JP2004235563A - 静電チャック装置用電極シート及びこれを用いた静電チャック装置 - Google Patents

静電チャック装置用電極シート及びこれを用いた静電チャック装置 Download PDF

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Publication number
JP2004235563A
JP2004235563A JP2003024658A JP2003024658A JP2004235563A JP 2004235563 A JP2004235563 A JP 2004235563A JP 2003024658 A JP2003024658 A JP 2003024658A JP 2003024658 A JP2003024658 A JP 2003024658A JP 2004235563 A JP2004235563 A JP 2004235563A
Authority
JP
Japan
Prior art keywords
insulating adhesive
electrostatic chuck
adhesive layer
chuck device
electrode sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003024658A
Other languages
English (en)
Japanese (ja)
Inventor
Takeshi Shima
武志 島
Jiyun Tochihira
順 栃平
Yuichi Hasegawa
雄一 長谷川
Toshiyuki Yamamoto
敏之 山本
Masatoshi Hori
真寿 堀
Akio Imanishi
章夫 今西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tomoegawa Co Ltd
Original Assignee
Tomoegawa Paper Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tomoegawa Paper Co Ltd filed Critical Tomoegawa Paper Co Ltd
Priority to JP2003024658A priority Critical patent/JP2004235563A/ja
Priority to KR1020040005335A priority patent/KR20040070322A/ko
Priority to CNB2004100396166A priority patent/CN1315172C/zh
Priority to TW093101938A priority patent/TWI240350B/zh
Publication of JP2004235563A publication Critical patent/JP2004235563A/ja
Priority to KR1020050128172A priority patent/KR20060010701A/ko
Priority to KR1020050128173A priority patent/KR100639817B1/ko
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/042—Reducing risk of explosion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Laminated Bodies (AREA)
  • Adhesives Or Adhesive Processes (AREA)
JP2003024658A 2003-01-31 2003-01-31 静電チャック装置用電極シート及びこれを用いた静電チャック装置 Pending JP2004235563A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003024658A JP2004235563A (ja) 2003-01-31 2003-01-31 静電チャック装置用電極シート及びこれを用いた静電チャック装置
KR1020040005335A KR20040070322A (ko) 2003-01-31 2004-01-28 정전 척장치용 전극시트 및 이를 이용한 정전 척장치
CNB2004100396166A CN1315172C (zh) 2003-01-31 2004-01-29 静电吸盘装置用电极板和使用它的静电吸盘装置
TW093101938A TWI240350B (en) 2003-01-31 2004-01-29 Electrode sheet for electrostatic chuck devices and electrostatic chuck device comprising the same
KR1020050128172A KR20060010701A (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치
KR1020050128173A KR100639817B1 (ko) 2003-01-31 2005-12-22 정전 척장치용 전극시트 및 이를 이용한 정전 척장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003024658A JP2004235563A (ja) 2003-01-31 2003-01-31 静電チャック装置用電極シート及びこれを用いた静電チャック装置

Publications (1)

Publication Number Publication Date
JP2004235563A true JP2004235563A (ja) 2004-08-19

Family

ID=32953132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003024658A Pending JP2004235563A (ja) 2003-01-31 2003-01-31 静電チャック装置用電極シート及びこれを用いた静電チャック装置

Country Status (4)

Country Link
JP (1) JP2004235563A (zh)
KR (3) KR20040070322A (zh)
CN (1) CN1315172C (zh)
TW (1) TWI240350B (zh)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006149156A (ja) * 2004-11-24 2006-06-08 Creative Technology:Kk 静電吸着体及びこの静電吸着体を用いたシート状被吸着物の移送方法
WO2006126503A1 (ja) * 2005-05-24 2006-11-30 Toto Ltd. 静電チャック
JP2008187006A (ja) * 2007-01-30 2008-08-14 Tomoegawa Paper Co Ltd 静電チャック装置
JP2009071023A (ja) * 2007-09-13 2009-04-02 Tomoegawa Paper Co Ltd 静電チャック装置用接着シート、および静電チャック装置
US7672111B2 (en) 2006-09-22 2010-03-02 Toto Ltd. Electrostatic chuck and method for manufacturing same
US8023246B2 (en) 2007-05-08 2011-09-20 Shinko Electric Industries Co., Ltd. Electrostatic chuck and method of manufacturing the same
JP2013153017A (ja) * 2012-01-24 2013-08-08 Ulvac Japan Ltd 基板吸着状態の判定方法およびプラズマ処理装置
JP2013187217A (ja) * 2012-03-06 2013-09-19 Ulvac Japan Ltd 基板保持装置
JP2015093884A (ja) * 2013-11-08 2015-05-18 デクセリアルズ株式会社 接着剤組成物、及びフィルム巻装体
US9765428B2 (en) 2014-12-26 2017-09-19 Samsung Display Co., Ltd. Apparatus for deposition and substrate alignment method in the same
US9771645B2 (en) 2014-12-26 2017-09-26 Samsung Display Co., Ltd. Apparatus for deposition and substrate alignment method in the same
JP2018113430A (ja) * 2016-10-28 2018-07-19 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 接点を有する、応力均衡のとれた静電基板キャリア
JP2019514221A (ja) * 2016-04-13 2019-05-30 トルンプフ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトＴｒｕｍｐｆ ＧｍｂＨ＋Ｃｏ．ＫＧ フラクタル電極を備えた電気吸着グリッパ
KR20210013729A (ko) 2018-12-27 2021-02-05 가부시키가이샤 도모에가와 세이시쇼 정전 척 장치

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1994839B (zh) * 2006-01-05 2012-07-18 财团法人工业技术研究院 静电吸附装置
KR100984748B1 (ko) * 2006-04-03 2010-10-01 주식회사 코미코 정전척, 조립형 정전 흡착 장치, 글라스 기판 접합 장치 및조립형 글라스 기판 접합 장치
CN102269797A (zh) * 2011-07-07 2011-12-07 南京协力电子科技集团有限公司 印刷电路板水平式飞针测试平台
CN103327720B (zh) * 2012-03-21 2016-01-20 长毅技研股份有限公司 可透视静电吸板
JP6935132B2 (ja) * 2017-07-21 2021-09-15 株式会社ディスコ 静電チャックプレートの製造方法
KR102176064B1 (ko) * 2017-11-10 2020-11-09 주식회사 아이앤티 정전척 제조방법 및 정전척
CN109449907B (zh) * 2018-12-11 2024-01-12 广东海拓创新技术有限公司 一种透明静电吸盘及其制备方法
KR20220019144A (ko) 2020-08-06 2022-02-16 삼성디스플레이 주식회사 전자 장치 및 이의 제조 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3979792B2 (ja) * 2000-05-25 2007-09-19 株式会社巴川製紙所 静電チャック装置用接着シート及び静電チャック装置
TW492135B (en) * 2000-05-25 2002-06-21 Tomoegawa Paper Co Ltd Adhesive sheets for static electricity chuck device, and static electricity chuck device
JP4753460B2 (ja) * 2000-08-16 2011-08-24 株式会社クリエイティブ テクノロジー 静電チャック及びその製造方法

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006149156A (ja) * 2004-11-24 2006-06-08 Creative Technology:Kk 静電吸着体及びこの静電吸着体を用いたシート状被吸着物の移送方法
WO2006126503A1 (ja) * 2005-05-24 2006-11-30 Toto Ltd. 静電チャック
US7468880B2 (en) 2005-05-24 2008-12-23 Toto Ltd. Electrostatic chuck
US7760484B2 (en) 2005-05-24 2010-07-20 Toto Ltd. Electrostatic chuck
US7672111B2 (en) 2006-09-22 2010-03-02 Toto Ltd. Electrostatic chuck and method for manufacturing same
JP2008187006A (ja) * 2007-01-30 2008-08-14 Tomoegawa Paper Co Ltd 静電チャック装置
US8023246B2 (en) 2007-05-08 2011-09-20 Shinko Electric Industries Co., Ltd. Electrostatic chuck and method of manufacturing the same
JP2009071023A (ja) * 2007-09-13 2009-04-02 Tomoegawa Paper Co Ltd 静電チャック装置用接着シート、および静電チャック装置
JP2013153017A (ja) * 2012-01-24 2013-08-08 Ulvac Japan Ltd 基板吸着状態の判定方法およびプラズマ処理装置
JP2013187217A (ja) * 2012-03-06 2013-09-19 Ulvac Japan Ltd 基板保持装置
JP2015093884A (ja) * 2013-11-08 2015-05-18 デクセリアルズ株式会社 接着剤組成物、及びフィルム巻装体
US9765428B2 (en) 2014-12-26 2017-09-19 Samsung Display Co., Ltd. Apparatus for deposition and substrate alignment method in the same
US9771645B2 (en) 2014-12-26 2017-09-26 Samsung Display Co., Ltd. Apparatus for deposition and substrate alignment method in the same
JP2019514221A (ja) * 2016-04-13 2019-05-30 トルンプフ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトＴｒｕｍｐｆ ＧｍｂＨ＋Ｃｏ．ＫＧ フラクタル電極を備えた電気吸着グリッパ
JP2018113430A (ja) * 2016-10-28 2018-07-19 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 接点を有する、応力均衡のとれた静電基板キャリア
KR20210013729A (ko) 2018-12-27 2021-02-05 가부시키가이샤 도모에가와 세이시쇼 정전 척 장치

Also Published As

Publication number Publication date
TWI240350B (en) 2005-09-21
KR20060010701A (ko) 2006-02-02
KR100639817B1 (ko) 2006-10-31
KR20060013356A (ko) 2006-02-09
TW200416936A (en) 2004-09-01
CN1525547A (zh) 2004-09-01
KR20040070322A (ko) 2004-08-07
CN1315172C (zh) 2007-05-09

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