TWI582907B - 包括具一供電性隔離柱構成之二極體用的共用二極體組件部分之軌條堆疊的非揮發性記憶體陣列 - Google Patents
包括具一供電性隔離柱構成之二極體用的共用二極體組件部分之軌條堆疊的非揮發性記憶體陣列 Download PDFInfo
- Publication number
- TWI582907B TWI582907B TW098119833A TW98119833A TWI582907B TW I582907 B TWI582907 B TW I582907B TW 098119833 A TW098119833 A TW 098119833A TW 98119833 A TW98119833 A TW 98119833A TW I582907 B TWI582907 B TW I582907B
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- Prior art keywords
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- strips
- diode
- diode assembly
- doped polysilicon
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/221—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
- H10B20/10—ROM devices comprising bipolar components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
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- Semiconductor Memories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/139,435 US8154005B2 (en) | 2008-06-13 | 2008-06-13 | Non-volatile memory arrays comprising rail stacks with a shared diode component portion for diodes of electrically isolated pillars |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201007887A TW201007887A (en) | 2010-02-16 |
| TWI582907B true TWI582907B (zh) | 2017-05-11 |
Family
ID=40933694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098119833A TWI582907B (zh) | 2008-06-13 | 2009-06-12 | 包括具一供電性隔離柱構成之二極體用的共用二極體組件部分之軌條堆疊的非揮發性記憶體陣列 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8154005B2 (enExample) |
| EP (1) | EP2286453A1 (enExample) |
| JP (1) | JP2011524091A (enExample) |
| KR (1) | KR20110039260A (enExample) |
| CN (1) | CN102067315B (enExample) |
| TW (1) | TWI582907B (enExample) |
| WO (1) | WO2009152001A1 (enExample) |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8154005B2 (en) | 2008-06-13 | 2012-04-10 | Sandisk 3D Llc | Non-volatile memory arrays comprising rail stacks with a shared diode component portion for diodes of electrically isolated pillars |
| US8105867B2 (en) * | 2008-11-18 | 2012-01-31 | Sandisk 3D Llc | Self-aligned three-dimensional non-volatile memory fabrication |
| US8120068B2 (en) | 2008-12-24 | 2012-02-21 | Sandisk 3D Llc | Three-dimensional memory structures having shared pillar memory cells |
| US8270199B2 (en) * | 2009-04-03 | 2012-09-18 | Sandisk 3D Llc | Cross point non-volatile memory cell |
| US7978498B2 (en) * | 2009-04-03 | 2011-07-12 | Sandisk 3D, Llc | Programming non-volatile storage element using current from other element |
| US8139391B2 (en) | 2009-04-03 | 2012-03-20 | Sandisk 3D Llc | Multi-bit resistance-switching memory cell |
| JP2011129737A (ja) * | 2009-12-18 | 2011-06-30 | Toshiba Corp | 半導体記憶装置の製造方法及び半導体記憶装置 |
| JP5981424B2 (ja) * | 2010-06-11 | 2016-08-31 | クロスバー, インコーポレイテッドCrossbar, Inc. | メモリー素子に関する柱状構造及び方法 |
| US9224496B2 (en) | 2010-08-11 | 2015-12-29 | Shine C. Chung | Circuit and system of aggregated area anti-fuse in CMOS processes |
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| US8488359B2 (en) | 2010-08-20 | 2013-07-16 | Shine C. Chung | Circuit and system of using junction diode as program selector for one-time programmable devices |
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| US10923204B2 (en) | 2010-08-20 | 2021-02-16 | Attopsemi Technology Co., Ltd | Fully testible OTP memory |
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| US9042153B2 (en) | 2010-08-20 | 2015-05-26 | Shine C. Chung | Programmable resistive memory unit with multiple cells to improve yield and reliability |
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| US9496033B2 (en) | 2010-08-20 | 2016-11-15 | Attopsemi Technology Co., Ltd | Method and system of programmable resistive devices with read capability using a low supply voltage |
| US9019742B2 (en) | 2010-08-20 | 2015-04-28 | Shine C. Chung | Multiple-state one-time programmable (OTP) memory to function as multi-time programmable (MTP) memory |
| US8649203B2 (en) | 2010-08-20 | 2014-02-11 | Shine C. Chung | Reversible resistive memory using polysilicon diodes as program selectors |
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| US8830720B2 (en) | 2010-08-20 | 2014-09-09 | Shine C. Chung | Circuit and system of using junction diode as program selector and MOS as read selector for one-time programmable devices |
| US9025357B2 (en) | 2010-08-20 | 2015-05-05 | Shine C. Chung | Programmable resistive memory unit with data and reference cells |
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| US10229746B2 (en) | 2010-08-20 | 2019-03-12 | Attopsemi Technology Co., Ltd | OTP memory with high data security |
| US9711237B2 (en) | 2010-08-20 | 2017-07-18 | Attopsemi Technology Co., Ltd. | Method and structure for reliable electrical fuse programming |
| US9818478B2 (en) | 2012-12-07 | 2017-11-14 | Attopsemi Technology Co., Ltd | Programmable resistive device and memory using diode as selector |
| US10916317B2 (en) | 2010-08-20 | 2021-02-09 | Attopsemi Technology Co., Ltd | Programmable resistance memory on thin film transistor technology |
| JP5422534B2 (ja) * | 2010-10-14 | 2014-02-19 | 株式会社東芝 | 不揮発性抵抗変化素子および不揮発性抵抗変化素子の製造方法 |
| US9019791B2 (en) | 2010-11-03 | 2015-04-28 | Shine C. Chung | Low-pin-count non-volatile memory interface for 3D IC |
| US8988965B2 (en) | 2010-11-03 | 2015-03-24 | Shine C. Chung | Low-pin-count non-volatile memory interface |
| US9076513B2 (en) | 2010-11-03 | 2015-07-07 | Shine C. Chung | Low-pin-count non-volatile memory interface with soft programming capability |
| US8913449B2 (en) | 2012-03-11 | 2014-12-16 | Shine C. Chung | System and method of in-system repairs or configurations for memories |
| US9496265B2 (en) * | 2010-12-08 | 2016-11-15 | Attopsemi Technology Co., Ltd | Circuit and system of a high density anti-fuse |
| US8848423B2 (en) | 2011-02-14 | 2014-09-30 | Shine C. Chung | Circuit and system of using FinFET for building programmable resistive devices |
| US10586832B2 (en) | 2011-02-14 | 2020-03-10 | Attopsemi Technology Co., Ltd | One-time programmable devices using gate-all-around structures |
| US10192615B2 (en) | 2011-02-14 | 2019-01-29 | Attopsemi Technology Co., Ltd | One-time programmable devices having a semiconductor fin structure with a divided active region |
| JP2013065772A (ja) * | 2011-09-20 | 2013-04-11 | Toshiba Corp | 半導体装置の製造方法 |
| US9136261B2 (en) | 2011-11-15 | 2015-09-15 | Shine C. Chung | Structures and techniques for using mesh-structure diodes for electro-static discharge (ESD) protection |
| US9324849B2 (en) | 2011-11-15 | 2016-04-26 | Shine C. Chung | Structures and techniques for using semiconductor body to construct SCR, DIAC, or TRIAC |
| US8912576B2 (en) | 2011-11-15 | 2014-12-16 | Shine C. Chung | Structures and techniques for using semiconductor body to construct bipolar junction transistors |
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| US9007804B2 (en) | 2012-02-06 | 2015-04-14 | Shine C. Chung | Circuit and system of protective mechanisms for programmable resistive memories |
| US8917533B2 (en) | 2012-02-06 | 2014-12-23 | Shine C. Chung | Circuit and system for testing a one-time programmable (OTP) memory |
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| US9183897B2 (en) | 2012-09-30 | 2015-11-10 | Shine C. Chung | Circuits and methods of a self-timed high speed SRAM |
| US9324447B2 (en) | 2012-11-20 | 2016-04-26 | Shine C. Chung | Circuit and system for concurrently programming multiple bits of OTP memory devices |
| US9178143B2 (en) * | 2013-07-29 | 2015-11-03 | Industrial Technology Research Institute | Resistive memory structure |
| US9412473B2 (en) | 2014-06-16 | 2016-08-09 | Shine C. Chung | System and method of a novel redundancy scheme for OTP |
| KR102471608B1 (ko) * | 2016-06-03 | 2022-11-29 | 에스케이하이닉스 주식회사 | 반도체 메모리 장치 및 그의 구동 방법 |
| US10726914B2 (en) | 2017-04-14 | 2020-07-28 | Attopsemi Technology Co. Ltd | Programmable resistive memories with low power read operation and novel sensing scheme |
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| US10535413B2 (en) | 2017-04-14 | 2020-01-14 | Attopsemi Technology Co., Ltd | Low power read operation for programmable resistive memories |
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| US10770160B2 (en) | 2017-11-30 | 2020-09-08 | Attopsemi Technology Co., Ltd | Programmable resistive memory formed by bit slices from a standard cell library |
| KR102682821B1 (ko) | 2019-01-25 | 2024-07-08 | 삼성전자주식회사 | 가변 저항 메모리 장치 |
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| TW200811864A (en) * | 2006-07-31 | 2008-03-01 | Sandisk 3D Llc | Multi-use memory cell and memory array and method for use therewith |
| TW200826117A (en) * | 2006-07-31 | 2008-06-16 | Sandisk 3D Llc | Method for controlled pulse operations in non-volatile memory and non-volatile memory |
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| US8105867B2 (en) | 2008-11-18 | 2012-01-31 | Sandisk 3D Llc | Self-aligned three-dimensional non-volatile memory fabrication |
| US8120068B2 (en) | 2008-12-24 | 2012-02-21 | Sandisk 3D Llc | Three-dimensional memory structures having shared pillar memory cells |
-
2008
- 2008-06-13 US US12/139,435 patent/US8154005B2/en not_active Expired - Fee Related
-
2009
- 2009-06-02 WO PCT/US2009/046001 patent/WO2009152001A1/en not_active Ceased
- 2009-06-02 CN CN2009801221973A patent/CN102067315B/zh active Active
- 2009-06-02 JP JP2011513573A patent/JP2011524091A/ja active Pending
- 2009-06-02 EP EP09763292A patent/EP2286453A1/en not_active Withdrawn
- 2009-06-02 KR KR1020117000959A patent/KR20110039260A/ko not_active Withdrawn
- 2009-06-12 TW TW098119833A patent/TWI582907B/zh not_active IP Right Cessation
-
2012
- 2012-04-06 US US13/441,805 patent/US8748859B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030022420A1 (en) * | 2000-04-28 | 2003-01-30 | Bendik Kleveland | Three-dimensional memory array incorporating serial chain diode stack |
| TW540086B (en) * | 2000-08-14 | 2003-07-01 | Matrix Semiconductor Inc | Dense arrays and charge storage devices, and methods for making same |
| US6642603B1 (en) * | 2002-06-27 | 2003-11-04 | Matrix Semiconductor, Inc. | Same conductivity type highly-doped regions for antifuse memory cell |
| US20040002186A1 (en) * | 2002-06-27 | 2004-01-01 | Vyvoda Michael A. | Electrically isolated pillars in active devices |
| TW200811864A (en) * | 2006-07-31 | 2008-03-01 | Sandisk 3D Llc | Multi-use memory cell and memory array and method for use therewith |
| TW200826117A (en) * | 2006-07-31 | 2008-06-16 | Sandisk 3D Llc | Method for controlled pulse operations in non-volatile memory and non-volatile memory |
Also Published As
| Publication number | Publication date |
|---|---|
| US8748859B2 (en) | 2014-06-10 |
| US20090309089A1 (en) | 2009-12-17 |
| KR20110039260A (ko) | 2011-04-15 |
| EP2286453A1 (en) | 2011-02-23 |
| CN102067315B (zh) | 2013-04-24 |
| CN102067315A (zh) | 2011-05-18 |
| US20120187361A1 (en) | 2012-07-26 |
| JP2011524091A (ja) | 2011-08-25 |
| WO2009152001A1 (en) | 2009-12-17 |
| US8154005B2 (en) | 2012-04-10 |
| TW201007887A (en) | 2010-02-16 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |