KR101598248B1 - 유리 기판 유지용 막체 및 유리 기판의 연마 방법 - Google Patents

유리 기판 유지용 막체 및 유리 기판의 연마 방법 Download PDF

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Publication number
KR101598248B1
KR101598248B1 KR1020127025047A KR20127025047A KR101598248B1 KR 101598248 B1 KR101598248 B1 KR 101598248B1 KR 1020127025047 A KR1020127025047 A KR 1020127025047A KR 20127025047 A KR20127025047 A KR 20127025047A KR 101598248 B1 KR101598248 B1 KR 101598248B1
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KR
South Korea
Prior art keywords
glass substrate
double
sided adhesive
sheet
polishing
Prior art date
Application number
KR1020127025047A
Other languages
English (en)
Korean (ko)
Other versions
KR20130033360A (ko
Inventor
미노루 요코타
미츠루 후루타
다카시 사사모리
Original Assignee
후지보홀딩스가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 후지보홀딩스가부시끼가이샤 filed Critical 후지보홀딩스가부시끼가이샤
Publication of KR20130033360A publication Critical patent/KR20130033360A/ko
Application granted granted Critical
Publication of KR101598248B1 publication Critical patent/KR101598248B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
    • B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/05—Interconnection of layers the layers not being connected over the whole surface, e.g. discontinuous connection or patterned connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
KR1020127025047A 2010-03-25 2010-03-25 유리 기판 유지용 막체 및 유리 기판의 연마 방법 KR101598248B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/055283 WO2011118010A1 (ja) 2010-03-25 2010-03-25 ガラス基板の保持用膜体、及びガラス基板の研磨方法

Publications (2)

Publication Number Publication Date
KR20130033360A KR20130033360A (ko) 2013-04-03
KR101598248B1 true KR101598248B1 (ko) 2016-02-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127025047A KR101598248B1 (ko) 2010-03-25 2010-03-25 유리 기판 유지용 막체 및 유리 기판의 연마 방법

Country Status (4)

Country Link
JP (1) JP5529258B2 (ja)
KR (1) KR101598248B1 (ja)
CN (1) CN102811837B (ja)
WO (1) WO2011118010A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7205423B2 (ja) * 2018-12-17 2023-01-17 Ａｇｃ株式会社 ガラス基板の保持用膜体、及びガラス基板の研磨方法
CN110634400B (zh) * 2019-08-22 2021-04-27 武汉华星光电技术有限公司 背光模组、显示装置及背光模组的制作方法
CN116393336B (zh) * 2023-06-09 2023-08-18 太原科技大学 用于磁致伸缩材料薄膜基体旋转涂布的夹具及其使用方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009119533A (ja) * 2007-11-12 2009-06-04 Fujibo Holdings Inc 保持パッド

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02220838A (ja) * 1989-02-22 1990-09-04 Rodeele Nitta Kk 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布
JP2000087004A (ja) * 1998-09-17 2000-03-28 Nitta Ind Corp 被加工物用保持剤およびそれを用いた被加工物の脱着方法
JP2001138233A (ja) * 1999-11-19 2001-05-22 Sony Corp 研磨装置、研磨方法および研磨工具の洗浄方法
JP2002337048A (ja) * 2001-05-15 2002-11-26 Shin Etsu Handotai Co Ltd ワークの研磨方法
JP4207153B2 (ja) 2002-07-31 2009-01-14 旭硝子株式会社 基板の研磨方法及びその装置
JP2005051055A (ja) * 2003-07-29 2005-02-24 Tokyo Electron Ltd 貼合せ方法および貼合せ装置
JP4034320B2 (ja) * 2005-05-24 2008-01-16 富士紡ホールディングス株式会社 保持パッド
JP4562598B2 (ja) 2005-07-04 2010-10-13 富士紡ホールディングス株式会社 研磨布
JP4948935B2 (ja) * 2006-08-08 2012-06-06 富士紡ホールディングス株式会社 研磨布
JP4943766B2 (ja) * 2006-08-09 2012-05-30 ニッタ・ハース株式会社 被加工物保持材およびその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009119533A (ja) * 2007-11-12 2009-06-04 Fujibo Holdings Inc 保持パッド

Also Published As

Publication number Publication date
JP5529258B2 (ja) 2014-06-25
CN102811837B (zh) 2015-12-02
JPWO2011118010A1 (ja) 2013-07-04
CN102811837A (zh) 2012-12-05
WO2011118010A1 (ja) 2011-09-29
KR20130033360A (ko) 2013-04-03

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