KR20190063405A - 기판 반출 장치 - Google Patents

기판 반출 장치 Download PDF

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Publication number
KR20190063405A
KR20190063405A KR1020180144488A KR20180144488A KR20190063405A KR 20190063405 A KR20190063405 A KR 20190063405A KR 1020180144488 A KR1020180144488 A KR 1020180144488A KR 20180144488 A KR20180144488 A KR 20180144488A KR 20190063405 A KR20190063405 A KR 20190063405A
Authority
KR
South Korea
Prior art keywords
substrate
sheet
conveying
unit
carry
Prior art date
Application number
KR1020180144488A
Other languages
English (en)
Korean (ko)
Inventor
요시타카 니시오
기요시 다카마츠
츠토무 우에노
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20190063405A publication Critical patent/KR20190063405A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • B65H20/02—Advancing webs by friction roller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/26—Registering, tensioning, smoothing or guiding webs longitudinally by transverse stationary or adjustable bars or rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
KR1020180144488A 2017-11-29 2018-11-21 기판 반출 장치 KR20190063405A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017229383A JP6970431B2 (ja) 2017-11-29 2017-11-29 基板搬出装置
JPJP-P-2017-229383 2017-11-29

Publications (1)

Publication Number Publication Date
KR20190063405A true KR20190063405A (ko) 2019-06-07

Family

ID=66850086

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180144488A KR20190063405A (ko) 2017-11-29 2018-11-21 기판 반출 장치

Country Status (4)

Country Link
JP (1) JP6970431B2 (ja)
KR (1) KR20190063405A (ja)
CN (1) CN110027910B (ja)
TW (1) TW201926522A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013193167A (ja) 2012-03-21 2013-09-30 Hitachi Via Mechanics Ltd ワーク吸着機構

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4228993A (en) * 1978-05-01 1980-10-21 Ppg Industries, Inc. Sheet orienting and transporting frame
JPH08181158A (ja) * 1994-12-22 1996-07-12 Nitto Denko Corp 真空吸引装置
IT1311461B1 (it) * 1999-11-19 2002-03-12 Bottero Spa Metodo e macchina per la realizzazione di un articolo di vetro asviluppo piano presentante una superficie estesa ricoperta da uno
JP2002158277A (ja) * 2000-11-21 2002-05-31 Nikon Corp 基板ホルダ、基板搬送アーム、露光装置及び基板露光処理装置
JP2002329998A (ja) * 2001-04-27 2002-11-15 Ibiden Co Ltd 基板移送装置
JP4027700B2 (ja) * 2002-03-26 2007-12-26 中村留精密工業株式会社 スクライブ・ブレーク兼用装置
JP4924316B2 (ja) * 2007-09-14 2012-04-25 日本電気株式会社 半導体製造装置及び半導体製造方法
JP2009105249A (ja) * 2007-10-24 2009-05-14 Nec Electronics Corp ピックアップ装置およびピックアップ方法
JP2010263010A (ja) * 2009-04-30 2010-11-18 Fujitsu Ltd 搬送装置および搬送方法
KR102043656B1 (ko) * 2010-06-07 2019-11-12 니폰 덴키 가라스 가부시키가이샤 판 형상 부재의 이송 장치 및 흡착 패드
KR101202082B1 (ko) * 2011-04-21 2012-11-15 하이디스 테크놀로지 주식회사 스크라이빙 장치
JP6186940B2 (ja) * 2013-06-26 2017-08-30 三星ダイヤモンド工業株式会社 脆性材料基板の搬送方法
JP2016011178A (ja) * 2014-06-27 2016-01-21 三星ダイヤモンド工業株式会社 脆性材料基板の搬送方法及び搬送装置
JP6435669B2 (ja) * 2014-07-04 2018-12-12 三星ダイヤモンド工業株式会社 基板加工装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013193167A (ja) 2012-03-21 2013-09-30 Hitachi Via Mechanics Ltd ワーク吸着機構

Also Published As

Publication number Publication date
CN110027910B (zh) 2022-04-15
CN110027910A (zh) 2019-07-19
JP2019102539A (ja) 2019-06-24
JP6970431B2 (ja) 2021-11-24
TW201926522A (zh) 2019-07-01

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