KR910007253A - 복합 종진동 메카니칼 필터 및 그 제조방법 - Google Patents

복합 종진동 메카니칼 필터 및 그 제조방법

Info

Publication number
KR910007253A
KR910007253A KR1019900003748A KR900003748A KR910007253A KR 910007253 A KR910007253 A KR 910007253A KR 1019900003748 A KR1019900003748 A KR 1019900003748A KR 900003748 A KR900003748 A KR 900003748A KR 910007253 A KR910007253 A KR 910007253A
Authority
KR
South Korea
Prior art keywords
manufacturing
longitudinal vibration
mechanical filter
vibration mechanical
composite longitudinal
Prior art date
Application number
KR1019900003748A
Other languages
English (en)
Other versions
KR940002304B1 (ko
Inventor
가즈오 야마시따
요시히꼬 다께우찌
마사히로 와따나베
Original Assignee
니혼무센가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1247398A external-priority patent/JPH0624308B2/ja
Priority claimed from JP1247396A external-priority patent/JPH0666633B2/ja
Priority claimed from JP1247397A external-priority patent/JPH03108810A/ja
Priority claimed from JP1247399A external-priority patent/JPH0624301B2/ja
Priority claimed from JP1269810A external-priority patent/JPH0648772B2/ja
Priority claimed from JP26980989A external-priority patent/JP3197009B2/ja
Priority claimed from JP26980789A external-priority patent/JP3167703B2/ja
Priority claimed from JP1269808A external-priority patent/JPH0648773B2/ja
Application filed by 니혼무센가부시끼가이샤 filed Critical 니혼무센가부시끼가이샤
Publication of KR910007253A publication Critical patent/KR910007253A/ko
Application granted granted Critical
Publication of KR940002304B1 publication Critical patent/KR940002304B1/ko

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/09Elastic or damping supports
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/48Coupling means therefor
    • H03H9/50Mechanical coupling means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1019900003748A 1989-09-21 1990-03-20 복합 종진동 메카니칼 필터 및 그 제조방법 KR940002304B1 (ko)

Applications Claiming Priority (16)

Application Number Priority Date Filing Date Title
JP1-247397 1989-09-21
JP1247398A JPH0624308B2 (ja) 1989-09-21 1989-09-21 複合縦振動メカニカルフィルタ
JP1-247396 1989-09-21
JP1247396A JPH0666633B2 (ja) 1989-09-21 1989-09-21 複合縦振動メカニカルフィルタ
JP1-247398 1989-09-21
JP1-247399 1989-09-21
JP1247397A JPH03108810A (ja) 1989-09-21 1989-09-21 複合縦振動メカニカルフィルタ
JP1247399A JPH0624301B2 (ja) 1989-09-21 1989-09-21 複合縦振動メカニカルフィルタの製造方法
JP1269810A JPH0648772B2 (ja) 1989-10-16 1989-10-16 複合縦振動メカニカルフィルタの製造方法
JP26980989A JP3197009B2 (ja) 1989-10-16 1989-10-16 複合縦振動メカニカルフィルタの製造方法
JP1-269808 1989-10-16
JP1-269810 1989-10-16
JP26980789A JP3167703B2 (ja) 1989-10-16 1989-10-16 複合縦振動メカニカルフィルタ
JP1-269809 1989-10-16
JP1269808A JPH0648773B2 (ja) 1989-10-16 1989-10-16 複合縦振動メカニカルフィルタ
JP1-269807 1989-10-16

Publications (2)

Publication Number Publication Date
KR910007253A true KR910007253A (ko) 1991-04-30
KR940002304B1 KR940002304B1 (ko) 1994-03-21

Family

ID=27573534

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900003748A KR940002304B1 (ko) 1989-09-21 1990-03-20 복합 종진동 메카니칼 필터 및 그 제조방법

Country Status (6)

Country Link
US (4) US5187458A (ko)
KR (1) KR940002304B1 (ko)
CA (1) CA2010722C (ko)
DE (1) DE4008920C2 (ko)
FR (1) FR2652962B1 (ko)
GB (1) GB2238194A (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
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US5187458A (en) * 1989-09-21 1993-02-16 Nihon Musen Kabushiki Kaisha Composite longitudinal vibration mechanical filter having central frequency deviation elimination means and method of manufacturing same
JP3489509B2 (ja) * 1999-02-22 2004-01-19 株式会社村田製作所 電気音響変換器
US6268683B1 (en) * 1999-02-26 2001-07-31 M&Fc Holding Company Transducer configurations and related method
US7065779B1 (en) 1999-10-13 2006-06-20 Cisco Technology, Inc. Technique for synchronizing multiple access controllers at the head end of an access network
US6624726B2 (en) 2001-08-31 2003-09-23 Motorola, Inc. High Q factor MEMS resonators
US7312674B2 (en) * 2002-08-06 2007-12-25 The Charles Stark Draper Laboratory, Inc. Resonator system with a plurality of individual mechanically coupled resonators and method of making same
JP4321034B2 (ja) * 2002-10-16 2009-08-26 パナソニック株式会社 圧電アクチュエータおよびディスク装置
KR20070100942A (ko) * 2005-01-07 2007-10-15 트르스티스 오브 보스톤 유니버시티 나노기계 발진기
US20110068834A1 (en) * 2005-01-07 2011-03-24 Trustees Of Boston University Electro-mechanical oscillating devices and associated methods
US7319372B2 (en) * 2005-07-15 2008-01-15 Board Of Trustees Of The Leland Standford Junior University In-plane mechanically coupled microelectromechanical tuning fork resonators
US8513863B2 (en) 2009-06-11 2013-08-20 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with two layers
WO2014024309A1 (ja) 2012-08-10 2014-02-13 富士通株式会社 Qcmセンサとその製造方法
US10543666B2 (en) * 2015-06-29 2020-01-28 The Boeing Company Composite sandwich panel and associated methods of manufacture

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NL261600A (ko) * 1960-02-26
DE1416791A1 (de) * 1960-03-01 1968-10-03 Telefunken Patent Mechanisches Hochfrequenzfilter
DE1241920B (de) * 1960-03-30 1967-06-08 Siemens Ag Aus mechanisch angeregten und mechanisch gekoppelten Torsionsschwingungen ausfuehrenden Resonatoren aufgebautes Filter kleinen Raumbedarfs
NL277292A (ko) * 1961-06-20
AT232061B (de) * 1961-09-25 1964-02-25 Siemens Ag Filteranordnung für elektrische Wellen
US3189852A (en) * 1962-04-14 1965-06-15 Toko Radio Coil Kenkyusho Kk Electro-mechanical filters
JPS4424961Y1 (ko) * 1966-06-04 1969-10-21
US3490056A (en) * 1967-05-16 1970-01-13 Gen Electric Electromechanical resonator for integrated circuits
US3488530A (en) * 1968-04-22 1970-01-06 North American Rockwell Piezoelectric microresonator
DE2047899C3 (de) * 1970-09-29 1975-07-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Abgleich mechanischer Filter
BE788576A (fr) * 1971-09-10 1973-01-02 Siemens Ag Filtre electromecanique
BE788774A (fr) * 1971-09-13 1973-01-02 Siemens Ag Filtre electromecanique
JPS5427689B2 (ko) * 1972-04-28 1979-09-11
US3931600A (en) * 1973-06-11 1976-01-06 Kokusai Electric Co., Ltd. Mechanical filter
JPS529344A (en) * 1975-07-14 1977-01-24 Nippon Telegr & Teleph Corp <Ntt> Mechanical filter
JPS5294344A (en) * 1976-02-04 1977-08-08 Toshiba Corp Flame retardant resin compositions
US4156156A (en) * 1977-08-18 1979-05-22 P. R. Mallory & Co. Inc. Method for reducing the resonant frequency of a piezoelectric transducer
US4137511A (en) * 1977-09-13 1979-01-30 Bell Telephone Laboratories, Incorporated Electromechanical filter and resonator
JPS54109355A (en) * 1978-02-15 1979-08-27 Fujitsu Ltd Mechanical filter
JPS5845207B2 (ja) * 1978-09-12 1983-10-07 東邦電子株式会社 有極形メカニカルフイルタ
JPS5545233A (en) * 1978-09-26 1980-03-29 Seiko Instr & Electronics Ltd Production of piezo-electric thin film driving metal vibration piece
JPS5577222A (en) * 1978-12-06 1980-06-10 Seiko Epson Corp Tuning-fork type vibrator
JPS5630018A (en) * 1979-08-16 1981-03-26 Nippon Steel Corp Shape controlling method for sheet rolling work
JPS5669912A (en) * 1979-10-23 1981-06-11 Fujitsu Ltd Automatic adjusting method for frequency of mechanical resonator
US4421381A (en) * 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
US4447753A (en) * 1981-03-25 1984-05-08 Seiko Instruments & Electronics Ltd. Miniature GT-cut quartz resonator
JPS57188121A (en) * 1981-05-15 1982-11-19 Seiko Instr & Electronics Ltd Frequency adjusting method of coupling oscillator
JPS5918663A (ja) * 1982-07-22 1984-01-31 Murata Mfg Co Ltd 電子部品のケ−ス収容方法
JPS59161113A (ja) * 1983-03-04 1984-09-11 Fujitsu Ltd メカニカルフイルタ
US4555682A (en) * 1983-03-02 1985-11-26 Fujitsu Limited Mechanical filter
JPS6082837A (ja) * 1983-10-13 1985-05-11 Fujitsu Ltd パタ−ン欠陥選択方式
JPS616915A (ja) * 1984-06-20 1986-01-13 Fujitsu Ltd メカニカルフイルタの支持方法
JPS6169208A (ja) * 1984-09-12 1986-04-09 Fujitsu Ltd メカニカルフイルタの製造方法
JPS61121512A (ja) * 1984-11-17 1986-06-09 Fujitsu Ltd メカニカルフイルタ
JPS61123211A (ja) * 1984-11-19 1986-06-11 Murata Mfg Co Ltd 圧電振動子および圧電振動子の振動周波数調整方法
JPS61139115A (ja) * 1984-12-11 1986-06-26 Fujitsu Ltd メカニカルフイルタ
FR2577362B1 (fr) * 1985-02-13 1987-04-17 Ebauchesfabrik Eta Ag Procede de fabrication de resonateurs a quartz a haute frequence
JPH0754891B2 (ja) * 1987-06-02 1995-06-07 セイコー電子部品株式会社 縦水晶振動子
US5187458A (en) * 1989-09-21 1993-02-16 Nihon Musen Kabushiki Kaisha Composite longitudinal vibration mechanical filter having central frequency deviation elimination means and method of manufacturing same

Also Published As

Publication number Publication date
KR940002304B1 (ko) 1994-03-21
FR2652962B1 (fr) 1992-10-09
CA2010722C (en) 1994-04-12
US5187458A (en) 1993-02-16
FR2652962A1 (fr) 1991-04-12
GB2238194A (en) 1991-05-22
CA2010722A1 (en) 1991-03-21
GB9004598D0 (en) 1990-04-25
DE4008920A1 (de) 1991-04-04
US5528806A (en) 1996-06-25
US5740595A (en) 1998-04-21
DE4008920C2 (de) 1994-02-03
US5751200A (en) 1998-05-12

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