KR920006646A - 다단식 진공 펌프 - Google Patents

다단식 진공 펌프 Download PDF

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Publication number
KR920006646A
KR920006646A KR1019910016474A KR910016474A KR920006646A KR 920006646 A KR920006646 A KR 920006646A KR 1019910016474 A KR1019910016474 A KR 1019910016474A KR 910016474 A KR910016474 A KR 910016474A KR 920006646 A KR920006646 A KR 920006646A
Authority
KR
South Korea
Prior art keywords
collector
delivery passage
pump
vacuum pump
casing
Prior art date
Application number
KR1019910016474A
Other languages
English (en)
Other versions
KR100198475B1 (ko
Inventor
야스히로 니이무라
하루미쯔 사이또
Original Assignee
후지무라 히로유끼
가부시기가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17244941&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR920006646(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 후지무라 히로유끼, 가부시기가이샤 에바라 세이사꾸쇼 filed Critical 후지무라 히로유끼
Publication of KR920006646A publication Critical patent/KR920006646A/ko
Application granted granted Critical
Publication of KR100198475B1 publication Critical patent/KR100198475B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

내용 없음

Description

다단식 진공 펌프
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도 내지 제3도는 본 발명의 일실시예에 따른 다단식 진공펌프의 구조를 나타낸 도면이고, 그중 제1도는 실시예의 세로측 단면도이고,
제2도와 제3도는 제1도의 각각에서 라인 Ⅱ-Ⅱ와 라인 Ⅲ-Ⅲ으로 취해진 단면도이다.

Claims (4)

  1. 공통 케이싱내에서 회전자를 위한 공통 샤프트에 배열된 두개의 돌출형 진공펌프의 복수의 셋트를 포함하고, 근접한 펌프들은 펌프 케이싱내에 형성된 전달 통로를 통하여 서로 연속으로 연결되는 다단식 진공 펌프에서; 냉각 수단을 구비한 고체 물질 콜렉터가 상기 펌프 케이싱으로 부터 분리되기 위해 상기 전달 통로에 제공된다는 점에서 개량된 특징으로 나타내는 다단식 진공 펌프.
  2. 제1항에 있어서, 상기 고체 물질 콜렉터의 하류측의 상기 전달통로가 전단에서 펌프실의 방출부에 근접하여 형성되고, 액체가 상기 전달 통로로 전단에서 리어(rear)단의 펌프실로 흐르는 것을 특징으로 하는 다단식 진공 펌프.
  3. 제2항에 있어서, 상기 고체 물질 콜렉터가 각각 내부에 상기 냉각 코일을 함유한 콜렉터 하우징과, 상기 콜렉터 케이싱에 제공된 삽입개구와 배출개구와, 상기 삽입 개구와 상기 배출 개구가 전단에서 상기 펌프실의 상기 배출구와 연결되는 것과, 상기 전달 통로를 포함하는 것을 특징으로 하는 다단식 진공 펌프.
  4. 제3항에 있어서, 상기 고체 물질 콜렉터는 상기 냉각 코일 그 위체 고정되게 설치되고 상기 콜렉터 하우징에 유동적으로 설치된 코일 설치 부재를 포함하고, 그로써 상기 코일 설치 부재가 동일한 것으로부터 상기 콜렉터 하우징의 분리를 제외하여 상기 펌프 케이싱으로부터 유동적인 것을 특징으로 하는 다단식 진공 펌프.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910016474A 1990-09-21 1991-09-20 다단식 진공 펌프 KR100198475B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2252988A JP2537696B2 (ja) 1990-09-21 1990-09-21 多段真空ポンプ
JP90-252988 1990-09-21

Publications (2)

Publication Number Publication Date
KR920006646A true KR920006646A (ko) 1992-04-27
KR100198475B1 KR100198475B1 (ko) 1999-06-15

Family

ID=17244941

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910016474A KR100198475B1 (ko) 1990-09-21 1991-09-20 다단식 진공 펌프

Country Status (5)

Country Link
US (1) US5173041A (ko)
EP (1) EP0476631B1 (ko)
JP (1) JP2537696B2 (ko)
KR (1) KR100198475B1 (ko)
DE (1) DE69112160T2 (ko)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5217357A (en) * 1992-09-10 1993-06-08 Welch Robert E Rotary vane pump with removable particulate collection chamber
DE4233142A1 (de) * 1992-10-02 1994-04-07 Leybold Ag Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
DE4234169A1 (de) * 1992-10-12 1994-04-14 Leybold Ag Verfahren zum Betrieb einer trockenverdichteten Vakuumpumpe sowie für dieses Betriebsverfahren geeignete Vakuumpumpe
US5746790A (en) * 1995-08-14 1998-05-05 Ebara Corporation Trap for collecting solid
JPH09222083A (ja) * 1996-02-16 1997-08-26 Matsushita Electric Ind Co Ltd 冷凍サイクルと圧縮機
JP2000161269A (ja) * 1998-11-27 2000-06-13 Toyota Autom Loom Works Ltd ルーツポンプ及びポンプ装置
JP2000170679A (ja) * 1998-12-04 2000-06-20 Toyota Autom Loom Works Ltd 多段ルーツポンプ及び多段ポンプ装置
US6318959B1 (en) * 1998-12-22 2001-11-20 Unozawa-Gumi Iron Works, Ltd. Multi-stage rotary vacuum pump used for high temperature gas
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
US6896764B2 (en) * 2001-11-28 2005-05-24 Tokyo Electron Limited Vacuum processing apparatus and control method thereof
GB0224709D0 (en) 2002-10-24 2002-12-04 Boc Group Plc Improvements in dry pumps
GB0310615D0 (en) * 2003-05-08 2003-06-11 Boc Group Plc Improvements in seal assemblies
TWI332549B (en) 2006-07-19 2010-11-01 Toyota Jidoshokki Kk Fluid machine
KR100773358B1 (ko) 2006-11-17 2007-11-05 삼성전자주식회사 유체 노즐을 갖는 진공펌프 및 배기 시스템
KR100873104B1 (ko) * 2007-03-16 2008-12-09 삼성전자주식회사 회전체 크리닝 유니트 및 이를 갖는 진공펌프
JP4844489B2 (ja) 2007-07-19 2011-12-28 株式会社豊田自動織機 流体機械
KR20100091063A (ko) * 2009-02-09 2010-08-18 삼성전자주식회사 회전체 크리닝 장치 및 이를 갖는 진공 펌프
TWI518245B (zh) * 2010-04-19 2016-01-21 荏原製作所股份有限公司 乾真空泵裝置、排氣單元，以及消音器
US9719526B2 (en) * 2012-06-08 2017-08-01 Oxea Corporation Vertical cooler with liquid removal and mist eliminator
JP6472653B2 (ja) * 2014-03-17 2019-02-20 株式会社荏原製作所 除害機能付真空ポンプ
JP6441660B2 (ja) * 2014-03-17 2018-12-19 株式会社荏原製作所 除害機能付真空ポンプ
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1769153A (en) * 1928-03-07 1930-07-01 Meyer William Warren Rotary blower or pump
US2489887A (en) * 1946-07-11 1949-11-29 Roots Connersville Blower Corp Rotary pump
US2849173A (en) * 1956-01-31 1958-08-26 Charles J Surdy Compressor system
DE2056353C3 (de) * 1970-11-17 1974-04-25 Claudius Peters Ag, 2000 Hamburg Zweistufiger Vielzellenverdichter
US4010016A (en) * 1975-05-27 1977-03-01 Ingersoll-Rand Company Gas compressor
GB1551725A (en) * 1975-09-06 1979-08-30 Rolls Royce Primary systems for pumps
JPS59229072A (ja) * 1983-06-09 1984-12-22 Mitsui Toatsu Chem Inc 天然ガス井戸用ガス圧縮機
JPS61197793A (ja) * 1985-02-26 1986-09-02 Ebara Corp 多段複葉型真空ポンプにおける冷却方法
JPS62107287A (ja) * 1985-11-01 1987-05-18 Hitachi Ltd 真空ポンプ
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
JPS62189388A (ja) * 1987-01-30 1987-08-19 Ebara Corp 多段ル−ツ型真空ポンプ
EP0332741B1 (de) * 1988-02-29 1991-09-18 Leybold Aktiengesellschaft Mehrstufige Vakuumpumpe
US4943215A (en) * 1988-02-29 1990-07-24 Leybold Aktiengesellschaft Multistage vacuum pump with bore for fouling removal
JPH0219318A (ja) * 1988-06-30 1990-01-23 Carl R Thornfeldt 疝痛及び生歯に対する治療
FR2642479B1 (fr) * 1989-02-02 1994-03-18 Alcatel Cit Pompe a vide du type roots, multietagee
JPH02245493A (ja) * 1989-03-20 1990-10-01 Hitachi Ltd スクリュー真空ポンプ
DE59010310D1 (de) * 1990-03-27 1996-06-05 Leybold Ag Mehrstufige trockenverdichtende Vakuumpumpe und Verfahren zu ihrem Betrieb

Also Published As

Publication number Publication date
EP0476631A1 (en) 1992-03-25
JPH04132895A (ja) 1992-05-07
DE69112160T2 (de) 1996-03-21
JP2537696B2 (ja) 1996-09-25
KR100198475B1 (ko) 1999-06-15
EP0476631B1 (en) 1995-08-16
US5173041A (en) 1992-12-22
DE69112160D1 (de) 1995-09-21

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