JPS5545233A - Production of piezo-electric thin film driving metal vibration piece - Google Patents

Production of piezo-electric thin film driving metal vibration piece

Info

Publication number
JPS5545233A
JPS5545233A JP11828278A JP11828278A JPS5545233A JP S5545233 A JPS5545233 A JP S5545233A JP 11828278 A JP11828278 A JP 11828278A JP 11828278 A JP11828278 A JP 11828278A JP S5545233 A JPS5545233 A JP S5545233A
Authority
JP
Japan
Prior art keywords
thin film
metal
vibration piece
piezo
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11828278A
Other languages
Japanese (ja)
Inventor
Akihito Kudo
Hideo Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP11828278A priority Critical patent/JPS5545233A/en
Publication of JPS5545233A publication Critical patent/JPS5545233A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To realize a vibration piece processing method which has a high mass production efficiency, by forming a piezo-electric thin film on the metal substrate of ever elastic materials by the thin film technique and forming the vibration piece ring part and the electrode by ethcing and cutting off and separating the vibration piece from the metal substrate in the connection part. CONSTITUTION:Piezo-electric thin film 4 is stuck to only the surface of metal substrate 3 consisting of ever elastic materials by the sputtering method, and next, Au metal thin film 5 is stuck and formed on the surface and the revrese face by the sputtering method, the evaporation method, etc. Exposure and development are performed after forming photo resistor 6 on the surface of thin film 5, and further, metal surface 5 and thin film 3 are etched to leave metal substrate at the center as it is. Next, photo resisror 6 is removed, and photo resistor 7 is formed again on the surface of metal 5, and an electrode form is exposed and developed and printed to leave the electrode-form photo resistor as it is, and substrate 3 is selectively removed by etching liquid to make the substrate into a desired outline form. Finally, photo resistor 7 is removed, and metal vibration piece 1 is cut off and separated in the connection part. As a result, several hundreds of metal diaphragms can be taken from one wafer, so that a mass production efficiency may be high.
JP11828278A 1978-09-26 1978-09-26 Production of piezo-electric thin film driving metal vibration piece Pending JPS5545233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11828278A JPS5545233A (en) 1978-09-26 1978-09-26 Production of piezo-electric thin film driving metal vibration piece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11828278A JPS5545233A (en) 1978-09-26 1978-09-26 Production of piezo-electric thin film driving metal vibration piece

Publications (1)

Publication Number Publication Date
JPS5545233A true JPS5545233A (en) 1980-03-29

Family

ID=14732799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11828278A Pending JPS5545233A (en) 1978-09-26 1978-09-26 Production of piezo-electric thin film driving metal vibration piece

Country Status (1)

Country Link
JP (1) JPS5545233A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03131110A (en) * 1989-10-16 1991-06-04 Japan Radio Co Ltd Manufacture of composite longitudinal vibration mechanical filter
US5528806A (en) * 1989-09-21 1996-06-25 Nihon Musen Kabushiki Kaisha Tunable composite longitudinal vibration mechanical filter manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528806A (en) * 1989-09-21 1996-06-25 Nihon Musen Kabushiki Kaisha Tunable composite longitudinal vibration mechanical filter manufacturing method
US5740595A (en) * 1989-09-21 1998-04-21 Nihon Musen Kabushiki Kaisha Composite longitudinal vibration mechanical filter's method of manufacturing including undesired vibration absorber
JPH03131110A (en) * 1989-10-16 1991-06-04 Japan Radio Co Ltd Manufacture of composite longitudinal vibration mechanical filter

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