SG10201700825QA - Substrate Treating Apparatus - Google Patents

Substrate Treating Apparatus

Info

Publication number
SG10201700825QA
SG10201700825QA SG10201700825QA SG10201700825QA SG10201700825QA SG 10201700825Q A SG10201700825Q A SG 10201700825QA SG 10201700825Q A SG10201700825Q A SG 10201700825QA SG 10201700825Q A SG10201700825Q A SG 10201700825QA SG 10201700825Q A SG10201700825Q A SG 10201700825QA
Authority
SG
Singapore
Prior art keywords
treating apparatus
substrate treating
substrate
treating
Prior art date
Application number
SG10201700825QA
Inventor
Jae Kyun Yang
Chang Weon Lee
Dong Whee Shin
Original Assignee
Psk Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Psk Inc filed Critical Psk Inc
Publication of SG10201700825QA publication Critical patent/SG10201700825QA/en

Links

SG10201700825QA 2016-04-15 2017-02-02 Substrate Treating Apparatus SG10201700825QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160046116A KR20170118397A (en) 2016-04-15 2016-04-15 Substrate treating apparatus

Publications (1)

Publication Number Publication Date
SG10201700825QA true SG10201700825QA (en) 2017-11-29

Family

ID=60299981

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201700825QA SG10201700825QA (en) 2016-04-15 2017-02-02 Substrate Treating Apparatus

Country Status (3)

Country Link
KR (1) KR20170118397A (en)
SG (1) SG10201700825QA (en)
TW (1) TWI681491B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102413739B1 (en) 2017-09-15 2022-06-29 현대모비스 주식회사 Pressure sensing apparatus for air bag
TWI815827B (en) * 2017-11-07 2023-09-21 日商東京威力科創股份有限公司 Substrate processing equipment
KR102080016B1 (en) * 2018-09-17 2020-02-21 주식회사 에이케이테크 Gaseous nitrogen spray structure to wafer for equipment front end module and equipment front end module comprising the wafer cooling structure for equipment front end module

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186363A (en) * 1997-12-24 1999-07-09 Shin Etsu Handotai Co Ltd Semiconductor manufacturing device
JP2002057133A (en) * 2000-08-15 2002-02-22 Tokyo Electron Ltd Wafer treatment apparatus
US20040026036A1 (en) * 2001-02-23 2004-02-12 Hitachi Kokusai Electric Inc. Substrate processing apparatus and substrate processing method
KR101074083B1 (en) * 2009-07-27 2011-10-17 피에스케이 주식회사 Roadlock chamber and substrate treating facility including the chamber, and method for treating substrate with the facility
KR20160038948A (en) * 2014-09-30 2016-04-08 주식회사 원익아이피에스 Gate valve for processing substrate

Also Published As

Publication number Publication date
TW201802997A (en) 2018-01-16
KR20170118397A (en) 2017-10-25
TWI681491B (en) 2020-01-01

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