KR20040070322A - 정전 척장치용 전극시트 및 이를 이용한 정전 척장치 - Google Patents

정전 척장치용 전극시트 및 이를 이용한 정전 척장치 Download PDF

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Publication number
KR20040070322A
KR20040070322A KR1020040005335A KR20040005335A KR20040070322A KR 20040070322 A KR20040070322 A KR 20040070322A KR 1020040005335 A KR1020040005335 A KR 1020040005335A KR 20040005335 A KR20040005335 A KR 20040005335A KR 20040070322 A KR20040070322 A KR 20040070322A
Authority
KR
South Korea
Prior art keywords
electrostatic chuck
insulating adhesive
insulating
electrode
electrode sheet
Prior art date
Application number
KR1020040005335A
Other languages
English (en)
Korean (ko)
Inventor
시마다케시
도치히라준
하세가와유이치
야마모토도시유키
호리마사토시
이마니시아키오
Original Assignee
가부시키가이샤 도모에가와 세이시쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 도모에가와 세이시쇼 filed Critical 가부시키가이샤 도모에가와 세이시쇼
Publication of KR20040070322A publication Critical patent/KR20040070322A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/042—Reducing risk of explosion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Laminated Bodies (AREA)
  • Adhesives Or Adhesive Processes (AREA)
KR1020040005335A 2003-01-31 2004-01-28 정전 척장치용 전극시트 및 이를 이용한 정전 척장치 KR20040070322A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003024658A JP2004235563A (ja) 2003-01-31 2003-01-31 静電チャック装置用電極シート及びこれを用いた静電チャック装置
JPJP-P-2003-00024658 2003-01-31

Related Child Applications (2)

Application Number Title Priority Date Filing Date
KR1020050128173A Division KR100639817B1 (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치
KR1020050128172A Division KR20060010701A (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치

Publications (1)

Publication Number Publication Date
KR20040070322A true KR20040070322A (ko) 2004-08-07

Family

ID=32953132

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020040005335A KR20040070322A (ko) 2003-01-31 2004-01-28 정전 척장치용 전극시트 및 이를 이용한 정전 척장치
KR1020050128173A KR100639817B1 (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치
KR1020050128172A KR20060010701A (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020050128173A KR100639817B1 (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치
KR1020050128172A KR20060010701A (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치

Country Status (4)

Country Link
JP (1) JP2004235563A (zh)
KR (3) KR20040070322A (zh)
CN (1) CN1315172C (zh)
TW (1) TWI240350B (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4866543B2 (ja) * 2004-11-24 2012-02-01 株式会社クリエイティブ テクノロジー 静電吸着体及びこの静電吸着体を用いたシート状被吸着物の移送方法
JP2006332204A (ja) 2005-05-24 2006-12-07 Toto Ltd 静電チャック
CN1994839B (zh) * 2006-01-05 2012-07-18 财团法人工业技术研究院 静电吸附装置
KR100984748B1 (ko) * 2006-04-03 2010-10-01 주식회사 코미코 정전척, 조립형 정전 흡착 장치, 글라스 기판 접합 장치 및조립형 글라스 기판 접합 장치
US7672111B2 (en) 2006-09-22 2010-03-02 Toto Ltd. Electrostatic chuck and method for manufacturing same
JP2008187006A (ja) * 2007-01-30 2008-08-14 Tomoegawa Paper Co Ltd 静電チャック装置
JP4976915B2 (ja) 2007-05-08 2012-07-18 新光電気工業株式会社 静電チャックおよび静電チャックの製造方法
JP4948337B2 (ja) * 2007-09-13 2012-06-06 株式会社巴川製紙所 静電チャック装置用接着シート、および静電チャック装置
CN102269797A (zh) * 2011-07-07 2011-12-07 南京协力电子科技集团有限公司 印刷电路板水平式飞针测试平台
JP5939808B2 (ja) * 2012-01-24 2016-06-22 株式会社アルバック 基板吸着状態の判定方法
JP5965676B2 (ja) * 2012-03-06 2016-08-10 株式会社アルバック 処理対象物の保持方法
CN103327720B (zh) * 2012-03-21 2016-01-20 长毅技研股份有限公司 可透视静电吸板
JP6408759B2 (ja) * 2013-11-08 2018-10-17 デクセリアルズ株式会社 接着剤組成物、及びフィルム巻装体
KR102311586B1 (ko) 2014-12-26 2021-10-12 삼성디스플레이 주식회사 증착 장치 및 증착 장치 내 기판 정렬 방법
KR102373326B1 (ko) 2014-12-26 2022-03-11 삼성디스플레이 주식회사 증착 장치 및 증착 장치 내 기판 정렬 방법
DE102016206193A1 (de) * 2016-04-13 2017-10-19 Trumpf Gmbh + Co. Kg Elektroadhäsionsgreifer mit fraktalen Elektroden
US20180122679A1 (en) * 2016-10-28 2018-05-03 Applied Materials, Inc. Stress balanced electrostatic substrate carrier with contacts
JP6935132B2 (ja) * 2017-07-21 2021-09-15 株式会社ディスコ 静電チャックプレートの製造方法
KR102176064B1 (ko) * 2017-11-10 2020-11-09 주식회사 아이앤티 정전척 제조방법 및 정전척
CN109449907B (zh) * 2018-12-11 2024-01-12 广东海拓创新技术有限公司 一种透明静电吸盘及其制备方法
WO2020138179A1 (ja) 2018-12-27 2020-07-02 株式会社巴川製紙所 静電チャック装置
KR20220019144A (ko) 2020-08-06 2022-02-16 삼성디스플레이 주식회사 전자 장치 및 이의 제조 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW492135B (en) * 2000-05-25 2002-06-21 Tomoegawa Paper Co Ltd Adhesive sheets for static electricity chuck device, and static electricity chuck device
JP3979792B2 (ja) * 2000-05-25 2007-09-19 株式会社巴川製紙所 静電チャック装置用接着シート及び静電チャック装置
JP4753460B2 (ja) * 2000-08-16 2011-08-24 株式会社クリエイティブ テクノロジー 静電チャック及びその製造方法

Also Published As

Publication number Publication date
TW200416936A (en) 2004-09-01
KR20060010701A (ko) 2006-02-02
CN1525547A (zh) 2004-09-01
KR100639817B1 (ko) 2006-10-31
CN1315172C (zh) 2007-05-09
KR20060013356A (ko) 2006-02-09
TWI240350B (en) 2005-09-21
JP2004235563A (ja) 2004-08-19

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