KR20110039260A - 전기적으로 절연된 필라들의 다이오드들에 대해 공유되는 다이오드 요소 부분을 갖는 레일 스택을 포함하는 비휘발성 메모리 어레이 - Google Patents

전기적으로 절연된 필라들의 다이오드들에 대해 공유되는 다이오드 요소 부분을 갖는 레일 스택을 포함하는 비휘발성 메모리 어레이 Download PDF

Info

Publication number
KR20110039260A
KR20110039260A KR1020117000959A KR20117000959A KR20110039260A KR 20110039260 A KR20110039260 A KR 20110039260A KR 1020117000959 A KR1020117000959 A KR 1020117000959A KR 20117000959 A KR20117000959 A KR 20117000959A KR 20110039260 A KR20110039260 A KR 20110039260A
Authority
KR
South Korea
Prior art keywords
diode element
layer
polysilicon layer
diode
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020117000959A
Other languages
English (en)
Korean (ko)
Inventor
강-제이 시아
크리스토퍼 제이. 페티
캘빈 케이. 리
Original Assignee
쌘디스크 3디 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 쌘디스크 3디 엘엘씨 filed Critical 쌘디스크 3디 엘엘씨
Publication of KR20110039260A publication Critical patent/KR20110039260A/ko
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/201Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
    • H10D84/204Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
    • H10D84/221Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B20/00Read-only memory [ROM] devices
    • H10B20/10ROM devices comprising bipolar components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/20Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays

Landscapes

  • Semiconductor Memories (AREA)
KR1020117000959A 2008-06-13 2009-06-02 전기적으로 절연된 필라들의 다이오드들에 대해 공유되는 다이오드 요소 부분을 갖는 레일 스택을 포함하는 비휘발성 메모리 어레이 Withdrawn KR20110039260A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/139,435 2008-06-13
US12/139,435 US8154005B2 (en) 2008-06-13 2008-06-13 Non-volatile memory arrays comprising rail stacks with a shared diode component portion for diodes of electrically isolated pillars

Publications (1)

Publication Number Publication Date
KR20110039260A true KR20110039260A (ko) 2011-04-15

Family

ID=40933694

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117000959A Withdrawn KR20110039260A (ko) 2008-06-13 2009-06-02 전기적으로 절연된 필라들의 다이오드들에 대해 공유되는 다이오드 요소 부분을 갖는 레일 스택을 포함하는 비휘발성 메모리 어레이

Country Status (7)

Country Link
US (2) US8154005B2 (enExample)
EP (1) EP2286453A1 (enExample)
JP (1) JP2011524091A (enExample)
KR (1) KR20110039260A (enExample)
CN (1) CN102067315B (enExample)
TW (1) TWI582907B (enExample)
WO (1) WO2009152001A1 (enExample)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8154005B2 (en) 2008-06-13 2012-04-10 Sandisk 3D Llc Non-volatile memory arrays comprising rail stacks with a shared diode component portion for diodes of electrically isolated pillars
US8105867B2 (en) * 2008-11-18 2012-01-31 Sandisk 3D Llc Self-aligned three-dimensional non-volatile memory fabrication
US8120068B2 (en) 2008-12-24 2012-02-21 Sandisk 3D Llc Three-dimensional memory structures having shared pillar memory cells
US8270199B2 (en) 2009-04-03 2012-09-18 Sandisk 3D Llc Cross point non-volatile memory cell
US7978498B2 (en) * 2009-04-03 2011-07-12 Sandisk 3D, Llc Programming non-volatile storage element using current from other element
US8139391B2 (en) 2009-04-03 2012-03-20 Sandisk 3D Llc Multi-bit resistance-switching memory cell
JP2011129737A (ja) * 2009-12-18 2011-06-30 Toshiba Corp 半導体記憶装置の製造方法及び半導体記憶装置
JP5981424B2 (ja) * 2010-06-11 2016-08-31 クロスバー, インコーポレイテッドCrossbar, Inc. メモリー素子に関する柱状構造及び方法
US9224496B2 (en) 2010-08-11 2015-12-29 Shine C. Chung Circuit and system of aggregated area anti-fuse in CMOS processes
US10916317B2 (en) 2010-08-20 2021-02-09 Attopsemi Technology Co., Ltd Programmable resistance memory on thin film transistor technology
US10229746B2 (en) 2010-08-20 2019-03-12 Attopsemi Technology Co., Ltd OTP memory with high data security
US8488364B2 (en) 2010-08-20 2013-07-16 Shine C. Chung Circuit and system of using a polysilicon diode as program selector for resistive devices in CMOS logic processes
US9496033B2 (en) 2010-08-20 2016-11-15 Attopsemi Technology Co., Ltd Method and system of programmable resistive devices with read capability using a low supply voltage
US9042153B2 (en) 2010-08-20 2015-05-26 Shine C. Chung Programmable resistive memory unit with multiple cells to improve yield and reliability
US9711237B2 (en) 2010-08-20 2017-07-18 Attopsemi Technology Co., Ltd. Method and structure for reliable electrical fuse programming
US9251893B2 (en) 2010-08-20 2016-02-02 Shine C. Chung Multiple-bit programmable resistive memory using diode as program selector
US9025357B2 (en) 2010-08-20 2015-05-05 Shine C. Chung Programmable resistive memory unit with data and reference cells
US9818478B2 (en) 2012-12-07 2017-11-14 Attopsemi Technology Co., Ltd Programmable resistive device and memory using diode as selector
US9431127B2 (en) 2010-08-20 2016-08-30 Shine C. Chung Circuit and system of using junction diode as program selector for metal fuses for one-time programmable devices
US8830720B2 (en) 2010-08-20 2014-09-09 Shine C. Chung Circuit and system of using junction diode as program selector and MOS as read selector for one-time programmable devices
US8804398B2 (en) 2010-08-20 2014-08-12 Shine C. Chung Reversible resistive memory using diodes formed in CMOS processes as program selectors
US9019742B2 (en) 2010-08-20 2015-04-28 Shine C. Chung Multiple-state one-time programmable (OTP) memory to function as multi-time programmable (MTP) memory
US8488359B2 (en) 2010-08-20 2013-07-16 Shine C. Chung Circuit and system of using junction diode as program selector for one-time programmable devices
US9236141B2 (en) 2010-08-20 2016-01-12 Shine C. Chung Circuit and system of using junction diode of MOS as program selector for programmable resistive devices
US10249379B2 (en) 2010-08-20 2019-04-02 Attopsemi Technology Co., Ltd One-time programmable devices having program selector for electrical fuses with extended area
US10923204B2 (en) 2010-08-20 2021-02-16 Attopsemi Technology Co., Ltd Fully testible OTP memory
US9460807B2 (en) 2010-08-20 2016-10-04 Shine C. Chung One-time programmable memory devices using FinFET technology
US9824768B2 (en) 2015-03-22 2017-11-21 Attopsemi Technology Co., Ltd Integrated OTP memory for providing MTP memory
US9070437B2 (en) 2010-08-20 2015-06-30 Shine C. Chung Circuit and system of using junction diode as program selector for one-time programmable devices with heat sink
JP5422534B2 (ja) * 2010-10-14 2014-02-19 株式会社東芝 不揮発性抵抗変化素子および不揮発性抵抗変化素子の製造方法
US9076513B2 (en) 2010-11-03 2015-07-07 Shine C. Chung Low-pin-count non-volatile memory interface with soft programming capability
US8913449B2 (en) 2012-03-11 2014-12-16 Shine C. Chung System and method of in-system repairs or configurations for memories
US9019791B2 (en) 2010-11-03 2015-04-28 Shine C. Chung Low-pin-count non-volatile memory interface for 3D IC
US8988965B2 (en) 2010-11-03 2015-03-24 Shine C. Chung Low-pin-count non-volatile memory interface
TWI478168B (zh) * 2010-12-08 2015-03-21 莊建祥 反熔絲記憶體及電子系統
US10192615B2 (en) 2011-02-14 2019-01-29 Attopsemi Technology Co., Ltd One-time programmable devices having a semiconductor fin structure with a divided active region
US10586832B2 (en) 2011-02-14 2020-03-10 Attopsemi Technology Co., Ltd One-time programmable devices using gate-all-around structures
US8848423B2 (en) 2011-02-14 2014-09-30 Shine C. Chung Circuit and system of using FinFET for building programmable resistive devices
JP2013065772A (ja) * 2011-09-20 2013-04-11 Toshiba Corp 半導体装置の製造方法
US8912576B2 (en) 2011-11-15 2014-12-16 Shine C. Chung Structures and techniques for using semiconductor body to construct bipolar junction transistors
US9324849B2 (en) 2011-11-15 2016-04-26 Shine C. Chung Structures and techniques for using semiconductor body to construct SCR, DIAC, or TRIAC
US9136261B2 (en) 2011-11-15 2015-09-15 Shine C. Chung Structures and techniques for using mesh-structure diodes for electro-static discharge (ESD) protection
US8861249B2 (en) 2012-02-06 2014-10-14 Shine C. Chung Circuit and system of a low density one-time programmable memory
US8917533B2 (en) 2012-02-06 2014-12-23 Shine C. Chung Circuit and system for testing a one-time programmable (OTP) memory
US9007804B2 (en) 2012-02-06 2015-04-14 Shine C. Chung Circuit and system of protective mechanisms for programmable resistive memories
US9076526B2 (en) 2012-09-10 2015-07-07 Shine C. Chung OTP memories functioning as an MTP memory
US9183897B2 (en) 2012-09-30 2015-11-10 Shine C. Chung Circuits and methods of a self-timed high speed SRAM
US9324447B2 (en) 2012-11-20 2016-04-26 Shine C. Chung Circuit and system for concurrently programming multiple bits of OTP memory devices
US9178143B2 (en) * 2013-07-29 2015-11-03 Industrial Technology Research Institute Resistive memory structure
US9412473B2 (en) 2014-06-16 2016-08-09 Shine C. Chung System and method of a novel redundancy scheme for OTP
KR102471608B1 (ko) * 2016-06-03 2022-11-29 에스케이하이닉스 주식회사 반도체 메모리 장치 및 그의 구동 방법
US11062786B2 (en) 2017-04-14 2021-07-13 Attopsemi Technology Co., Ltd One-time programmable memories with low power read operation and novel sensing scheme
US10535413B2 (en) 2017-04-14 2020-01-14 Attopsemi Technology Co., Ltd Low power read operation for programmable resistive memories
US10726914B2 (en) 2017-04-14 2020-07-28 Attopsemi Technology Co. Ltd Programmable resistive memories with low power read operation and novel sensing scheme
US11615859B2 (en) 2017-04-14 2023-03-28 Attopsemi Technology Co., Ltd One-time programmable memories with ultra-low power read operation and novel sensing scheme
US10770160B2 (en) 2017-11-30 2020-09-08 Attopsemi Technology Co., Ltd Programmable resistive memory formed by bit slices from a standard cell library
KR102682821B1 (ko) 2019-01-25 2024-07-08 삼성전자주식회사 가변 저항 메모리 장치
US12483429B2 (en) 2021-06-01 2025-11-25 Attopsemi Technology Co., Ltd Physically unclonable function produced using OTP memory

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU562641B2 (en) 1983-01-18 1987-06-18 Energy Conversion Devices Inc. Electronic matrix array
US5835396A (en) 1996-10-17 1998-11-10 Zhang; Guobiao Three-dimensional read-only memory
US6483736B2 (en) 1998-11-16 2002-11-19 Matrix Semiconductor, Inc. Vertically stacked field programmable nonvolatile memory and method of fabrication
US6034882A (en) * 1998-11-16 2000-03-07 Matrix Semiconductor, Inc. Vertically stacked field programmable nonvolatile memory and method of fabrication
CN1278645A (zh) * 1999-06-22 2001-01-03 张世熹 高密度集成电路之存储器
US6631085B2 (en) * 2000-04-28 2003-10-07 Matrix Semiconductor, Inc. Three-dimensional memory array incorporating serial chain diode stack
US8575719B2 (en) 2000-04-28 2013-11-05 Sandisk 3D Llc Silicon nitride antifuse for use in diode-antifuse memory arrays
US6420215B1 (en) 2000-04-28 2002-07-16 Matrix Semiconductor, Inc. Three-dimensional memory array and method of fabrication
US6515888B2 (en) 2000-08-14 2003-02-04 Matrix Semiconductor, Inc. Low cost three-dimensional memory array
US6777773B2 (en) 2000-08-14 2004-08-17 Matrix Semiconductor, Inc. Memory cell with antifuse layer formed at diode junction
TW540086B (en) * 2000-08-14 2003-07-01 Matrix Semiconductor Inc Dense arrays and charge storage devices, and methods for making same
US6627530B2 (en) 2000-12-22 2003-09-30 Matrix Semiconductor, Inc. Patterning three dimensional structures
US6356477B1 (en) 2001-01-29 2002-03-12 Hewlett Packard Company Cross point memory array including shared devices for blocking sneak path currents
US6525953B1 (en) 2001-08-13 2003-02-25 Matrix Semiconductor, Inc. Vertically-stacked, field-programmable, nonvolatile memory and method of fabrication
US6483734B1 (en) * 2001-11-26 2002-11-19 Hewlett Packard Company Memory device having memory cells capable of four states
US6579760B1 (en) 2002-03-28 2003-06-17 Macronix International Co., Ltd. Self-aligned, programmable phase change memory
US7623370B2 (en) 2002-04-04 2009-11-24 Kabushiki Kaisha Toshiba Resistance change memory device
US6642603B1 (en) 2002-06-27 2003-11-04 Matrix Semiconductor, Inc. Same conductivity type highly-doped regions for antifuse memory cell
US6952043B2 (en) 2002-06-27 2005-10-04 Matrix Semiconductor, Inc. Electrically isolated pillars in active devices
US7081377B2 (en) 2002-06-27 2006-07-25 Sandisk 3D Llc Three-dimensional memory
JP2006511965A (ja) 2002-12-19 2006-04-06 マトリックス セミコンダクター インコーポレイテッド 高密度不揮発性メモリを製作するための改良された方法
US7285464B2 (en) 2002-12-19 2007-10-23 Sandisk 3D Llc Nonvolatile memory cell comprising a reduced height vertical diode
US7005350B2 (en) 2002-12-31 2006-02-28 Matrix Semiconductor, Inc. Method for fabricating programmable memory array structures incorporating series-connected transistor strings
US6875651B2 (en) * 2003-01-23 2005-04-05 Sharp Laboratories Of America, Inc. Dual-trench isolated crosspoint memory array and method for fabricating same
US6822903B2 (en) 2003-03-31 2004-11-23 Matrix Semiconductor, Inc. Apparatus and method for disturb-free programming of passive element memory cells
US6951780B1 (en) 2003-12-18 2005-10-04 Matrix Semiconductor, Inc. Selective oxidation of silicon in diode, TFT, and monolithic three dimensional memory arrays
US7410838B2 (en) 2004-04-29 2008-08-12 Taiwan Semiconductor Manufacturing Co., Ltd. Fabrication methods for memory cells
US7405465B2 (en) * 2004-09-29 2008-07-29 Sandisk 3D Llc Deposited semiconductor structure to minimize n-type dopant diffusion and method of making
US7224013B2 (en) 2004-09-29 2007-05-29 Sandisk 3D Llc Junction diode comprising varying semiconductor compositions
US7521353B2 (en) 2005-03-25 2009-04-21 Sandisk 3D Llc Method for reducing dielectric overetch when making contact to conductive features
US20060250836A1 (en) 2005-05-09 2006-11-09 Matrix Semiconductor, Inc. Rewriteable memory cell comprising a diode and a resistance-switching material
WO2008016420A2 (en) * 2006-07-31 2008-02-07 Sandisk 3D Llc Multi-use memory cell and memory array and method for use therewith
WO2008016833A2 (en) * 2006-07-31 2008-02-07 Sandisk 3D Llc Increasing write voltage pulse operations in non-volatile memory
KR100881292B1 (ko) 2007-01-23 2009-02-04 삼성전자주식회사 3차원 적층구조를 가지는 저항성 반도체 메모리 장치 및그의 제어방법
TW200847399A (en) 2007-05-21 2008-12-01 Ind Tech Res Inst Phase change memory device and method of fabricating the same
US7989740B2 (en) 2008-05-16 2011-08-02 Thermon Manufacturing Company Heating cable
US20090283739A1 (en) 2008-05-19 2009-11-19 Masahiro Kiyotoshi Nonvolatile storage device and method for manufacturing same
JP2009283513A (ja) * 2008-05-19 2009-12-03 Toshiba Corp 不揮発性記憶装置及びその製造方法
US8154005B2 (en) 2008-06-13 2012-04-10 Sandisk 3D Llc Non-volatile memory arrays comprising rail stacks with a shared diode component portion for diodes of electrically isolated pillars
US8105867B2 (en) 2008-11-18 2012-01-31 Sandisk 3D Llc Self-aligned three-dimensional non-volatile memory fabrication
US8120068B2 (en) 2008-12-24 2012-02-21 Sandisk 3D Llc Three-dimensional memory structures having shared pillar memory cells

Also Published As

Publication number Publication date
CN102067315A (zh) 2011-05-18
US8154005B2 (en) 2012-04-10
JP2011524091A (ja) 2011-08-25
WO2009152001A1 (en) 2009-12-17
EP2286453A1 (en) 2011-02-23
US20120187361A1 (en) 2012-07-26
TWI582907B (zh) 2017-05-11
US8748859B2 (en) 2014-06-10
CN102067315B (zh) 2013-04-24
TW201007887A (en) 2010-02-16
US20090309089A1 (en) 2009-12-17

Similar Documents

Publication Publication Date Title
CN102067315B (zh) 包括具有被电隔离的柱的二极管的共享的二极管器件部的叠轨式堆叠的非易失性存储器阵列
US7660181B2 (en) Method of making non-volatile memory cell with embedded antifuse
US7830697B2 (en) High forward current diodes for reverse write 3D cell
US7800933B2 (en) Method for using a memory cell comprising switchable semiconductor memory element with trimmable resistance
US7706177B2 (en) Method of programming cross-point diode memory array
US7684226B2 (en) Method of making high forward current diodes for reverse write 3D cell
US7800934B2 (en) Programming methods to increase window for reverse write 3D cell
US8072791B2 (en) Method of making nonvolatile memory device containing carbon or nitrogen doped diode
US8008700B2 (en) Non-volatile memory cell with embedded antifuse
US20070090425A1 (en) Memory cell comprising switchable semiconductor memory element with trimmable resistance
US8102694B2 (en) Nonvolatile memory device containing carbon or nitrogen doped diode
US7800939B2 (en) Method of making 3D R/W cell with reduced reverse leakage
US7759666B2 (en) 3D R/W cell with reduced reverse leakage
TWI508307B (zh) 含有碳或氮摻雜二極體之非揮發性記憶體及其製造方法
JP5695417B2 (ja) 逆方向リークが減少した3次元の読み書きセルとそれを作る方法
WO2009002477A1 (en) High forward current diodes for reverse write 3d cell and method of making thereof

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000