CN113614910A - 氮化硅烧结体及其制造方法、以及层叠体及电力模组 - Google Patents

氮化硅烧结体及其制造方法、以及层叠体及电力模组 Download PDF

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CN113614910A
CN113614910A CN202080022624.7A CN202080022624A CN113614910A CN 113614910 A CN113614910 A CN 113614910A CN 202080022624 A CN202080022624 A CN 202080022624A CN 113614910 A CN113614910 A CN 113614910A
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silicon nitride
sintered body
nitride sintered
thermal conductivity
power module
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Chinese (zh)
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岩切翔二
武田真
高田真一
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Denka Co Ltd
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Denka Co Ltd
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