KR102130420B1 - P형 핀펫 및 n형 핀펫에 대한 향상된 성능을 위한 하이브리드 기법 - Google Patents

P형 핀펫 및 n형 핀펫에 대한 향상된 성능을 위한 하이브리드 기법 Download PDF

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KR102130420B1
KR102130420B1 KR1020170158176A KR20170158176A KR102130420B1 KR 102130420 B1 KR102130420 B1 KR 102130420B1 KR 1020170158176 A KR1020170158176 A KR 1020170158176A KR 20170158176 A KR20170158176 A KR 20170158176A KR 102130420 B1 KR102130420 B1 KR 102130420B1
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semiconductor
semiconductor layer
strip
layer
forming
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KR1020170158176A
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Korean (ko)
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KR20190024523A (ko
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쿠오쳉 칭
시닝 주
칭웨이 차이
콴룬 쳉
치이하오 왕
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타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드
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