ES2035556T3 - Bombas de vacio. - Google Patents

Bombas de vacio.

Info

Publication number
ES2035556T3
ES2035556T3 ES198989303810T ES89303810T ES2035556T3 ES 2035556 T3 ES2035556 T3 ES 2035556T3 ES 198989303810 T ES198989303810 T ES 198989303810T ES 89303810 T ES89303810 T ES 89303810T ES 2035556 T3 ES2035556 T3 ES 2035556T3
Authority
ES
Spain
Prior art keywords
chamber
gas
recirculating
pumping
bomb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198989303810T
Other languages
English (en)
Inventor
Henryk Wycliffe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Application granted granted Critical
Publication of ES2035556T3 publication Critical patent/ES2035556T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

BOMBA DE VACIO QUE CONSTA DE UNA CAMARA DE BOMBEO (2, 3, 4, 5) CON UNA ENTRADA (6) Y UNA SALIDA (8), DE FORMA QUE SE PUEDE BOMBEAR GAS DESDE UN RECINTO CONECTABLE A LA ADMISION Y EN EL CUAL UNOS MECANISMOS PERMITEN LA INTRODUCCION SELECTIVA EN LA CAMARA DE UN FLUJO DE GAS PURIFICADOR RECIRCULANTE, PARA REALIZAR EL BOMBEADO DE LA CAMARA; SERA PREFERIBLE QUE DICHOS MECANISMOS PERMITAN QUE EL GAS PURIFICADOR RECIRCULANTE SE PRODUZCA EN UN CIRCUITO DE GAS QUE INCLUYA LA ADMISION (6), EL DESAGUE (8) Y UN FILTRO (11).
ES198989303810T 1988-04-22 1989-04-18 Bombas de vacio. Expired - Lifetime ES2035556T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB888809621A GB8809621D0 (en) 1988-04-22 1988-04-22 Dry pump with closed loop filter

Publications (1)

Publication Number Publication Date
ES2035556T3 true ES2035556T3 (es) 1993-04-16

Family

ID=10635708

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198989303810T Expired - Lifetime ES2035556T3 (es) 1988-04-22 1989-04-18 Bombas de vacio.

Country Status (6)

Country Link
US (1) US4995794A (es)
EP (1) EP0338764B1 (es)
JP (1) JP2608605B2 (es)
DE (1) DE68903355T2 (es)
ES (1) ES2035556T3 (es)
GB (1) GB8809621D0 (es)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
EP0448750B1 (de) * 1990-03-27 1996-05-01 Leybold Aktiengesellschaft Mehrstufige trockenverdichtende Vakuumpumpe und Verfahren zu ihrem Betrieb
FR2670839A1 (fr) * 1990-12-21 1992-06-26 Cit Alcatel Machine, telle que pompe a vide ou compresseur du type volumetrique ou a entrainement.
DE59200391D1 (de) * 1991-03-04 1994-09-22 Leybold Ag Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.
FR2691382B1 (fr) * 1992-05-22 1994-09-09 Cit Alcatel Installation de pompage pour pomper une enceinte contenant des gaz mélangés à des particules solides ou susceptibles de générer des particules ou condensats solides.
US5449454A (en) * 1993-01-13 1995-09-12 Aquaria, Inc. Gas expelling device for a canister type filter
JP2922181B1 (ja) * 1998-01-26 1999-07-19 株式会社宇野澤組鐵工所 粉体捕集機能を有する真空ポンプ装置
US8047817B2 (en) * 2003-09-23 2011-11-01 Edwards Limited Cleaning method of a rotary piston vacuum pump
US7094036B2 (en) * 2003-09-24 2006-08-22 The Boc Group Plc Vacuum pumping system
GB0519742D0 (en) * 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas
DE102007001316B4 (de) * 2007-01-02 2009-02-05 Deutsche Mechatronics Gmbh Entstaubungsvorrichtung und Verfahren zur Entstaubung, insbesondere von Bandanlagen
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
US20120140166A1 (en) 2010-12-07 2012-06-07 Abbott Medical Optics Inc. Pupil dependent diffractive lens for near, intermediate, and far vision
GB2499217A (en) 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
EP4027016A1 (en) * 2015-01-15 2022-07-13 ATLAS COPCO AIRPOWER, naamloze vennootschap Method for controlling the speed of a compressor/vacuum pump
BE1023207B1 (nl) * 2015-01-15 2016-12-21 Atlas Copco Airpower Naamloze Vennootschap Werkwijze voor het regelen van een gastoevoer naar een vacuümpomp
US10808702B2 (en) 2015-01-15 2020-10-20 Atlas Copco Airpower, Naamloze Vennootschap Method for controlling a gas supply to a vacuum pump
JP6935216B2 (ja) * 2017-03-31 2021-09-15 株式会社荏原製作所 ルーツ型真空ポンプ
DE102018203992A1 (de) * 2018-03-15 2019-09-19 Gardner Denver Schopfheim Gmbh Drehkolbenmaschine
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2148671A (en) * 1937-01-08 1939-02-28 Fred L Allen Fluid injector
US3168236A (en) * 1963-09-05 1965-02-02 Jaeger Machine Co Oil scavenging system for a rotary compressor
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
GB1509376A (en) * 1975-07-18 1978-05-04 Wdm Ltd Gas ballast for vacuum pumps
GB2088957B (en) * 1980-12-05 1984-12-12 Boc Ltd Rotary positive-displacement fluidmachines
IT1135031B (it) * 1981-01-14 1986-08-20 Generalvacuum Spa Perfezionamenti nelle o relativi alle pompe a capsulismo
US4534699A (en) * 1983-06-22 1985-08-13 Possell Clarence P Coal fired turbine
JPS60256584A (ja) * 1984-05-30 1985-12-18 Honjiyou Chem Kk 高真空装置
JPS62153597A (ja) * 1985-12-27 1987-07-08 Hitachi Ltd 真空ポンプ

Also Published As

Publication number Publication date
US4995794A (en) 1991-02-26
GB8809621D0 (en) 1988-05-25
EP0338764A2 (en) 1989-10-25
DE68903355D1 (de) 1992-12-10
JP2608605B2 (ja) 1997-05-07
EP0338764B1 (en) 1992-11-04
DE68903355T2 (de) 1993-03-18
EP0338764A3 (en) 1990-03-28
JPH01315682A (ja) 1989-12-20

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