KR20210139409A - 질화 규소 소결체 및 그의 제조 방법, 및 적층체 및 파워 모듈 - Google Patents

질화 규소 소결체 및 그의 제조 방법, 및 적층체 및 파워 모듈 Download PDF

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KR20210139409A
KR20210139409A KR1020217033670A KR20217033670A KR20210139409A KR 20210139409 A KR20210139409 A KR 20210139409A KR 1020217033670 A KR1020217033670 A KR 1020217033670A KR 20217033670 A KR20217033670 A KR 20217033670A KR 20210139409 A KR20210139409 A KR 20210139409A
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silicon nitride
nitride sintered
sintered compact
thermal conductivity
sintered body
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쇼지 이와키리
마코토 다케다
신이치 다카다
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덴카 주식회사
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    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

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JP2017212316A (ja) 2016-05-25 2017-11-30 Ｄｏｗａホールディングス株式会社 金属−セラミックス接合基板およびその製造方法

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