KR20140100893A - 기판 가공 장치 - Google Patents

기판 가공 장치 Download PDF

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Publication number
KR20140100893A
KR20140100893A KR1020140010075A KR20140010075A KR20140100893A KR 20140100893 A KR20140100893 A KR 20140100893A KR 1020140010075 A KR1020140010075 A KR 1020140010075A KR 20140010075 A KR20140010075 A KR 20140010075A KR 20140100893 A KR20140100893 A KR 20140100893A
Authority
KR
South Korea
Prior art keywords
substrate
receiving
adsorption
comb
processing apparatus
Prior art date
Application number
KR1020140010075A
Other languages
English (en)
Korean (ko)
Inventor
토루 나루오
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20140100893A publication Critical patent/KR20140100893A/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027—Scoring tool holders; Driving mechanisms therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Specific Conveyance Elements (AREA)
KR1020140010075A 2013-02-07 2014-01-28 기판 가공 장치 KR20140100893A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013022624A JP6126396B2 (ja) 2013-02-07 2013-02-07 基板加工装置
JPJP-P-2013-022624 2013-02-07

Publications (1)

Publication Number Publication Date
KR20140100893A true KR20140100893A (ko) 2014-08-18

Family

ID=51270854

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140010075A KR20140100893A (ko) 2013-02-07 2014-01-28 기판 가공 장치

Country Status (4)

Country Link
JP (1) JP6126396B2 (ja)
KR (1) KR20140100893A (ja)
CN (1) CN103978564A (ja)
TW (1) TWI584397B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6117755B2 (ja) * 2014-09-22 2017-04-19 ファナック株式会社 予め切断された基板の引っ掛かりを解除する装置、ロボット、およびロボットシステム
JP2017095294A (ja) * 2015-11-20 2017-06-01 三星ダイヤモンド工業株式会社 基板分断装置
KR102525334B1 (ko) * 2016-03-03 2023-04-27 주식회사 탑 엔지니어링 스크라이빙 장치
JP6509772B2 (ja) * 2016-04-12 2019-05-08 株式会社佐藤鉄工所 成形材料供給装置
CN110405962B (zh) * 2019-07-23 2021-11-19 上海理工大学 自动翻转式半导体解理装置及加工方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147344U (ja) * 1988-03-30 1989-10-12
US6079227A (en) * 1997-06-05 2000-06-27 Nippon Sheet Glass Co., Ltd. Method for manufacturing bent and tempered glass sheet and apparatus for manufacturing the same
US6470782B1 (en) * 1997-09-25 2002-10-29 Beldex Corporation Scribe device
JP2002009133A (ja) * 2000-06-26 2002-01-11 Canon Inc 基板搬送装置
CN1486285B (zh) * 2001-01-17 2013-01-16 三星宝石工业株式会社 划线分断设备及其系统
JP4545996B2 (ja) * 2001-07-03 2010-09-15 株式会社アイテック ロボットハンドの駆動装置
JP4197129B2 (ja) * 2003-03-19 2008-12-17 シャープ株式会社 ワーク搬送装置
JP4739024B2 (ja) * 2003-12-04 2011-08-03 三星ダイヤモンド工業株式会社 基板加工方法、基板加工装置および基板搬送機構、基板分離装置
ITMI20041250A1 (it) * 2004-06-22 2004-09-22 Bavelloni Z Spa Procedimento di caricamento e taglio di lastre di vetro su tavoli di taglio
CN101058369A (zh) * 2006-04-19 2007-10-24 叶祺成 基板移运装置
JP5059573B2 (ja) * 2007-12-06 2012-10-24 東京エレクトロン株式会社 基板保持具、基板搬送装置および基板処理システム
JP5349881B2 (ja) * 2008-09-24 2013-11-20 三星ダイヤモンド工業株式会社 スクライブ装置および基板分断システム
JP5079115B2 (ja) * 2010-03-30 2012-11-21 住友化学株式会社 基板搬送機構および偏光フィルムの貼合装置における搬送手段を備えた基板支持装置
JP2013023401A (ja) * 2011-07-20 2013-02-04 Mitsuboshi Diamond Industrial Co Ltd 分断装置
CN102642714B (zh) * 2012-04-27 2015-02-18 深圳市华星光电技术有限公司 基板移运装置

Also Published As

Publication number Publication date
JP6126396B2 (ja) 2017-05-10
CN103978564A (zh) 2014-08-13
JP2014151538A (ja) 2014-08-25
TWI584397B (zh) 2017-05-21
TW201432842A (zh) 2014-08-16

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