493B2 (ja) 1995-11-29 1995-11-29 基板処理システム
JP95-335885 1995-11-29

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KR970030213A true KR970030213A (ko) 1997-06-26
KR100231377B1 KR100231377B1 (ko) 1999-11-15

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