KR20080015536A - 와이어 그리드 편광자 제조 시스템 및 제조 방법 - Google Patents

와이어 그리드 편광자 제조 시스템 및 제조 방법 Download PDF

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Publication number
KR20080015536A
KR20080015536A KR1020060076959A KR20060076959A KR20080015536A KR 20080015536 A KR20080015536 A KR 20080015536A KR 1020060076959 A KR1020060076959 A KR 1020060076959A KR 20060076959 A KR20060076959 A KR 20060076959A KR 20080015536 A KR20080015536 A KR 20080015536A
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KR
South Korea
Prior art keywords
unit
photoresist
stamp
substrate
curing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020060076959A
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English (en)
Korean (ko)
Inventor
추대호
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR1020060076959A priority Critical patent/KR20080015536A/ko
Priority to JP2006317914A priority patent/JP2008046580A/ja
Priority to US11/648,092 priority patent/US20080041816A1/en
Priority to CNA2007100081174A priority patent/CN101126894A/zh
Priority to TW096114603A priority patent/TW200811487A/zh
Priority to EP07016076A priority patent/EP1914571A3/en
Publication of KR20080015536A publication Critical patent/KR20080015536A/ko
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
KR1020060076959A 2006-08-16 2006-08-16 와이어 그리드 편광자 제조 시스템 및 제조 방법 Withdrawn KR20080015536A (ko)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020060076959A KR20080015536A (ko) 2006-08-16 2006-08-16 와이어 그리드 편광자 제조 시스템 및 제조 방법
JP2006317914A JP2008046580A (ja) 2006-08-16 2006-11-27 ワイヤーグリッド偏光子製造システム及びその製造方法
US11/648,092 US20080041816A1 (en) 2006-08-16 2006-12-29 Systems and methods for manufacturing wire grid polarizers
CNA2007100081174A CN101126894A (zh) 2006-08-16 2007-01-26 用于制造线栅偏振器的系统和方法
TW096114603A TW200811487A (en) 2006-08-16 2007-04-25 Systems and methods for manufacturing wire grid polarizers
EP07016076A EP1914571A3 (en) 2006-08-16 2007-08-16 System and methods for manufacturing wire grid polarizers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060076959A KR20080015536A (ko) 2006-08-16 2006-08-16 와이어 그리드 편광자 제조 시스템 및 제조 방법

Publications (1)

Publication Number Publication Date
KR20080015536A true KR20080015536A (ko) 2008-02-20

Family

ID=38962156

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060076959A Withdrawn KR20080015536A (ko) 2006-08-16 2006-08-16 와이어 그리드 편광자 제조 시스템 및 제조 방법

Country Status (6)

Country Link
US (1) US20080041816A1 (enExample)
EP (1) EP1914571A3 (enExample)
JP (1) JP2008046580A (enExample)
KR (1) KR20080015536A (enExample)
CN (1) CN101126894A (enExample)
TW (1) TW200811487A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190098405A (ko) * 2018-02-14 2019-08-22 한국기계연구원 순간가열방식 및 용액전사방식의 임프린트 장치와, 그 방법

Families Citing this family (20)

* Cited by examiner, † Cited by third party
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TWI481496B (zh) * 2007-12-19 2015-04-21 Heptagon Micro Optics Pte Ltd 製造光學元件的方法
JP5077764B2 (ja) 2008-04-22 2012-11-21 富士電機株式会社 インプリント方法およびその装置
JP5370806B2 (ja) 2008-04-22 2013-12-18 富士電機株式会社 インプリント方法およびその装置
JP5279397B2 (ja) * 2008-08-06 2013-09-04 キヤノン株式会社 インプリント装置、インプリント方法、およびデバイス製造方法
JP5149244B2 (ja) * 2009-06-19 2013-02-20 東京エレクトロン株式会社 インプリントシステム、インプリント方法、プログラム及びコンピュータ記憶媒体
CN102044476B (zh) * 2009-10-13 2013-06-19 中芯国际集成电路制造(上海)有限公司 金属图案的形成方法
KR20120075877A (ko) * 2010-12-29 2012-07-09 삼성전자주식회사 액정 디스플레이 패널 및 이를 포함하는 장치
JP2013020182A (ja) * 2011-07-13 2013-01-31 Asahi Kasei E-Materials Corp ワイヤグリッド偏光板及びワイヤグリッド偏光板の製造方法
US20130043956A1 (en) * 2011-08-15 2013-02-21 Honeywell International Inc. Systems and methods for a nanofabricated optical circular polarizer
KR20140030382A (ko) 2012-08-27 2014-03-12 삼성디스플레이 주식회사 액정 표시 장치 및 이의 제조 방법
CN104058362B (zh) * 2013-03-21 2017-06-27 无锡华润上华半导体有限公司 微电子机械系统的加工方法
KR102056902B1 (ko) 2013-05-29 2019-12-18 삼성전자주식회사 와이어 그리드 편광판 및 이를 구비하는 액정 표시패널 및 액정 표시장치
KR102089661B1 (ko) 2013-08-27 2020-03-17 삼성전자주식회사 와이어 그리드 편광판 및 이를 구비하는 액정 표시패널 및 액정 표시장치
KR101729683B1 (ko) 2015-09-16 2017-04-25 한국기계연구원 선격자 편광자의 제조 방법
WO2017131497A1 (ko) 2016-01-27 2017-08-03 주식회사 엘지화학 필름 마스크, 이의 제조방법 및 이를 이용한 패턴 형성 방법
KR102138960B1 (ko) 2016-01-27 2020-07-28 주식회사 엘지화학 필름 마스크, 이의 제조방법, 이를 이용한 패턴 형성 방법 및 이를 이용하여 형성된 패턴
JP6725097B2 (ja) 2016-01-27 2020-07-15 エルジー・ケム・リミテッド フィルムマスク、その製造方法、これを用いたパターンの形成方法およびこれを用いて形成されたパターン
WO2019065098A1 (ja) * 2017-09-27 2019-04-04 日本電気硝子株式会社 光学膜付きガラス板及びその製造方法
CN109270620B (zh) * 2018-11-16 2022-07-19 京东方科技集团股份有限公司 金属线栅偏振片的制作方法及显示面板
CN109445012A (zh) * 2018-12-20 2019-03-08 深圳市华星光电半导体显示技术有限公司 线栅型偏光片制作方法及透明显示装置

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Publication number Priority date Publication date Assignee Title
JP3152257B2 (ja) * 1992-08-10 2001-04-03 株式会社タツノ・メカトロニクス 給油装置
US7218465B1 (en) * 2002-06-28 2007-05-15 Seagate Technology Llc Magnetic media patterning via contact printing utilizing stamper having magnetic pattern formed in non-magnetic substrate
KR100484088B1 (ko) * 2002-12-06 2005-04-20 삼성전자주식회사 멀티 칩 패키지용 다이 어태치와 경화 인라인 장치
CA2522218A1 (en) * 2003-04-14 2004-10-28 National Graphics, Inc. Lenticular images formed on selected images portions
JP4295592B2 (ja) * 2003-09-30 2009-07-15 大日本印刷株式会社 複製版の製造方法
JP2005153091A (ja) * 2003-11-27 2005-06-16 Hitachi Ltd 転写方法及び転写装置
KR100624414B1 (ko) * 2003-12-06 2006-09-18 삼성전자주식회사 회절 렌즈 어레이 몰드의 제조 방법 및 ｕｖ 디스펜서
KR20050075580A (ko) * 2004-01-16 2005-07-21 엘지전자 주식회사 나노 임프린트 리쏘그라피를 이용한 대면적 스탬프 제작방법
US20060056024A1 (en) * 2004-09-15 2006-03-16 Ahn Seh W Wire grid polarizer and manufacturing method thereof
JP2006084776A (ja) * 2004-09-16 2006-03-30 Lg Electronics Inc ワイヤーグリッド偏光子及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190098405A (ko) * 2018-02-14 2019-08-22 한국기계연구원 순간가열방식 및 용액전사방식의 임프린트 장치와, 그 방법

Also Published As

Publication number Publication date
EP1914571A2 (en) 2008-04-23
US20080041816A1 (en) 2008-02-21
JP2008046580A (ja) 2008-02-28
EP1914571A3 (en) 2010-01-20
CN101126894A (zh) 2008-02-20
TW200811487A (en) 2008-03-01

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PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20060816

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid