KR20210006279A - 흡착 기구 - Google Patents

흡착 기구 Download PDF

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Publication number
KR20210006279A
KR20210006279A KR1020200049023A KR20200049023A KR20210006279A KR 20210006279 A KR20210006279 A KR 20210006279A KR 1020200049023 A KR1020200049023 A KR 1020200049023A KR 20200049023 A KR20200049023 A KR 20200049023A KR 20210006279 A KR20210006279 A KR 20210006279A
Authority
KR
South Korea
Prior art keywords
pad
work
support wall
adsorption mechanism
adsorption
Prior art date
Application number
KR1020200049023A
Other languages
English (en)
Korean (ko)
Inventor
타쿠마 아루가
Original Assignee
가부시키가이샤 니혼피스코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니혼피스코 filed Critical 가부시키가이샤 니혼피스코
Publication of KR20210006279A publication Critical patent/KR20210006279A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool
    • H05K13/0409—Sucking devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
KR1020200049023A 2019-07-08 2020-04-23 흡착 기구 KR20210006279A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2019-126896 2019-07-08
JP2019126896A JP6880112B2 (ja) 2019-07-08 2019-07-08 移動装置の吸着機構

Publications (1)

Publication Number Publication Date
KR20210006279A true KR20210006279A (ko) 2021-01-18

Family

ID=74006430

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200049023A KR20210006279A (ko) 2019-07-08 2020-04-23 흡착 기구

Country Status (4)

Country Link
JP (1) JP6880112B2 (ja)
KR (1) KR20210006279A (ja)
CN (1) CN112192598B (ja)
TW (1) TW202103878A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016215285A (ja) 2015-05-14 2016-12-22 株式会社前川製作所 真空吸着装置
JP2019024127A (ja) 2018-11-13 2019-02-14 パナソニックＩｐマネジメント株式会社 基板保持装置および部品圧着機

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190511A (ja) * 1983-04-11 1984-10-29 東芝精機株式会社 吸着盤
JPS63221984A (ja) * 1987-03-09 1988-09-14 工業技術院長 走査型吸着盤
JP3176392B2 (ja) * 1991-06-26 2001-06-18 住友重機械工業株式会社 搬送用ハンド
JP3044840B2 (ja) * 1991-07-09 2000-05-22 松下電器産業株式会社 半導体部品の接合装置
EP0648187B1 (en) * 1992-06-26 2000-05-24 RANKIN, Noel William George Clamping device
JPH06335877A (ja) * 1993-05-27 1994-12-06 Agency Of Ind Science & Technol 真空吸着装置
JP2013055360A (ja) * 2012-12-17 2013-03-21 Lintec Corp 支持装置及び支持方法
EP3093510A4 (en) * 2014-01-08 2017-09-27 Hong Sik Koo Vacuum adsorption apparatus
CN106378790A (zh) * 2016-11-24 2017-02-08 广州数控设备有限公司 一种机器人吸盘装置
CN206383159U (zh) * 2017-01-05 2017-08-08 中国建材国际工程集团有限公司 玻璃真空吸盘结构
JP7007816B2 (ja) * 2017-06-08 2022-01-25 株式会社ディスコ チャックテーブル

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016215285A (ja) 2015-05-14 2016-12-22 株式会社前川製作所 真空吸着装置
JP2019024127A (ja) 2018-11-13 2019-02-14 パナソニックＩｐマネジメント株式会社 基板保持装置および部品圧着機

Also Published As

Publication number Publication date
TW202103878A (zh) 2021-02-01
CN112192598A (zh) 2021-01-08
JP2021010985A (ja) 2021-02-04
CN112192598B (zh) 2022-11-18
JP6880112B2 (ja) 2021-06-02

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