KR920000968B1 - 다층 세라믹 배선회로기판 및 그 제조방법 - Google Patents

다층 세라믹 배선회로기판 및 그 제조방법 Download PDF

Info

Publication number
KR920000968B1
KR920000968B1 KR1019860003946A KR860003946A KR920000968B1 KR 920000968 B1 KR920000968 B1 KR 920000968B1 KR 1019860003946 A KR1019860003946 A KR 1019860003946A KR 860003946 A KR860003946 A KR 860003946A KR 920000968 B1 KR920000968 B1 KR 920000968B1
Authority
KR
South Korea
Prior art keywords
wiring circuit
circuit board
weight
mullite
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019860003946A
Other languages
English (en)
Korean (ko)
Other versions
KR860009605A (ko
Inventor
노부유끼 우시푸사
사토루 오기하라
코우세이 나가야마
히로이찌 시노하라
교죠 토다
Original Assignee
가부시기가이샤 히다찌세이사꾸쇼
미다 가쓰시게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 히다찌세이사꾸쇼, 미다 가쓰시게 filed Critical 가부시기가이샤 히다찌세이사꾸쇼
Publication of KR860009605A publication Critical patent/KR860009605A/ko
Application granted granted Critical
Publication of KR920000968B1 publication Critical patent/KR920000968B1/ko
Expired legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69Insulating materials thereof
    • H10W70/692Ceramics or glasses
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/16Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
    • C04B35/18Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4673Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
    • H05K3/4676Single layer compositions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07251Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/901Printed circuit
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49163Manufacturing circuit on or in base with sintering of base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322Composite web or sheet
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
KR1019860003946A 1985-05-21 1986-05-21 다층 세라믹 배선회로기판 및 그 제조방법 Expired KR920000968B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP109112 1985-05-21
JP60109112A JPS61266350A (ja) 1985-05-21 1985-05-21 配線回路用セラミック基板
JP85-109112 1985-05-21

Publications (2)

Publication Number Publication Date
KR860009605A KR860009605A (ko) 1986-12-23
KR920000968B1 true KR920000968B1 (ko) 1992-01-31

Family

ID=14501863

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860003946A Expired KR920000968B1 (ko) 1985-05-21 1986-05-21 다층 세라믹 배선회로기판 및 그 제조방법

Country Status (5)

Country Link
US (1) US4736276A (enExample)
EP (1) EP0202858B1 (enExample)
JP (1) JPS61266350A (enExample)
KR (1) KR920000968B1 (enExample)
DE (1) DE3682824D1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610927B2 (ja) * 1985-04-05 1994-02-09 株式会社日立製作所 セラミック基板の製造方法
US5015609A (en) * 1986-09-16 1991-05-14 Lanxide Technology Company, Lp Ceramic composite structures having intrinsically fitted encasement members thereon and methods of making the same
US4775596A (en) * 1987-02-18 1988-10-04 Corning Glass Works Composite substrate for integrated circuits
JP2760541B2 (ja) * 1988-03-02 1998-06-04 新光電気工業株式会社 セラミック組成物
DE3814863A1 (de) * 1988-05-02 1989-11-16 Siemens Ag Verfahren zum herstellen von vielschichtenkeramik auf silikatbasis
US4914813A (en) * 1988-11-25 1990-04-10 Innovative Packing Technology Refurbishing of prior used laminated ceramic packages
USRE34291E (en) * 1989-09-27 1993-06-22 Gec-Marconi Electronic Systems Corp. Hybrid module electronics package
US4996630A (en) * 1989-09-27 1991-02-26 Plessey Electronic Systems Corp. Hybrid module electronics package
CA2036771A1 (en) * 1990-02-22 1991-09-30 Jun Inasaka Multilayer ceramic wiring substrate and pin connecting structure
JPH0829993B2 (ja) * 1991-09-23 1996-03-27 インターナショナル・ビジネス・マシーンズ・コーポレイション セラミツク複合構造及びその製造方法
JPH06169174A (ja) * 1992-08-17 1994-06-14 Praxair Technol Inc 多層セラミック構造物からのバインダー除去
US5673478A (en) * 1995-04-28 1997-10-07 Texas Instruments Incorporated Method of forming an electronic device having I/O reroute
US6239485B1 (en) 1998-11-13 2001-05-29 Fujitsu Limited Reduced cross-talk noise high density signal interposer with power and ground wrap
US6081026A (en) * 1998-11-13 2000-06-27 Fujitsu Limited High density signal interposer with power and ground wrap
US6762367B2 (en) * 2002-09-17 2004-07-13 International Business Machines Corporation Electronic package having high density signal wires with low resistance
CN2652088Y (zh) * 2002-09-20 2004-10-27 日本特殊陶业株式会社 由树脂制成的带有插脚的电路板
JP4566866B2 (ja) * 2005-09-07 2010-10-20 新光電気工業株式会社 半導体パッケージ、半導体パッケージの実装構造、半導体パッケージの製造方法
CN108530021A (zh) * 2018-04-16 2018-09-14 广东金意陶陶瓷集团有限公司 一种高导热的电热瓷砖及制作方法
US11882654B2 (en) * 2019-03-29 2024-01-23 Kyocera Corporation Wiring board, electronic device package, and electronic device
CN117303880B (zh) * 2023-09-27 2025-09-09 中国国检测试控股集团股份有限公司 适用于多种建筑陶瓷的预应力增强用涂层浆料及其制备方法和应用

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB678636A (enExample) *
GB736148A (en) * 1952-02-01 1955-09-07 Morgan Crucible Co Ceramic materials
US3773532A (en) * 1972-07-13 1973-11-20 Taylors Sons Co Chas Mullite-chrome refractory
US4272500A (en) * 1978-05-08 1981-06-09 International Business Machines Corporation Process for forming mullite
JPS55139709A (en) * 1979-04-18 1980-10-31 Fujitsu Ltd Method of fabricating mullite substrate
JPS57115895A (en) * 1981-01-12 1982-07-19 Hitachi Ltd Mullite sintered material and method of producing same
US4396720A (en) * 1982-07-06 1983-08-02 Corning Glass Works Transparent glass-ceramics containing mullite
JPS6014494A (ja) * 1983-07-04 1985-01-25 株式会社日立製作所 セラミツク多層配線基板およびその製造方法
JPS60136294A (ja) * 1983-12-23 1985-07-19 株式会社日立製作所 セラミック多層配線回路板
US4528275A (en) * 1984-06-04 1985-07-09 General Electric Company Mullite-cordierite composite ceramic and method for preparation
JPS6136168A (ja) * 1984-07-27 1986-02-20 株式会社日立製作所 多層回路板とその製造方法

Also Published As

Publication number Publication date
US4736276A (en) 1988-04-05
DE3682824D1 (de) 1992-01-23
EP0202858A3 (en) 1987-08-05
EP0202858B1 (en) 1991-12-11
JPH0524107B2 (enExample) 1993-04-06
KR860009605A (ko) 1986-12-23
JPS61266350A (ja) 1986-11-26
EP0202858A2 (en) 1986-11-26

Similar Documents

Publication Publication Date Title
KR920000968B1 (ko) 다층 세라믹 배선회로기판 및 그 제조방법
EP0132740B1 (en) Method of forming a dielectric substrate
JP3793560B2 (ja) 低温焼成磁器およびその製造方法
JP2003342060A (ja) ガラスセラミック焼結体および配線基板
JP2001342063A (ja) 低温焼成磁器組成物、低温焼成磁器とその製造方法、並びにそれを用いた配線基板とその製造方法
JP4549028B2 (ja) ガラスセラミック組成物、ガラスセラミック焼結体、ガラスセラミック焼結体の製造方法、および配線基板
JP2012167008A (ja) ガラスセラミック組成物、ガラスセラミック焼結体並びにそれを用いた配線基板とその実装構造
JP2523266B2 (ja) 配線回路用セラミック基板の製造方法
JP2002053369A (ja) セラミック焼結体およびそれを用いた配線基板
JP3420426B2 (ja) 銅メタライズ組成物及びそれを用いたガラスセラミック配線基板
JP2004256347A (ja) ガラスセラミック組成物、ガラスセラミック焼結体とその製造方法、並びにそれを用いた配線基板とその実装構造
JP2648470B2 (ja) 配線回路用セラミック基板
JP3441924B2 (ja) 配線基板およびその実装構造
JP3556475B2 (ja) 高周波用磁器組成物および高周波用磁器の製造方法
JPH04357162A (ja) セラミック材料
JP4231316B2 (ja) セラミック配線基板の製造方法
JP2005015284A (ja) 低温焼成磁器およびその製造方法、並びに配線基板
JP2005179137A (ja) 高周波伝送特性に優れた磁器
JP3441950B2 (ja) 配線基板およびその実装構造
JP3793558B2 (ja) 高周波用磁器
JPH10158032A (ja) ガラスセラミック焼結体およびそれを用いた多層配線基板
JP2004323337A (ja) 低温焼成磁器組成物、およびそれを用いた配線基板
JP4395320B2 (ja) 低温焼成磁器組成物および低温焼成磁器並びに配線基板
JP2006232645A (ja) ガラスセラミック組成物、ガラスセラミック焼結体並びにそれを用いた配線基板とその実装構造
JP2003165765A (ja) ガラスセラミック組成物およびガラスセラミックスの製造方法、並びに配線基板の製造方法

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

St.27 status event code: A-2-2-Q10-Q13-nap-PG1605

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

FPAY Annual fee payment

Payment date: 20001230

Year of fee payment: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20020201

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20020201

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000