KR970003591A - 반도체장치의 제조방법 및 반도체 제조장치 - Google Patents
반도체장치의 제조방법 및 반도체 제조장치 Download PDFInfo
- Publication number
- KR970003591A KR970003591A KR1019960020694A KR19960020694A KR970003591A KR 970003591 A KR970003591 A KR 970003591A KR 1019960020694 A KR1019960020694 A KR 1019960020694A KR 19960020694 A KR19960020694 A KR 19960020694A KR 970003591 A KR970003591 A KR 970003591A
- Authority
- KR
- South Korea
- Prior art keywords
- ionized water
- polishing
- abrasive
- semiconductor
- waste liquid
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract 17
- 238000005498 polishing Methods 0.000 claims abstract description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract 40
- 230000002378 acidificating effect Effects 0.000 claims abstract 12
- 239000004744 fabric Substances 0.000 claims abstract 10
- 239000002184 metal Substances 0.000 claims abstract 6
- 230000000087 stabilizing effect Effects 0.000 claims abstract 3
- 239000007788 liquid Substances 0.000 claims 11
- 239000002699 waste material Substances 0.000 claims 11
- 238000005868 electrolysis reaction Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 229910021642 ultra pure water Inorganic materials 0.000 claims 4
- 239000012498 ultrapure water Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000005299 abrasion Methods 0.000 claims 1
- 239000006061 abrasive grain Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000011109 contamination Methods 0.000 abstract 3
- 239000012535 impurity Substances 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
본 발명은 연마제에 금속불순물을 포함하지 않은 이온수를 사용하여 금속오염을 감소시킴과 더불어 연마비율을 제어할 수 있는 반도체장치의 제조방법 및 금속오염이 적은 반도체 제조장치를 제공한다.
톱플링(50)에 의해 보호유지된 반도체 웨이퍼(도시하지 않았음)의 폴리싱 처리에 있어서, 연마제와 함께 금속불순물을 포함하지 않은 알칼리 이온수 또는 산성 이온수를 반도체 웨이퍼의 폴리싱에 이용한다. 연마포(19)에 연마제를 주입하는 파이프(51)와 이온수를 주입하는 파이프(52)를 설치한다. 금속 불순물을 포함하지 않은 이온수를 사용함으로써 연마제를 알칼리성 또는 산성으로 유지할 수 있기 때문에, 폴리싱 때에 금속오염을 감소시킴과 더불어 폴리싱한 어떤 반도체 웨이퍼의 표면을 안정화시킬 수 있다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1실시예의 폴리싱장치의 개략 사시도.
Claims (15)
- 순수 또는 초순수의 전기분해에 의해 생성된 이온수와, 연마입자를 포함한 연마제를 연마포에 공급하면서 이들 연마포를 이용하여 반도체 웨이퍼의 폴리싱된 막을 갖춘 주면을 폴리싱하는 것을 특징으로 하는 반도체장치의 제조방법.
- 제1항에 있어서, 상기 연마포르의 상기 이온수 및 상기 연마제의 공급은 서로 다른 공급수단에 의해 공급된 것을 특징으로 하는 반도체장치의 제조방법.
- 연마포의 가공점에 연마입자를 포함한 연마제를 공급하면서 이 연마포를 이용하여 반도체 웨이퍼의 폴리싱된 막을 갖춘 주면을 폴리싱하는 공정과, 순수 또는 초순수의 전기분해에 의해 생성한 이온수에 의해 폴리싱한 상기 반도체 웨이퍼의 상기 폴리싱된 막의 표면을 안정화 하는 공정을 구비하여 이루어진 것을 특징으로 하는 반도체장치의 제조방법.
- 제2항에 있어서, 상기 이온수는 알칼리 이온수 또는 산성 이온수인 것을 특징으로 하는 반도체장치의 제조방법.
- 제4항에 있어서, 상기 이온수가 알칼리 이온수인 경우에 있어서, 산성 이온수에 의해 폴리싱에 따라 생성된 폐액을 중화시키고, 상기 이온수가 산성 이온수인 경우에 있어서, 알칼리 이온수에 의해 폴리싱에 따라 생성된 폐액을 중화시키는 것을 특징으로 하는 반도체장치의 제조방법.
- 제5항에 있어서, 상기 이온수 내 산성 이온수는 상기 반도체 웨이퍼상의 금속으로 이루어진 폴리싱된 막의 표면을 안정화 하고, 상기 이온수 내 알칼리성 및 산성 이온수는 상기 반도체 웨이퍼 상의 산화물, 질화물, 다결정 실리콘 및 실리콘 단결정의 어느쪽으로 이루어진 폴리싱된 막의 표면을 안정화하는 것을 특징으로 하는 반도체장치의 제조방법.
- 연마포(19)와 상기 연마포가 표면에 취부되고, 연마판구동축에 의해 회전되는 연마판(17)과, 반도체 웨이퍼를 보호유지하고, 이 반도체 웨이퍼의 폴리싱되는 막을 갖춘 주면을 상기 연마포(19) 표면에 단단히 누른 톱플링(50), 순수 또는 초순수의 전기분해에 의해 생성된 이온수를 상기 연마포(19)에 공급하는 이온수 공급파이프(52) 및, 연마입자를 포함하는 연마제를 상기 연마포(19)에 공급하는 연마제 공급파이프(51)를 구비하여 이루어진 것을 특징으로 하는 반도체 제조장치.
- 제7항에 있어서, 상기 이온수 공급파이프(52) 및 상기 연마제 공급파이프(51)는 가동하고, 상기 연마포(19)의 임의의 위치 상에 위치된 것을 특징으로 하는 반도체 제조장치.
- 제8항에 있어서, 상기 이온수 공급파이프(52) 및 상기 연마제 공급파이프(51)는 공급구 근방에서 일체화 된 것을 특징으로 하는 반도체 제조장치.
- 제9항에 있어서, 상기 연마판(17)은 폐액파이프(55)가 접속된 외위기(53)에 수납되어 있으며, 이 폐액파이프(55)에는 역류방지밸브(56)가 취부된 것을 특징으로 하는 반도체 제조장치.
- 제10항에 있어서, 상기 연마판(17)은 폐액파이프(55)가 접속된 외위기(53)에 수납되어 있으며, 이 폐액파이프(55)에는 침전주(57)가 취부된 것을 특징으로 하는 반도체 제조장치.
- 제11항에 있어서, 상기 이온수 공급파이프(52)는 순수 또는 초순수의 전기분해를 행하는 전해조(60)에 접속되고, 이 전해조에는 더욱이, 상기 폐액파이프(55)에 접속된 이온수 배출파이프(59)가 접속된 것을 특징으로 하는 반도체 제조장치.
- 제3항에 있어서, 상기 이온수는 알칼리 이온수 또는 산성 이온수인 것을 특징으로 하는 반도체장치의 제조방법.
- 제13항에 있어서, 상기 이온수가 알칼리수인 경우에 있어서, 산성 이온수에 의해 폴리싱에 따라 생성된 폐액을 중화시키고, 상기 이온수가 산성 이온수인 경우에 있어서, 알칼리 이온수에 의해 폴리싱에 따라 생성된 폐액을 중화시키는 것을 특징으로 하는 반도체장치의 제조방법.
- 제14항에 있어서, 상기 이온수의 내 산성 이온수는 상기 반도체 웨이퍼 상의 금속으로 이루어진 폴리싱된 막의 표면을 안정화 하고, 상기 이온수의 내 알칼리성 및 산성 이온수는 상기 반도체 웨이퍼 상의 산화물, 질화물, 다결정 실리콘 및 실리콘 다결정의 어느쪽으로 이루어진 폴리싱된 막의 표면을 안정화 하는 것을 특징으로 하는 반도체장치의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP95-170303 | 1995-06-13 | ||
JP17030395A JP3311203B2 (ja) | 1995-06-13 | 1995-06-13 | 半導体装置の製造方法及び半導体製造装置、半導体ウェーハの化学的機械的ポリッシング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970003591A true KR970003591A (ko) | 1997-01-28 |
KR100272383B1 KR100272383B1 (ko) | 2000-12-01 |
Family
ID=15902475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960020694A KR100272383B1 (ko) | 1995-06-13 | 1996-06-11 | 이온수를 이용하여 연마속도를 제어하기 위한 연마방법 및 연마장치 |
Country Status (4)
Country | Link |
---|---|
US (2) | US5643406A (ko) |
JP (1) | JP3311203B2 (ko) |
KR (1) | KR100272383B1 (ko) |
TW (1) | TW293146B (ko) |
Families Citing this family (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3098661B2 (ja) * | 1993-07-28 | 2000-10-16 | キヤノン株式会社 | 研磨剤組成物及びそれを用いる研磨方法 |
US5967030A (en) | 1995-11-17 | 1999-10-19 | Micron Technology, Inc. | Global planarization method and apparatus |
JPH09186116A (ja) * | 1995-12-27 | 1997-07-15 | Toshiba Corp | 半導体装置の製造方法及び半導体製造装置 |
JPH10163138A (ja) * | 1996-11-29 | 1998-06-19 | Fujitsu Ltd | 半導体装置の製造方法および研磨装置 |
TW426556B (en) * | 1997-01-24 | 2001-03-21 | United Microelectronics Corp | Method of cleaning slurry remnants left on a chemical-mechanical polish machine |
JPH10329011A (ja) | 1997-03-21 | 1998-12-15 | Canon Inc | 精密研磨装置及び方法 |
KR100243292B1 (ko) * | 1997-05-07 | 2000-02-01 | 윤종용 | 연마액의ph를조정하는반도체제조를위한화학적기계연마방법 |
US6331488B1 (en) | 1997-05-23 | 2001-12-18 | Micron Technology, Inc. | Planarization process for semiconductor substrates |
US6316363B1 (en) | 1999-09-02 | 2001-11-13 | Micron Technology, Inc. | Deadhesion method and mechanism for wafer processing |
US5921849A (en) * | 1997-06-04 | 1999-07-13 | Speedfam Corporation | Method and apparatus for distributing a polishing agent onto a polishing element |
US5934980A (en) | 1997-06-09 | 1999-08-10 | Micron Technology, Inc. | Method of chemical mechanical polishing |
KR19990010191A (ko) * | 1997-07-15 | 1999-02-05 | 윤종용 | 반도체장치 |
US6028006A (en) * | 1997-08-01 | 2000-02-22 | Texas Instruments Incorporated | Method for maintaining the buffer capacity of siliceous chemical-mechanical silicon polishing slurries |
US6103636A (en) * | 1997-08-20 | 2000-08-15 | Micron Technology, Inc. | Method and apparatus for selective removal of material from wafer alignment marks |
US5877562A (en) * | 1997-09-08 | 1999-03-02 | Sur; Harlan | Photo alignment structure |
DE69830121T2 (de) * | 1997-10-31 | 2006-02-23 | Ebara Corp. | Polierschlamm Spendevorrichtung |
US5948699A (en) * | 1997-11-21 | 1999-09-07 | Sibond, L.L.C. | Wafer backing insert for free mount semiconductor polishing apparatus and process |
JP3920429B2 (ja) * | 1997-12-02 | 2007-05-30 | 株式会社ルネサステクノロジ | 位相シフトフォトマスクの洗浄方法および洗浄装置 |
US6074286A (en) | 1998-01-05 | 2000-06-13 | Micron Technology, Inc. | Wafer processing apparatus and method of processing a wafer utilizing a processing slurry |
US6200896B1 (en) * | 1998-01-22 | 2001-03-13 | Cypress Semiconductor Corporation | Employing an acidic liquid and an abrasive surface to polish a semiconductor topography |
US6143663A (en) * | 1998-01-22 | 2000-11-07 | Cypress Semiconductor Corporation | Employing deionized water and an abrasive surface to polish a semiconductor topography |
US6224466B1 (en) | 1998-02-02 | 2001-05-01 | Micron Technology, Inc. | Methods of polishing materials, methods of slowing a rate of material removal of a polishing process |
US6171180B1 (en) | 1998-03-31 | 2001-01-09 | Cypress Semiconductor Corporation | Planarizing a trench dielectric having an upper surface within a trench spaced below an adjacent polish stop surface |
JP3075352B2 (ja) * | 1998-04-15 | 2000-08-14 | 日本電気株式会社 | 化学的機械研磨液の供給方法および装置 |
US6015499A (en) * | 1998-04-17 | 2000-01-18 | Parker-Hannifin Corporation | Membrane-like filter element for chemical mechanical polishing slurries |
TW410435B (en) * | 1998-06-30 | 2000-11-01 | United Microelectronics Corp | The metal interconnection manufacture by using the chemical mechanical polishing process |
JP2000040679A (ja) | 1998-07-24 | 2000-02-08 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
US6036586A (en) | 1998-07-29 | 2000-03-14 | Micron Technology, Inc. | Apparatus and method for reducing removal forces for CMP pads |
US6787471B2 (en) | 1998-08-26 | 2004-09-07 | Renesas Technology Corp. | Method of manufacturing a semiconductor device |
TW416104B (en) * | 1998-08-28 | 2000-12-21 | Kobe Steel Ltd | Method for reclaiming wafer substrate and polishing solution composition for reclaiming wafer substrate |
US6534378B1 (en) | 1998-08-31 | 2003-03-18 | Cypress Semiconductor Corp. | Method for forming an integrated circuit device |
US5972124A (en) * | 1998-08-31 | 1999-10-26 | Advanced Micro Devices, Inc. | Method for cleaning a surface of a dielectric material |
US6232231B1 (en) | 1998-08-31 | 2001-05-15 | Cypress Semiconductor Corporation | Planarized semiconductor interconnect topography and method for polishing a metal layer to form interconnect |
US6218316B1 (en) | 1998-10-22 | 2001-04-17 | Micron Technology, Inc. | Planarization of non-planar surfaces in device fabrication |
US6566249B1 (en) | 1998-11-09 | 2003-05-20 | Cypress Semiconductor Corp. | Planarized semiconductor interconnect topography and method for polishing a metal layer to form wide interconnect structures |
JP3538042B2 (ja) * | 1998-11-24 | 2004-06-14 | 松下電器産業株式会社 | スラリー供給装置及びスラリー供給方法 |
US6096162A (en) * | 1998-12-04 | 2000-08-01 | United Microelectronics Corp. | Chemical mechanical polishing machine |
US6439977B1 (en) * | 1998-12-07 | 2002-08-27 | Chartered Semiconductor Manufacturing Ltd. | Rotational slurry distribution system for rotary CMP system |
TW494502B (en) * | 1998-12-09 | 2002-07-11 | Applied Materials Inc | Polishing platen rinse for controlled passivation of silicon/polysilicon surfaces |
JP3983949B2 (ja) | 1998-12-21 | 2007-09-26 | 昭和電工株式会社 | 研磨用酸化セリウムスラリー、その製造法及び研磨方法 |
US6066030A (en) * | 1999-03-04 | 2000-05-23 | International Business Machines Corporation | Electroetch and chemical mechanical polishing equipment |
JP3550507B2 (ja) * | 1999-03-25 | 2004-08-04 | Necエレクトロニクス株式会社 | 被洗浄体のすすぎ方法およびその装置 |
JP4127926B2 (ja) * | 1999-04-08 | 2008-07-30 | 株式会社荏原製作所 | ポリッシング方法 |
JP2000301450A (ja) * | 1999-04-19 | 2000-10-31 | Rohm Co Ltd | Cmp研磨パッドおよびそれを用いたcmp処理装置 |
US6468135B1 (en) | 1999-04-30 | 2002-10-22 | International Business Machines Corporation | Method and apparatus for multiphase chemical mechanical polishing |
JP4484980B2 (ja) * | 1999-05-20 | 2010-06-16 | 株式会社ルネサステクノロジ | フォトマスクの洗浄方法、洗浄装置およびフォトマスクの洗浄液 |
US6352595B1 (en) * | 1999-05-28 | 2002-03-05 | Lam Research Corporation | Method and system for cleaning a chemical mechanical polishing pad |
US6130163A (en) * | 1999-06-03 | 2000-10-10 | Promos Technologies, Inc. | Stabilization of slurry used in chemical mechanical polishing of semiconductor wafers by adjustment of PH of deionized water |
US6248001B1 (en) * | 1999-08-06 | 2001-06-19 | Micron Technology, Inc. | Semiconductor die de-processing using a die holder and chemical mechanical polishing |
JP3760064B2 (ja) * | 1999-08-09 | 2006-03-29 | 株式会社日立製作所 | 半導体装置の製造方法及び半導体装置の平坦化加工装置 |
US6592433B2 (en) * | 1999-12-31 | 2003-07-15 | Intel Corporation | Method for defect reduction |
US6431957B1 (en) | 2000-01-25 | 2002-08-13 | Parker-Hannifin Corporation | Directional flow control valve with recirculation for chemical-mechanical polishing slurries |
US6616014B1 (en) | 2000-02-25 | 2003-09-09 | The Boc Group, Inc. | Precision liquid mixing apparatus and method |
US6514863B1 (en) | 2000-02-25 | 2003-02-04 | Vitesse Semiconductor Corporation | Method and apparatus for slurry distribution profile control in chemical-mechanical planarization |
US6646348B1 (en) * | 2000-07-05 | 2003-11-11 | Cabot Microelectronics Corporation | Silane containing polishing composition for CMP |
US6518172B1 (en) * | 2000-08-29 | 2003-02-11 | Micron Technology, Inc. | Method for applying uniform pressurized film across wafer |
US6503129B1 (en) * | 2000-10-06 | 2003-01-07 | Lam Research Corporation | Activated slurry CMP system and methods for implementing the same |
TWI228538B (en) * | 2000-10-23 | 2005-03-01 | Kao Corp | Polishing composition |
JP2002170792A (ja) * | 2000-11-29 | 2002-06-14 | Mitsubishi Electric Corp | 研磨液供給装置及び研磨液供給方法、研磨装置及び研磨方法、並びに、半導体装置の製造方法 |
US6478659B2 (en) * | 2000-12-13 | 2002-11-12 | Promos Technologies, Inc. | Chemical mechanical polishing method for slurry free fixed abrasive pads |
JP2002254248A (ja) * | 2001-02-28 | 2002-09-10 | Sony Corp | 電解加工装置 |
US6726534B1 (en) | 2001-03-01 | 2004-04-27 | Cabot Microelectronics Corporation | Preequilibrium polishing method and system |
US6969684B1 (en) | 2001-04-30 | 2005-11-29 | Cypress Semiconductor Corp. | Method of making a planarized semiconductor structure |
US6811470B2 (en) | 2001-07-16 | 2004-11-02 | Applied Materials Inc. | Methods and compositions for chemical mechanical polishing shallow trench isolation substrates |
US6677239B2 (en) | 2001-08-24 | 2004-01-13 | Applied Materials Inc. | Methods and compositions for chemical mechanical polishing |
US6585567B1 (en) | 2001-08-31 | 2003-07-01 | Koninklijke Philips Electronics N.V. | Short CMP polish method |
US6638145B2 (en) * | 2001-08-31 | 2003-10-28 | Koninklijke Philips Electronics N.V. | Constant pH polish and scrub |
US7199056B2 (en) * | 2002-02-08 | 2007-04-03 | Applied Materials, Inc. | Low cost and low dishing slurry for polysilicon CMP |
US6828678B1 (en) | 2002-03-29 | 2004-12-07 | Silicon Magnetic Systems | Semiconductor topography with a fill material arranged within a plurality of valleys associated with the surface roughness of the metal layer |
US7063597B2 (en) | 2002-10-25 | 2006-06-20 | Applied Materials | Polishing processes for shallow trench isolation substrates |
JP2004193377A (ja) * | 2002-12-12 | 2004-07-08 | Toshiba Corp | 半導体装置の製造方法 |
KR100560307B1 (ko) * | 2002-12-30 | 2006-03-14 | 동부아남반도체 주식회사 | 반도체 소자 제조방법 |
JP4574140B2 (ja) * | 2003-08-27 | 2010-11-04 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いる研磨方法 |
JP4764604B2 (ja) * | 2004-01-30 | 2011-09-07 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
US20060088976A1 (en) * | 2004-10-22 | 2006-04-27 | Applied Materials, Inc. | Methods and compositions for chemical mechanical polishing substrates |
JP2006179647A (ja) * | 2004-12-22 | 2006-07-06 | Renesas Technology Corp | 半導体装置の製造方法及び半導体製造装置 |
US7108588B1 (en) | 2005-04-05 | 2006-09-19 | Hitachi Global Storage Technologies Netherlands B.V. | System, method, and apparatus for wetting slurry delivery tubes in a chemical mechanical polishing process to prevent clogging thereof |
JP2007160496A (ja) * | 2005-11-15 | 2007-06-28 | Shinshu Univ | ワーク研磨装置およびワーク研磨方法 |
JP2007043183A (ja) * | 2006-09-05 | 2007-02-15 | Renesas Technology Corp | 半導体集積回路装置の製造方法 |
JP5661642B2 (ja) * | 2008-12-09 | 2015-01-28 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company | 粒子スラリーから大型粒子を選択的に除去するためのフィルタ |
WO2014109929A1 (en) | 2013-01-11 | 2014-07-17 | Applied Materials, Inc | Chemical mechanical polishing apparatus and methods |
TWI517935B (zh) * | 2013-04-16 | 2016-01-21 | 國立台灣科技大學 | 氣體添加硏磨液的供應系統及其方法 |
KR20140144959A (ko) * | 2013-06-12 | 2014-12-22 | 삼성전자주식회사 | 연마 패드 제조 장치 및 이를 제조하는 방법 |
US9449841B2 (en) | 2013-12-19 | 2016-09-20 | Taiwan Semicondcutor Manufacturing Company, Ltd. | Methods and systems for chemical mechanical polish and clean |
US10522365B2 (en) | 2016-01-27 | 2019-12-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Methods for reducing scratch defects in chemical mechanical planarization |
US10002771B1 (en) | 2017-10-10 | 2018-06-19 | Applied Materials, Inc. | Methods for chemical mechanical polishing (CMP) processing with ozone |
US10800004B2 (en) * | 2018-09-28 | 2020-10-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method of chemical mechanical polishing |
FI20195982A1 (en) * | 2019-11-18 | 2021-05-19 | Turun Yliopisto | Apparatus and method for polishing a part |
US11938585B1 (en) * | 2020-10-29 | 2024-03-26 | Stringtech Workstations Inc. | Sander apparatus and method |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5320706A (en) * | 1991-10-15 | 1994-06-14 | Texas Instruments Incorporated | Removing slurry residue from semiconductor wafer planarization |
US5340370A (en) * | 1993-11-03 | 1994-08-23 | Intel Corporation | Slurries for chemical mechanical polishing |
JP2743823B2 (ja) * | 1994-03-25 | 1998-04-22 | 日本電気株式会社 | 半導体基板のウエット処理方法 |
US5551986A (en) * | 1995-02-15 | 1996-09-03 | Taxas Instruments Incorporated | Mechanical scrubbing for particle removal |
-
1995
- 1995-06-13 JP JP17030395A patent/JP3311203B2/ja not_active Expired - Fee Related
-
1996
- 1996-06-04 TW TW085106671A patent/TW293146B/zh not_active IP Right Cessation
- 1996-06-11 KR KR1019960020694A patent/KR100272383B1/ko not_active IP Right Cessation
- 1996-06-12 US US08/661,897 patent/US5643406A/en not_active Expired - Lifetime
-
1997
- 1997-01-31 US US08/792,229 patent/US5922620A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5643406A (en) | 1997-07-01 |
KR100272383B1 (ko) | 2000-12-01 |
TW293146B (ko) | 1996-12-11 |
JP3311203B2 (ja) | 2002-08-05 |
JPH08339981A (ja) | 1996-12-24 |
US5922620A (en) | 1999-07-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR970003591A (ko) | 반도체장치의 제조방법 및 반도체 제조장치 | |
KR100335557B1 (ko) | 반도체기판의 표면처리장치 | |
KR100979737B1 (ko) | 반도체 재료 기판의 폴리싱 방법 | |
KR100348097B1 (ko) | 폴리싱방법, 반도체장치의 제조방법 및 반도체제조장치 | |
EP2919259B1 (en) | Method for polishing work and work polishing apparatus | |
US6200196B1 (en) | Polishing systems, methods of polishing substrates, and methods of preparing liquids for semiconductor fabrication processes | |
MY120338A (en) | Wafer polishing apparatus | |
JP2000186000A (ja) | シリコンウェーハ加工方法およびその装置 | |
MY115584A (en) | A wafer carrier assembly for chem-mech polishing | |
US10272537B2 (en) | Method for polishing GaN single crystal material | |
WO2001028739A8 (fr) | Dispositif de polissage pour bord peripherique exterieur de tranche de semi-conducteur | |
KR970061441A (ko) | 화학기계적 연마 장치 및 이를 이용한 화학기계적 연마방법 | |
JP2000052235A (ja) | ポリッシング方法及び装置 | |
TWI802673B (zh) | SiC基板的研磨方法 | |
TW200500168A (en) | Polishing device | |
JPS6442823A (en) | Flattening of semiconductor device surface | |
JP3023854B2 (ja) | シリコン半導体基板の平坦化方法 | |
JPH1110526A (ja) | 基板研磨装置及び基板研磨の方法 | |
Mizuuchi et al. | Chemical Mechanical Polishing of SiC Substrate Using Enhanced Slurry Containing Nanobubbles with Active Gas Generated by Plasma | |
JP2024011635A (ja) | 気液分離装置と加工装置 | |
KR100423755B1 (ko) | 실리콘 웨이퍼 핸들러 | |
TWI293591B (en) | Chemical mechanical polishing apparatus and method for conditioning the polishing pad | |
Di et al. | The research of silicon wafer's polishing fog | |
JPS6080560A (ja) | マスクの裏面研磨方法 | |
JP2008194797A (ja) | 表面研磨方法と表面研磨装置と表面研磨板 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20100730 Year of fee payment: 11 |
|
LAPS | Lapse due to unpaid annual fee |