KR960012409A - 비지에이(bga) 반도체패키지의 와이어본딩 검사방법 - Google Patents
비지에이(bga) 반도체패키지의 와이어본딩 검사방법 Download PDFInfo
- Publication number
- KR960012409A KR960012409A KR1019940024280A KR19940024280A KR960012409A KR 960012409 A KR960012409 A KR 960012409A KR 1019940024280 A KR1019940024280 A KR 1019940024280A KR 19940024280 A KR19940024280 A KR 19940024280A KR 960012409 A KR960012409 A KR 960012409A
- Authority
- KR
- South Korea
- Prior art keywords
- wire bonding
- bonding inspection
- wire
- semiconductor package
- inspection method
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2853—Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8512—Aligning
- H01L2224/85148—Aligning involving movement of a part of the bonding apparatus
- H01L2224/85169—Aligning involving movement of a part of the bonding apparatus being the upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
- H01L2224/8518—Translational movements
- H01L2224/85186—Translational movements connecting first outside the semiconductor or solid-state body, i.e. off-chip, reverse stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/859—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01059—Praseodymium [Pr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Wire Bonding (AREA)
Abstract
본 발명은 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법에 관한 것으로서, 비지에이(BGA) 반도체패키지의 PCB에 반도체칩이 안치되는 부위와 콤파운드 수지물의 분리성을 좋게 하기 위한 게이트까지 전도성 금속층을 연결 형성하여 와이어본딩 검사시스템의 탐침과 캐피러리를 게이트와 반도체칩에 각각 접촉시킨 상태에서 반도체칩과 각 리드간에 와이어본딩된 비지에이(BGA) 반도체패키지의 도통을 확인하여 리프트본드(LIFT BOND) 및 미싱와이어(MISSING WIRE)등의 와이어본딩 작업공정상의 불량을 체크하여 양품 및 불량을 검사할 수 있도록 하므로서 와이어본딩작업 및 검수를 원활히 하고 제품의 품질과 신뢰도를 높일 수 있는 것이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 비지에이(BGA) 반도체패키지가 PCB로 적용된 리드프레임의 평면도.
제2도는 본 발명의 와이어본딩된 반도체패키지의 검사방법.
제3도는 본 발명에 따른 단층 PCB상태의 반도체패키지 검사방법 구조도.
Claims (8)
- 비지에이(BGA) 반도체패키지의 PCB(P)에 반도체칩(C)이 안치되는 부위(L1)와 이곳에서 콤파운드 수지물의 분리성을 좋게 하기 위한 게이트(G)까지의 거리(L2)에 전도성 금속층(L3)을 연결 형성하여 와이어본딩 검사시스템(S)의 탐침(PR)과 캐피러리(CP)를 게이트(G)와 반도체칩(C)에 각각 접촉시킨 상태에서 반도체칩(C)과 각 리드(LD)간에 와이어본딩된 비지에이(BGA) 반도체패키지의 전기적 도통을 확인하여 양품 및 불량을 검사할 수 있도록 한 것을 특징으로 하는 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법.
- 제1항에 있어서, 전도성 금속층(L3)을 금(AU)으로 형성한 것을 특징으로 하는 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법.
- 제1항에 있어서, 전도성 금속층(L3)을 구리(CU)로 형성한 것을 특징으로 하는 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법.
- 제1항에 있어서, 와이어본딩 검사시스템(S)으로 단층PCB(P)에 와이어본딩된 것을 검사할 수 있는 비지에이(BGA) 반도체피키지의 와이어본딩 검사방법.
- 제1항에 있어서, 와이어본딩 검사시스템(S)으로 다층PCB(P)에 와이어본딩된 것을 검사할 수 있는 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법.
- 제5항에 있어서, 브라인드비어(BL)가 구비된 다층PCB(P)에 와이어본딩된 것을 검사할 수 있는 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법.
- 제5항에 있어서, 베리드비어(BU)가 형성된 다층PCB(P)에 와이어본딩된 것을 검사할 수 있는 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법.
- 제5항에 있어서, 관통구멍(TH)이 형성된 다층PCB(P)에 와이어본딩된 것을 검사할 수 있는 비지에이(BGA) 반도체패키지의 와이어본딩 검사방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940024280A KR0131389B1 (ko) | 1994-09-27 | 1994-09-27 | 비지에이 반도체패키지의 와이어본딩 검사방법 |
US08/530,558 US5712570A (en) | 1994-09-27 | 1995-09-19 | Method for checking a wire bond of a semiconductor package |
JP7241960A JP2703204B2 (ja) | 1994-09-27 | 1995-09-20 | ボール・グリッド・アレイ半導体パッケージのワイヤボンディング検査方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940024280A KR0131389B1 (ko) | 1994-09-27 | 1994-09-27 | 비지에이 반도체패키지의 와이어본딩 검사방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960012409A true KR960012409A (ko) | 1996-04-20 |
KR0131389B1 KR0131389B1 (ko) | 1998-04-14 |
Family
ID=19393532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940024280A KR0131389B1 (ko) | 1994-09-27 | 1994-09-27 | 비지에이 반도체패키지의 와이어본딩 검사방법 |
Country Status (3)
Country | Link |
---|---|
US (1) | US5712570A (ko) |
JP (1) | JP2703204B2 (ko) |
KR (1) | KR0131389B1 (ko) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6104198A (en) * | 1997-05-20 | 2000-08-15 | Zen Licensing Group Llp | Testing the integrity of an electrical connection to a device using an onboard controllable signal source |
JP3011147B2 (ja) * | 1997-08-20 | 2000-02-21 | 日本電気株式会社 | 固体アクチュエータ製造装置及び固体アクチュエータ製造方法並びに固体アクチュエータ製造装置制御プログラム記録媒体 |
US6085962A (en) * | 1997-09-08 | 2000-07-11 | Micron Technology, Inc. | Wire bond monitoring system for layered packages |
US6237833B1 (en) * | 1998-06-15 | 2001-05-29 | Rohm Co., Ltd. | Method of checking wirebond condition |
US6342398B1 (en) | 1998-12-17 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company | Method of backside emission analysis for BGA packaged IC's |
KR100339020B1 (ko) * | 1999-08-02 | 2002-05-31 | 윤종용 | 반도체칩 패키징 시스템 및 이를 이용한 반도체칩 패키징 방법 |
US6392424B1 (en) | 1999-08-12 | 2002-05-21 | Advanced Semiconductor Engineering Inc. | Press plate of wire bond checking system |
US6172318B1 (en) | 1999-08-23 | 2001-01-09 | Advanced Semiconductor Engineering Inc. | Base for wire bond checking |
US6392425B1 (en) * | 1999-12-30 | 2002-05-21 | Siliconware Precision Industries Co., Ltd. | Multi-chip packaging having non-sticking test structure |
TW522532B (en) * | 2000-11-07 | 2003-03-01 | Siliconware Precision Industries Co Ltd | Schemes for detecting bonding status of bonding wire of semiconductor package |
CN1327520C (zh) * | 2002-09-16 | 2007-07-18 | 日月光半导体制造股份有限公司 | 具有静电放电防护的封装基板 |
US7211995B2 (en) * | 2004-03-30 | 2007-05-01 | Nokia Corporation | Method and system for detecting electronic component failures |
US7319043B2 (en) * | 2005-09-26 | 2008-01-15 | Advanced Chip Engineering Technology Inc. | Method and system of trace pull test |
US8179143B2 (en) * | 2008-10-15 | 2012-05-15 | Test Research, Inc. | Apparatus for testing printed circuit and method therefor |
CN102005165B (zh) * | 2009-08-28 | 2013-09-18 | 上海天马微电子有限公司 | 压合测试装置和方法 |
US9395400B1 (en) * | 2013-03-11 | 2016-07-19 | Amazon Technologies, Inc. | Test fixture to test device connectors |
CN106158680B (zh) * | 2015-04-02 | 2019-06-25 | 展讯通信(上海)有限公司 | 一种芯片封装结构检测系统 |
CN110133416B (zh) * | 2019-06-10 | 2021-07-30 | 重庆理工大学 | 一种bga板电迁移测试装置 |
CN110133373B (zh) * | 2019-06-10 | 2021-07-30 | 重庆理工大学 | 一种bga板的焊点电阻测试装置 |
KR20230101372A (ko) | 2021-12-29 | 2023-07-06 | 주식회사 에스에프에이 | 반도체 와이어본딩 공정 모니터링 장치 및 그 장치의 구동방법 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3975680A (en) * | 1975-06-25 | 1976-08-17 | Honeywell Information Systems, Inc. | Non-contact coupling plate for circuit board tester |
US4056773A (en) * | 1976-08-25 | 1977-11-01 | Sullivan Donald F | Printed circuit board open circuit tester |
US4186338A (en) * | 1976-12-16 | 1980-01-29 | Genrad, Inc. | Phase change detection method of and apparatus for current-tracing the location of faults on printed circuit boards and similar systems |
US4563636A (en) * | 1983-12-12 | 1986-01-07 | Hewlett-Packard Company | Connection verification between circuit board and circuit tester |
US5059897A (en) * | 1989-12-07 | 1991-10-22 | Texas Instruments Incorporated | Method and apparatus for testing passive substrates for integrated circuit mounting |
US5254953A (en) * | 1990-12-20 | 1993-10-19 | Hewlett-Packard Company | Identification of pin-open faults by capacitive coupling through the integrated circuit package |
US5124660A (en) * | 1990-12-20 | 1992-06-23 | Hewlett-Packard Company | Identification of pin-open faults by capacitive coupling through the integrated circuit package |
US5557209A (en) * | 1990-12-20 | 1996-09-17 | Hewlett-Packard Company | Identification of pin-open faults by capacitive coupling through the integrated circuit package |
JP3214766B2 (ja) * | 1992-08-06 | 2001-10-02 | アジレント・テクノロジーズ・インク | 接続検査のための装置 |
US5275058A (en) * | 1992-10-30 | 1994-01-04 | Ford Motor Company | Method and apparatus for detecting wire bond pull test failure modes |
-
1994
- 1994-09-27 KR KR1019940024280A patent/KR0131389B1/ko not_active IP Right Cessation
-
1995
- 1995-09-19 US US08/530,558 patent/US5712570A/en not_active Expired - Lifetime
- 1995-09-20 JP JP7241960A patent/JP2703204B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR0131389B1 (ko) | 1998-04-14 |
US5712570A (en) | 1998-01-27 |
JP2703204B2 (ja) | 1998-01-26 |
JPH08115964A (ja) | 1996-05-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR960012409A (ko) | 비지에이(bga) 반도체패키지의 와이어본딩 검사방법 | |
US5496775A (en) | Semiconductor device having ball-bonded pads | |
CN101894816B (zh) | 半导体器件 | |
US5824569A (en) | Semiconductor device having ball-bonded pads | |
US10229893B2 (en) | Dual lead frame semiconductor package and method of manufacture | |
US6198162B1 (en) | Method and apparatus for a chip-on-board semiconductor module | |
US7042098B2 (en) | Bonding pad for a packaged integrated circuit | |
US6252178B1 (en) | Semiconductor device with bonding anchors in build-up layers | |
US5844305A (en) | Lead frame for semiconductor devices | |
JPH0394430A (ja) | 半導体装置およびその製造方法 | |
KR970053193A (ko) | 본딩 와이어의 단선 불량을 감지할 수 있는 회로 기판 및 와이어 본딩 장치 | |
JPH0621175A (ja) | 半導体装置用テストチップ | |
KR0148883B1 (ko) | 이중 와이어 본딩을 이용한 반도체 패키지 | |
CN1722423A (zh) | 提高封装可靠性的导线架及其封装结构 | |
JP3130332U (ja) | 半導体パッケージ構造 | |
JP2985423B2 (ja) | 半導体装置 | |
KR200159491Y1 (ko) | 반도체소자 패키지 공정용 리드프레임 | |
KR970018426A (ko) | 제품특성 평가용 패키지 | |
KR100301096B1 (ko) | 반도체 디바이스 및 그 제조방법 | |
KR100213435B1 (ko) | 반도체 칩의 마스터 전극 패드 및 이를 이용한 탭 패키지 | |
KR100212703B1 (ko) | 와이어본딩장치의 loc용 본딩블럭 구조 및 이를 이용한 와이어본딩방법 | |
JP2001102416A (ja) | 半導体装置の検査方法及び製造方法 | |
KR0157193B1 (ko) | 노운 굳 다이의 구조 및 제조방법 | |
Kovacs | X-ray inspection of microwire bonds | |
JPH03195034A (ja) | フィルムキャリアテープ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
N231 | Notification of change of applicant | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20111201 Year of fee payment: 15 |
|
FPAY | Annual fee payment |
Payment date: 20121203 Year of fee payment: 16 |
|
LAPS | Lapse due to unpaid annual fee |