KR960030362A - 밀폐콘테이너 - Google Patents

밀폐콘테이너 Download PDF

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Publication number
KR960030362A
KR960030362A KR1019950043130A KR19950043130A KR960030362A KR 960030362 A KR960030362 A KR 960030362A KR 1019950043130 A KR1019950043130 A KR 1019950043130A KR 19950043130 A KR19950043130 A KR 19950043130A KR 960030362 A KR960030362 A KR 960030362A
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KR
South Korea
Prior art keywords
container body
lid
container
airtight
fixture
Prior art date
Application number
KR1019950043130A
Other languages
English (en)
Other versions
KR100374255B1 (ko
Inventor
마사나오 무라타
쑤요시 다나까
테루야 모리타
Original Assignee
스즈끼 아끼오
신꼬덴끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 스즈끼 아끼오, 신꼬덴끼 가부시끼가이샤 filed Critical 스즈끼 아끼오
Publication of KR960030362A publication Critical patent/KR960030362A/ko
Application granted granted Critical
Publication of KR100374255B1 publication Critical patent/KR100374255B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

본 발명은 뚜껑을 닫을 때 콘테이너본체의 기밀성을 계속 유지하고, 뚜껑을 열때에는 콘테이너본체 안밖의 압력차를 평형으로 하여 용이하게 열수 있는 밀폐콘테이너를 제공하는 것을 목적으로 한다.
이를 위해 본 발명은 반도체웨이퍼(W)를 수납하는 내부를 불활성가스분위기로 된 콘테이너본체(5)와, 정기구(10)의 시정/해정 작동에 의한 상기 콘테이너본체(5)의 내부를 기밀/개방 상태로 하는 뚜껑(9)을 구비하여 이루어지는 밀페콘테이너에 있어서, 상기 뚜껑(9)에 설치된 상기 콘테이너본체(5)의 안밖으로 연통하는 통기구(35A)를 상기 정기구(10)의 시정/해정 작용에 동기하여 기밀/개방 상태로 하는 압력평형기구(11)를 설치한 것으로 구성하였다.

Description

밀폐콘테이너
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예 1에 관한 밀폐콘테이너의 구성을 설명하기 위한 종단면도, 제2도는 본 발명의 실시예 1에 관한 밀폐콘테이너의 정(錠)기구와 압력평형기구의 구성을 설명하기 위한 제1도의 요부확대도, 제3도는 본 발명의 실시예 1에 관한 밀폐콘테이너의 정기구의 고무와 로크아암의 구조 및 이들의 관계를 설명하기 위한 상태도, 제4도의 (a) 내지 (c)는 본 발명의 실시예 1에 관한 밀폐콘테이너의 개폐작동을 설명하기 위한 요부확대도.

Claims (2)

  1. 반도체웨이퍼를 수납하고 내부를 불활성가스 분위기로 만드는 콘테이너본체와, 정기구의 시정/해정 작동에 의해 상기 콘테이너본체의 내부를 기밀/개방 상태로 하는 뚜껑으로 구비하여 이루어지는 밀폐콘테이너에 있어서, 상기 뚜껑에 설치되여 상기 콘테이너본체의 안밖으로 연통하는 통기구를 상기 정기구의 시정/해정 작동에 동기(同期)하여 기밀/개방 상태로 하는 압력평형기구를 설치한 것을 특징으로 하는 밀폐콘테이너.
  2. 제1항에 있어서, 상기 압력평형기구가 상기 정기구를 구성하는 고무의 회동에 의해 변형되는 로크아암에 추종(追從)하여 이동하고, 상기 통기구를 개폐하는 개폐뚜껑으로 구성되는 것을 특징으로 하는 밀폐콘테이너.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950043130A 1995-01-09 1995-11-23 밀폐 콘테이너 KR100374255B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1846495A JP3180600B2 (ja) 1995-01-09 1995-01-09 密閉コンテナ
JP95-18464 1995-01-09

Publications (2)

Publication Number Publication Date
KR960030362A true KR960030362A (ko) 1996-08-17
KR100374255B1 KR100374255B1 (ko) 2003-05-09

Family

ID=11972366

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950043130A KR100374255B1 (ko) 1995-01-09 1995-11-23 밀폐 콘테이너

Country Status (7)

Country Link
US (1) US5743424A (ko)
EP (1) EP0721207B1 (ko)
JP (1) JP3180600B2 (ko)
KR (1) KR100374255B1 (ko)
DE (1) DE69610126T2 (ko)
SG (1) SG50395A1 (ko)
TW (1) TW372325B (ko)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11154699A (ja) * 1997-11-21 1999-06-08 Shin Etsu Polymer Co Ltd 容器の封止構造
JPH11214479A (ja) 1998-01-23 1999-08-06 Tokyo Electron Ltd 基板処理装置及びその方法並びに基板搬送装置
US8083272B1 (en) * 1998-06-29 2011-12-27 Industrial Technology Research Institute Mechanically actuated air tight device for wafer carrier
US6354601B1 (en) 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
JP2000289795A (ja) * 1999-04-06 2000-10-17 Kakizaki Mamufacuturing Co Ltd 薄板収納・輸送容器
US6379731B1 (en) * 2000-02-18 2002-04-30 Fresh Express, Inc. Methods for vacuum gas flush treatment of fresh produce
US20040118849A1 (en) * 2002-12-24 2004-06-24 Rosaen Borje O. Lever system cover and method of use
JP4027837B2 (ja) 2003-04-28 2007-12-26 Ｔｄｋ株式会社 パージ装置およびパージ方法
JP4012190B2 (ja) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 密閉容器の蓋開閉システム及び開閉方法
JP2009088437A (ja) * 2007-10-03 2009-04-23 Tokyo Electron Ltd 被処理体の導入ポート機構及び処理システム
TWI416655B (zh) * 2008-09-08 2013-11-21 Gallant Prec Machining Co Ltd Carrying plate holding device and sorting system
JP5715898B2 (ja) * 2011-07-06 2015-05-13 ミライアル株式会社 基板収納容器
WO2013187104A1 (ja) 2012-06-14 2013-12-19 村田機械株式会社 蓋開閉装置
EP2863422B1 (en) 2012-06-14 2020-06-24 Murata Machinery, Ltd. Lid-opening/closing device
CN109303370A (zh) * 2017-07-26 2019-02-05 株式会社泰已科 简易保护帽
KR102038909B1 (ko) * 2018-04-13 2019-11-26 유한회사 지에스케이테크놀로지 다기능 안전방석
KR101936580B1 (ko) * 2018-06-07 2019-01-09 주식회사 폴리쉘 다용도 착석시트
KR102158069B1 (ko) * 2019-01-29 2020-10-23 김형용 모자

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249903B2 (ko) * 1974-02-27 1977-12-20
JPS604455U (ja) * 1983-06-22 1985-01-12 株式会社東海理化電機製作所 燃料タンクのキヤツプ
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5000339A (en) * 1989-10-02 1991-03-19 Richard Wheat Flip-top gas cap
JP3084828B2 (ja) * 1991-09-20 2000-09-04 神鋼電機株式会社 機械式インターフェース装置
US5255783A (en) * 1991-12-20 1993-10-26 Fluoroware, Inc. Evacuated wafer container
DE9213054U1 (de) * 1992-09-28 1994-02-03 Siemens Ag Transportbehälter für Halbleiterprodukte in Reinraum-Fertigungen
US5520300A (en) * 1993-10-18 1996-05-28 Stant Manufacturing Inc. Lockable pressure relief fuel cap

Also Published As

Publication number Publication date
EP0721207A2 (en) 1996-07-10
TW372325B (en) 1999-10-21
EP0721207A3 (ko) 1996-08-21
DE69610126T2 (de) 2001-05-10
SG50395A1 (en) 1998-07-20
EP0721207B1 (en) 2000-09-06
JPH08191100A (ja) 1996-07-23
DE69610126D1 (de) 2000-10-12
JP3180600B2 (ja) 2001-06-25
KR100374255B1 (ko) 2003-05-09
US5743424A (en) 1998-04-28

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