KR102172593B1 - 다공성 필름의 측정 - Google Patents

다공성 필름의 측정 Download PDF

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KR102172593B1
KR102172593B1 KR1020177019247A KR20177019247A KR102172593B1 KR 102172593 B1 KR102172593 B1 KR 102172593B1 KR 1020177019247 A KR1020177019247 A KR 1020177019247A KR 20177019247 A KR20177019247 A KR 20177019247A KR 102172593 B1 KR102172593 B1 KR 102172593B1
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sample
parameter
wavelength
equation
transmittance
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KR20170102264A (ko
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케빈 폴 험프리
로버트 피터 해먼드
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엔디씨 테크놀로지스 리미티드
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/24Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity by observing the transmission of wave or particle radiation through the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08Investigating permeability, pore-volume, or surface area of porous materials
    • G01N15/088Investigating volume, surface area, size or distribution of pores; Porosimetry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N21/3151Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • G01N21/3559Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content in sheets, e.g. in paper
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/8422Investigating thin films, e.g. matrix isolation method
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/86Investigating moving sheets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/0846Investigating permeability, pore-volume, or surface area of porous materials by use of radiation, e.g. transmitted or reflected light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/086Investigating permeability, pore-volume, or surface area of porous materials of films, membranes or pellicules

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Dispersion Chemistry (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020177019247A 2014-12-22 2015-12-18 다공성 필름의 측정 Active KR102172593B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1422964.5A GB2533589A (en) 2014-12-22 2014-12-22 Measurement of porous film
GB1422964.5 2014-12-22
PCT/GB2015/054075 WO2016102938A1 (en) 2014-12-22 2015-12-18 Measurement of porous film

Publications (2)

Publication Number Publication Date
KR20170102264A KR20170102264A (ko) 2017-09-08
KR102172593B1 true KR102172593B1 (ko) 2020-11-02

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Country Status (7)

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US (1) US10161863B2 (https=)
EP (1) EP3237886B1 (https=)
JP (3) JP6745803B2 (https=)
KR (1) KR102172593B1 (https=)
CN (1) CN107430054B (https=)
GB (1) GB2533589A (https=)
WO (1) WO2016102938A1 (https=)

Cited By (1)

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US12525474B2 (en) 2021-07-22 2026-01-13 Semes Co., Ltd. Apparatus for treating substrate and method for treating substrate

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TWI762083B (zh) * 2015-09-17 2022-04-21 美商康寧公司 特性量測經離子交換之含鋰化學強化玻璃的方法
CN106769770A (zh) * 2017-01-06 2017-05-31 佛山科学技术学院 一种纳米多孔薄膜闭孔孔隙率的测量方法
CN108332674B (zh) * 2018-02-11 2020-01-21 中国科学院电子学研究所 单光谱求取多孔膜厚度和孔隙率的方法
KR102202789B1 (ko) 2018-05-24 2021-01-14 주식회사 엘지화학 3층 구조의 연료전지용 수소이온교환 강화막 비파괴 두께 측정 방법
US11879765B2 (en) 2018-09-26 2024-01-23 Honeywell International Inc. Apparatus for composite sheet weight determinations
US10914685B2 (en) 2018-10-11 2021-02-09 Ethicon, Inc. Systems and methods of using UV absorbent coatings for detecting defects in substrates used to make sterile medical device packages
CN109682735A (zh) * 2018-12-21 2019-04-26 山东精工电子科技有限公司 锂离子电池极片涂层孔隙率的测试方法
FR3101568B1 (fr) * 2019-10-03 2022-08-05 Aleph Sas Procede de fabrication d’un film comportant des cavites avec determination de profils d’etirage, de masse volumique, d’epaisseur et/ou de porosite du film
DE102019127705A1 (de) * 2019-10-15 2021-04-15 Kiefel Gmbh Messverfahren und messvorrichtung zur inline-kontrolle von kunststofffolien
CN112797920B (zh) * 2019-11-13 2024-05-03 中国航发南方工业有限公司 一种叶片小微孔角度测量方法
EP4143542B1 (en) * 2020-05-01 2024-12-11 GasPorOx AB System and method for determining at least one property of a porous medium
KR20210136222A (ko) * 2020-05-06 2021-11-17 삼성디스플레이 주식회사 광학필름, 광학필름을 포함하는 표시장치 및 광학필름의 제조방법
US12584869B2 (en) * 2021-02-26 2026-03-24 Honeywell Limited Boehmite detection and warning system, and concentration indicator for LiB separator sheet manufacturing
RU2758777C1 (ru) * 2021-03-22 2021-11-01 Федеральное государственное бюджетное учреждение науки Институт оптики атмосферы им. В.Е. Зуева Сибирского отделения Российской академии наук Способ измерения размера пор гидрофильных материалов
KR102920808B1 (ko) * 2021-06-26 2026-01-30 주식회사 엘지에너지솔루션 분리막 통기도 검사장치 및 이를 이용한 분리막 통기도 검사방법
CN113866046B (zh) * 2021-09-13 2024-03-19 中国辐射防护研究院 一种测量热中子吸收材料面密度的方法
JP2023150628A (ja) * 2022-03-31 2023-10-16 横河電機株式会社 測定装置及び測定方法
KR20240040475A (ko) * 2022-09-21 2024-03-28 현대자동차주식회사 수소전기분해 확산층 검사 및 타발 장치 및 방법
CN115855767A (zh) * 2022-11-10 2023-03-28 江西昌河航空工业有限公司 一种菱形孔防雷击铜网开孔率的测量方法
DE102022134504A1 (de) * 2022-12-22 2024-06-27 Technische Universität Dresden, Körperschaft des öffentlichen Rechts Verfahren und gerät zur schichtdickenbestimmung histologischer schnittpräparate und konzentrationsbestimmung von biologischen substanzen in histologischen präparaten
CN117214065B (zh) * 2023-09-27 2024-05-03 兰州大学 一种利用红外谱特征峰法测量固体表面孔隙率的方法
CN120741413B (zh) * 2025-08-20 2025-11-18 中国科学院近代物理研究所 基于暗场散射光学方法的纳米孔核孔膜快速无损检测方法

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US4755678A (en) 1985-05-06 1988-07-05 The University Of Alabama Simultaneous measurement of moisture content and basis weight of paper sheet with a submillimeter laser
US5452091A (en) 1993-03-22 1995-09-19 Nanometrics Incorporated Scatter correction in reflectivity measurements
JP2009529654A (ja) 2005-12-15 2009-08-20 ハネウェル・インターナショナル・インコーポレーテッド 組み合わせ型の紙シートの温度および水分のセンサ
US20100243900A1 (en) 2009-03-30 2010-09-30 Honeywell Asca Inc. Spectroscopy having correction for broadband distortion for analyzing multi-component samples
JP2015025746A (ja) 2013-07-26 2015-02-05 住友ベークライト株式会社 材料の三次元構造の評価方法、材料製品、及び透明複合シート製品

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US4755678A (en) 1985-05-06 1988-07-05 The University Of Alabama Simultaneous measurement of moisture content and basis weight of paper sheet with a submillimeter laser
US5452091A (en) 1993-03-22 1995-09-19 Nanometrics Incorporated Scatter correction in reflectivity measurements
JP2009529654A (ja) 2005-12-15 2009-08-20 ハネウェル・インターナショナル・インコーポレーテッド 組み合わせ型の紙シートの温度および水分のセンサ
US20100243900A1 (en) 2009-03-30 2010-09-30 Honeywell Asca Inc. Spectroscopy having correction for broadband distortion for analyzing multi-component samples
JP2015025746A (ja) 2013-07-26 2015-02-05 住友ベークライト株式会社 材料の三次元構造の評価方法、材料製品、及び透明複合シート製品

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12525474B2 (en) 2021-07-22 2026-01-13 Semes Co., Ltd. Apparatus for treating substrate and method for treating substrate

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JP2018505400A (ja) 2018-02-22
US20180024053A1 (en) 2018-01-25
JP6976369B2 (ja) 2021-12-08
JP2020106536A (ja) 2020-07-09
JP2022024012A (ja) 2022-02-08
JP7305727B2 (ja) 2023-07-10
JP6745803B2 (ja) 2020-08-26
KR20170102264A (ko) 2017-09-08
EP3237886B1 (en) 2023-07-05
EP3237886A1 (en) 2017-11-01
CN107430054A (zh) 2017-12-01
CN107430054B (zh) 2020-04-17
WO2016102938A1 (en) 2016-06-30
GB2533589A (en) 2016-06-29
US10161863B2 (en) 2018-12-25

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