KR102418497B1 - 물품 수납 설비 - Google Patents
물품 수납 설비 Download PDFInfo
- Publication number
- KR102418497B1 KR102418497B1 KR1020160041596A KR20160041596A KR102418497B1 KR 102418497 B1 KR102418497 B1 KR 102418497B1 KR 1020160041596 A KR1020160041596 A KR 1020160041596A KR 20160041596 A KR20160041596 A KR 20160041596A KR 102418497 B1 KR102418497 B1 KR 102418497B1
- Authority
- KR
- South Korea
- Prior art keywords
- storage
- movable support
- stop position
- target stop
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
- B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
- B66F9/075—Constructional features or details
- B66F9/0755—Position control; Position detectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
- B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
- B66F9/075—Constructional features or details
- B66F9/20—Means for actuating or controlling masts, platforms, or forks
- B66F9/24—Electrical devices or systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Structural Engineering (AREA)
- Transportation (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Civil Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015077897A JP6332115B2 (ja) | 2015-04-06 | 2015-04-06 | 物品収納設備 |
| JPJP-P-2015-077897 | 2015-04-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160119714A KR20160119714A (ko) | 2016-10-14 |
| KR102418497B1 true KR102418497B1 (ko) | 2022-07-06 |
Family
ID=57016898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020160041596A Active KR102418497B1 (ko) | 2015-04-06 | 2016-04-05 | 물품 수납 설비 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9669996B2 (enExample) |
| JP (1) | JP6332115B2 (enExample) |
| KR (1) | KR102418497B1 (enExample) |
| TW (1) | TWI667180B (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG11201902970VA (en) * | 2016-10-07 | 2019-05-30 | Murata Machinery Ltd | Automated warehouse |
| CN109863101A (zh) * | 2016-10-18 | 2019-06-07 | 村田机械株式会社 | 堆装起重机 |
| JP6597551B2 (ja) * | 2016-10-21 | 2019-10-30 | 株式会社ダイフク | 物品搬送設備 |
| EP3453646A1 (en) * | 2017-09-11 | 2019-03-13 | Nekos Oy | System for storing storage units |
| JP6924112B2 (ja) * | 2017-09-29 | 2021-08-25 | 川崎重工業株式会社 | 基板搬送装置及び基板搬送ロボットと基板載置部との位置関係を求める方法 |
| US11465840B2 (en) | 2017-11-14 | 2022-10-11 | Hai Robotics Co., Ltd. | Handling robot |
| US11396424B2 (en) | 2017-11-14 | 2022-07-26 | Hai Robotics Co., Ltd. | Handling robot |
| US12330870B2 (en) | 2017-11-14 | 2025-06-17 | Hai Robotics Co., Ltd. | Handling robot |
| US12103771B2 (en) | 2017-11-14 | 2024-10-01 | Hai Robotics Co., Ltd. | Handling robot |
| US12006143B2 (en) | 2017-11-14 | 2024-06-11 | Hai Robotics Co., Ltd. | Handling robot |
| NZ765310A (en) | 2017-11-14 | 2022-04-29 | Hai Robotics Co Ltd | Automated guided vehicle designed for warehouse |
| US11597598B2 (en) | 2019-02-01 | 2023-03-07 | Hai Robotics Co., Ltd. | Handling robot |
| US11542135B2 (en) | 2019-02-01 | 2023-01-03 | Hai Robotics Co., Ltd. | Handling robot |
| JP7238612B2 (ja) * | 2019-06-04 | 2023-03-14 | 村田機械株式会社 | カメラの姿勢ずれ評価方法及びカメラシステム |
| JP7453114B2 (ja) * | 2020-09-29 | 2024-03-19 | 株式会社Fuji | 測定装置、移載装置、及び測定方法 |
| CN114646498B (zh) * | 2020-12-21 | 2025-06-17 | 山东金钟科技集团股份有限公司 | 一种巷道式一体化粮食智能快检系统自动留样装置 |
| CN113086467B (zh) * | 2021-03-24 | 2023-05-23 | 北京极智嘉科技股份有限公司 | 机器人以及基于机器人的料箱检测方法 |
| JP7322924B2 (ja) * | 2021-05-28 | 2023-08-08 | 株式会社ダイフク | 物品収容設備 |
| CN117916683A (zh) * | 2021-09-09 | 2024-04-19 | 村田机械株式会社 | 行驶车系统及行驶车 |
| KR102685300B1 (ko) * | 2021-12-28 | 2024-07-16 | 주식회사 인스턴 | 사용자 단말기와 연동되는 딥러닝 기반 스마트 자동물류 적재창고 시스템 |
| KR102685530B1 (ko) * | 2021-12-30 | 2024-07-15 | 국립금오공과대학교 산학협력단 | 처리속도가 향상된 딥러닝 기반 스마트 자동물류 적재창고 시스템 |
| KR102668615B1 (ko) * | 2022-01-17 | 2024-05-22 | 국립금오공과대학교 산학협력단 | 주변환경과 연동되는 딥러닝 기반 스마트 자동물류 적재창고 시스템 |
| KR102838956B1 (ko) * | 2022-12-02 | 2025-07-28 | 현대무벡스 주식회사 | 데이터 매트릭스 태그를 이용한 캐리지 정위치 제어 방법 |
| CN116409573B (zh) * | 2023-02-27 | 2025-09-30 | 极研生物(上海)有限公司 | 一种全自动样本低温存取系统 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002002909A (ja) * | 2000-06-19 | 2002-01-09 | Shinko Electric Co Ltd | ストッカ用ロボットの教示確認方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR940006241A (ko) * | 1992-06-05 | 1994-03-23 | 이노우에 아키라 | 기판이재장치 및 이재방법 |
| TW314630B (enExample) * | 1994-06-30 | 1997-09-01 | Hitachi Ltd | |
| JP2001225909A (ja) | 2000-02-10 | 2001-08-21 | Daifuku Co Ltd | 荷出し入れ装置の学習方法 |
| DE60235963D1 (de) * | 2001-02-16 | 2010-05-27 | Toyoda Automatic Loom Works | Kamerahebevorrichtung und lasthandhabungstragvorrichtung eines hubwagens und hubwagen |
| JP4696373B2 (ja) * | 2001-02-20 | 2011-06-08 | 東京エレクトロン株式会社 | 処理システム及び被処理体の搬送方法 |
| EP1502896A4 (en) * | 2002-01-23 | 2009-11-18 | Toyota Jidoshokki Kk | POSITION CONTROL DEVICE AND POSITION CONTROL PROCESS FOR LOADING DEVICE IN INDUSTRIAL VEHICLE |
| JP4573105B2 (ja) * | 2004-12-10 | 2010-11-04 | 株式会社ダイフク | 物品搬送装置 |
| TW200736870A (en) * | 2005-11-04 | 2007-10-01 | Murata Machinery Ltd | Control device for movable body |
| JP5170554B2 (ja) * | 2008-09-29 | 2013-03-27 | 株式会社ダイフク | 物品収納設備における学習装置 |
| JP5524139B2 (ja) * | 2010-09-28 | 2014-06-18 | 東京エレクトロン株式会社 | 基板位置検出装置、これを備える成膜装置、および基板位置検出方法 |
| CN103459271B (zh) * | 2011-03-29 | 2015-05-06 | 村田机械株式会社 | 自动化仓库 |
| JP5800193B2 (ja) * | 2011-11-07 | 2015-10-28 | 株式会社ダイフク | 物品収納設備 |
| US9171278B1 (en) * | 2013-09-25 | 2015-10-27 | Amazon Technologies, Inc. | Item illumination based on image recognition |
| US9959610B2 (en) * | 2014-10-30 | 2018-05-01 | Applied Materials, Inc. | System and method to detect substrate and/or substrate support misalignment using imaging |
-
2015
- 2015-04-06 JP JP2015077897A patent/JP6332115B2/ja active Active
-
2016
- 2016-04-05 KR KR1020160041596A patent/KR102418497B1/ko active Active
- 2016-04-06 TW TW105110756A patent/TWI667180B/zh active
- 2016-04-06 US US15/091,662 patent/US9669996B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002002909A (ja) * | 2000-06-19 | 2002-01-09 | Shinko Electric Co Ltd | ストッカ用ロボットの教示確認方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201643088A (zh) | 2016-12-16 |
| KR20160119714A (ko) | 2016-10-14 |
| US9669996B2 (en) | 2017-06-06 |
| JP2016196360A (ja) | 2016-11-24 |
| TWI667180B (zh) | 2019-08-01 |
| US20160289002A1 (en) | 2016-10-06 |
| JP6332115B2 (ja) | 2018-05-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20160405 |
|
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