KR20120098683A - 고순도 불소가스, 그 제조 방법 및 용도, 및 불소가스 내의 불순물 모니터링 방법 - Google Patents

고순도 불소가스, 그 제조 방법 및 용도, 및 불소가스 내의 불순물 모니터링 방법 Download PDF

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KR20120098683A
KR20120098683A KR1020127012164A KR20127012164A KR20120098683A KR 20120098683 A KR20120098683 A KR 20120098683A KR 1020127012164 A KR1020127012164 A KR 1020127012164A KR 20127012164 A KR20127012164 A KR 20127012164A KR 20120098683 A KR20120098683 A KR 20120098683A
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South Korea
Prior art keywords
fluorine
cell
detector
generating cell
producing
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KR1020127012164A
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English (en)
Korean (ko)
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홀거 페르니체
요아네스 아이허
프란시스 파이스
도미니크 발타사르
크리스토프 조머
하랄트 크뤼거
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솔베이 플루오르 게엠베하
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Publication of KR20120098683A publication Critical patent/KR20120098683A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/20—Fluorine
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/72—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using flame burners
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Optics & Photonics (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Treating Waste Gases (AREA)
KR1020127012164A 2009-10-16 2010-10-13 고순도 불소가스, 그 제조 방법 및 용도, 및 불소가스 내의 불순물 모니터링 방법 KR20120098683A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP09173332 2009-10-16
EP09173332.9 2009-10-16

Publications (1)

Publication Number Publication Date
KR20120098683A true KR20120098683A (ko) 2012-09-05

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Family Applications (1)

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KR1020127012164A KR20120098683A (ko) 2009-10-16 2010-10-13 고순도 불소가스, 그 제조 방법 및 용도, 및 불소가스 내의 불순물 모니터링 방법

Country Status (7)

Country Link
US (1) US20120228144A1 (ja)
EP (1) EP2488448A1 (ja)
JP (1) JP2013507629A (ja)
KR (1) KR20120098683A (ja)
CN (1) CN102574682A (ja)
TW (1) TW201121889A (ja)
WO (1) WO2011045338A1 (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6792158B2 (ja) 2016-02-09 2020-11-25 セントラル硝子株式会社 フッ素化合物ガスの精製方法
JP6867581B2 (ja) * 2016-02-09 2021-04-28 セントラル硝子株式会社 フッ素ガスの精製方法
CN109276976B (zh) * 2018-12-05 2023-07-04 国家电网有限公司 一种六氟化硫与氮气混合气体的回收装置及方法
KR20220005530A (ko) * 2019-11-27 2022-01-13 쇼와 덴코 가부시키가이샤 자외 분광법에 의한 할로겐불화물 함유 가스에 포함되는 불소 가스 농도의 측정 방법
KR20220065864A (ko) * 2019-12-27 2022-05-20 쇼와 덴코 가부시키가이샤 불소 가스의 제조 방법 및 불소 가스 제조 장치
US20220213605A1 (en) * 2019-12-27 2022-07-07 Showa Denko K.K. Method for producing fluorine gas and device for producing fluorine gas
WO2021132028A1 (ja) * 2019-12-27 2021-07-01 昭和電工株式会社 フッ素ガスの製造方法及びフッ素ガス製造装置
US20220251716A1 (en) * 2019-12-27 2022-08-11 Showa Denko K.K. Method for producing fluorine gas and device for producing fluorine gas
CN113874553B (zh) * 2019-12-27 2024-02-09 株式会社力森诺科 氟气的制造方法及氟气制造装置
WO2021131816A1 (ja) * 2019-12-27 2021-07-01 昭和電工株式会社 フッ素ガスの製造方法及びフッ素ガス製造装置
US20220228273A1 (en) * 2019-12-27 2022-07-21 Showa Denko K.K. Device for producing fluorine gas and light scattering detector
CN112946125B (zh) * 2021-02-02 2021-11-16 福建德尔科技有限公司 氟气中氟化氢的分析装置及分析方法
CN116443854B (zh) * 2023-06-16 2023-09-01 福建德尔科技股份有限公司 一种基于四氟化碳制备的炭粒与氟气反应流量控制方法

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US4711680A (en) * 1983-05-23 1987-12-08 Rockwell International Corporation Pure fluorine gas generator
IT1229210B (it) * 1988-03-31 1991-07-25 Central Glass Co Ltd Metodo e dispositivo per analizzare gas contenenti fluoro.
JPH04120461A (ja) * 1990-09-10 1992-04-21 Mitsubishi Electric Corp Ｓｆ↓６ガス分析装置
JP3339962B2 (ja) * 1994-04-18 2002-10-28 関東電化工業株式会社 フッ素ガス中の不純物ガスの分析方法およびその装置
WO1996034998A1 (en) * 1995-05-01 1996-11-07 E.I. Du Pont De Nemours And Company Electrochemical conversion of anhydrous hydrogen halide to halogen gas using a cation-transporting membrane
US6240117B1 (en) * 1998-01-30 2001-05-29 Cymer, Inc. Fluorine control system with fluorine monitor
KR100633870B1 (ko) 2001-06-29 2006-10-13 쇼와 덴코 가부시키가이샤 고순도 불소 가스, 그의 제조 방법 및 용도
JP4744017B2 (ja) * 2001-06-29 2011-08-10 昭和電工株式会社 高純度フッ素ガス中の微量不純物の分析方法
JP2003190762A (ja) * 2001-12-27 2003-07-08 L'air Liquide Sa Pour L'etude & L'exploitation Des Procedes Georges Claude フッ化水素を含むフッ素ガスの生成装置
JP3725822B2 (ja) * 2001-12-27 2005-12-14 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード フッ素ガス生成及び供給装置
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JP5221881B2 (ja) * 2007-02-09 2013-06-26 大陽日酸株式会社 ガス分析装置
JP2011017077A (ja) * 2009-06-12 2011-01-27 Central Glass Co Ltd フッ素ガス生成装置
JP5438439B2 (ja) * 2009-09-04 2014-03-12 東洋炭素株式会社 気体供給システム

Also Published As

Publication number Publication date
EP2488448A1 (en) 2012-08-22
US20120228144A1 (en) 2012-09-13
JP2013507629A (ja) 2013-03-04
CN102574682A (zh) 2012-07-11
TW201121889A (en) 2011-07-01
WO2011045338A1 (en) 2011-04-21

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