KR910010700A - 기생전류에 보호되는 수직형 모놀리식 반도체 전원장치 - Google Patents
기생전류에 보호되는 수직형 모놀리식 반도체 전원장치 Download PDFInfo
- Publication number
- KR910010700A KR910010700A KR1019900017732A KR900017732A KR910010700A KR 910010700 A KR910010700 A KR 910010700A KR 1019900017732 A KR1019900017732 A KR 1019900017732A KR 900017732 A KR900017732 A KR 900017732A KR 910010700 A KR910010700 A KR 910010700A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor power
- metallization
- monolithic semiconductor
- material layer
- insulating material
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims 3
- 230000003071 parasitic effect Effects 0.000 title description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims 4
- 239000011810 insulating material Substances 0.000 claims 4
- 238000001465 metallisation Methods 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910021339 platinum silicide Inorganic materials 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
- H01L27/0821—Combination of lateral and vertical transistors only
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Emergency Protection Circuit Devices (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 기생전류에 보호되는, 본 발명에 따른 모놀리식 전원장치의 제1의 실시예의 평면도.
제3도는 제2도의 라인 Ⅲ-Ⅲ에 따른 단면도.
제4도는 제2도의 라인 Ⅳ-Ⅳ에 따른 단면도.
Claims (11)
- 전원장치의 회로 성분을 한정하는 N+타입 영역(11,12;13;14) 과 P타입 영역(6,7,9,10)을 포함하는 N타입 영역(4,15)과 P타입 영역(8)을 포함하며 말단이 표면위로 돌출해있는 P타입 절연 포켓 (3)이 얻어지는 N+타입 기체(1)를 포함하는 수직형 모놀리식 반도체 전원장치에 있어서, 상기 절연포켓(3)의 돌출말단은 접지에 연결된 제1의 메타릴제이션(21,30)에 의해 완전히 덮여지는 것을 특징으로 하는 수직형 모놀리식 반도체 전원장치.
- 제1항에 있어서, 상기 제1의 메타릴제이션(21)은 금속 실리사이드로 성취되는 것을 특징으로 하는 장치.
- 제2항에 있어서, 상기 제1의 메타릴제이션(21)은 플라티늄 실리사이드로 성취되는 것을 특징으로 하는 장치.
- 제1항에 있어서, 상기 제1의 메탈리제이션(30)은 알루미늄으로 성취되는 것을 특징으로 하는 장치.
- 제1항에 있어서, 상기 제1의 메탈리제이션(21,30)은 절연재료층(18,40)으로 덮어지는 것을 특징으로 하는 장치.
- 제5항에 있어서, 상기 절연재료층(18)은 실리콘 산화막으로 성취되는 것을 특징으로 하는장치.
- 제5항에 있어서, 상기 절연재료층(18)에는 서로 다른 회로요소들을 연결하는 금속트랙(20)이 있는 것을 특징으로 하는장치.
- 제7항에 있어서, 상기 금속연결트랙(20)은 알루미늄으로 성취되는 것을 특징으로 하는 장치.
- 제5항에 있어서, 상기 절연재료층(40)에는 서로 다른 회로 요소들을 연결하는 제2의 메탈리제이션(31)이 있는 것을 특징으로 하는 장치.
- 제9항에 있어서, 상기 제2의 메탈리제이션(31)은 알루미늄으로 성취되는 것을 특징으로하는 장치.
- 제1항에 있어서, 상기 절연포켓(3)은 상기 기체 (1)위에 중첩되는 에피텍셜층(2)에서 얻어지는 것을 특징으로 하는 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT22428A/89 | 1989-11-17 | ||
IT02242889A IT1236797B (it) | 1989-11-17 | 1989-11-17 | Dispositivo monolitico di potenza a semiconduttore di tipo verticale con una protezione contro le correnti parassite. |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910010700A true KR910010700A (ko) | 1991-06-29 |
KR100190352B1 KR100190352B1 (ko) | 1999-06-01 |
Family
ID=11196182
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900017732A KR100190352B1 (ko) | 1989-11-17 | 1990-11-02 | 기생전류에 보호되는 수직형 모놀리식 반도체 전력소자 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5221855A (ko) |
EP (1) | EP0429131A3 (ko) |
JP (1) | JPH03173169A (ko) |
KR (1) | KR100190352B1 (ko) |
IT (1) | IT1236797B (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0544048B1 (en) * | 1991-11-25 | 1997-06-18 | STMicroelectronics S.r.l. | Integrated bridge device optimising conduction power losses |
EP1172848A1 (en) * | 2000-07-14 | 2002-01-16 | STMicroelectronics S.r.l. | Integrated semiconductor structure |
US7156115B2 (en) * | 2003-01-28 | 2007-01-02 | Lancer Partnership, Ltd | Method and apparatus for flow control |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3517280A (en) * | 1967-10-17 | 1970-06-23 | Ibm | Four layer diode device insensitive to rate effect and method of manufacture |
US4174562A (en) * | 1973-11-02 | 1979-11-20 | Harris Corporation | Process for forming metallic ground grid for integrated circuits |
US4106048A (en) * | 1977-04-27 | 1978-08-08 | Rca Corp. | Integrated circuit protection device comprising diode having large contact area in shunt with protected bipolar transistor |
FR2492165A1 (fr) * | 1980-05-14 | 1982-04-16 | Thomson Csf | Dispositif de protection contre les courants de fuite dans des circuits integres |
IT1210916B (it) * | 1982-08-05 | 1989-09-29 | Ates Componenti Elettron | Transistore integrato protetto contro le sovratensioni. |
DE3276513D1 (en) * | 1982-11-26 | 1987-07-09 | Ibm | Self-biased resistor structure and application to interface circuits realization |
JPS59108326A (ja) * | 1982-12-14 | 1984-06-22 | Sanyo Electric Co Ltd | 集積回路 |
IT1214806B (it) * | 1984-09-21 | 1990-01-18 | Ates Componenti Elettron | Dispositivo integrato monolitico di potenza e semiconduttore |
FR2575333B1 (fr) * | 1984-12-21 | 1987-01-23 | Radiotechnique Compelec | Dispositif de protection d'un circuit integre contre les decharges electrostatiques |
US4825278A (en) * | 1985-10-17 | 1989-04-25 | American Telephone And Telegraph Company At&T Bell Laboratories | Radiation hardened semiconductor devices |
US4883772A (en) * | 1986-09-11 | 1989-11-28 | National Semiconductor Corporation | Process for making a self-aligned silicide shunt |
JPS63114261A (ja) * | 1986-09-11 | 1988-05-19 | フェアチャイルド セミコンダクタ コーポレーション | トランジスタ用の自己整合型ベース分路 |
GB2204445B (en) * | 1987-03-06 | 1991-04-24 | Texas Instruments Ltd | Semiconductor switch |
US4999684A (en) * | 1988-05-06 | 1991-03-12 | General Electric Company | Symmetrical blocking high voltage breakdown semiconducotr device |
US4864379A (en) * | 1988-05-20 | 1989-09-05 | General Electric Company | Bipolar transistor with field shields |
-
1989
- 1989-11-17 IT IT02242889A patent/IT1236797B/it active IP Right Grant
-
1990
- 1990-10-30 US US07/605,447 patent/US5221855A/en not_active Expired - Lifetime
- 1990-11-02 KR KR1019900017732A patent/KR100190352B1/ko not_active IP Right Cessation
- 1990-11-14 EP EP19900203022 patent/EP0429131A3/en not_active Withdrawn
- 1990-11-16 JP JP2308941A patent/JPH03173169A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
IT8922428A1 (it) | 1991-05-17 |
EP0429131A3 (en) | 1992-01-08 |
US5221855A (en) | 1993-06-22 |
EP0429131A2 (en) | 1991-05-29 |
IT1236797B (it) | 1993-04-02 |
IT8922428A0 (it) | 1989-11-17 |
JPH03173169A (ja) | 1991-07-26 |
KR100190352B1 (ko) | 1999-06-01 |
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A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
LAPS | Lapse due to unpaid annual fee |