CN101126894A - 用于制造线栅偏振器的系统和方法 - Google Patents

用于制造线栅偏振器的系统和方法 Download PDF

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Publication number
CN101126894A
CN101126894A CNA2007100081174A CN200710008117A CN101126894A CN 101126894 A CN101126894 A CN 101126894A CN A2007100081174 A CNA2007100081174 A CN A2007100081174A CN 200710008117 A CN200710008117 A CN 200710008117A CN 101126894 A CN101126894 A CN 101126894A
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CN
China
Prior art keywords
unit
photoresist
substrate
die
metal film
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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CNA2007100081174A
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English (en)
Chinese (zh)
Inventor
秋大镐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of CN101126894A publication Critical patent/CN101126894A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
CNA2007100081174A 2006-08-16 2007-01-26 用于制造线栅偏振器的系统和方法 Pending CN101126894A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020060076959A KR20080015536A (ko) 2006-08-16 2006-08-16 와이어 그리드 편광자 제조 시스템 및 제조 방법
KR76959/06 2006-08-16

Publications (1)

Publication Number Publication Date
CN101126894A true CN101126894A (zh) 2008-02-20

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ID=38962156

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007100081174A Pending CN101126894A (zh) 2006-08-16 2007-01-26 用于制造线栅偏振器的系统和方法

Country Status (6)

Country Link
US (1) US20080041816A1 (enExample)
EP (1) EP1914571A3 (enExample)
JP (1) JP2008046580A (enExample)
KR (1) KR20080015536A (enExample)
CN (1) CN101126894A (enExample)
TW (1) TW200811487A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102044476B (zh) * 2009-10-13 2013-06-19 中芯国际集成电路制造(上海)有限公司 金属图案的形成方法
CN109270620A (zh) * 2018-11-16 2019-01-25 京东方科技集团股份有限公司 金属线栅偏振片的制作方法及显示面板
CN111149025A (zh) * 2017-09-27 2020-05-12 日本电气硝子株式会社 带光学膜的玻璃板及其制造方法
WO2020124890A1 (zh) * 2018-12-20 2020-06-25 深圳市华星光电半导体显示技术有限公司 线栅型偏光片制作方法及透明显示装置

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TWI481496B (zh) * 2007-12-19 2015-04-21 Heptagon Micro Optics Pte Ltd 製造光學元件的方法
JP5077764B2 (ja) 2008-04-22 2012-11-21 富士電機株式会社 インプリント方法およびその装置
JP5370806B2 (ja) 2008-04-22 2013-12-18 富士電機株式会社 インプリント方法およびその装置
JP5279397B2 (ja) * 2008-08-06 2013-09-04 キヤノン株式会社 インプリント装置、インプリント方法、およびデバイス製造方法
JP5149244B2 (ja) * 2009-06-19 2013-02-20 東京エレクトロン株式会社 インプリントシステム、インプリント方法、プログラム及びコンピュータ記憶媒体
KR20120075877A (ko) * 2010-12-29 2012-07-09 삼성전자주식회사 액정 디스플레이 패널 및 이를 포함하는 장치
JP2013020182A (ja) * 2011-07-13 2013-01-31 Asahi Kasei E-Materials Corp ワイヤグリッド偏光板及びワイヤグリッド偏光板の製造方法
US20130043956A1 (en) * 2011-08-15 2013-02-21 Honeywell International Inc. Systems and methods for a nanofabricated optical circular polarizer
KR20140030382A (ko) 2012-08-27 2014-03-12 삼성디스플레이 주식회사 액정 표시 장치 및 이의 제조 방법
CN104058362B (zh) * 2013-03-21 2017-06-27 无锡华润上华半导体有限公司 微电子机械系统的加工方法
KR102056902B1 (ko) 2013-05-29 2019-12-18 삼성전자주식회사 와이어 그리드 편광판 및 이를 구비하는 액정 표시패널 및 액정 표시장치
KR102089661B1 (ko) 2013-08-27 2020-03-17 삼성전자주식회사 와이어 그리드 편광판 및 이를 구비하는 액정 표시패널 및 액정 표시장치
KR101729683B1 (ko) 2015-09-16 2017-04-25 한국기계연구원 선격자 편광자의 제조 방법
WO2017131497A1 (ko) 2016-01-27 2017-08-03 주식회사 엘지화학 필름 마스크, 이의 제조방법 및 이를 이용한 패턴 형성 방법
KR102138960B1 (ko) 2016-01-27 2020-07-28 주식회사 엘지화학 필름 마스크, 이의 제조방법, 이를 이용한 패턴 형성 방법 및 이를 이용하여 형성된 패턴
JP6725097B2 (ja) 2016-01-27 2020-07-15 エルジー・ケム・リミテッド フィルムマスク、その製造方法、これを用いたパターンの形成方法およびこれを用いて形成されたパターン
KR102022268B1 (ko) * 2018-02-14 2019-09-19 한국기계연구원 순간가열방식 및 용액전사방식의 임프린트 장치와, 그 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3152257B2 (ja) * 1992-08-10 2001-04-03 株式会社タツノ・メカトロニクス 給油装置
US7218465B1 (en) * 2002-06-28 2007-05-15 Seagate Technology Llc Magnetic media patterning via contact printing utilizing stamper having magnetic pattern formed in non-magnetic substrate
KR100484088B1 (ko) * 2002-12-06 2005-04-20 삼성전자주식회사 멀티 칩 패키지용 다이 어태치와 경화 인라인 장치
CA2522218A1 (en) * 2003-04-14 2004-10-28 National Graphics, Inc. Lenticular images formed on selected images portions
JP4295592B2 (ja) * 2003-09-30 2009-07-15 大日本印刷株式会社 複製版の製造方法
JP2005153091A (ja) * 2003-11-27 2005-06-16 Hitachi Ltd 転写方法及び転写装置
KR100624414B1 (ko) * 2003-12-06 2006-09-18 삼성전자주식회사 회절 렌즈 어레이 몰드의 제조 방법 및 ｕｖ 디스펜서
KR20050075580A (ko) * 2004-01-16 2005-07-21 엘지전자 주식회사 나노 임프린트 리쏘그라피를 이용한 대면적 스탬프 제작방법
US20060056024A1 (en) * 2004-09-15 2006-03-16 Ahn Seh W Wire grid polarizer and manufacturing method thereof
JP2006084776A (ja) * 2004-09-16 2006-03-30 Lg Electronics Inc ワイヤーグリッド偏光子及びその製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102044476B (zh) * 2009-10-13 2013-06-19 中芯国际集成电路制造(上海)有限公司 金属图案的形成方法
CN111149025A (zh) * 2017-09-27 2020-05-12 日本电气硝子株式会社 带光学膜的玻璃板及其制造方法
CN109270620A (zh) * 2018-11-16 2019-01-25 京东方科技集团股份有限公司 金属线栅偏振片的制作方法及显示面板
US11307341B2 (en) 2018-11-16 2022-04-19 Boe Technology Group Co., Ltd. Method for manufacturing metal wire grid polarizer and display panel
WO2020124890A1 (zh) * 2018-12-20 2020-06-25 深圳市华星光电半导体显示技术有限公司 线栅型偏光片制作方法及透明显示装置

Also Published As

Publication number Publication date
EP1914571A2 (en) 2008-04-23
US20080041816A1 (en) 2008-02-21
JP2008046580A (ja) 2008-02-28
EP1914571A3 (en) 2010-01-20
TW200811487A (en) 2008-03-01
KR20080015536A (ko) 2008-02-20

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Application publication date: 20080220