KR20190020724A - 막 형성장치 및 막 형성방법 - Google Patents

막 형성장치 및 막 형성방법 Download PDF

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Publication number
KR20190020724A
KR20190020724A KR1020197000116A KR20197000116A KR20190020724A KR 20190020724 A KR20190020724 A KR 20190020724A KR 1020197000116 A KR1020197000116 A KR 1020197000116A KR 20197000116 A KR20197000116 A KR 20197000116A KR 20190020724 A KR20190020724 A KR 20190020724A
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KR
South Korea
Prior art keywords
substrate
roller
heating
film forming
temperature
Prior art date
Application number
KR1020197000116A
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English (en)
Korean (ko)
Inventor
아키히로 요코야마
마사키 타케이
마사토시 사토
준야 키요타
Original Assignee
가부시키가이샤 아루박
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Publication date
Application filed by 가부시키가이샤 아루박 filed Critical 가부시키가이샤 아루박
Publication of KR20190020724A publication Critical patent/KR20190020724A/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR1020197000116A 2017-04-26 2018-04-25 막 형성장치 및 막 형성방법 KR20190020724A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2017-087333 2017-04-26
JP2017087333 2017-04-26
PCT/JP2018/016817 WO2018199169A1 (ja) 2017-04-26 2018-04-25 成膜装置及び成膜方法

Publications (1)

Publication Number Publication Date
KR20190020724A true KR20190020724A (ko) 2019-03-04

Family

ID=63918367

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197000116A KR20190020724A (ko) 2017-04-26 2018-04-25 막 형성장치 및 막 형성방법

Country Status (4)

Country Link
JP (1) JPWO2018199169A1 (ja)
KR (1) KR20190020724A (ja)
CN (1) CN109729718A (ja)
WO (1) WO2018199169A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109778135A (zh) * 2019-03-28 2019-05-21 中国科学院青岛生物能源与过程研究所 一种预嵌入金属锂制备电池负极材料的装置及方法
KR102699837B1 (ko) * 2019-07-11 2024-08-29 니폰 덴키 가라스 가부시키가이샤 유리 롤의 제조 방법 및 제조 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008081820A (ja) 2006-09-28 2008-04-10 Sumitomo Electric Ind Ltd 成膜装置
JP2010121188A (ja) 2008-11-21 2010-06-03 Sumitomo Metal Mining Co Ltd 金属積層樹脂フィルム基板及びその製造方法
JP2010182599A (ja) 2009-02-09 2010-08-19 Toyota Motor Corp リチウムイオン電池用集電体の成膜方法及び成膜装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03158467A (ja) * 1989-11-14 1991-07-08 Matsushita Electric Ind Co Ltd 連続製膜装置
JPH11350117A (ja) * 1998-06-03 1999-12-21 Toppan Printing Co Ltd 真空成膜装置
JP2002231221A (ja) * 2001-02-01 2002-08-16 Mitsubishi Heavy Ind Ltd リチウム二次電池用電極又はセパレータ及びこれらの製造方法並びにこれらを用いたリチウム二次電池
JP4329357B2 (ja) * 2003-02-24 2009-09-09 住友電気工業株式会社 リチウム二次電池負極部材、及びその製造方法
JP4516304B2 (ja) * 2003-11-20 2010-08-04 株式会社アルバック 巻取式真空蒸着方法及び巻取式真空蒸着装置
US20100307414A1 (en) * 2008-04-14 2010-12-09 Ulvac, Inc. Take-Up Type Vacuum Deposition Apparatus
JP2010242200A (ja) * 2009-04-09 2010-10-28 Toyota Motor Corp 薄膜部材の製造装置およびその製造方法
JP2011089160A (ja) * 2009-10-21 2011-05-06 Honjo Metal Co Ltd リチウム膜の製造方法およびリチウム膜製造装置
JP6016723B2 (ja) * 2012-08-07 2016-10-26 株式会社神戸製鋼所 ガラスフィルム搬送装置
JP6209832B2 (ja) * 2013-03-06 2017-10-11 大日本印刷株式会社 積層体の製造方法
JP2015021172A (ja) * 2013-07-19 2015-02-02 日東電工株式会社 スパッタ装置
KR20160111481A (ko) * 2014-01-22 2016-09-26 어플라이드 머티어리얼스, 인코포레이티드 가요성 기판의 스프레딩을 위한 롤러, 가요성 기판을 프로세싱하기 위한 장치, 및 그의 동작 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008081820A (ja) 2006-09-28 2008-04-10 Sumitomo Electric Ind Ltd 成膜装置
JP2010121188A (ja) 2008-11-21 2010-06-03 Sumitomo Metal Mining Co Ltd 金属積層樹脂フィルム基板及びその製造方法
JP2010182599A (ja) 2009-02-09 2010-08-19 Toyota Motor Corp リチウムイオン電池用集電体の成膜方法及び成膜装置

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Publication number Publication date
WO2018199169A1 (ja) 2018-11-01
CN109729718A (zh) 2019-05-07
JPWO2018199169A1 (ja) 2019-06-27

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