KR101717328B1 - 몰드 - Google Patents

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Publication number
KR101717328B1
KR101717328B1 KR1020140074106A KR20140074106A KR101717328B1 KR 101717328 B1 KR101717328 B1 KR 101717328B1 KR 1020140074106 A KR1020140074106 A KR 1020140074106A KR 20140074106 A KR20140074106 A KR 20140074106A KR 101717328 B1 KR101717328 B1 KR 101717328B1
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KR
South Korea
Prior art keywords
mold
pattern
light
substrate
resin
Prior art date
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KR1020140074106A
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English (en)
Korean (ko)
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KR20150001630A (ko
Inventor
요시카즈 미야지마
아키요시 스즈키
다케히코 이와나가
Original Assignee
캐논 가부시끼가이샤
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Publication of KR20150001630A publication Critical patent/KR20150001630A/ko
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Publication of KR101717328B1 publication Critical patent/KR101717328B1/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020140074106A 2013-06-26 2014-06-18 몰드 Active KR101717328B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2013-134209 2013-06-26
JP2013134209A JP6368075B2 (ja) 2013-06-26 2013-06-26 モールド

Publications (2)

Publication Number Publication Date
KR20150001630A KR20150001630A (ko) 2015-01-06
KR101717328B1 true KR101717328B1 (ko) 2017-03-16

Family

ID=52115827

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140074106A Active KR101717328B1 (ko) 2013-06-26 2014-06-18 몰드

Country Status (5)

Country Link
US (1) US20150004275A1 (enExample)
JP (1) JP6368075B2 (enExample)
KR (1) KR101717328B1 (enExample)
CN (1) CN104249420A (enExample)
TW (1) TWI534858B (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160023404A1 (en) * 2014-07-25 2016-01-28 Stephen Raymond Anderson Three-dimensional manufacturing, fabricating, forming, and/or repairing apparatus and method
US10409156B2 (en) * 2015-02-13 2019-09-10 Canon Kabushiki Kaisha Mold, imprint apparatus, and method of manufacturing article
JP6583747B2 (ja) * 2015-09-29 2019-10-02 大日本印刷株式会社 インプリント用のモールドおよびその製造方法
US20170210036A1 (en) * 2016-01-22 2017-07-27 Canon Kabushiki Kaisha Mold replicating method, imprint apparatus, and article manufacturing method
TWI565577B (zh) * 2016-01-29 2017-01-11 森田印刷廠股份有限公司 模內轉印模具及模內轉印方法
JP6748496B2 (ja) * 2016-06-30 2020-09-02 キヤノン株式会社 モールド、インプリント方法、インプリント装置および物品製造方法
CN108068254A (zh) * 2016-11-14 2018-05-25 昇印光电（昆山）股份有限公司 微纳结构压印模具
JP6821408B2 (ja) * 2016-11-28 2021-01-27 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
US10712660B2 (en) * 2016-12-21 2020-07-14 Canon Kabushiki Kaisha Template for imprint lithography including a recession and an apparatus and method of using the template
CN109397677A (zh) * 2017-08-18 2019-03-01 昇印光电（昆山）股份有限公司 微纳压印模具
TWI754374B (zh) * 2018-04-09 2022-02-01 日商大日本印刷股份有限公司 奈米壓印用模片及其製造方法、及、2段台面基底及其製造方法
US11281095B2 (en) 2018-12-05 2022-03-22 Canon Kabushiki Kaisha Frame curing template and system and method of using the frame curing template
JP7278135B2 (ja) 2019-04-02 2023-05-19 キヤノン株式会社 インプリント装置および物品製造方法
JP7414508B2 (ja) * 2019-12-16 2024-01-16 キヤノン株式会社 インプリント装置、および物品製造方法
US11747731B2 (en) 2020-11-20 2023-09-05 Canon Kabishiki Kaisha Curing a shaped film using multiple images of a spatial light modulator
JP2023091495A (ja) * 2021-12-20 2023-06-30 キヤノン株式会社 インプリント方法、インプリント装置および物品製造方法。

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4727806A (en) * 1985-08-26 1988-03-01 Wilson Engraving Company, Inc. Pin register system for flexographic printing plates
US8011916B2 (en) * 2005-09-06 2011-09-06 Canon Kabushiki Kaisha Mold, imprint apparatus, and process for producing structure
JP5182470B2 (ja) * 2007-07-17 2013-04-17 大日本印刷株式会社 インプリントモールド
JP4799575B2 (ja) * 2008-03-06 2011-10-26 株式会社東芝 インプリント方法
JP5534311B2 (ja) * 2010-01-22 2014-06-25 Ｈｏｙａ株式会社 マスクブランク用基板とその製造方法、インプリントモールド用マスクブランクとその製造方法、及びインプリントモールドとその製造方法
JP5744590B2 (ja) * 2011-03-28 2015-07-08 キヤノン株式会社 インプリント方法、型、それらを用いた物品の製造方法
JP5831012B2 (ja) * 2011-07-27 2015-12-09 大日本印刷株式会社 インプリント用位置合わせマーク、該マークを備えたテンプレートおよびその製造方法
JP6061524B2 (ja) * 2011-08-11 2017-01-18 キヤノン株式会社 インプリント装置および物品の製造方法
JP2013051360A (ja) * 2011-08-31 2013-03-14 Fujikura Ltd 絶縁性基板の製造方法及び多層積層板の製造方法

Also Published As

Publication number Publication date
JP2015012034A (ja) 2015-01-19
CN104249420A (zh) 2014-12-31
US20150004275A1 (en) 2015-01-01
JP6368075B2 (ja) 2018-08-01
TWI534858B (zh) 2016-05-21
TW201503232A (zh) 2015-01-16
KR20150001630A (ko) 2015-01-06

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