JPS6420428A - Formation of acicular member - Google Patents
Formation of acicular memberInfo
- Publication number
- JPS6420428A JPS6420428A JP17766187A JP17766187A JPS6420428A JP S6420428 A JPS6420428 A JP S6420428A JP 17766187 A JP17766187 A JP 17766187A JP 17766187 A JP17766187 A JP 17766187A JP S6420428 A JPS6420428 A JP S6420428A
- Authority
- JP
- Japan
- Prior art keywords
- sio2 film
- projection
- etching
- substrate
- acicular member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
PURPOSE:To easily obtain an acicular member in large quantities by etching the surface of a planar material, forming plural projections, removing a mask layer, executing chemically etching and forming sharply the tip part of the projection. CONSTITUTION:An SiO2 film 2 is stuck to a substrate 1. By patterning the SiO2 film, the SiO2 film 2 is left partially. By using the SiO2 film 2 as a mask and executing ion etching, the surface of the substrate 1 is removed selectively, and a projection 3 is formed. A tip part 5 of the projection 3 is immersed into an etching liquid. As a result, the tip part 5 becomes sharper. By separating the substrate 1 by a cleavage, etc., a prescribed acicular member is obtained separately. In such a way, the acicular member can be obtained easily in large quantities.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17766187A JPS6420428A (en) | 1987-07-15 | 1987-07-15 | Formation of acicular member |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17766187A JPS6420428A (en) | 1987-07-15 | 1987-07-15 | Formation of acicular member |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420428A true JPS6420428A (en) | 1989-01-24 |
Family
ID=16034892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17766187A Pending JPS6420428A (en) | 1987-07-15 | 1987-07-15 | Formation of acicular member |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420428A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04233128A (en) * | 1990-07-25 | 1992-08-21 | Internatl Business Mach Corp <Ibm> | Precision instrument sensor for profil measurement of afm/stm/mfm and its manufacture |
US5173716A (en) * | 1990-02-02 | 1992-12-22 | Harada Kogyo Kabushiki Kaisha | Device for driving telescopic power antenna |
US5599464A (en) * | 1995-10-06 | 1997-02-04 | Vlsi Standards, Inc. | Formation of atomic scale vertical features for topographic instrument calibration |
US5771744A (en) * | 1995-03-14 | 1998-06-30 | Holmac S.A.S. Di Gastaldi Christian E C. | Device for subjecting a shaft to a combined simple rotation and alternating rotation of limited extent about its own axis |
US6358860B1 (en) | 1999-10-07 | 2002-03-19 | Vlsi Standards, Inc. | Line width calibration standard manufacturing and certifying method |
JP2006160298A (en) * | 2004-12-03 | 2006-06-22 | Yushin Giken Kk | Packaging box, and packaging structure using the same |
-
1987
- 1987-07-15 JP JP17766187A patent/JPS6420428A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5173716A (en) * | 1990-02-02 | 1992-12-22 | Harada Kogyo Kabushiki Kaisha | Device for driving telescopic power antenna |
JPH04233128A (en) * | 1990-07-25 | 1992-08-21 | Internatl Business Mach Corp <Ibm> | Precision instrument sensor for profil measurement of afm/stm/mfm and its manufacture |
US5771744A (en) * | 1995-03-14 | 1998-06-30 | Holmac S.A.S. Di Gastaldi Christian E C. | Device for subjecting a shaft to a combined simple rotation and alternating rotation of limited extent about its own axis |
US5599464A (en) * | 1995-10-06 | 1997-02-04 | Vlsi Standards, Inc. | Formation of atomic scale vertical features for topographic instrument calibration |
US6358860B1 (en) | 1999-10-07 | 2002-03-19 | Vlsi Standards, Inc. | Line width calibration standard manufacturing and certifying method |
JP2006160298A (en) * | 2004-12-03 | 2006-06-22 | Yushin Giken Kk | Packaging box, and packaging structure using the same |
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