KR20120079839A - Ｉｃ 소자 시험 소켓 - Google Patents

Ｉｃ 소자 시험 소켓 Download PDF

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Publication number
KR20120079839A
KR20120079839A KR1020127010603A KR20127010603A KR20120079839A KR 20120079839 A KR20120079839 A KR 20120079839A KR 1020127010603 A KR1020127010603 A KR 1020127010603A KR 20127010603 A KR20127010603 A KR 20127010603A KR 20120079839 A KR20120079839 A KR 20120079839A
Authority
KR
South Korea
Prior art keywords
substrate
pin
layer
conductive
dielectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020127010603A
Other languages
English (en)
Korean (ko)
Inventor
유이찌 쯔바끼
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 컴파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 쓰리엠 이노베이티브 프로퍼티즈 컴파니 filed Critical 쓰리엠 이노베이티브 프로퍼티즈 컴파니
Publication of KR20120079839A publication Critical patent/KR20120079839A/ko
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0483—Sockets for unleaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Connecting Device With Holders (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020127010603A 2009-09-29 2010-09-21 Ｉｃ 소자 시험 소켓 Withdrawn KR20120079839A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009224929A JP2011075313A (ja) 2009-09-29 2009-09-29 Ｉｃデバイス検査用ソケット
JPJP-P-2009-224929 2009-09-29

Publications (1)

Publication Number Publication Date
KR20120079839A true KR20120079839A (ko) 2012-07-13

Family

ID=43302431

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127010603A Withdrawn KR20120079839A (ko) 2009-09-29 2010-09-21 Ｉｃ 소자 시험 소켓

Country Status (7)

Country Link
US (1) US8957693B2 (enExample)
EP (1) EP2483699A1 (enExample)
JP (1) JP2011075313A (enExample)
KR (1) KR20120079839A (enExample)
PH (1) PH12012500637A1 (enExample)
TW (1) TW201126180A (enExample)
WO (1) WO2011041158A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111707920A (zh) * 2020-07-23 2020-09-25 苏州朗之睿电子科技有限公司 一种陶瓷嵌入定位式半导体器件用测试座

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150168450A1 (en) * 2013-12-17 2015-06-18 Tim WOODEN Coaxial Impedance-Matched Test Socket
US20160351526A1 (en) * 2014-03-29 2016-12-01 Intel Corporation Integrated circuit chip attachment using local heat source
JP2017026505A (ja) * 2015-07-24 2017-02-02 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
WO2019049481A1 (ja) * 2017-09-08 2019-03-14 株式会社エンプラス 電気接続用ソケット
WO2019106871A1 (ja) * 2017-11-30 2019-06-06 株式会社エンプラス 電気接続用ソケット
WO2021010583A1 (ko) * 2019-07-15 2021-01-21 이승용 벤딩 구조의 인터페이스, 그 인터페이스를 포함하는 인터페이스 어셈블리 및 테스트 소켓, 및 그 인터페이스 제조 방법

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH039271Y2 (enExample) * 1984-10-11 1991-03-07
JPH05235550A (ja) * 1992-02-20 1993-09-10 Nec Corp 低誘電率ガラスセラミック多層配線基板およびその製造方法
US5854534A (en) 1992-08-05 1998-12-29 Fujitsu Limited Controlled impedence interposer substrate
US5502397A (en) * 1992-11-12 1996-03-26 Advanced Micro Devices, Inc. Integrated circuit testing apparatus and method
US5480309A (en) 1994-05-23 1996-01-02 Kel Corporation Universal multilayer base board assembly for integrated circuits
JP3591894B2 (ja) * 1994-11-24 2004-11-24 キヤノン株式会社 多層プリント基板
TW456074B (en) * 1998-02-17 2001-09-21 Advantest Corp IC socket
JP2001116795A (ja) * 1999-10-18 2001-04-27 Mitsubishi Electric Corp テスト用ソケット、およびテスト用ソケットに用いる接続シート
AU2001296373A1 (en) * 2000-09-29 2002-04-08 Intel Corporation A method and an apparatus for testing electronic devices
US6512389B1 (en) 2000-11-17 2003-01-28 Aql Manufacturing Services, Inc. Apparatus for use in an electronic component test interface having multiple printed circuit boards
US20020180469A1 (en) * 2001-05-31 2002-12-05 Jichen Wu Reusable test jig
JP2003023257A (ja) * 2001-07-06 2003-01-24 Matsushita Electric Works Ltd プリント配線板
JP2003050262A (ja) * 2001-08-08 2003-02-21 Hitachi Ltd 高周波ｉｃソケット、半導体試験装置および半導体試験方法ならびに半導体装置の製造方法
US6891258B1 (en) * 2002-12-06 2005-05-10 Xilinx, Inc. Interposer providing low-inductance decoupling capacitance for a packaged integrated circuit
US6846184B2 (en) 2003-01-24 2005-01-25 High Connection Density Inc. Low inductance electrical contacts and LGA connector system
US7271581B2 (en) * 2003-04-02 2007-09-18 Micron Technology, Inc. Integrated circuit characterization printed circuit board, test equipment including same, method of fabrication thereof and method of characterizing an integrated circuit device
US6936502B2 (en) * 2003-05-14 2005-08-30 Nortel Networks Limited Package modification for channel-routed circuit boards
WO2005006003A1 (ja) 2003-07-10 2005-01-20 Nec Corporation Ｂｇａ用ｌｓｉテストソケット
WO2006062911A1 (en) * 2004-12-08 2006-06-15 K & S Interconnect, Inc. Test socket and method for making
US7663387B2 (en) 2007-09-27 2010-02-16 Yokowo Co., Ltd. Test socket
JP2009270835A (ja) * 2008-04-30 2009-11-19 Shinko Electric Ind Co Ltd 半導体部品の検査方法及び装置
US7927109B1 (en) 2009-10-30 2011-04-19 Hon Hai Precision Ind. Co., Ltd. Electrical connector having plated conductive layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111707920A (zh) * 2020-07-23 2020-09-25 苏州朗之睿电子科技有限公司 一种陶瓷嵌入定位式半导体器件用测试座

Also Published As

Publication number Publication date
PH12012500637A1 (en) 2012-11-12
US20120182037A1 (en) 2012-07-19
JP2011075313A (ja) 2011-04-14
WO2011041158A1 (en) 2011-04-07
EP2483699A1 (en) 2012-08-08
TW201126180A (en) 2011-08-01
US8957693B2 (en) 2015-02-17

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000