KR102377315B1 - 기판 처리 장치 - Google Patents

기판 처리 장치 Download PDF

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Publication number
KR102377315B1
KR102377315B1 KR1020210043880A KR20210043880A KR102377315B1 KR 102377315 B1 KR102377315 B1 KR 102377315B1 KR 1020210043880 A KR1020210043880 A KR 1020210043880A KR 20210043880 A KR20210043880 A KR 20210043880A KR 102377315 B1 KR102377315 B1 KR 102377315B1
Authority
KR
South Korea
Prior art keywords
treating apparatus
substrate treating
substrate
treating
Prior art date
Application number
KR1020210043880A
Other languages
English (en)
Other versions
KR20210040021A (ko
Inventor
마사후미 마에다
Original Assignee
가부시키가이샤 스크린 홀딩스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 스크린 홀딩스 filed Critical 가부시키가이샤 스크린 홀딩스
Publication of KR20210040021A publication Critical patent/KR20210040021A/ko
Priority to KR1020220032620A priority Critical patent/KR20220038043A/ko
Application granted granted Critical
Publication of KR102377315B1 publication Critical patent/KR102377315B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B05D1/005—Spin coating
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3092—Recovery of material; Waste processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C15/00—Enclosures for apparatus; Booths
KR1020210043880A 2015-11-13 2021-04-05 기판 처리 장치 KR102377315B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020220032620A KR20220038043A (ko) 2015-11-13 2022-03-16 기판 처리 장치

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015223003A JP6503281B2 (ja) 2015-11-13 2015-11-13 基板処理装置
JPJP-P-2015-223003 2015-11-13
KR1020190173015A KR20190143442A (ko) 2015-11-13 2019-12-23 기판 처리 장치

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020190173015A Division KR20190143442A (ko) 2015-11-13 2019-12-23 기판 처리 장치

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020220032620A Division KR20220038043A (ko) 2015-11-13 2022-03-16 기판 처리 장치

Publications (2)

Publication Number Publication Date
KR20210040021A KR20210040021A (ko) 2021-04-12
KR102377315B1 true KR102377315B1 (ko) 2022-03-22

Family

ID=58689838

Family Applications (5)

Application Number Title Priority Date Filing Date
KR1020160150288A KR101938041B1 (ko) 2015-11-13 2016-11-11 기판 처리 장치
KR1020190000781A KR102061995B1 (ko) 2015-11-13 2019-01-03 기판 처리 장치
KR1020190173015A KR20190143442A (ko) 2015-11-13 2019-12-23 기판 처리 장치
KR1020210043880A KR102377315B1 (ko) 2015-11-13 2021-04-05 기판 처리 장치
KR1020220032620A KR20220038043A (ko) 2015-11-13 2022-03-16 기판 처리 장치

Family Applications Before (3)

Application Number Title Priority Date Filing Date
KR1020160150288A KR101938041B1 (ko) 2015-11-13 2016-11-11 기판 처리 장치
KR1020190000781A KR102061995B1 (ko) 2015-11-13 2019-01-03 기판 처리 장치
KR1020190173015A KR20190143442A (ko) 2015-11-13 2019-12-23 기판 처리 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020220032620A KR20220038043A (ko) 2015-11-13 2022-03-16 기판 처리 장치

Country Status (4)

Country Link
US (4) US10170349B2 (ko)
JP (1) JP6503281B2 (ko)
KR (5) KR101938041B1 (ko)
TW (3) TWI674621B (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6503281B2 (ja) * 2015-11-13 2019-04-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6870944B2 (ja) * 2016-09-26 2021-05-12 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP7194690B2 (ja) * 2017-03-31 2022-12-22 アーケマ・インコーポレイテッド ガラス容器コーティング用モジュール式フード
JP7221594B2 (ja) 2018-03-26 2023-02-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6986623B2 (ja) * 2018-03-26 2021-12-22 東京エレクトロン株式会社 基板処理装置、空調方法及び記憶媒体
JP7183567B2 (ja) 2018-05-02 2022-12-06 Tdk株式会社 循環式ｅｆｅｍ
US11047050B2 (en) * 2018-10-30 2021-06-29 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor tool having controllable ambient environment processing zones
JP7221110B2 (ja) * 2019-03-28 2023-02-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
US20210242039A1 (en) * 2020-02-04 2021-08-05 Tokyo Electron Limited Substrate processing system and method to reduce a number of external connectors provided on the system
KR20220097680A (ko) * 2020-12-30 2022-07-08 세메스 주식회사 노즐 대기 포트와 이를 포함하는 기판 처리 장치 및 이를 이용한 노즐 세정 방법
JP2022124070A (ja) * 2021-02-15 2022-08-25 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、および、筒状ガードの加工方法
KR20230092188A (ko) * 2021-12-17 2023-06-26 삼성전자주식회사 기판 처리 장치 및 방법

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JP3239472B2 (ja) * 1992-09-04 2001-12-17 ソニー株式会社 洗浄装置の給排気制御方法及び被洗浄物の洗浄方法
TW353777B (en) 1996-11-08 1999-03-01 Tokyo Electron Ltd Treatment device
JPH11168135A (ja) * 1997-12-03 1999-06-22 Toshiba Corp 基板保管装置および基板保管方法
TW511169B (en) * 2000-02-01 2002-11-21 Tokyo Electron Ltd Substrate processing apparatus and substrate processing method
JP2002147811A (ja) * 2000-11-08 2002-05-22 Sharp Corp クリーンルーム
JP2003100620A (ja) * 2001-09-27 2003-04-04 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2003347186A (ja) 2002-05-23 2003-12-05 Dainippon Screen Mfg Co Ltd 基板処理装置
JP4494840B2 (ja) * 2003-06-27 2010-06-30 大日本スクリーン製造株式会社 異物除去装置、基板処理装置および基板処理方法
JP4381909B2 (ja) * 2004-07-06 2009-12-09 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4471865B2 (ja) * 2005-02-18 2010-06-02 東京エレクトロン株式会社 液処理装置及びその方法
US8353986B2 (en) * 2005-03-31 2013-01-15 Tokyo Electron Limited Substrate processing apparatus
US20080173238A1 (en) * 2006-12-12 2008-07-24 Hitachi Kokusai Electric Inc. Substrate processing apparatus, method of manufacturing semiconductor device, and reaction vessel
JP5006122B2 (ja) 2007-06-29 2012-08-22 株式会社Ｓｏｋｕｄｏ 基板処理装置
KR100944949B1 (ko) 2007-10-10 2010-03-03 세메스 주식회사 제어유닛 및 이를 구비하는 기판 처리 장치
JP5160204B2 (ja) 2007-11-30 2013-03-13 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5179170B2 (ja) 2007-12-28 2013-04-10 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP2010087116A (ja) 2008-09-30 2010-04-15 Sokudo Co Ltd 基板処理装置
JP5280141B2 (ja) * 2008-09-30 2013-09-04 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5654862B2 (ja) 2010-04-12 2015-01-14 株式会社日立国際電気 半導体装置の製造方法、基板処理方法及び基板処理装置
JP5146526B2 (ja) 2010-12-28 2013-02-20 東京エレクトロン株式会社 液処理装置
JP5569508B2 (ja) 2011-01-05 2014-08-13 東京エレクトロン株式会社 基板処理装置
JP5666361B2 (ja) 2011-03-29 2015-02-12 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 基板処理装置
JP5673480B2 (ja) 2011-10-14 2015-02-18 東京エレクトロン株式会社 基板処理装置
JP6320762B2 (ja) 2014-01-15 2018-05-09 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6503281B2 (ja) * 2015-11-13 2019-04-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Also Published As

Publication number Publication date
TWI674619B (zh) 2019-10-11
JP2017092339A (ja) 2017-05-25
US20210082721A1 (en) 2021-03-18
KR20190143442A (ko) 2019-12-30
TWI674621B (zh) 2019-10-11
KR20210040021A (ko) 2021-04-12
US10879091B2 (en) 2020-12-29
US11373889B2 (en) 2022-06-28
KR20190003854A (ko) 2019-01-09
TWI664662B (zh) 2019-07-01
TW201921441A (zh) 2019-06-01
US20220277971A1 (en) 2022-09-01
KR102061995B1 (ko) 2020-01-02
US20190096719A1 (en) 2019-03-28
JP6503281B2 (ja) 2019-04-17
US10170349B2 (en) 2019-01-01
KR20220038043A (ko) 2022-03-25
US20170136489A1 (en) 2017-05-18
TW201835976A (zh) 2018-10-01
TW201719723A (zh) 2017-06-01
KR101938041B1 (ko) 2019-01-14
KR20170056459A (ko) 2017-05-23

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