KR101706412B1 - 기판 케이스 및 기판 수용 장치 - Google Patents

기판 케이스 및 기판 수용 장치 Download PDF

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Publication number
KR101706412B1
KR101706412B1 KR1020127016536A KR20127016536A KR101706412B1 KR 101706412 B1 KR101706412 B1 KR 101706412B1 KR 1020127016536 A KR1020127016536 A KR 1020127016536A KR 20127016536 A KR20127016536 A KR 20127016536A KR 101706412 B1 KR101706412 B1 KR 101706412B1
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KR
South Korea
Prior art keywords
sheet substrate
substrate
shaft
holding
shaft portion
Prior art date
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Active
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KR1020127016536A
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English (en)
Korean (ko)
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KR20120107099A (ko
Inventor
히데오 미즈타니
도루 기우치
도루 가와구치
다카시 마스카와
Original Assignee
가부시키가이샤 니콘
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Publication date
Application filed by 가부시키가이샤 니콘 filed Critical 가부시키가이샤 니콘
Publication of KR20120107099A publication Critical patent/KR20120107099A/ko
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Publication of KR101706412B1 publication Critical patent/KR101706412B1/ko
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H75/00—Storing webs, tapes, or filamentary material, e.g. on reels
    • B65H75/02—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks
    • B65H75/18—Constructional details
    • B65H75/28—Arrangements for positively securing ends of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H75/00—Storing webs, tapes, or filamentary material, e.g. on reels
    • B65H75/02—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks
    • B65H75/18—Constructional details
    • B65H75/28—Arrangements for positively securing ends of material
    • B65H75/285—Holding devices to prevent the wound material from unwinding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1908—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for containing substrates other than wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H19/00—Changing the web roll
    • B65H19/22—Changing the web roll in winding mechanisms or in connection with winding operations
    • B65H19/2276—The web roll being driven by a winding mechanism of the coreless type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2405/00—Parts for holding the handled material
    • B65H2405/40—Holders, supports for rolls
    • B65H2405/42—Supports for rolls fully removable from the handling machine
    • B65H2405/421—Supports for rolls fully removable from the handling machine and serving also as package
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2601/00—Problem to be solved or advantage achieved
    • B65H2601/20—Avoiding or preventing undesirable effects
    • B65H2601/25—Damages to handled material

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Storage Of Web-Like Or Filamentary Materials (AREA)
  • Packaging Frangible Articles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020127016536A 2009-12-29 2010-12-28 기판 케이스 및 기판 수용 장치 Active KR101706412B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US28219809P 2009-12-29 2009-12-29
US61/282,198 2009-12-29
US12/976,149 US10541160B2 (en) 2009-12-29 2010-12-22 Substrate case and substrate accommodation apparatus
US12/976,149 2010-12-22
PCT/JP2010/073899 WO2011081220A1 (en) 2009-12-29 2010-12-28 Substrate case and substrate accommodation apparatus

Publications (2)

Publication Number Publication Date
KR20120107099A KR20120107099A (ko) 2012-09-28
KR101706412B1 true KR101706412B1 (ko) 2017-02-13

Family

ID=44186239

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127016536A Active KR101706412B1 (ko) 2009-12-29 2010-12-28 기판 케이스 및 기판 수용 장치

Country Status (6)

Country Link
US (2) US10541160B2 (https=)
JP (1) JP5708649B2 (https=)
KR (1) KR101706412B1 (https=)
CN (1) CN102712436B (https=)
TW (1) TWI499546B (https=)
WO (1) WO2011081220A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020093339A1 (zh) * 2018-11-09 2020-05-14 丁飞燕 一种除尘型印制板存放架
TWI760258B (zh) * 2020-08-12 2022-04-01 大立鈺科技有限公司 可伸縮收納機構以及可供該可伸縮收納機構容置的收納盒
CN114078730B (zh) * 2020-08-12 2025-05-13 大立钰科技有限公司 可伸缩收纳机构以及供该可伸缩收纳机构容置的收纳盒

Citations (2)

* Cited by examiner, † Cited by third party
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JP2003104480A (ja) 2001-09-28 2003-04-09 Jsr Corp 梱包箱
JP2006327784A (ja) 2005-05-27 2006-12-07 Sharp Corp シート材巻き付け具及びシート材の保管方法

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NL6707394A (https=) * 1967-05-26 1968-11-27
US3622099A (en) * 1969-06-20 1971-11-23 C Olivetti And C Spa Ing Plastic ribbon spool
US4165138A (en) * 1976-11-15 1979-08-21 Mosinee Paper Company Dispenser cabinet for sheet material and transfer mechanism
IT1100423B (it) * 1978-11-29 1985-09-28 Alberto Pietro Macchina automatica per la realizzazione in continuo di rotoli di tessuto
JPS56172837U (https=) * 1980-05-23 1981-12-21
JPS5758134A (en) 1980-09-25 1982-04-07 Ricoh Co Ltd Film advancing spool of camera
JPS63181816A (ja) 1987-01-19 1988-07-27 Takenaka Komuten Co Ltd 地中梁構成材
JPS63271325A (ja) * 1987-04-30 1988-11-09 Konica Corp フイルム巻取方法
JPH0213521A (ja) * 1988-06-30 1990-01-17 Ricoh Co Ltd 給紙ロール及びそれを使用する画像形成装置
JPH0511169Y2 (https=) * 1989-01-23 1993-03-18
JP3077275B2 (ja) 1991-07-08 2000-08-14 株式会社ニコン ズームレンズ鏡筒
JPH0575219A (ja) * 1991-07-25 1993-03-26 Sharp Corp フレキシブル回路基板及びフレキシブル回路基板の製造方法
JPH06100068A (ja) 1992-09-21 1994-04-12 Murata Mfg Co Ltd テーピング電子部品連
JPH06156882A (ja) 1992-11-18 1994-06-03 Hitachi Chem Co Ltd 感光性エレメントの保護フィルム巻き取り用巻芯、該巻芯を備えたラミネーター及びラミネート方法
CN1058091C (zh) 1993-12-22 2000-11-01 伊斯曼柯达公司 将胶片插入和/或取出胶卷暗盒的方法和设备
JPH07181631A (ja) 1993-12-24 1995-07-21 Konica Corp 写真フィルム用パトローネ及びそれに収納される写真フィルム
US5613787A (en) * 1996-03-18 1997-03-25 Axiohm Ipb Inc. Automatic journal loading assembly
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JP2826307B1 (ja) * 1997-08-08 1998-11-18 田中電子工業株式会社 ボンディングワイヤ用スプールケース
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JP2003104480A (ja) 2001-09-28 2003-04-09 Jsr Corp 梱包箱
JP2006327784A (ja) 2005-05-27 2006-12-07 Sharp Corp シート材巻き付け具及びシート材の保管方法

Also Published As

Publication number Publication date
US20200118847A1 (en) 2020-04-16
JP5708649B2 (ja) 2015-04-30
JP2013516049A (ja) 2013-05-09
US10541160B2 (en) 2020-01-21
TW201132567A (en) 2011-10-01
KR20120107099A (ko) 2012-09-28
TWI499546B (zh) 2015-09-11
CN102712436B (zh) 2014-12-31
US20110155838A1 (en) 2011-06-30
US11342206B2 (en) 2022-05-24
CN102712436A (zh) 2012-10-03
WO2011081220A1 (en) 2011-07-07

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