KR20130097186A - 규소 주괴를 고형화시키기 위한 도가니 - Google Patents

규소 주괴를 고형화시키기 위한 도가니 Download PDF

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Publication number
KR20130097186A
KR20130097186A KR1020137006424A KR20137006424A KR20130097186A KR 20130097186 A KR20130097186 A KR 20130097186A KR 1020137006424 A KR1020137006424 A KR 1020137006424A KR 20137006424 A KR20137006424 A KR 20137006424A KR 20130097186 A KR20130097186 A KR 20130097186A
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South Korea
Prior art keywords
crucible
layer
silicon
tiles
polysilazane
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Ceased
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KR1020137006424A
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English (en)
Korean (ko)
Inventor
찰스 유게트
엠마뉴엘 플라오트
엘렌 리그니에르
Original Assignee
꼼미사리아 아 레네르지 아토미끄 에뜨 옥스 에너지스 앨터네이티브즈
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Publication of KR20130097186A publication Critical patent/KR20130097186A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D9/00—Crystallisation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/0087—Uses not provided for elsewhere in C04B2111/00 for metallurgical applications
    • C04B2111/00879—Non-ferrous metallurgy

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
KR1020137006424A 2010-08-27 2011-08-26 규소 주괴를 고형화시키기 위한 도가니 Ceased KR20130097186A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1056804A FR2964117B1 (fr) 2010-08-27 2010-08-27 Creuset pour la solidification de lingot de silicium
FR1056804 2010-08-27
PCT/IB2011/053748 WO2012025905A1 (fr) 2010-08-27 2011-08-26 Creuset pour la solidification de lingot de silicium

Publications (1)

Publication Number Publication Date
KR20130097186A true KR20130097186A (ko) 2013-09-02

Family

ID=43037050

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137006424A Ceased KR20130097186A (ko) 2010-08-27 2011-08-26 규소 주괴를 고형화시키기 위한 도가니

Country Status (8)

Country Link
US (1) US20130247334A1 (https=)
EP (1) EP2609043A1 (https=)
JP (1) JP5975994B2 (https=)
KR (1) KR20130097186A (https=)
CN (1) CN103080028B (https=)
BR (1) BR112013004537A2 (https=)
FR (1) FR2964117B1 (https=)
WO (1) WO2012025905A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230157088A (ko) * 2022-05-09 2023-11-16 (주)셀릭 저저항 대구경 잉곳 제조장치

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5557334B2 (ja) * 2010-12-27 2014-07-23 コバレントマテリアル株式会社 シリコン単結晶引上げ用シリカガラスルツボ
US9352389B2 (en) 2011-09-16 2016-05-31 Silicor Materials, Inc. Directional solidification system and method
FR2986228B1 (fr) * 2012-01-31 2014-02-28 Commissariat Energie Atomique Creuset pour la solidification de lingot de silicium.
DE102012019519B4 (de) 2012-10-05 2015-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer diffusionshemmenden Beschichtung, Tiegel zum Schmelzen und/oder Kristallisieren von Nichteisenmetallen sowie Verwendungszwecke
TWI643983B (zh) * 2013-03-14 2018-12-11 美商希利柯爾材料股份有限公司 定向凝固系統及方法
DE102016201495B4 (de) 2016-02-01 2019-05-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Tiegel mit einer Innenbeschichtung aus SiC als Diffusionsbarriere für Metalle sowie Verfahren zu dessen Herstellung, Verwendung und darin hergestellte Halbleiterkristalle
JP6564151B1 (ja) * 2019-02-28 2019-08-21 株式会社アドマップ ＳｉＣ膜単体構造体
CN112457027B (zh) * 2020-11-26 2022-10-11 西安鑫垚陶瓷复合材料有限公司 大尺寸圆截面陶瓷基复合材料构件熔融渗硅工装及方法
CN116462520A (zh) * 2023-04-28 2023-07-21 长沙新立硅材料科技有限公司 一种用于单晶硅拉制的无氧氮化硅坩埚的制作方法

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AU603724B2 (en) * 1988-01-22 1990-11-22 Ethyl Corporation Organoborosilazane polymers
JPH0365581A (ja) * 1989-08-01 1991-03-20 Nkk Corp 炭素焼結体の耐酸化性向上方法
US5114749A (en) * 1989-08-01 1992-05-19 Nkk Corporation Method for manufacturing carbon material having good resistance to oxidation by coating the carbon material with an inorganic polysilazane and then heating
JPH0365574A (ja) * 1989-08-01 1991-03-20 Nkk Corp 炭素と炭化ケイ素からなる多孔体の製造方法
US5322825A (en) 1992-05-29 1994-06-21 Allied-Signal Inc. Silicon oxycarbonitride by pyrolysis of polycyclosiloxanes in ammonia
US5837318A (en) * 1995-04-26 1998-11-17 Mcdonnell Douglas Corporation Process for production of low dielectric ceramic composites
US8405183B2 (en) * 2003-04-14 2013-03-26 S'Tile Pole des Eco-Industries Semiconductor structure
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DE10342042A1 (de) * 2003-09-11 2005-04-07 Wacker-Chemie Gmbh Verfahren zur Herstellung eines Si3N4 beschichteten SiO2-Formkörpers
DE102005032790A1 (de) * 2005-06-06 2006-12-07 Deutsche Solar Ag Behälter mit Beschichtung und Herstellungsverfahren
DE102005042944A1 (de) 2005-09-08 2007-03-22 Clariant International Limited Polysilazane enthaltende Beschichtungen für Metall- und Polymeroberflächen
TWI400369B (zh) * 2005-10-06 2013-07-01 Vesuvius Crucible Co 用於矽結晶的坩堝及其製造方法
DE102006008308A1 (de) * 2006-02-23 2007-08-30 Clariant International Limited Polysilazane enthaltende Beschichtungen zur Vermeidung von Zunderbildung und Korrosion
DE102007053284A1 (de) * 2007-11-08 2009-05-20 Esk Ceramics Gmbh & Co. Kg Fest haftende siliciumnitridhaltige Trennschicht
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230157088A (ko) * 2022-05-09 2023-11-16 (주)셀릭 저저항 대구경 잉곳 제조장치

Also Published As

Publication number Publication date
EP2609043A1 (fr) 2013-07-03
CN103080028B (zh) 2016-08-24
JP2013536150A (ja) 2013-09-19
US20130247334A1 (en) 2013-09-26
FR2964117A1 (fr) 2012-03-02
WO2012025905A1 (fr) 2012-03-01
BR112013004537A2 (pt) 2016-06-07
FR2964117B1 (fr) 2012-09-28
CN103080028A (zh) 2013-05-01
JP5975994B2 (ja) 2016-08-23

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