CN102811837B - 玻璃基板保持用膜体及玻璃基板的研磨方法 - Google Patents

玻璃基板保持用膜体及玻璃基板的研磨方法 Download PDF

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Publication number
CN102811837B
CN102811837B CN201080065758.3A CN201080065758A CN102811837B CN 102811837 B CN102811837 B CN 102811837B CN 201080065758 A CN201080065758 A CN 201080065758A CN 102811837 B CN102811837 B CN 102811837B
Authority
CN
China
Prior art keywords
glass substrate
adhesive tape
faced adhesive
double faced
tape bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201080065758.3A
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English (en)
Chinese (zh)
Other versions
CN102811837A (zh
Inventor
横田稔
古田充
笹森孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujibo Holdins Inc
Original Assignee
Fujibo Holdins Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujibo Holdins Inc filed Critical Fujibo Holdins Inc
Publication of CN102811837A publication Critical patent/CN102811837A/zh
Application granted granted Critical
Publication of CN102811837B publication Critical patent/CN102811837B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
    • B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/05—Interconnection of layers the layers not being connected over the whole surface, e.g. discontinuous connection or patterned connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
CN201080065758.3A 2010-03-25 2010-03-25 玻璃基板保持用膜体及玻璃基板的研磨方法 Active CN102811837B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/055283 WO2011118010A1 (ja) 2010-03-25 2010-03-25 ガラス基板の保持用膜体、及びガラス基板の研磨方法

Publications (2)

Publication Number Publication Date
CN102811837A CN102811837A (zh) 2012-12-05
CN102811837B true CN102811837B (zh) 2015-12-02

Family

ID=44672601

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080065758.3A Active CN102811837B (zh) 2010-03-25 2010-03-25 玻璃基板保持用膜体及玻璃基板的研磨方法

Country Status (4)

Country Link
JP (1) JP5529258B2 (ja)
KR (1) KR101598248B1 (ja)
CN (1) CN102811837B (ja)
WO (1) WO2011118010A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7205423B2 (ja) * 2018-12-17 2023-01-17 Ａｇｃ株式会社 ガラス基板の保持用膜体、及びガラス基板の研磨方法
CN110634400B (zh) * 2019-08-22 2021-04-27 武汉华星光电技术有限公司 背光模组、显示装置及背光模组的制作方法
CN116393336B (zh) * 2023-06-09 2023-08-18 太原科技大学 用于磁致伸缩材料薄膜基体旋转涂布的夹具及其使用方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000017284A1 (en) * 1998-09-17 2000-03-30 Nitta Corporation Workpiece retainer and method for attaching/detaching workpiece by using the same
CN1830076A (zh) * 2003-07-29 2006-09-06 东京毅力科创株式会社 粘合方法及粘合装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02220838A (ja) * 1989-02-22 1990-09-04 Rodeele Nitta Kk 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布
JP2001138233A (ja) * 1999-11-19 2001-05-22 Sony Corp 研磨装置、研磨方法および研磨工具の洗浄方法
JP2002337048A (ja) * 2001-05-15 2002-11-26 Shin Etsu Handotai Co Ltd ワークの研磨方法
JP4207153B2 (ja) 2002-07-31 2009-01-14 旭硝子株式会社 基板の研磨方法及びその装置
JP4034320B2 (ja) * 2005-05-24 2008-01-16 富士紡ホールディングス株式会社 保持パッド
JP4562598B2 (ja) 2005-07-04 2010-10-13 富士紡ホールディングス株式会社 研磨布
JP4948935B2 (ja) * 2006-08-08 2012-06-06 富士紡ホールディングス株式会社 研磨布
JP4943766B2 (ja) * 2006-08-09 2012-05-30 ニッタ・ハース株式会社 被加工物保持材およびその製造方法
JP5501561B2 (ja) * 2007-11-12 2014-05-21 富士紡ホールディングス株式会社 保持パッド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000017284A1 (en) * 1998-09-17 2000-03-30 Nitta Corporation Workpiece retainer and method for attaching/detaching workpiece by using the same
CN1830076A (zh) * 2003-07-29 2006-09-06 东京毅力科创株式会社 粘合方法及粘合装置

Also Published As

Publication number Publication date
JP5529258B2 (ja) 2014-06-25
KR101598248B1 (ko) 2016-02-26
JPWO2011118010A1 (ja) 2013-07-04
CN102811837A (zh) 2012-12-05
WO2011118010A1 (ja) 2011-09-29
KR20130033360A (ko) 2013-04-03

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Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Free format text: FORMER OWNER: FUJIBO HOLDINGS CO., LTD.

Effective date: 20150731

Owner name: FUJIBO HOLDINGS CO., LTD.

Free format text: FORMER OWNER: ASAHI GLASS CO., LTD. JP)

Effective date: 20150731

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20150731

Address after: Tokyo, Japan

Applicant after: Fujibo Holdings Inc.

Address before: Tokyo, Japan

Applicant before: Asahi Glass Co., Ltd.

Applicant before: Fujibo Holdings Inc.

C14 Grant of patent or utility model
GR01 Patent grant