KR102048789B1 - 정전 척 및 정전 척의 제조 방법 - Google Patents

정전 척 및 정전 척의 제조 방법 Download PDF

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Publication number
KR102048789B1
KR102048789B1 KR1020130055479A KR20130055479A KR102048789B1 KR 102048789 B1 KR102048789 B1 KR 102048789B1 KR 1020130055479 A KR1020130055479 A KR 1020130055479A KR 20130055479 A KR20130055479 A KR 20130055479A KR 102048789 B1 KR102048789 B1 KR 102048789B1
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South Korea
Prior art keywords
hole
gas flow
flow path
electrostatic chuck
insulating sleeve
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KR1020130055479A
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English (en)
Korean (ko)
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KR20130129842A (ko
Inventor
노리오 시라이와
지로 가와이
Original Assignee
신꼬오덴기 고교 가부시키가이샤
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Publication of KR20130129842A publication Critical patent/KR20130129842A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
KR1020130055479A 2012-05-21 2013-05-16 정전 척 및 정전 척의 제조 방법 Active KR102048789B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012116035A JP5984504B2 (ja) 2012-05-21 2012-05-21 静電チャック、静電チャックの製造方法
JPJP-P-2012-116035 2012-05-21

Publications (2)

Publication Number Publication Date
KR20130129842A KR20130129842A (ko) 2013-11-29
KR102048789B1 true KR102048789B1 (ko) 2019-11-26

Family

ID=49581114

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130055479A Active KR102048789B1 (ko) 2012-05-21 2013-05-16 정전 척 및 정전 척의 제조 방법

Country Status (4)

Country Link
US (1) US9660557B2 (https=)
JP (1) JP5984504B2 (https=)
KR (1) KR102048789B1 (https=)
TW (1) TWI591751B (https=)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5811513B2 (ja) 2014-03-27 2015-11-11 Toto株式会社 静電チャック
KR102508955B1 (ko) 2015-02-18 2023-03-13 스미토모 오사카 세멘토 가부시키가이샤 정전 척 장치 및 반도체 제조 장치
CN110770877B (zh) * 2017-06-13 2024-06-18 日本碍子株式会社 半导体制造装置用部件
WO2019082875A1 (ja) * 2017-10-26 2019-05-02 京セラ株式会社 試料保持具
KR102188366B1 (ko) 2017-11-21 2020-12-08 와틀로 일렉트릭 매뉴팩츄어링 컴파니 세라믹 받침대에서 사용하기 위한 이중 목적 비아
US11456161B2 (en) * 2018-06-04 2022-09-27 Applied Materials, Inc. Substrate support pedestal
KR102188779B1 (ko) * 2018-10-15 2020-12-08 세메스 주식회사 기판 지지 장치 및 그 제조방법
KR102618849B1 (ko) 2019-01-24 2023-12-28 교세라 가부시키가이샤 정전 척
CN111508883B (zh) * 2019-01-31 2024-02-13 台湾积体电路制造股份有限公司 静电吸盘及其制造方法
TWI684241B (zh) * 2019-01-31 2020-02-01 台灣積體電路製造股份有限公司 靜電吸盤及其製造方法
JP7291046B2 (ja) * 2019-09-18 2023-06-14 新光電気工業株式会社 基板固定装置
KR20210057384A (ko) * 2019-11-12 2021-05-21 주식회사 미코세라믹스 정전척
JP7521903B2 (ja) * 2020-02-21 2024-07-24 株式会社巴川コーポレーション 静電チャック装置
CN117099194A (zh) * 2021-03-25 2023-11-21 京瓷株式会社 静电吸盘
CN115732387A (zh) * 2021-08-31 2023-03-03 Toto株式会社 静电吸盘以及处理装置
CN115732386A (zh) * 2021-08-31 2023-03-03 Toto株式会社 静电吸盘以及处理装置
JP7514817B2 (ja) * 2021-12-27 2024-07-11 日本碍子株式会社 半導体製造装置用部材
JP7734117B2 (ja) * 2022-06-30 2025-09-04 日本特殊陶業株式会社 保持装置
JPWO2024090276A1 (https=) * 2022-10-24 2024-05-02
JP7618098B2 (ja) * 2023-01-26 2025-01-20 日本碍子株式会社 ウエハ載置台
CN120584400A (zh) * 2023-02-06 2025-09-02 日本碍子株式会社 基座
JP7409536B1 (ja) 2023-02-22 2024-01-09 Toto株式会社 静電チャック及びその製造方法
JP7480876B1 (ja) 2023-02-22 2024-05-10 Toto株式会社 静電チャック及びその製造方法
TW202435357A (zh) * 2023-02-22 2024-09-01 日商Ｔｏｔｏ股份有限公司 靜電吸盤及其製造方法
JP7647782B2 (ja) * 2023-02-22 2025-03-18 Toto株式会社 静電チャック及びその製造方法
JP7647781B2 (ja) * 2023-02-22 2025-03-18 Toto株式会社 静電チャック及びその製造方法
JP7409535B1 (ja) 2023-02-22 2024-01-09 Toto株式会社 静電チャック及びその製造方法
JP7647783B2 (ja) * 2023-02-22 2025-03-18 Toto株式会社 静電チャック及びその製造方法
KR102642523B1 (ko) * 2023-06-07 2024-03-04 주식회사 미코세라믹스 서셉터 제조 방법 및 그 방법에 의해 제조된 서셉터

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006344766A (ja) 2005-06-09 2006-12-21 Matsushita Electric Ind Co Ltd プラズマ処理装置
JP2009218592A (ja) 2008-03-11 2009-09-24 Ngk Insulators Ltd 静電チャック

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5720818A (en) * 1996-04-26 1998-02-24 Applied Materials, Inc. Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
US7479456B2 (en) * 2004-08-26 2009-01-20 Applied Materials, Inc. Gasless high voltage high contact force wafer contact-cooling electrostatic chuck
US7697260B2 (en) * 2004-03-31 2010-04-13 Applied Materials, Inc. Detachable electrostatic chuck
KR101132632B1 (ko) * 2004-12-07 2012-04-02 주성엔지니어링(주) 정전척
KR101125885B1 (ko) * 2007-07-31 2012-03-22 어플라이드 머티어리얼스, 인코포레이티드 감소된 플라즈마 침투 및 아킹을 갖는 정전척을 제공하는 방법 및 장치
JP2009123929A (ja) * 2007-11-15 2009-06-04 Tokyo Electron Ltd プラズマ処理装置
KR20090097229A (ko) * 2008-03-11 2009-09-16 전영재 반도체 및 ｌｃｄ 제조용 정전척
JP5449750B2 (ja) * 2008-11-19 2014-03-19 株式会社日本セラテック 静電チャックおよびその製造方法
JP5250408B2 (ja) 2008-12-24 2013-07-31 新光電気工業株式会社 基板温調固定装置
JP5604888B2 (ja) * 2009-12-21 2014-10-15 住友大阪セメント株式会社 静電チャックの製造方法
JP6096470B2 (ja) * 2012-10-29 2017-03-15 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006344766A (ja) 2005-06-09 2006-12-21 Matsushita Electric Ind Co Ltd プラズマ処理装置
JP2009218592A (ja) 2008-03-11 2009-09-24 Ngk Insulators Ltd 静電チャック

Also Published As

Publication number Publication date
JP2013243267A (ja) 2013-12-05
TW201409604A (zh) 2014-03-01
JP5984504B2 (ja) 2016-09-06
KR20130129842A (ko) 2013-11-29
TWI591751B (zh) 2017-07-11
US9660557B2 (en) 2017-05-23
US20130308244A1 (en) 2013-11-21

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