KR20090014107A - 복수의 대들보 합성형 접촉자 - Google Patents

복수의 대들보 합성형 접촉자 Download PDF

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Publication number
KR20090014107A
KR20090014107A KR1020080075285A KR20080075285A KR20090014107A KR 20090014107 A KR20090014107 A KR 20090014107A KR 1020080075285 A KR1020080075285 A KR 1020080075285A KR 20080075285 A KR20080075285 A KR 20080075285A KR 20090014107 A KR20090014107 A KR 20090014107A
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KR
South Korea
Prior art keywords
probe
vertical
horizontal
vertical probe
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020080075285A
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English (en)
Korean (ko)
Inventor
군세이 기모토
Original Assignee
군세이 기모토
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 군세이 기모토 filed Critical 군세이 기모토
Publication of KR20090014107A publication Critical patent/KR20090014107A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020080075285A 2007-08-03 2008-07-31 복수의 대들보 합성형 접촉자 Ceased KR20090014107A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00223232 2007-08-03
JP2007223232A JP5099487B2 (ja) 2007-08-03 2007-08-03 複数梁合成型接触子

Publications (1)

Publication Number Publication Date
KR20090014107A true KR20090014107A (ko) 2009-02-06

Family

ID=40331498

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080075285A Ceased KR20090014107A (ko) 2007-08-03 2008-07-31 복수의 대들보 합성형 접촉자

Country Status (5)

Country Link
US (1) US7808261B2 (https=)
JP (1) JP5099487B2 (https=)
KR (1) KR20090014107A (https=)
CN (1) CN101358998B (https=)
TW (1) TW200907351A (https=)

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* Cited by examiner, † Cited by third party
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JP4859820B2 (ja) * 2007-12-05 2012-01-25 東京エレクトロン株式会社 プローブ
JP2011141126A (ja) * 2010-01-05 2011-07-21 Toshiba Corp プローブカード
JP2011242377A (ja) * 2010-05-19 2011-12-01 Kimoto Gunsei プローブ
JP4883215B1 (ja) * 2010-10-29 2012-02-22 オムロン株式会社 端子およびこれを用いたコネクタ
JP4811530B1 (ja) * 2010-11-04 2011-11-09 オムロン株式会社 端子およびこれを用いたコネクタ
JP5083426B2 (ja) * 2011-03-14 2012-11-28 オムロン株式会社 端子およびこれを用いたコネクタ
JP5083427B2 (ja) 2011-03-14 2012-11-28 オムロン株式会社 端子およびこれを用いたコネクタ
US9702904B2 (en) 2011-03-21 2017-07-11 Formfactor, Inc. Non-linear vertical leaf spring
CN104155491A (zh) * 2013-05-13 2014-11-19 木本军生 探针
JP6491409B2 (ja) * 2013-12-27 2019-03-27 富士電機株式会社 接触子及び半導体試験装置
TWI603090B (zh) * 2016-09-06 2017-10-21 Mpi Corp A vertical probe, a method of manufacturing the same, and a probe head and a probe card using the same
DE102017209510A1 (de) * 2017-06-06 2018-12-06 Feinmetall Gmbh Kontaktelementsystem
TWI783074B (zh) * 2017-11-09 2022-11-11 義大利商探針科技公司 用於測試高頻裝置的測試頭的接觸探針
US11973301B2 (en) 2018-09-26 2024-04-30 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
US12078657B2 (en) 2019-12-31 2024-09-03 Microfabrica Inc. Compliant pin probes with extension springs, methods for making, and methods for using
US12181493B2 (en) 2018-10-26 2024-12-31 Microfabrica Inc. Compliant probes including dual independently operable probe contact elements including at least one flat extension spring, methods for making, and methods for using
US12000865B2 (en) 2019-02-14 2024-06-04 Microfabrica Inc. Multi-beam vertical probes with independent arms formed of a high conductivity metal for enhancing current carrying capacity and methods for making such probes
US11768227B1 (en) 2019-02-22 2023-09-26 Microfabrica Inc. Multi-layer probes having longitudinal axes and preferential probe bending axes that lie in planes that are nominally parallel to planes of probe layers
JP2021028603A (ja) * 2019-08-09 2021-02-25 株式会社日本マイクロニクス 電気的接触子及び電気的接続装置
US11761982B1 (en) 2019-12-31 2023-09-19 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact and methods for making such probes
US12196781B2 (en) 2019-12-31 2025-01-14 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact, methods for making such probes, and methods for using such probes
US12196782B2 (en) 2019-12-31 2025-01-14 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact, methods for making such probes, and methods for using such probes
US11802891B1 (en) 2019-12-31 2023-10-31 Microfabrica Inc. Compliant pin probes with multiple spring segments and compression spring deflection stabilization structures, methods for making, and methods for using
CN111579835B (zh) * 2020-05-18 2023-05-16 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器
US11774467B1 (en) 2020-09-01 2023-10-03 Microfabrica Inc. Method of in situ modulation of structural material properties and/or template shape
CN112147380A (zh) * 2020-09-03 2020-12-29 渭南高新区木王科技有限公司 一种弹片针
US12146898B2 (en) 2020-10-02 2024-11-19 Microfabrica Inc. Multi-beam probes with decoupled structural and current carrying beams and methods of making
KR102892995B1 (ko) * 2021-03-24 2025-12-05 삼성전자주식회사 반도체 소자 검사용 프로브 및 이를 포함하는 프로브 카드
JP2022176778A (ja) * 2021-05-17 2022-11-30 株式会社片岡製作所 充放電検査装置
CN114200278B (zh) * 2021-11-29 2022-12-27 强一半导体（苏州）有限公司 一种薄膜探针卡及其探针头

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US4618821A (en) * 1983-09-19 1986-10-21 Lenz Seymour S Test probe assembly for microelectronic circuits
US5599194A (en) * 1992-08-18 1997-02-04 Enplas Corporation IC socket and its contact pin
JP3762444B2 (ja) * 1993-08-24 2006-04-05 信昭 鈴木 回路基板の検査用プローブとその取付構造
KR100212169B1 (ko) * 1996-02-13 1999-08-02 오쿠보 마사오 프로브, 프로브의 제조, 그리고 프로브를 사용한 수직동작형 프로브 카드 어셈블리
US5764072A (en) * 1996-12-20 1998-06-09 Probe Technology Dual contact probe assembly for testing integrated circuits
US7063541B2 (en) * 1997-03-17 2006-06-20 Formfactor, Inc. Composite microelectronic spring structure and method for making same
US6127832A (en) * 1998-01-06 2000-10-03 International Business Machines Corporation Electrical test tool having easily replaceable electrical probe
JP3346279B2 (ja) * 1998-05-18 2002-11-18 三菱マテリアル株式会社 コンタクトプローブおよびそれを備えたプローブ装置並びにコンタクトプローブの製造方法
JP2000338133A (ja) * 1999-05-31 2000-12-08 Isao Kimoto 接触子
JP4579361B2 (ja) * 1999-09-24 2010-11-10 軍生 木本 接触子組立体
US7254889B1 (en) * 2000-09-08 2007-08-14 Gabe Cherian Interconnection devices
US20040051541A1 (en) * 2002-09-04 2004-03-18 Yu Zhou Contact structure with flexible cable and probe contact assembly using same
SG124273A1 (en) * 2004-03-08 2006-08-30 Tan Yin Leong Non-abrasive electrical test contact
WO2005011069A1 (ja) * 2003-07-29 2005-02-03 Advantest Corporation ソケット、及び試験装置
TWI286606B (en) * 2004-03-16 2007-09-11 Gunsei Kimoto Electric signal connecting device, and probe assembly and prober device using it
JP4571511B2 (ja) * 2005-01-07 2010-10-27 株式会社日本マイクロニクス 通電試験用プローブ
TWI398640B (zh) * 2005-09-19 2013-06-11 木本軍生 Contact assembly and its LSI wafer inspection device
TWI397696B (zh) * 2006-02-19 2013-06-01 木本軍生 Probe assembly
JP4522975B2 (ja) * 2006-06-19 2010-08-11 東京エレクトロン株式会社 プローブカード
JP5077735B2 (ja) * 2006-08-07 2012-11-21 軍生 木本 複数梁合成型接触子組立
JP2008122356A (ja) * 2006-10-18 2008-05-29 Isao Kimoto プローブ
JP5030060B2 (ja) * 2007-08-01 2012-09-19 軍生 木本 電気信号接続装置

Also Published As

Publication number Publication date
JP5099487B2 (ja) 2012-12-19
CN101358998B (zh) 2011-10-05
CN101358998A (zh) 2009-02-04
JP2009036744A (ja) 2009-02-19
US20090045831A1 (en) 2009-02-19
TW200907351A (en) 2009-02-16
US7808261B2 (en) 2010-10-05
TWI375035B (https=) 2012-10-21

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