KR20200012736A - 조절계 - Google Patents

조절계 Download PDF

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Publication number
KR20200012736A
KR20200012736A KR1020190083244A KR20190083244A KR20200012736A KR 20200012736 A KR20200012736 A KR 20200012736A KR 1020190083244 A KR1020190083244 A KR 1020190083244A KR 20190083244 A KR20190083244 A KR 20190083244A KR 20200012736 A KR20200012736 A KR 20200012736A
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KR
South Korea
Prior art keywords
manipulated variable
cooling
area
value
switch point
Prior art date
Application number
KR1020190083244A
Other languages
English (en)
Korean (ko)
Inventor
료 하마노소노
후미히로 스가와라
유타카 마키노
나오토시 다니구치
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아즈빌주식회사
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Publication date
Application filed by 아즈빌주식회사 filed Critical 아즈빌주식회사
Publication of KR20200012736A publication Critical patent/KR20200012736A/ko

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00Automatic controllers
    • G05B11/01Automatic controllers electric
    • G05B11/36Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1919Control of temperature characterised by the use of electric means characterised by the type of controller

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
KR1020190083244A 2018-07-27 2019-07-10 조절계 KR20200012736A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018141767A JP7164348B2 (ja) 2018-07-27 2018-07-27 調節計
JPJP-P-2018-141767 2018-07-27

Publications (1)

Publication Number Publication Date
KR20200012736A true KR20200012736A (ko) 2020-02-05

Family

ID=69383881

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190083244A KR20200012736A (ko) 2018-07-27 2019-07-10 조절계

Country Status (4)

Country Link
JP (1) JP7164348B2 (zh)
KR (1) KR20200012736A (zh)
CN (1) CN110780591B (zh)
TW (1) TWI711907B (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05289704A (ja) 1992-04-11 1993-11-05 Rika Kogyo Kk 加熱冷却調節計
JP2016170806A (ja) 2012-12-07 2016-09-23 オムロン株式会社 調節器、制御方法および制御プログラム

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JPS603705A (ja) * 1983-06-21 1985-01-10 Matsushita Electric Ind Co Ltd 制御弁装置
JP2004126732A (ja) 2002-09-30 2004-04-22 Yamatake Corp 温度調節計
JP2004131038A (ja) * 2002-10-15 2004-04-30 Sanden Corp 車両用空調装置
TWI284791B (en) * 2004-04-23 2007-08-01 Yamatake Corp Control method and apparatus
US7458774B2 (en) 2005-12-20 2008-12-02 General Electric Company High pressure turbine disk hub with curved hub surface and method
CN101275774A (zh) * 2007-03-30 2008-10-01 朱殿臣 电动比例阀自动分段防冻恒温燃气热水器
ES2449695T3 (es) * 2009-10-20 2014-03-20 Surface Generation Limited Control por zonas de la temperatura de una herramienta
CN102109861B (zh) * 2010-12-15 2013-04-10 复旦大学 热分析仪高频pwm温度控制装置和控制方法
JP5627106B2 (ja) * 2011-02-16 2014-11-19 アズビル株式会社 制御装置および制御方法
JP5912439B2 (ja) * 2011-11-15 2016-04-27 東京エレクトロン株式会社 温度制御システム、半導体製造装置及び温度制御方法
CN103513860B (zh) * 2012-06-29 2016-12-21 联想(北京)有限公司 一种状态切换的方法及电子设备
JP6070145B2 (ja) * 2012-12-13 2017-02-01 オムロン株式会社 調節器、操作量出力方法、プログラムおよび記憶媒体
CN103116371B (zh) * 2013-01-15 2014-09-24 富通集团有限公司 一种用于反应釜的温度控制方法
CN104374036B (zh) * 2013-08-14 2018-08-17 浙江盾安人工环境股份有限公司 空调的控制方法和空调机组
CN111584355B (zh) * 2014-04-18 2021-07-13 株式会社荏原制作所 基板处理装置及基板处理系统
JP2016045686A (ja) * 2014-08-22 2016-04-04 アズビル株式会社 調節計
JP6346582B2 (ja) * 2015-03-26 2018-06-20 アズビル株式会社 制御装置および制御方法
WO2018100821A1 (ja) * 2016-11-29 2018-06-07 株式会社神鋼環境ソリューション 蒸気温度制御装置及びそれを含む制御ユニット

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05289704A (ja) 1992-04-11 1993-11-05 Rika Kogyo Kk 加熱冷却調節計
JP2016170806A (ja) 2012-12-07 2016-09-23 オムロン株式会社 調節器、制御方法および制御プログラム

Also Published As

Publication number Publication date
CN110780591B (zh) 2023-08-11
TWI711907B (zh) 2020-12-01
JP7164348B2 (ja) 2022-11-01
CN110780591A (zh) 2020-02-11
JP2020017231A (ja) 2020-01-30
TW202008084A (zh) 2020-02-16

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