TW200811487A - Systems and methods for manufacturing wire grid polarizers - Google Patents
Systems and methods for manufacturing wire grid polarizers Download PDFInfo
- Publication number
- TW200811487A TW200811487A TW096114603A TW96114603A TW200811487A TW 200811487 A TW200811487 A TW 200811487A TW 096114603 A TW096114603 A TW 096114603A TW 96114603 A TW96114603 A TW 96114603A TW 200811487 A TW200811487 A TW 200811487A
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- Taiwan
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- photoresist
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Links
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
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- 244000144730 Amygdalus persica Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
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- 238000003848 UV Light-Curing Methods 0.000 description 1
- FJJCIZWZNKZHII-UHFFFAOYSA-N [4,6-bis(cyanoamino)-1,3,5-triazin-2-yl]cyanamide Chemical compound N#CNC1=NC(NC#N)=NC(NC#N)=N1 FJJCIZWZNKZHII-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
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- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Polarising Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060076959A KR20080015536A (ko) | 2006-08-16 | 2006-08-16 | 와이어 그리드 편광자 제조 시스템 및 제조 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200811487A true TW200811487A (en) | 2008-03-01 |
Family
ID=38962156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096114603A TW200811487A (en) | 2006-08-16 | 2007-04-25 | Systems and methods for manufacturing wire grid polarizers |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20080041816A1 (enExample) |
| EP (1) | EP1914571A3 (enExample) |
| JP (1) | JP2008046580A (enExample) |
| KR (1) | KR20080015536A (enExample) |
| CN (1) | CN101126894A (enExample) |
| TW (1) | TW200811487A (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI481496B (zh) * | 2007-12-19 | 2015-04-21 | Heptagon Micro Optics Pte Ltd | 製造光學元件的方法 |
| JP5077764B2 (ja) | 2008-04-22 | 2012-11-21 | 富士電機株式会社 | インプリント方法およびその装置 |
| JP5370806B2 (ja) | 2008-04-22 | 2013-12-18 | 富士電機株式会社 | インプリント方法およびその装置 |
| JP5279397B2 (ja) * | 2008-08-06 | 2013-09-04 | キヤノン株式会社 | インプリント装置、インプリント方法、およびデバイス製造方法 |
| JP5149244B2 (ja) * | 2009-06-19 | 2013-02-20 | 東京エレクトロン株式会社 | インプリントシステム、インプリント方法、プログラム及びコンピュータ記憶媒体 |
| CN102044476B (zh) * | 2009-10-13 | 2013-06-19 | 中芯国际集成电路制造(上海)有限公司 | 金属图案的形成方法 |
| KR20120075877A (ko) * | 2010-12-29 | 2012-07-09 | 삼성전자주식회사 | 액정 디스플레이 패널 및 이를 포함하는 장치 |
| JP2013020182A (ja) * | 2011-07-13 | 2013-01-31 | Asahi Kasei E-Materials Corp | ワイヤグリッド偏光板及びワイヤグリッド偏光板の製造方法 |
| US20130043956A1 (en) * | 2011-08-15 | 2013-02-21 | Honeywell International Inc. | Systems and methods for a nanofabricated optical circular polarizer |
| KR20140030382A (ko) | 2012-08-27 | 2014-03-12 | 삼성디스플레이 주식회사 | 액정 표시 장치 및 이의 제조 방법 |
| CN104058362B (zh) * | 2013-03-21 | 2017-06-27 | 无锡华润上华半导体有限公司 | 微电子机械系统的加工方法 |
| KR102056902B1 (ko) | 2013-05-29 | 2019-12-18 | 삼성전자주식회사 | 와이어 그리드 편광판 및 이를 구비하는 액정 표시패널 및 액정 표시장치 |
| KR102089661B1 (ko) | 2013-08-27 | 2020-03-17 | 삼성전자주식회사 | 와이어 그리드 편광판 및 이를 구비하는 액정 표시패널 및 액정 표시장치 |
| KR101729683B1 (ko) | 2015-09-16 | 2017-04-25 | 한국기계연구원 | 선격자 편광자의 제조 방법 |
| WO2017131497A1 (ko) | 2016-01-27 | 2017-08-03 | 주식회사 엘지화학 | 필름 마스크, 이의 제조방법 및 이를 이용한 패턴 형성 방법 |
| KR102138960B1 (ko) | 2016-01-27 | 2020-07-28 | 주식회사 엘지화학 | 필름 마스크, 이의 제조방법, 이를 이용한 패턴 형성 방법 및 이를 이용하여 형성된 패턴 |
| JP6725097B2 (ja) | 2016-01-27 | 2020-07-15 | エルジー・ケム・リミテッド | フィルムマスク、その製造方法、これを用いたパターンの形成方法およびこれを用いて形成されたパターン |
| WO2019065098A1 (ja) * | 2017-09-27 | 2019-04-04 | 日本電気硝子株式会社 | 光学膜付きガラス板及びその製造方法 |
| KR102022268B1 (ko) * | 2018-02-14 | 2019-09-19 | 한국기계연구원 | 순간가열방식 및 용액전사방식의 임프린트 장치와, 그 방법 |
| CN109270620B (zh) * | 2018-11-16 | 2022-07-19 | 京东方科技集团股份有限公司 | 金属线栅偏振片的制作方法及显示面板 |
| CN109445012A (zh) * | 2018-12-20 | 2019-03-08 | 深圳市华星光电半导体显示技术有限公司 | 线栅型偏光片制作方法及透明显示装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3152257B2 (ja) * | 1992-08-10 | 2001-04-03 | 株式会社タツノ・メカトロニクス | 給油装置 |
| US7218465B1 (en) * | 2002-06-28 | 2007-05-15 | Seagate Technology Llc | Magnetic media patterning via contact printing utilizing stamper having magnetic pattern formed in non-magnetic substrate |
| KR100484088B1 (ko) * | 2002-12-06 | 2005-04-20 | 삼성전자주식회사 | 멀티 칩 패키지용 다이 어태치와 경화 인라인 장치 |
| CA2522218A1 (en) * | 2003-04-14 | 2004-10-28 | National Graphics, Inc. | Lenticular images formed on selected images portions |
| JP4295592B2 (ja) * | 2003-09-30 | 2009-07-15 | 大日本印刷株式会社 | 複製版の製造方法 |
| JP2005153091A (ja) * | 2003-11-27 | 2005-06-16 | Hitachi Ltd | 転写方法及び転写装置 |
| KR100624414B1 (ko) * | 2003-12-06 | 2006-09-18 | 삼성전자주식회사 | 회절 렌즈 어레이 몰드의 제조 방법 및 ｕｖ 디스펜서 |
| KR20050075580A (ko) * | 2004-01-16 | 2005-07-21 | 엘지전자 주식회사 | 나노 임프린트 리쏘그라피를 이용한 대면적 스탬프 제작방법 |
| US20060056024A1 (en) * | 2004-09-15 | 2006-03-16 | Ahn Seh W | Wire grid polarizer and manufacturing method thereof |
| JP2006084776A (ja) * | 2004-09-16 | 2006-03-30 | Lg Electronics Inc | ワイヤーグリッド偏光子及びその製造方法 |
-
2006
- 2006-08-16 KR KR1020060076959A patent/KR20080015536A/ko not_active Withdrawn
- 2006-11-27 JP JP2006317914A patent/JP2008046580A/ja active Pending
- 2006-12-29 US US11/648,092 patent/US20080041816A1/en not_active Abandoned
-
2007
- 2007-01-26 CN CNA2007100081174A patent/CN101126894A/zh active Pending
- 2007-04-25 TW TW096114603A patent/TW200811487A/zh unknown
- 2007-08-16 EP EP07016076A patent/EP1914571A3/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP1914571A2 (en) | 2008-04-23 |
| US20080041816A1 (en) | 2008-02-21 |
| JP2008046580A (ja) | 2008-02-28 |
| EP1914571A3 (en) | 2010-01-20 |
| CN101126894A (zh) | 2008-02-20 |
| KR20080015536A (ko) | 2008-02-20 |
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